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Class 324/752 - Using light probe


Subclass of Class 324 - Electricity: measuring and testing
Definition: Subject matter wherein light such as a laser beam is used
No. of patents: 435
Last issue date: 07/05/2011


1                      
NumberTitleIssue Date
7973545Time resolved radiation assisted device alteration
A method of time resolved radiation assisted device alteration testing of a semiconductor circuit which includes performing spatially resolved radiation assisted circuit testing on the semiconductor circuit while applying a test pattern to determine a pass-fail modu...
07/05/2011
7928748Method of locating failure site on semiconductor device under test
In an analysis of a semiconductor device under test (DUT) using a Thermal Induced Voltage Alteration (TIVA) tool, the TIVA is connected to an output of the DUT and the DC component on the output is decoupled from the TIVA. The remaining AC component from the output ...
04/19/2011
7868631Solar cell testing apparatus
A solar cell testing apparatus including a stage, a movable chuck, a light source and a plurality of probes is provided. The movable chuck is disposed on the stage and capable of carrying a sample sheet to move. The sample sheet has a light incident side, a rear sid...
01/11/2011
7868630Integrated light conditioning devices on a probe card for testing imaging devices, and methods of fabricating same
A probe card is disclosed which includes a body, at least one housing in the body, the housing having at least one light opening, and at least one light conditioning device in the at least one light opening in the housing. A method of forming a probe card is also di...
01/11/2011
7859276Non-destructive validation of semiconductor devices
A process for performing non-destructive monitoring of a semiconductor device that permits detection of additional circuitry that is not part of the original, intended design. This permits verification that additional circuitry, for example malicious circuitry, has ...
12/28/2010
7821276Method and article of manufacture to generate IC test vector for synchronized physical probing
Systems, methods, and computer readable media storing instructions for such methods relate to generating test vectors that can be used for exercising a particular area of interest in an integrated circuit. The test vectors generally include a non-overlapping repeati...
10/26/2010
7795887Photoconductive based electrical testing of transistor arrays
An apparatus is provided for testing microelectronic components on a substrate, including a scanner operative to scan a light beam over a plurality of thin film transistors disposed on a substrate, one transistor at a time, so as to induce a photoconductive response...
09/14/2010
7777507Integrated circuit testing with laser stimulation and emission analysis
A diagnostic tool for testing an integrated circuit device directs a beam of laser energy to stimulate at least a portion of the device. In one mode, electromagnetic waves from said device may be detected at the same time in response to the stimulation. A processor ...
08/17/2010
7733100System and method for modulation mapping
An apparatus for providing modulation mapping is disclosed. The apparatus includes a laser source, a motion mechanism providing relative motion between the laser beam and the DUT, signal collection mechanism, which include a photodetector and appropriate electronics...
06/08/2010
7663385Apparatus and method for electrical characterization by selecting and adjusting the light for a target depth of a semiconductor
The present disclosure provides methods and apparatus that enable characterization of an electrical property of a semiconductor specimen, e.g., dopant concentration of a near-surface region of the specimen. In exemplary method, a target depth for measurement is sele...
02/16/2010
7649365Inline inspection of photovoltaics for electrical defects
A method of inline inspection of photovoltaic material for electrical anomalies. A first electrical connection is formed to a first surface of the photovoltaic material, and a second electrical connection is formed to an opposing second surface of the photovoltaic m...
01/19/2010
7626403Photosensor testing device with built-in light source and tester provided with said device
The present invention provides a photosensor testing device with a built-in light source and a tester provided with said device, which has a base and an upper cover disposed above the base, characterized in that the upper cover is equipped with at least one light em...
12/01/2009
7612571System and method for estimation of integrated circuit signal characteristics using optical measurements
Systems and methods for making electrical measurements using optical emissions include positioning a sensor/photodetector to measure radiation emissions from devices to be tested. Radiation emission information is collected from the device to be tested during electr...
11/03/2009
7560940Method and installation for analyzing an integrated circuit
A method and installation for analyzing an integrated circuit. The method includes, for a plurality of surface points of the integrated circuit, the following steps: applying a laser radiation, in one point of the surface of the integrated circuit; exciting the circ...
07/14/2009
7538564Methods and apparatus for utilizing an optical reference
A laser processing system implements a method for aligning a probe element (e.g., a probe pin) with a device interface element (e.g., a contact pad of a circuit substrate). First, the laser processing system generates an optical reference beam at one or more predete...
05/26/2009
7528615Measurement method of the current-voltage characteristics of photovoltaic devices, a solar simulator for the measurement, and a module for setting irradiance and a part for adjusting irradiance used for the solar simulator
In a solar simulator for measuring the current-voltage characteristics of photovoltaic devices, it is to provide a measurement method using a solar simulator in which locative unevenness of irradiance on the test plane of the test plane side is drastically improved,...
05/05/2009
7528614Apparatus and method for voltage contrast analysis of a wafer using a tilted pre-charging beam
A method for electrically testing a wafer that includes: receiving a wafer having a first layer that is at least partly conductive and a second layer formed over the first layer, following production of openings in the second layer; directing towards the wafer a fir...
05/05/2009
7466151Electric-field distribution measurement method and apparatus for semiconductor device
It comprises a voltage-application apparatus 2 for applying a predetermined voltage to a semiconductor device 1, and holding it therein; a laser apparatus 3 for generating a laser beam 4 having a predetermined wavelength; an irradiation a...
12/16/2008
7411408Measurement method using solar simulator
This invention provides a solar simulator measurement method capable of high-accuracy measurements with fast-response photovoltaic devices as well as with slow-response photovoltaic devices, and a solar simulator for implementing the method. A flash having a pulse w...
08/12/2008
7408365Image sensor testing method and apparatus
Disclosed are an optical test apparatus, related test method and method of operation, and related probe card adapted to optically test an image sensor. An illumination source of the optical test apparatus provides an optical test signal to the image sensor through t...
08/05/2008
7405580Self-calibration in non-contact surface photovoltage measurement of depletion capacitance and dopant concentration
The surface photovoltage dopant concentration measurement of a semiconductor wafer is calibrated by biasing the semiconductor wafer into an avalanche breakdown condition in a surface depletion region; determining a contact potential difference value corresponding to...
07/29/2008
7403023Apparatus and method of measuring defects in an ion implanted wafer by heating the wafer to a treatment temperature and time to substantially stabilize interstitial defect migration while leaving the vacancy defects substantially unaltered.
The invention relates to the use of the metrology methods and the related apparatus disclosed herein that incorporate thermal treatment devices and methods that improve defect detection. Specifically, in one aspect the invention relates to method of thermally treati...
07/22/2008
7400154Apparatus and method for detecting photon emissions from transistors
A system, apparatus, and method for analyzing photon emission data to discriminate between photons emitted by transistors and photons emitted by background sources. The analysis involves spatial and/or temporal correlation of photon emissions. After correlation, the...
07/15/2008
7397263Sensor differentiated fault isolation
Disclosed is an apparatus and method for diagnostically testing circuitry within a device. The apparatus and method incorporate the use of energy (e.g., light, heat, magnetic, electric, etc.) applied directly to any location on the device that can affect the electri...
07/08/2008
7381978Contact opening metrology
A method for process monitoring includes receiving a sample having a first layer that is at least partially conductive and a second layer formed over the first layer, following production of contact openings in the second layer by an etch process, the contact openin...
06/03/2008
7378859System and method for estimation of integrated circuit signal characteristics using optical measurements
Systems and methods for making electrical measurements using optical emissions include positioning a sensor/photodetector to measure radiation emissions from devices to be tested. Radiation emission information is collected from the device to be tested during electr...
05/27/2008
7375505Method and apparatus for testing function of active microstructural elements and method for producing microstructural elements using the test method
A method and an apparatus for testing the function of a plurality of microstructural elements by irradiation with particle radiation. All of the microstructural elements detected as malfunctioning are listed in a first error list in a first test sequence. The micros...
05/20/2008
7372283Probe navigation method and device and defect inspection device
A probe navigation method, a navigation device, and a defect inspection device wherein in a charged particle beam system provided with probes for electrical characteristics evaluation, probing can be easily carried out regardless of the equipment user's level of ski...
05/13/2008
7368925Probe station with two platens
A probe station for testing a device under test. A first platen supporting an electrical probe. A chuck supporting the device under test. A second platen supporting an optical probe. The first platen and the second platen positioned above the device under test. A pe...
05/06/2008
7365837Vision inspection apparatus using a full reflection mirror
The present invention relates to a vision inspection apparatus and method using total reflection mirrors. The present invention provides a vision inspection apparatus using the total reflection mirrors comprising; a board position control module for fixing a printed...
04/29/2008
7363195Methods of configuring a sensor network
A sensor network collects time-series data from a process tool and supplies the data to an analysis system where pattern analysis techniques are used to identify structures and to monitor subsequent data based on analysis instructions or a composite model. Time-seri...
04/22/2008
7358748Methods and systems for determining a property of an insulating film
A method for determining a property of an insulating film is provided. The method may include obtaining a charge density measurement of the film, a surface voltage potential of the film relative to a bulk voltage potential of the substrate, and a rate of voltage dec...
04/15/2008
7355419Enhanced signal observability for circuit analysis
Methods and arrangements to enhance photon emissions responsive to a signal within an integrated circuit (IC) for observability of signal states utilizing, e.g., picosecond imaging circuit analysis (PICA), are disclosed. Embodiments attach a beacon to the signal of ...
04/08/2008
7348786Probe module for testing chips with electrical and optical input/output interconnects, methods of use, and methods of fabrication
Probe modules, methods of use of probe modules, and methods of preparing probe modules, are disclosed. A representative embodiment of a probe module, among others, includes a redistribution substrate and a probe substrate interfaced with the redistribution substrate...
03/25/2008
7342402Method of probing a device using captured image of probe structure in which probe tips comprise alignment features
An image of an array of probes is searched for alignment features. The alignment features are then used to bring contact targets and the probes into contact with one another. The alignment features may be a feature of one or more of the tips of the probes. For examp...
03/11/2008
7342218Methods and systems for optical inspection of surfaces based on laser screening
A method for imaging and an imaging system, the system includes the steps of: (i) scanning a beam of coherent radiation over a surface along a scan axis; (ii) focusing the beam to a spot on the surface, so that the spot has a predetermined dimension along the scan a...
03/11/2008
7339388Intra-clip power and test signal generation for use with test structures on wafers
The fabrication of the wafer may be analyzed starting from when the wafer is in a partially fabricated state. The value of a specified performance parameter may be determined at a plurality of locations on an active area of a die of the wafer. The specified performa...
03/04/2008
7339391Defect detection method
A defect detection method is disclosed, in which the method includes: providing a semiconductor sample, wherein the semiconductor sample comprises at least one defect; utilizing a failure analysis for detecting at least one suspected area on the backside of the semi...
03/04/2008
7332362Method for inspecting semiconductor device
A wafer is irradiated with laser light having a wavelength which is transmitted through an inside of a crystal of the wafer and does not generate an electromotive force due to photo-excitation while the laser light is scanned. When a temperature of the wafer is incr...
02/19/2008
7330041Localizing a temperature of a device for testing
Wafers or other structures comprising a plurality of dies or devices are tested at non-ambient temperatures by inducing a first heat flux through a substantial portion of a surface of the structure to modify a temperature of the structure and inducing a second heat ...
02/12/2008
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