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| Number | Title | Issue Date |
| 7605595 | System for clearance measurement and method of operating the same A clearance sensing system is disclosed. The system includes a probe separated from a test object by a variable distance d. The system also includes an alternating current (AC) source for supplying a current through the probe, wherein the AC source and the probe are... | 10/20/2009 |
| 7557591 | System and method for determining the state of a film in a plasma reactor using an electrical property The present invention describes a system and method for monitoring a material film within a plasma processing device. The system includes a plasma reactor formed by a reactor wall and an electrode, a RF generator to couple electrical energy to the electrode, an elec... | 07/07/2009 |
| 7514940 | System and method for determining effective channel dimensions of metal oxide semiconductor devices A system and method are disclosed for determining the effective channel width (Weff) and the effective channel length (Leff) of metal oxide semiconductor devices. One advantageous embodiment of the method provides a plurality of metal oxide semiconductor field effec... | 04/07/2009 |
| 7420163 | Determining layer thickness using photoelectron spectroscopy According to one embodiment of the invention, photoelectron spectroscopy is used to determine the thickness of one or more layers in a single or multi-layer structure on a substrate. The thickness may be determined by measuring the intensities of two photoelectron s... | 09/02/2008 |
| 7394280 | Method of electro migration testing A method of determining the time to failure of parallel electro migration test structures is described. The method generally includes the steps of: measuring the resistance of the complete structure; calculating the resistance of the n individual parallel structures... | 07/01/2008 |
| 7372584 | Dual photo-acoustic and resistivity measurement system A measurement system for measuring aspects of a wafer combines an apparatus for performing a conductivity measurement, such as a four-point probe system, with apparatus for performing an optical measurement, such as a photoacoustic measurement system. Results are ob... | 05/13/2008 |
| 7365529 | Test structure design for reliability test A flexible semiconductor test structure that may be incorporated into a semiconductor device is provided. The test structure may include a plurality of test pads designed to physically stress conductive lines to which they are attached during thermal cycling. By uti... | 04/29/2008 |
| 7358748 | Methods and systems for determining a property of an insulating film A method for determining a property of an insulating film is provided. The method may include obtaining a charge density measurement of the film, a surface voltage potential of the film relative to a bulk voltage potential of the substrate, and a rate of voltage dec... | 04/15/2008 |
| 7352194 | Method for determining the thickness of a coating on a composite material The invention relates to a method for determining the thickness of a coating on a composite material by applying induced currents wherein the composite material together with its coating is placed on a conducting material, in which circulating electric currents indu... | 04/01/2008 |
| 7334791 | Electronic die An ostensibly solid electronic die presents visual and/or sound effects when in use. Unlike known electronic dice, the disclosed electronic die retains the weight, feel and ruggedness of conventional non-electronic dice. The die includes an outer shell defining its ... | 02/26/2008 |
| 7317308 | System and method for measuring electric current in a pipeline A system for measuring a voltage differential in a current-carrying pipe using a propulsion vehicle for conveying the system inside the pipe. The system includes a first contact for maintaining electrical contact with the pipe as the vehicle moves through the pipe, ... | 01/08/2008 |
| 7285965 | Paper-width detecting device A paper-width detecting device includes a paper guide, a conductive element, a circuit board and a control-processing unit. The paper guide is movably disposed on a paper tray for accommodating different sizes of papers. The conductive element attaching to the paper... | 10/23/2007 |
| 7275865 | Temperature measuring apparatus using change of magnetic field A temperature measuring apparatus measures the temperature of a wafer in real time using a change of magnetic field during a thermal process. The temperature measuring apparatus includes: at least one conductive structure disposed on one surface of the wafer, in whi... | 10/02/2007 |
| 7268571 | Method for validating and monitoring automatic test equipment contactor A method and apparatus is provided for characterizing a contactor for automated semiconductor device testing, the method first comprising placing the contactor on a contactor test board positioned within an automated test apparatus. A first probe of the automated te... | 09/11/2007 |
| 7242206 | Reliability evaluation test apparatus, reliability evaluation test system, contactor, and reliability evaluation test method A reliability evaluation test apparatus of this invention includes a wafer storage section which stores a wafer in a state wherein the electrode pads of a number of devices formed on the wafer and the bumps of a contactor are totally in electrical contact with each ... | 07/10/2007 |
| 7212016 | Apparatus and methods for measuring resistance of conductive layers Apparatus and methods for measuring the electrical resistance of conductive materials are disclosed. In one embodiment, an apparatus includes a housing, and first, second, third, and fourth conductive members projecting outwardly from the housing. The conductive mem... | 05/01/2007 |
| 7195933 | Semiconductor device having a measuring pattern and a method of measuring the semiconductor device using the measuring pattern A semiconductor device having a measuring pattern that enhances measuring reliability and a method of measuring the semiconductor device using the measuring pattern. The semiconductor device includes a semiconductor substrate having a chip area in which an integrate... | 03/27/2007 |
| 7185545 | Instrumentation and method for monitoring change in electric potential to detect crack growth Instrumentation for monitoring crack growth using a change in electric potential across a starter crack as the crack propagates is disclosed. The instrumentation includes a specimen of a material to be analyzed for crack growth propagation having a surface with a st... | 03/06/2007 |
| 7180310 | Amplitude varying driver circuit and test apparatus There is provided an amplitude varying driver circuit operable to output an output signal, which is an amplified input signal being supplied. The amplitude varying driver circuit includes: a plurality of differential amplifiers provided in parallel with one another,... | 02/20/2007 |
| 7157927 | Test pattern for testing resistance of pattern of semiconductor substrate A test pattern includes a test wiring pattern on a lower surface of a substrate. First, second, third and fourth upper patterns are formed on an upper surface of the substrate. First, second, third and fourth electrodes are formed respectively on the first, second, ... | 01/02/2007 |
| 7135876 | Electrical feedback detection system for multi-point probes An electrical feedback detection system for detecting electrical contact between a multi-point probe and an electrically conducting material test sample surface. The electrical feedback detection system comprises an electrical detector unit connected to a multitude ... | 11/14/2006 |
| 7104147 | System and method for measuring electric current in a pipeline A system and method for measuring a voltage differential in a current-carrying pipe using a propulsion vehicle. The system may be adapted for use with a pipeline pig or other propulsion device, which is configured to determine the electric current in a pipeline with... | 09/12/2006 |
| 7102370 | Compliant micro-browser for a hand held probe A micro-browser has pair of rods each rod entering a corresponding bore in a sleeve that retains them, and that may itself be carried by a grip shaped to be rotated between a thumb and a finger. The edge of a small circuit board is soldered at the distal end of the ... | 09/05/2006 |
| 7098676 | Multi-functional structure for enhanced chip manufacturibility and reliability for low k dielectrics semiconductors and a crackstop integrity screen and monitor An on-chip redundant crack termination barrier structure, or crackstop, provides a barrier for preventing defects, cracks, delaminations, and moisture/oxidation contaminants from reaching active circuit regions. Conductive materials in the barrier structure design p... | 08/29/2006 |
| 7098674 | Occupant sensor An oscillatory or pulsed first signal is operatively coupled to a first electrode placed between a conductive heating element and a seating region of a seat containing the heating element. A second signal substantially equal to the first signal is operatively couple... | 08/29/2006 |
| 7084427 | Systems and methods for overlay shift determination The systems and methods enable the determination of the magnitude and direction of overlay of at least two elements in two layers. Overlay measurements along two axes can be obtained using four probe pads and without requiring a decoder. Overlay measurements along a... | 08/01/2006 |
| 7080549 | Throttle position sensor A throttle position sensor for a throttle having a movable throttle element. The sensor includes an elongated electrically resistive strip having a first and second end. The first end of the strip is connected to a first voltage potential while the second end is ele... | 07/25/2006 |
| 7067335 | Apparatus and methods for semiconductor IC failure detection An improved voltage contrast test structure is disclosed. In general terms, the test structure can be fabricated in a single photolithography step or with a single reticle or mask. The test structure includes substructures which are designed to have a particular vol... | 06/27/2006 |
| 7055498 | Throttle assembly for internal combustion engine, and throttle sensor In a throttle body there are provided a throttle valve for controlling the flow of intake air in an internal combustion engine, an electrically-driven actuator for actuating the throttle valve, and a reduction gear mechanism for the actuator, and a receptacle portio... | 06/06/2006 |
| 7038473 | Method and apparatus for measuring a fluid level and a motor vehicle provided with such apparatus A fluid level (26) is measured through determining an inclination angle of a bracket (32) that rotatably connects a floating member (34) located near a surface of the fluid to a pivoting arrangement (28, 30) which carries a resistor (4... | 05/02/2006 |
| 7038472 | Methods and systems for measuring internal dimensions of microscale structures The present invention provides novel devices for measuring internal dimensions of microscale structures. Methods in accordance with the invention use the voltage measured at a midpoint between a reference structure and a sample structure to determine the resistance ... | 05/02/2006 |
| 7034519 | High frequency measurement for current-in-plane-tunneling An improved method and apparatus for determining a property based upon at least two measurements uses simultaneous probe signals having two different frequencies. The probe signals are produced simultaneously such that the position of the probes is identical when th... | 04/25/2006 |
| 7017905 | Electronic die An electronic die capable of exhibiting visual and/or sound effects is disclosed. The die retains the conventional dice-action aspect of being rolled to randomly select an upwardly facing facet. The electronic components provide entertainment effects. Electronic dis... | 03/28/2006 |
| 7012438 | Methods and systems for determining a property of an insulating film A method for determining a property of an insulating film is provided. The method may include obtaining a charge density measurement of the film, a surface voltage potential of the film relative to a bulk voltage potential of the substrate, and a rate of voltage dec... | 03/14/2006 |
| 7011762 | Metal bridging monitor for etch and CMP endpoint detection One aspect of the present invention relates to a wafer containing a semiconductor substrate, at least one metal layer formed over the semiconductor substrate, and at least one electrical sensor embedded at least one of on and in the wafer to facilitate real time mon... | 03/14/2006 |
| 7005851 | Methods and apparatus for inspection utilizing pulsed eddy current In some aspects, the present invention provides a method for estimating at least one measurement/object property of a metal object. The method includes generating a time-varying eddy current in a wall of the metal object utilizing a pulsed-signal transmitter. The me... | 02/28/2006 |
| 7002361 | Film thickness measuring apparatus and a method for measuring a thickness of a film An apparatus for measuring the thickness of thin-film cause electron beams of first and second energies to strike thin-film to be measured that is formed on a silicon substrate, and measures the first substrate current value of current flowing in the substrate when ... | 02/21/2006 |
| 6987388 | Digital measuring head A digital measuring head in a measuring apparatus measures a work by making a contact element abut to the work. The digital measuring head includes an arm supported rotatably around a support point arranged on a base; a finger having the contact element at a tip end... | 01/17/2006 |
| 6972576 | Electrical critical dimension measurement and defect detection for reticle fabrication A system for testing a reticle used in semiconductor wafer fabrication is provided. The system includes a reticle that has an opaque metal layer over a translucent substrate. The reticle includes one or more test features containing probe points operable for electri... | 12/06/2005 |
| 6952944 | Movable zero point position sensor A sensor assembly is coupled with a control linkage and detects displacement of the control linkage and produces an output signal indicative of that displacement. The zero-point of the sensor assembly is not necessarily aligned with the zero-point of the control lin... | 10/11/2005 |
