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| Number | Title | Issue Date |
| 8018234 | Electron source for a vacuum pressure measuring device A vacuum pressure measuring device with an electron source has a reaction zone for forming ions by impact ionization, wherein the electron source communicates with the reaction zone via a passage for the electrons. The electron source is surrounded by an insulating ... | 09/13/2011 |
| 7741852 | Ionization vacuum gauge An ionization vacuum gauge which has at least three electrodes of a grid (2), an electron source (3) and an ion collector (1) in a vacuum vessel (4) connected in communication with a vacuum apparatus, oscillates electrons emitted front th... | 06/22/2010 |
| 7313966 | Method and apparatus for storing vacuum gauge calibration parameters and measurement data on a vacuum gauge structure A method and apparatus for measuring gas pressure by combining an ionization gauge with at least one other vacuum sensor. Nonvolatile memory coupled to the vacuum gauge contains calibration parameters unique to each individual sensor based on factory calibration. Th... | 01/01/2008 |
| 7283096 | Microstrip patch antenna for high temperature environments A patch antenna for operation within a high temperature environment. The patent antenna typically includes an antenna radiating element, a housing and a microwave transmission medium, such as a high temperature microwave cable. The antenna radiating element typicall... | 10/16/2007 |
| 7009193 | Utilization of an ion gauge in the process chamber of a semiconductor ion implanter A device to implant impurities into a semiconductor wafer has a process chamber having a wall, a pressure compensation unit, a disk to support a plurality of semiconductor wafers within the process chamber. The disk has a radially extending slot arranged among the w... | 03/07/2006 |
| 6756785 | Pressure controlled degas system for hot cathode ionization pressure gauges A method operating a hot cathode ionization pressure gauge during electron bombardment and resistance degas operations by controlling the degas power levels as a function of the gauge pressure. In one embodiment, the degas power level is increased and decreased in s... | 06/29/2004 |
| 6081121 | Ionization gauge and method of using and calibrating same Controller circuitry and method for controlling the operation of an ionization gauge having a source of electrons, an anode, an ion collector electrode. Circuitry is provided (a) for providing an electron emission current from the electron source (b) for ... | 06/27/2000 |
| 6046456 | Miniature ionization gauge utilizing multiple ion collectors An ionization gauge including a source of electrons; an open anode defining an anode volume, where the source of electrons is disposed outside the anode volume; a plurality of ion collector electrodes disposed within the anode volume; a plurality of axial... | 04/04/2000 |
| 6025723 | Miniature ionization gauge utilizing multiple ion collectors An ionization gauge including a source of electrons; an open anode defining an anode volume, where the source of electrons is disposed outside the anode volume; a plurality of ion collector electrodes disposed within the anode volume; a plurality of axial... | 02/15/2000 |
| 5801535 | Ionization gauge and method of using and calibrating same Controller circuitry and method for controlling the operation of an ionization gauge having a source of electrons, an anode, an ion collector electrode. Circuitry is provided (a) for providing an electron emission current from the electron source (b) for ... | 09/01/1998 |
| 5422573 | Ionization gauge and method of using and calibrating same Ionization gauge and method of operating same where the gauge may be of the Bayard-Alpert type and include a shield which completely encloses the electron source, the anode, and the collector electrode so that potentials external to the shield do not dist... | 06/06/1995 |
| 5373240 | Hot-cathode ionization pressure gauge including a sequence of electrodes arranged at a distance from one another in sequence along an axis A hot cathode ionization pressure gauge with the following electrodes, arged at a distance from one another in the specified sequence along an axis: a) a thermionic cathode filament which has a central active part and lateral support parts; b) an essenti... | 12/13/1994 |
| 5300890 | Hot-cathode ionization pressure gauge including a sequence of electrodes arranged at a distance from one another in sequence along an axis A hot cathode ionization pressure gauge with the following electrodes, arged at a distance from one another in the specified sequence along an axis: (a) a thermionic cathode filament which has a central active part and lateral support parts; (b) an essen... | 04/05/1994 |
| 5296817 | Ionization gauge and method of using and calibrating same Ionization gauge and method of operating same where the gauge may be of the Bayard-Alpert type and include a shield which completely encloses the electron source, the anode, and the collector electrode so that potentials external to the shield do not dist... | 03/22/1994 |
| 5250906 | Ionization gauge and method of using and calibrating same Controller circuitry and method for controlling the operation of an ionization gauge having a source of electrons, an anode, and an ion collector electrode, including storing a plurality of calibration data sets for at least collector electrode currents a... | 10/05/1993 |
| 5191799 | Measured value receiver for vacuum measurement The invention relates to a measured value pickup for vacuum measurements, with the pickup including a sensor as well as electronic circuits for supplying the sensor with voltage, and a signal processing device. In order to be able to employ the measure va... | 03/09/1993 |
| 5128617 | Ionization vacuum gauge with emission of electrons in parallel paths An ionization gauge and controller therefor where the gauge has a sensitivity which is reproducible gauge to gauge and stable over time in the same gauge. An ionization gauge with a very much lower and a somewhat higher pressure limit than prior art gauge... | 07/07/1992 |
| 5051748 | Device for transmitting and receiving microwave radiation, for forming images of buried objects A transmitting antenna radiates a micro-wave field through an opening in the form of a rectangular wave-guide applied against the separation surface between a first medium, in which it is located, and a second medium, in which an object is buried. The mic... | 09/24/1991 |
| 4902977 | Multipactor pressure gauge for use as a noninvasive vacuum tube sensor A gas ionization type vacuum gauge for testing the internal vacuum levels to below 10-6 torr is disclosed which uses a multipactor discharge means as the source for the electron current used to ionize residual gas molecules. The invention compr... | 02/20/1990 |
| 4792763 | Hot cathode ionization pressure gauge A hot cathode ionization gauge with which neutral gas densities in the ra 1017 to 1021 m-3 can be measured, in particular under the conditions typical of fusion-orientated plasma experiments (magnetic field strength from ... | 12/20/1988 |
| 4471661 | Electronic-type vacuum gauges with replaceable elements In electronic devices for measuring pressures in vacuum systems, the metal elements which undergo thermal deterioration are made readily replaceable by making them parts of a simple plug-in unit. Thus, in ionization gauges, the filament and grid or electr... | 09/18/1984 |
| 4314205 | Method and means for vacuum gauging The operating range of an ionization tube vacuum gauge is increased by applying at least two different bias voltages to the tube and measuring ion current for the two bias voltages. The ratio of the ion currents indicates vacuum pressure in the range of 1... | 02/02/1982 |
| 4307323 | Vacuum gauge A hot filament ionization gauge is provided with a very small diameter and/or very short collector to limit interception of X-ray flux. Suitable gauge sensitivity is achieved by additionally collecting ions at the collector support, which is shielded from... | 12/22/1981 |
| 4270091 | Apparatus and method for measuring pressures and indicating leaks with optical analysis A partial pressure gauge utilizes an efficient electron collision excitation source yielding de-excitation radiation characteristic of residual gases. The intensity of a given spectral line is proportional to the partial pressure of the gas having such sp... | 05/26/1981 |
| 4093913 | Vacuum measuring ionization apparatus control A triode ionization gauge controller employing logarithmic amplifiers develops a signal proportional to the logarithm of the ratio of an ion current to the ionizing current. Gaseous thermal conductivity is employed to reduce emission current at high press... | 06/06/1978 |
| 4035720 | Ion gauge system In the ion gauge system disclosed herein, the ion current obtained from an ion gauge tube is directly converted to a signal having a frequency proportional to the ion current so that a digital measurement of vacuum may be obtained. The ion current charges... | 07/12/1977 |
