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| Number | Title | Issue Date |
| 8188733 | Arrangement and method for recognizing and classifying preferably hidden objects in object and/or human traffic An arrangement and method recognizes and classifies preferably hidden objects in object and/or human traffic. Objects relevant to security are recognized, located and tracked through the surroundings thereof in moving object and human traffic isolated in real time. ... | 05/29/2012 |
| 7443167 | Interleaved magnetometry and pulsed electromagnetic detection of underground objects Magnetometry and pulsed electromagnetic radiation (EM) may be employed during a same survey pass by synchronously interleaving the collection of magnetometer data with pulses from EM sensors. For example, one or more magnetometers may be sampled between pulses of on... | 10/28/2008 |
| 7363814 | Multi-axial angular velocity sensor An angular velocity sensor for detecting angular velocity about a Z-axis in an XYZ coordinate system has a substrate oscillator, a flexible member for connecting the oscillator to a casing, a device for oscillating the oscillator in an X-axis direction, and a detect... | 04/29/2008 |
| 7360455 | Force detector and acceleration detector and method of manufacturing the same An electrode layer is formed on the upper surface of a first substrate, and a processing for partially removing the substrate is carried out in order to allow the substrate to have flexibility. To the lower surface of the first substrate, a second substrate is conne... | 04/22/2008 |
| 7315161 | Micro-electromechanical system (MEMS) based current and magnetic field sensor having capacitive sense components A micro-electromechanical system (MEMS) based current & magnetic field sensor includes a MEMS-based magnetic field sensing component having a capacitive magneto-MEMS component, a compensator and an output component for sensing magnetic fields and for providing, in r... | 01/01/2008 |
| 7268646 | Temperature controlled MEMS resonator and method for controlling resonator frequency There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a temperature compensated microelectromechanical resonator as well as fabricating, manufacturing, providing and/or controlling microelectromechanical reso... | 09/11/2007 |
| 7262522 | Microelectromechanical isolating power converter A microelectromechanical system (MEMS) device is used to transfer power from a source generator to a power generator that delivers electrical power to a load, while maintaining electrical isolation between the source generator and power generator for size critical a... | 08/28/2007 |
| 7253616 | Microelectromechanical magnetometer An apparatus comprising a substrate and a MEM device. The MEM includes a comb capacitor and a magnetic element physically connected to one electrode of the comb capacitor. The magnetic element is capable of moving the one electrode in a manner that alters a capacita... | 08/07/2007 |
| 7253615 | Microelectromechanical system sensor and method for using According to some embodiments, an apparatus includes a movable portion through which a sensing current is to be conducted. The movable portion might comprise, for example, a beam or plate suspended above a well in a Microelectromechanical System (MEMS) substrate. Th... | 08/07/2007 |
| 7231802 | Apparatus for detecting a physical quantity acting as an external force and method for testing and manufacturing the apparatus A sensor comprises a semiconductor pellet (10) including a working portion (11) adapted to undergo action of a force, a fixed portion (13) fixed on the sensor body, and a flexible portion (13) having flexibility formed therebetween, a wor... | 06/19/2007 |
| 7219561 | Force-detecting device Forces and moments are detected in a distinguishing manner by a simple structure. A supporting member (20) is positioned below a force receiving member (10), which receives forces to be detected, and between these components, four columnar force transm... | 05/22/2007 |
| 7187486 | Electromechanical drives adapted to provide two degrees of mobility An electromechanical system having an object and drives adapted to cooperate to provide the object with two degrees of mobility is described herein. ... | 03/06/2007 |
| 7152485 | Acceleration detector An electrode layer is formed on the upper surface of a first substrate, and a processing for partially removing the substrate is carried out in order to allow the substrate to have flexibility. To the lower surface of the first substrate, a second substrate is conne... | 12/26/2006 |
| 7121147 | Force detection device Forces and moments are detected in a distinguishing manner by a simple structure. A supporting member (20) is positioned below a force receiving member (10), which receives forces to be detected, and between these components, at least two columnar forc... | 10/17/2006 |
| 7123028 | Force detector The invention provides a force detector in which power consumption is suppressed. Four electrodes E11 through E14 are formed on a substrate, and an elastic deformable body formed of a rubber film is disposed thereon. A conductive coating is applied on ... | 10/17/2006 |
| 7112951 | MEMS based current sensor using magnetic-to-mechanical conversion and reference components A micro-electromechanical system (MEMS) current sensor is described as including a first conductor, a magnetic field shaping component for shaping a magnetic field produced by a current in the first conductor, and a MEMS-based magnetic field sensing component includ... | 09/26/2006 |
| 7075527 | Input device of rotational operation quantity and operating device using this An efficient rotational-operation-quantity input device suitable to be built into a small electrical appliance is provided. An operational force applied by an operator is input in time series as a coordinate value (x, y) in an XY two-dimensional rectangular coordina... | 07/11/2006 |
| 7068125 | Temperature controlled MEMS resonator and method for controlling resonator frequency There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a temperature compensated microelectromechanical resonator as well as fabricating, manufacturing, providing and/or controlling microelectromechanical reso... | 06/27/2006 |
| 7059188 | Angular velocity sensor A flexible substrate (110) having flexibility and a fixed substrate (120) disposed so as to oppose it are supported at their peripheral portions by a sensor casing (140). An oscillator (130) is fixed on the lower surface of the flexible s... | 06/13/2006 |
| 7049806 | Microelectricalmechanical system with improved beam suspension In a MEMS device employing a beam supported by transverse arms, potential bowing of the transverse arms caused by fabrication processes, temperature or local self-heating from resistive losses is accommodated by flexible terminations of the transverse arms. Alternat... | 05/23/2006 |
| 7046002 | Magnetic sensor with variable sensitivity A microelectromechanical system (MEMS) device comprising a base structure; a magnetic sensor attached to the base structure and operable for sensing a magnetic field and allowing for a continuous variation of an amplification of the magnetic field at a position at t... | 05/16/2006 |
| 7042213 | Magnetometer having an electromechanical resonator In one embodiment, a magnetometer includes an electromechanical resonator coupled to a drive-and-detect (DD) circuit. The resonator has a deformable beam that is a part of a closed current path. By applying a periodic drive signal to a drive electrode located in pro... | 05/09/2006 |
| 7038285 | Very high sensitivity magnetic sensor A magnetic sensor includes a thin deformable membrane made of a conductive material forming a first plate of a capacitor which conducts an electric current therethrough. A second capacitor plate of the capacitor includes a doped region of a semiconductor substrate. ... | 05/02/2006 |
| 7038449 | Biased magnetic field strength indication tool A detection device, for detecting a strength of a magnetic field of an object, includes a housing having a center, a first end and a detection end. A permanent magnetic element is suspended above the center of the housing having a first magnetic field strength and a... | 05/02/2006 |
| 6941810 | Angular velocity sensor An angular velocity sensor for detecting an angular velocity component includes an oscillator having mass, a sensor casing for accommodating the oscillator therewithin, a flexible member for connecting the oscillator to the sensor casing so that the oscillator can b... | 09/13/2005 |
| 6920788 | Acceleration sensor An acceleration sensor in a connecting portion connects a displacing section to a fixed section and a weight is connected to the displacing section from below. A pedestal is disposed adjacent to the weight and is connected to the fixed section by a pedestal joint la... | 07/26/2005 |
| 6915709 | Force detection device Forces and moments are detected in a distinguishing manner by a simple structure. A supporting member (20) is positioned below a force receiving member (10), which receives forces to be detected, and between these components, at least two columnar forc... | 07/12/2005 |
| 6848317 | Method and apparatus for uniformizing output signal levels of micro-electro mechanical systems (MEMS) capacitive sensors The present invention is an apparatus and method for making output signal (AC voltage) levels of MEMS capacitive sensors uniform, each including a microstructure being displaced by a certain force and a fixed electrode for detecting capacitance variation caused by g... | 02/01/2005 |
| 6836111 | Sensor assembly with a universal sensor module for sensing angular position of an object A sensor assembly with a universal sensor module for sensing angular position of a rotatable object is provided. The universal sensor module includes a module housing. The sensor module further includes a rotatable assembly in the module housing configured to define... | 12/28/2004 |
| 6821552 | Method and apparatus for determining the pass through flux of magnetic materials The invention includes an apparatus and method for determining the pass through flux of magnetic materials. The apparatus comprises one or more magnetic field sensors arranged in such a way as to collect field strength data in any or all the x, y, z directions. The ... | 11/23/2004 |
| 6809513 | Rotary position sensor having waterproof, explosion-protective structure A rotary position sensor includes a cylindrical housing having a partition wall which divides the interior of the housing into a first storing space and a second storing space. The first storing space stores a rotating mechanism and is closed with a first cover in s... | 10/26/2004 |
| 6803755 | Microelectromechanical system (MEMS) with improved beam suspension In a MEMS device employing a beam supported by transverse arms, potential bowing of the transverse arms caused by fabrication processes, temperature or local self-heating from resistive losses is accommodated by flexible terminations of the transverse arms. Alternat... | 10/12/2004 |
| 6696947 | Metal detector An improved metal detector characterized by enclosing the detector's circuitry in a foldable enclosure whereby the improved detector may be transported easily and quickly and securely erected for use.... | 02/24/2004 |
| 6670809 | Magnetic sensor with modulating flux concentrator having minimized air resistance for 1/f noise reduction A magnetic sensing transducer device that senses low frequency magnetic fields by using flux concentrators that modulate the observed low frequency signal, thereby shifting this observed signal to higher frequencies and minimizing 1/f-type noise. This is ... | 12/30/2003 |
| 6664786 | Magnetic field sensor using microelectromechanical system A microelectromechanical systems (MEMS) Device manufactured on a microscopic scale using integrated circuit techniques provides a sensitive magnetic field sensor by detecting motion caused by the Lorentz force produced by a current through a MEMS conducto... | 12/16/2003 |
| 6501268 | Magnetic sensor with modulating flux concentrator for 1/f noise reduction A magnetic sensing device that senses low frequency magnetic fields by using movable flux concentrators that modulate the observed low frequency signal. The concentrator oscillates at a modulation frequency much greater than the observed magnetic field be... | 12/31/2002 |
| 6454911 | Method and apparatus for determining the pass through flux of magnetic materials The invention includes an apparatus and method for determining the pass through flux of magnetic materials. The apparatus comprises one or more magnetic field sensors arranged in such a way as to collect field strength data in any or all the x, y, z direc... | 09/24/2002 |
| 6429652 | System and method of providing a resonant micro-compass A resonant micro-compass for detecting the Earth's magnetic field while requiring minimal power is disclosed Generally, the micro-compass comprises a resonant structure that is driven at its resonant frequency, which requires minimal power. The resonant f... | 08/06/2002 |
| 6348788 | High resolution current sensing apparatus A current sensor includes a deflectable member disposed in a magnetic field. Nulling or compensating members may be mechanically coupled to the deflectable member. Feedback or readout devices coupled to the structure provide signals indicative of deflecti... | 02/19/2002 |
| 6275034 | Micromachined semiconductor magnetic sensor A semiconductor magnetic field sensor including a substrate; a semiconductor moveable element suspended above the substrate, the moveable element being configured to have a current passed therethrough and to deflect perpendicularly with respect to an appl... | 08/14/2001 |