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| Number | Title | Issue Date |
| 7228724 | Apparatus and process for sensing target gas species in semiconductor processing systems A gas detector for detecting a fluoro gas species in a gaseous environment containing same, e.g., an effluent from a semiconductor processing tool that employs corrosive fluoro species such as HF, NF3, etc. for etch cleaning. The gas detector preferably e... | 06/12/2007 |
| 7189979 | Electron gun An electron gun includes a cathode portion which emits electrons, an anode portion which accelerates the emission electrons, a bias portion which is arranged between the cathode portion and the anode portion and controls trajectories of the emission electrons, a shi... | 03/13/2007 |
| 6989634 | Magnetron cathode assembly A magnetron cathode assembly which realizes stopping of turn of an external terminal inserted into a stem insulator without increasing a manufacturing cost. A leading end of a base end axial portion of an external terminal has a non-circular section by providing a f... | 01/24/2006 |
| 6696790 | Magnetron with external terminals having connecting portions which are air-tightly connected to cathode leads A magnetron including a tubular metallic container which is air-tightly connected to an anode, cathode leads for supporting a cathode with filaments being disposed in a central axial portion of the anode, a stem insulator formed with through holes through... | 02/24/2004 |
| 5466988 | High pressure discharge lamp having improved convection regulating means A high pressure discharge lamp is disclosed. The high pressure discharge lamp includes: a discharge tube which is filled with gas; a first electrode having a first end, the first electrode being provided in the discharge tube; and a second electrode havin... | 11/14/1995 |
| 5107166 | Electron beam collector assembly for a velocity modulated tube In a traveling wave tube, an electron beam collector and an electrically insulating cylinder having good thermal conductivity and dielectric strength are arranged in a bore of a cooling housing to improve heat elimination from the electron beam collector.... | 04/21/1992 |
| 4524296 | Cathode structure for electron tube A cathode structure includes a thermal conductive member, a heater for heating a thermal conductive member, a metal substrate having a first surface facing a thermal conductive member and a second surface and attached to the thermal conductive member to f... | 06/18/1985 |
| 4383197 | Metal halide arc discharge lamp having shielded electrode A shield is disposed about the electrode of a metal halide arc discharge lamp in order to improve lamp performance. The construction and location of the shield are such as to not lower the cold-spot temperature of the arc tube.... | 05/10/1983 |
| 4223246 | Microwave tubes incorporating rare earth magnets A microwave tube having a heated cathode with a rare earth magnet positioned inside the evacuated envelope of the tube and at least partially shielded from thermal radiation from the cathode and/or anode so that the magnet may be operated at elevated temp... | 09/16/1980 |
| 4220889 | Cathode for an electron gun A cathode for an electron gun in which a lanthanum hexaboride cap has an internal recess which accommodates a pyrolytic graphite heater element. The cap is cup-shaped, while the heater element is in the form of a frustum of a cone and is resiliently maint... | 09/02/1980 |
| 4216405 | Large, indirectly heated, oxide-coated cathode for producing uniform plasmas A large cathode structure having a diameter on the order of 50 cm for producing uniform plasmas in a magnetic field. The cathode is oxide-coated and indirectly heated by a plurality of heater wires disposed in insulating tubes arranged parallel to each ot... | 08/05/1980 |
| 4123684 | Thyratrons A thyratron is provided with a baffled structure between its cathode and first control electrode. The baffled structure consists of a series (e.g. three) annular baffle plates, each having a central aperture aligned with the axis of the cathode, mounted o... | 10/31/1978 |
| 4093893 | Short arc fluorescent lamp A short arc fluorescent lamp comprises an envelope having dimensions compatible with existing incandescent lamp luminaires. A radio frequency power supply, enclosed within the lamp base structure, reduces anode voltage drop to increase lamp efficacy. Cath... | 06/06/1978 |
