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| Number | Title | Issue Date |
| 8134287 | Low voltage closed drift anode layer ion source An ion source includes a pair of pole elements, at least one shunt element, and at least one magnetic field producing element that produces a magnetic field. A gap is defined between the pole elements of the pair of pole elements. The at least one magnetic field pro... | 03/13/2012 |
| 7821187 | Immersion gun equipped electron beam column An electron gun of the type having an electron emitter for emitting electrons, including an electrostatic lens and a magnetic lens formed by pole pieces with a winding coil disposed between the magnetic pole pieces. The magnetic lens forms a rotationally symmetrical... | 10/26/2010 |
| 7567026 | Ion source and polishing system using the same An ion source and a polishing system using the ion source are disclosed. The ion source includes a discharge chamber, an electron emitter, a cathode, a screen grid, an accelerator grid, and a screen electrode. The discharge chamber is configured for accommodating di... | 07/28/2009 |
| 7420182 | Combined radio frequency and hall effect ion source and plasma accelerator system This invention features a combined radio frequency (RF) and Hall Effect ion source and plasma accelerator system including a plasma accelerator having an anode and a discharge zone, the plasma accelerator for providing plasma discharge. A gas distributor introduces ... | 09/02/2008 |
| 7405411 | Ion source with multi-piece outer cathode In certain example embodiments of this invention, there is provided an ion source including an anode and a cathode. In certain example embodiments, a multi-piece outer cathode is provided. The multi-piece outer cathode allows precision adjustments to be made, thereb... | 07/29/2008 |
| 7381949 | Method and apparatus for simultaneously depositing and observing materials on a target A system for joining at least two beams of charged particles that includes directing a first beam along a first axis into a field. A second beam is directed along a second axis into the field. The first and second beams are turned, by interaction between the field a... | 06/03/2008 |
| 7372195 | Electron beam source having an extraction electrode provided with a magnetic disk element An electron beam source for use in an electron gun. The electron beam source includes an emitter terminating in a tip. The emitter is configured to generate an electron beam. The electron beam source further includes a suppressor electrode laterally surrounding the ... | 05/13/2008 |
| 7329885 | Electron beam emitter An exit window for an electron beam emitter through which electrons pass in an electron beam includes a structural foil for metal to metal bonding with the electron beam emitter. The structural foil has a central opening formed therethrough. A window layer of high t... | 02/12/2008 |
| 7294969 | Two-stage hall effect plasma accelerator including plasma source driven by high-frequency discharge Disclosed is a high-frequency discharge plasma generation-based two-stage Hall-effect plasma accelerator, which comprises an annular acceleration channel having a gas inlet port, a high-frequency wave supply section, an anode, a cathode, a neutralizing electron gene... | 11/13/2007 |
| 7256405 | Sample repairing apparatus, a sample repairing method and a device manufacturing method using the same method An object of the present invention is to provide a sample repairing apparatus, a sample repairing method and a device manufacturing method using the same method, which can reduce an edge roughness in a repaired pattern and also can provide the repairing of a sample ... | 08/14/2007 |
| 7230256 | Ion doping system, ion doping method and semiconductor device An ion doping system includes a chamber 11, an exhausting section 13 for exhausting gases from the chamber, an ion source 12 provided for the chamber, and an accelerating section 23 for extracting the ions, generated in the ion source ... | 06/12/2007 |
| 7195936 | Thin film processing method and system In a thin film processing method and system, a film thickness is regulated by using electron beams irradiated from a plurality of electron beam tubes onto a film of varying thickness formed on an object to be processed, wherein the output powers or beam irradiation ... | 03/27/2007 |
| 7193221 | Electronic optical lens barrel and production method therefor The present invention provides an electron optical lens column suitable for miniaturization, and provides the manufacturing method thereof. The column unit (1) comprises an inner column (11) and an outer column (12). The column unit is, as a who... | 03/20/2007 |
| 7180231 | Electron beam emitter A filament for generating electrons for an electron beam emitter where the filament has a cross section and a length. The cross section of the filament is varied along the length for producing a desired electron generation profile. ... | 02/20/2007 |
| 7180243 | Plasma accelerator with closed electron drift The closed electron drift plasma accelerator comprises an annular ionization chamber, an acceleration chamber on the same axis as the ionization chamber, an annular anode, a hollow cathode, a first DC voltage source, an annular gas manifold, a magnetic circuit, and ... | 02/20/2007 |
| 7164227 | Hall effect thruster with anode having magnetic field barrier An efficiency enhancing anode-magnetic structure of a Hall effect thruster produces a radially directed magnetic field between inner and outer poles at the exit portion of a gas distribution channel. The field-shaping structure includes magnetic material extending a... | 01/16/2007 |
| 7148613 | Source for energetic electrons There is described, for example, a generally cylindrical generator of energetic electrons that releases electrons from a vacuum enclosure into a surrounding space including into the atmosphere where the electrons may be used for a variety of applications including c... | 12/12/2006 |
| 7078852 | Method and apparatus for simultaneously depositing and observing materials on a target A system for joining at least two beams of charged particles that includes directing a first beam along a first axis into a field. A second beam is directed along a second axis into the field. The first and second beams are turned, by interaction between the field a... | 07/18/2006 |
| 7045793 | Multi-grid ion beam source for generating a highly collimated ion beam A multi-grid ion beam source has an extraction grid, an acceleration grid, a focus grid, and a shield grid to produce a highly collimated ion beam. A five grid ion beam source is also disclosed having two shield grids. The extraction grid has a high positive potenti... | 05/16/2006 |
| 7042145 | Electron beam projector provided with a linear thermionic emitting cathode for electron beam heating An electron beam gun comprises a beam waveguide and an accelerating anode fixed thereto. The accelerating anode is connected with the aid of high-voltage insulators and through a cathode plate to a cathode assembly. The cathode assembly comprises a linear hot cathod... | 05/09/2006 |
| 7030576 | Multichannel hall effect thruster A Hall effect thruster for propelling spacecraft and satellites includes at least two acceleration channels, each of the channels has a closed end and an open end, and a plurality of flux guides adjacent each of the channels. The plurality of flux guides includes an... | 04/18/2006 |
| 7026635 | Particle beam processing apparatus and materials treatable using the apparatus Methods, and materials made by the methods, are provided herein for treating materials with a particle beam processing device. According to one illustrative embodiment, a method for treating a material with a particle beam processing device is provided that includes... | 04/11/2006 |
| 7009342 | Plasma electron-emitting source The invention relates to the field of gaseous-discharge high-vacuum apparatuses. The engineering effect attainable thereby consists in improving the efficiency of extracting the electron beam as well as the gas and power efficiency. The disclosed plasma electron sou... | 03/07/2006 |
| 7005641 | Electron beam apparatus and a device manufacturing method by using said electron beam apparatus An electron beam apparatus, in which an electron beam emitted from an electron gun having a cathode and an anode is focused and irradiated onto a sample, and secondary electrons emanated from the sample are directed into a detector, the apparatus further comprising ... | 02/28/2006 |
| 7005782 | Charged particle beam extraction and formation apparatus A charged particle apparatus, with multiple electrically conducting semispheric grid electrodes, the grid electrodes mounted in a dielectric mounting ring, with hidden areas or regions to maintain electrical isolation between the grid electrodes as sputter deposits ... | 02/28/2006 |
| 7004234 | Vaporizer for generating feed gas for an arc chamber A vaporizer generating feed gas for the arc chamber of an ion source has a crucible which is heated to a temperature at which material in the crucible sublimes to produce a vapour for use as the feed gas. In addition to the heating element for heating the crucible, ... | 02/28/2006 |
| 6996972 | Method of ionizing a liquid propellant and an electric thruster implementing such a method A method of ionizing a liquid propellant is disclosed herein. The method includes the steps of applying an electrical charge to a showerhead, delivering a liquid propellant under pressure into a chamber defined within the showerhead, and emitting the liquid propella... | 02/14/2006 |
| 6982520 | Hall effect thruster with anode having magnetic field barrier An efficiency enhancing anode-magnetic structure of a Hall effect thruster produces a radially directed magnetic field between inner and outer poles at the exit portion of a gas distribution channel. The field-shaping structure includes magnetic material extending a... | 01/03/2006 |
| 6922463 | Thermally high conductive HV connector for a mono-polar CT tube An HV connector for high power X-ray device consists of thermally conductive epoxy, cable terminal, faraday cup, spring-loaded contact, and lead lined housing. The thermally conductive epoxy includes fillers. The epoxy can also be loaded with gravels of similar mate... | 07/26/2005 |
| 6919690 | Modular uniform gas distribution system in an ion source A modular ion source design relies on relatively short modular anode layer source (ALS) components, which can be coupled together to form a longer ALS. For long ion sources, these shorter modular components allow for easier manufacturing and further result in a fina... | 07/19/2005 |
| 6919672 | Closed drift ion source A closed drift ion source which includes a channel having an open end, a closed end, and an input port for an ionizable gas. A first magnetic pole is disposed on the open end of the channel and extends therefrom in a first direction. A second magnetic pole disposed ... | 07/19/2005 |
| 6906453 | Method and apparatus for simultaneously depositing and observing materials on a target A system for joining at least two beams of charged particles that includes directing a first beam along a first axis into a field. A second beam is directed along a second axis into the field. The first and second beams are turned, by interaction between the field a... | 06/14/2005 |
| 6903499 | Electron gun and a method for using the same An electron gun includes an electron emission cathode, a control electrode, and an extractor and the electron emission cathode is made of rare earth hexaboride. A tip of the electron emission cathode is located between the control electrode and the extractor, and th... | 06/07/2005 |
| 6888326 | Linac for ion beam acceleration A drift tube linear accelerator (linac) that can be used for the acceleration of low energy ion beams. The particles enter the linac at low energy and are accelerated and focused along a straight line in a plurality of resonant accelerating structures interposed by ... | 05/03/2005 |
| 6882095 | Electron accelerator having a wide electron beam An electron accelerator for generating an electron beam includes a vacuum chamber having an outer perimeter and an electron beam exit window. The exit window has a central region and a first end region. An electron generator is positioned within the vacuum chamber f... | 04/19/2005 |
| 6864486 | Ion sources A closed loop exit hole is formed in a magnetically permeable end wall (2) of an enclosure (1) of a closed electron drift ion source. Parts of this end wall separated by the exit hole serve as pole pieces (7 and 8) of the magnetic system ... | 03/08/2005 |
| 6815880 | Method and apparatus for simultaneously depositing and observing materials on a target A system for joining at least two beams of charged particles that includes directing a first beam along a first axis into a field. A second beam is directed along a second axis into the field. The first and second beams are turned, by interaction between the field a... | 11/09/2004 |
| 6800989 | Method of forming filament for electron beam emitter A filament for generating electrons for an electron beam emitter where the filament has a cross section and a length. The cross section of the filament is varied along the length for producing a desired electron generation profile. ... | 10/05/2004 |
| 6777862 | Segmented electrode hall thruster with reduced plume An apparatus and method for thrusting plasma, utilizing a Hall thruster with segmented electrodes along the channel, which make the acceleration region as localized as possible. Also disclosed are methods of arranging the electrodes so as to minimize erosion and arc... | 08/17/2004 |
| 6774378 | Method of tuning electrostatic quadrupole electrodes of an ion beam implanter The present invention concerns a method of tuning a plurality of electrostatic quadrupoles used for focusing an ion beam implanter. The steps of the method include: classifying the plurality of electrostatic quadrupoles into one of a predetermined number of groups, ... | 08/10/2004 |
