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| Number | Title | Issue Date |
| 7424776 | Method for machining a workpiece A method for machining a workpiece in which a machine tool comprising a first and a second chuck devices is employed to machine the workpiece, the machine tool being used in which the first and the second chuck devices comprise a chuck main body, plural chuck jaws, ... | 09/16/2008 |
| 7354481 | Substrate holding and rotating apparatus A substrate holding and rotating apparatus includes: a spin base connected to a rotary shaft and rotatable therearound; holding members attached to the spin base and displaceable between holding positions at which the holding members come in contact with the periphe... | 04/08/2008 |
| 7340087 | Edge inspection A semiconductor inspection tool comprises an edge top camera for obtaining images of a top edge of a wafer, an edge normal camera for obtaining images of a normal edge of the wafer, and a controller for receiving the images of the top edge of the wafer and the image... | 03/04/2008 |
| 7316390 | Conduit clamping device A conduit clamping device has an elongated substantially rigid base having a longitudinal axis. At least one axially extending elongated generally U-shaped channel is formed in the base and sized to receive at least a portion of a length of conduit of a given diamet... | 01/08/2008 |
| 7311312 | Chuck drawing a work against the chuck-face A chuck body is made up of axially movable plungers and jaws, in which the jaw has a master jaw body obliquely arranged with respect to an axis of the chuck body, the jaw also has a front face of the master jaw body and a rear end face of a master jaw head for restr... | 12/25/2007 |
| 7284760 | Holding device for disk-shaped objects Semiconductor technology requires the use of object holders, which are capable of holding wafers securely, also during rotation. In order to save time and expense, such holders should be suitable for integration directly into a processing facility, wherever possible... | 10/23/2007 |
| 7275749 | Substrate supporting apparatus A substrate supporting apparatus for supporting a substrate or wafer in a non-contact state by Bernoulli theorem is disclosed. The substrate supporting apparatus 1 comprises a housing 2, a rotatable chuck 3 which is disposed in the housing 2 | 10/02/2007 |
| 7258515 | Tool holding fixture and insert tool The invention is based on a tool holder for a power tool (i0), in particular for a hand-guided power angle grinder, having a slaving device (12) by way of which an inserted tool (14), which has a disklike hub (64), can be operatively conn... | 08/21/2007 |
| 7241362 | Substrate treatment method and substrate treatment apparatus A substrate treatment method for treating a substrate by supplying a treatment liquid to the substrate while rotating the substrate. The method comprises the steps of: performing a first substrate rotation process for rotating the substrate while clamping the substr... | 07/10/2007 |
| 7226055 | Substrate holding and spinning assembly and methods for making the same A substrate holding apparatus is provided. The substrate holding apparatus includes a chuck yoke, a plurality of arm assemblies, and a plurality of gripper assemblies. A first end of each of the arm assemblies is connected to the chuck yoke and each of the arm assem... | 06/05/2007 |
| 7204493 | Lathe chuck with stepped jaws A chuck for mounting wheel castings having different diameters upon a wheel lathe for machining the casting to final shape is provided. The chuck includes stepped jaw inserts that cooperate with corresponding stepped part supports to securely mount the wheel casting... | 04/17/2007 |
| 7198277 | Wheel chuck with counterweighted jaws A wheel chuck includes a plurality of moveable jaws mounted upon a support structure. A plurality of moveable counterweights are mounted upon the support structure with each counterweight opposite from and connected to a corresponding one of the jaws. Upon rotation ... | 04/03/2007 |
| 7143801 | Spindle for fastening rims of vehicle wheels on repair shop machines A spindle for fastening rims of vehicle wheels on repair shop machines, which comprises a frame that can be associated rotationally about a working axis with a repair shop machine, six or more movable arms that are associated with the frame, are distributed around t... | 12/05/2006 |
| 7131245 | Over-center self-adjusting equalizing cap chuck An over-center self adjusting cap chuck adapted for operative attachment to a high-speed capping machine includes a housing having an outer peripheral surface defining an inner annular periphery with an interior face. A plurality of independent engagement jaws are a... | 11/07/2006 |
| 7056392 | Wafer chucking apparatus and method for spin processor A wafer chuck is configured to hold a wafer efficiently for spin process cleaning of wafer edges and back sides. A first group of retractable tips extend to hold the wafer during a first portion of the cleaning period. A second group of retractable tips extend to ho... | 06/06/2006 |
| 7032287 | Edge grip chuck An actuated edge grip chuck includes tabs with raised portions that press against the side of a substrate as opposed clamping on the top or bottom surfaces. The edge grip chuck includes a solid-state actuator to move a moveable tab into an open position. The solid-s... | 04/25/2006 |
| 6997656 | Device and assembly for holding an object A device for holding an object, and an assembly for holding and rotating an object. The device includes a base, a series of posts, each of which is equidistant from a center point of reference and further pivotably holds a follower rotationally linked to all other f... | 02/14/2006 |
| 6964419 | Chuck rollers and pins for substrate cleaning and drying system A design for chuck rollers and a design for chuck pins for a wafer cleaning and drying system is disclosed. Each of the chuck rollers includes a roller head which ensures proper engagement of a wafer with the chuck rollers for rotation of the wafer during a wafer sc... | 11/15/2005 |
| 6953198 | Short pull-back chuck The present invention relates to a chuck for gripping workpieces having an outer chuck body rotatable about a chuck axis and defining a cavity. The chuck includes a collar, coupled to the outer chuck body, having a slot with a slot axis angled relative to said chuck... | 10/11/2005 |
| 6948898 | Alignment of semiconductor wafers and other articles A wafer or some other article is aligned while being held by an end-effector. ... | 09/27/2005 |
| 6935830 | Alignment of semiconductor wafers and other articles A wafer or some other article is aligned while being held by an end-effector. ... | 08/30/2005 |
| 6935638 | Universal substrate holder for treating objects in fluids A universal substrate holder of the invention for treating wafer substrates in liquids is provided with a shaft and a rod slidingly inserted into the central opening of the shaft. The end of the shaft that protrudes into the bowl supports a base platform for the sub... | 08/30/2005 |
| 6918599 | Anti-deflection tooling Anti-deflection tooling is provided for a pull back chuck. Equally spaced gussets are disposed between the riser body and the face plate of the chuck, to minimize or eliminate deflection of the face plate when a workpiece is clamped into the chuck. Adjustment device... | 07/19/2005 |
| 6910693 | Draw down chuck A drawn down chuck for gripping the inner or outer diameter of a workpiece. The chuck includes rotatable jaws disposed in a chuck body. The rotatable jaws helically and then linearly retract into the chuck body to secure workpieces having a shaft and an enlarged off... | 06/28/2005 |
| 6874790 | Device for rotating disc-shaped objects A device for rotation of disc-shaped elements of different diameter, such as matrices for manufacturing audio and video discs. The device comprises a rotatable chuck (10) in which three arms (20) distributed evenly in the peripheral direction are pivot... | 04/05/2005 |
| 6844929 | Apparatus and method for holding and transporting thin opaque plates A device is disclosed for supporting semiconductor wafers or other polished, opaque plates for processing or metrology in a vertical orientation, where the wafer loading and unloading occurs in a horizontal orientation. The device consists of a pallet designed with ... | 01/18/2005 |
| 6837499 | Ball-bolt chuck A chuck has a chuck body rotatable about a main axis and a plate displaceable axially on the body between an outer position and an inner position. Springs urge the plate into the outer position. A locking element on the body can move between a blocking position prev... | 01/04/2005 |
| 6761362 | Wafer holding device A wafer holding device, comprising a rotating baseplate, a wafer seat which is provided on the rotating baseplate coaxially with the rotating baseplate and which receives a peripheral edge of a wafer by a circumference, a predetermined number of chuck levers rotatab... | 07/13/2004 |
| 6702302 | Edge handling wafer chuck An edge handling chuck which operates to maintain a semiconductor wafer at a desirable orientation while rotating the wafer at high speeds is disclosed. The edge handling chuck consists of a cylindrical plate which holds a silicon wafer using multiple spr... | 03/09/2004 |
| 6530578 | Gripping arrangement The present invention relates to an arrangement (1) for gripping and holding or releasing a material (M), such as material held in a lathe chuck. The arrangement includes a piston-cylinder assembly (2) and a plurality of material gripping and holding or r... | 03/11/2003 |
| 6499746 | Lever-action chuck A chuck has a chuck body adapted to be rotated about a chuck axis and formed with a plurality of axially forwardly open passages each having a pair of angularly confronting side faces, respective guides pivotal in the passages about respective guide axes ... | 12/31/2002 |
| 6474658 | Chuck for machine tool Each of master jaws (17) has a middle spherical part guided for sliding movement by a spherical guide surface (16) formed in a chuck body (2), a round back end part (19) extended slidably through a spherical bearing member (12) supported on a support memb... | 11/05/2002 |
| 6454278 | Counter centrifugal power chuck assembly A power chuck assembly for securing a workpiece as the chuck assembly moves or rotates the workpiece is disclosed. The assembly includes a body portion, at least two gripping members and at least two counterweights wherein said counterweights operate to a... | 09/24/2002 |
| 6394691 | Gripping apparatus A gripping apparatus is disclosed that includes a housing that has at least two pivot trays. Each pivot tray includes a jaw cavity and a pivot pin notch. The gripping apparatus further includes at least two jaws that have a pivot pin. Each jaw is position... | 05/28/2002 |
| 6394467 | Retract type chuck A retractable chuck has a housing adapted to be fastened to a spindle of a lathe, a plurality of shafts mounted in the housing and having proximate ends near the lathe adapted to be coupled to a drawbar of the lathe, and jaws each fastened to one of the s... | 05/28/2002 |
| 6375197 | Clamping chuck with six arms mounted on ball joints compensated two by two The clamping chuck comprises six jaw carrier arms (4) that are operated two by two by one and the same compensator (5). Each compensator hinges with a pulling member (3) centered on the axis of the chuck and sliding axially in its main body (1) through th... | 04/23/2002 |
| 6371493 | Adaptive clamping type chuck The invention provides a chuck including a plurality of jaws (8), each of which is fixed to the forward end of a jaw carrier arm (5), said arm (5) being borne by a pivot joint (6) mounted on the body (1) of the chuck and the rotation of which imparts to t... | 04/16/2002 |
| 6367816 | Clamping device for objects, for example for workpieces to be treated A clamping device for objects such as workpieces to be treated and the like has a base body having at least one abutment surface for at least one object to be clamped, at least one clamping finger located on a movable carrier and having at least one clamp... | 04/09/2002 |
| 6250858 | Tool driver and tools therefor In the broader aspects of the invention, there is provided a new and improved tool driver having a shaft with a longitudinal axis and opposite ends and tools therefor. A boss is secured at one of said shaft ends by which the tool driver is connected to a ... | 06/26/2001 |
| 6217034 | Edge handling wafer chuck An edge handling chuck which operates to maintain a semiconductor wafer at a desirable orientation while rotating the wafer at high speeds is disclosed. The edge handling chuck consists of a cylindrical plate which holds a silicon wafer using multiple spr... | 04/17/2001 |
