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Class 266/152 - By indirect liquid heat exchange means


Subclass of Class 266 - Metallurgical apparatus
Definition: Device wherein the vaporized material gives up its heat
No. of patents: 8
Last issue date: 04/01/2008


NumberTitleIssue Date
7351936Method and apparatus for preventing baking chamber exhaust line clog
A method and apparatus involve providing a supply of nitrogen gas, heating the supply of nitrogen gas to a temperature, and ejecting the heated nitrogen gas through the exhaust line of the baking chamber on a periodic basis. The temperature is between a temperature ...
04/01/2008
6979368Apparatus and method for producing a semiconductor device including a byproduct control system
An apparatus includes a reaction chamber installed in a reaction furnace; a discharge port for removing from the reaction chamber reaction byproducts formed during producing of the semiconductor device; a heater for generating heat to the reaction chamber; and a hot...
12/27/2005
6966936Processing system, evacuating system for processing system, low-pressure CVD system, and evacuating system and trapping device for low-pressure CVD system
An object of the present invention is to ensure the stable operation of a vacuum pump for discharging an unused source gas and reaction byproduct gases from a low-pressure processing chamber, to recover the reaction byproducts efficiently for the effective utilizati...
11/22/2005
5997607Process of condensing metal in condensation chamber
A condensation chamber and method for condensing a metal connate from a metal rich gaseous mixture. The condensation chamber includes top and sidewall surfaces that together define a central bore. A gas supply is received in the bore, and as the gas begin...
12/07/1999
4940213Exhaust processing apparatus
An exhaust processing apparatus comprises a cracking furnace for cracking and solidifying exhaust discharged from a reactor for forming crystals on a semiconductor substrate, a first collecting device for collecting relatively large components solidified ...
07/10/1990
4540162Gas-scrubbing and metal-refining process and system
A metal-refining process and a corresponding system characterized by being adapted to minimize the health hazard by appropriate purification of the gases or vapor products resulting from acid action on a metal compound. This metal refining features the us...
09/10/1985
4502871Apparatus and method for separating wax from an entrainer gas
Disclosed is a wax condenser for separating wax from an entrainer gas (or sweep gas) which is introduced into a sintering furnace and then pumped out in order to remove the wax from the furnace. The condenser includes a hot chamber and a cold chamber. Wax...
03/05/1985
3933343Method and apparatus for melting metals
Metallic scrap contaminated with combustibles is melted in a well-type furnace to recover the metallic component with the aid of preheated air and heat generated by burning the fumes generated by the combustible contaminants. The scrap is fed into a depos...
01/20/1976
 
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