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Class 257/E27.063 - Means for preventing a parasitic bipolar action between the different transistor regions, e.g. latch-up prevention (EPO)


Subclass of Class 257 - Active solid-state devices (e.g., transistors, solid-state diodes)
No. of patents: 220
Last issue date: 10/28/2008


1            
NumberTitleIssue Date
7442996Structure and method for enhanced triple well latchup robustness
Disclosed is a triple well CMOS device structure that addresses the issue of latchup by adding an n+ buried layer not only beneath the p-well to isolate the p-well from the p− substrate but also beneath the n-well. The structure eliminates the spacing issues betwe...
10/28/2008
7396732Formation of deep trench airgaps and related applications
A method for forming deep trench or via airgaps in a semiconductor substrate is disclosed comprising the steps of patterning a hole in the substrate, partly fill said hole with a sacrificial material (e.g. poly-Si), depositing spacers on the sidewalls of the unfille...
07/08/2008
7358573Triple-well CMOS devices with increased latch-up immunity and methods of fabricating same
A triple-well CMOS structure having reduced latch-up susceptibility and a method of fabricating the structure. The method includes forming a buried P-type doped layer having low resistance under the P-wells and N-wells in which CMOS transistors are formed and formin...
04/15/2008
7342281Electrostatic discharge protection circuit using triple welled silicon controlled rectifier
Provided is an electrostatic discharge (ESD) protection circuit using a silicon controlled rectifier (SCR), which is applied to a semiconductor integrated circuit (IC). A semiconductor substrate has a triple well structure such that a bias is applied to a p-well cor...
03/11/2008
7309883Semiconductor device capable of preventing current flow caused by latch-up and method of forming the same
A semiconductor device includes first, second, and third wells. The first well is connected to a pad to which an external pin is connected and includes a first-type diffusion region that receives a well bias voltage. The second well is adjacent to the first well, an...
12/18/2007
7268400Triple-well CMOS devices with increased latch-up immunity and methods of fabricating same
A triple-well CMOS structure having reduced latch-up susceptibility and a method of fabricating the structure. The method includes forming a buried P-type doped layer having low resistance under the P-wells and N-wells in which CMOS transistors are formed and formin...
09/11/2007
7244992Turn-on-efficient bipolar structures with deep N-well for on-chip ESD protection
A semiconductor device suitable for applications in an electrostatic discharge (ESD) protection circuit, including a semiconductor substrate, a first well formed in the substrate, a second well formed in the substrate, and a first doped region formed in the second w...
07/17/2007
6686252Method and structure to reduce CMOS inter-well leakage
A method of forming a semiconductor device with improved leakage control, includes: providing a semiconductor substrate; forming a trench in the substrate; forming a leakage stop implant in the substrate under the bottom of the trench and under and aligne...
02/03/2004
6683362Metal-semiconductor diode clamped complementary field effect transistor integrated circuits
The subject invention relates to a metal-semiconductor diode clamped semiconductor device and method for producing such device. A specific embodiment of the subject invention utilizes one or more Schottky barriers at, for example, the drain and/or source ...
01/27/2004
6667522Silicon wafers for CMOS and other integrated circuits
Techniques include heating a substantially uniformly boron-doped wafer to achieve a significantly increased resistivity in a near-surface region of the wafer and forming at least one electrical circuit element in the near-surface region. Integrated circui...
12/23/2003
6653708Complementary metal oxide semiconductor with improved single event performance
A junction isolated Complementary Metal Oxide Semiconductor (CMOS) transistor device includes a substrate of a first conductivity type and first and second buried layers formed within the substrate and having a second conductivity type opposite from the f...
11/25/2003
6642583CMOS device with trench structure
A semiconductor device is provided having a high voltage driver IC reducing malfunction or device destruction. A high voltage IC chip includes a trench structure that surrounds each of two semiconductor regions at different electrical potentials. Specific...
11/04/2003
6636075Semiconductor integrated circuit and its fabrication method
An integrated circuit having a CMOS circuit constituted by electrically connecting an n-type well 2, in which p-channel transistor Tp of the CMOS circuit is set, with a supply line Vdd through switching transistor Tps, and electrically connecting a p-type...
10/21/2003
6617217Reduction in well implant channeling and resulting latchup characteristics in shallow trench isolation by implanting wells through nitride
Retrograde wells are formed by implanting through nitride films (40). Nitride films (40) are formed after STI (20) formation. By selectively masking a portion of the wafer with photoresist (47) after portions of a retrograde well are formed (45, 50, 55, a...
09/09/2003
6614078Highly latchup-immune CMOS I/O structures
CMOS I/O structures are described which are latchup-immune by inserting p+ and n+ diffusion guard-rings into the NMOS and PMOS source side of a semiconductor substrate, respectively. P+ diffusion guard-rings surround individual n-channel transistors and n...
09/02/2003
6605872Method for fabricating a semiconductor device including a latch-up preventing conductive layer
Provided with a semiconductor device which is adopted to reduce the resistance of a well without the need to increase the concentration of dopants in forming the well by depositing conductive layer patterns and then growing an epitaxial layer on the condu...
08/12/2003
6593174Field effect transistor having dielectrically isolated sources and drains and method for making same
A field-effect transistor and a method for its fabrication is described. The transistor includes a monocrystalline semiconductor channel region overlying and epitaxially continuous with a body region of a semiconductor substrate. First and second semicond...
07/15/2003
6583470Radiation tolerant back biased CMOS VLSI
A CMOS circuit formed in a semiconductor substrate having improved immunity to total ionizing dose radiation, improved immunity to radiation induced latch up, and improved immunity to a single event upset. The architecture of the present invention can be ...
06/24/2003
6493275Semiconductor integrated circuit device and electronic equipment
Each inverter includes any of a P-channel modulation MOS transistor, a normal N-channel MOS transistor, a normal P-channel MOS transistor, and an N-channel modulation MOS transistor. A modulation substrate bias Vb of the P-channel modulation MOS transisto...
12/10/2002
6489657Semiconductor device with improved channel stopper
A semiconductor device comprising a high withstand voltage MOS transistor of an offset drain/offset source structure easing a high electric field generated between a channel and a parasitic channel stopper in an operating state and preventing changes of a...
12/03/2002
6469365Semiconductor component with a structure for avoiding parallel-path currents and method for fabricating a semiconductor component
A semiconductor component having a structure for avoiding parallel-path currents in the semiconductor component includes a substrate of a first conductivity type having a surface. A plurality of separate wells of a second conductivity type with a more hig...
10/22/2002
6468848Method of fabricating electrically isolated double gated transistor
A gated field effect transistor (gated-FET) in which the body of the FET is electrically isolated from the substrate thereby reducing leakage current through parasitic bipolar action. The back-bias of the channel of the FET is jointly controlled by a diod...
10/22/2002
6465283Structure and fabrication method using latch-up implantation for improving latch-up immunity in CMOS fabrication process
A structure and fabrication method using latch-up implantation to improve latch-up immunity in CMOS circuit. The impedance of parasitic SCR conducting path is raised by performing an ion-implantation process on a cathode and an anode of a parasitic SCR wh...
10/15/2002
6461904Structure and method for making a notched transistor with spacers
A method of forming a semiconductor structure includes filling a trench in a first dielectric layer with a gate material. The first dielectric layer is on a semiconductor substrate, and spacers are in the trench. A semiconductor device formed from this st...
10/08/2002
6455363System to improve ser immunity and punchthrough
A method for fabricating an SRAM device having a standard well tub, where an additional well tub is deposited within the standard well tub. In this manner, the dopant concentration is increased in the well area of the SRAM device, which increases both the...
09/24/2002
6445044Apparatus improving latchup immunity in a dual-polysilicon gate
The invention is a method for creating a portion of an integrated circuit on a semiconductor wafer. The invention comprises doping a substrate to form a doped well region having an opposite conductivity type than the substrate. Separate photomasking steps...
09/03/2002
6420764Field effect transitor having dielectrically isolated sources and drains and methods for making same
A field-effect transistor and a method for its fabrication is described. The transistor includes a monocrystalline semiconductor channel region overlying and epitaxially continuous with a body region of a semiconductor substrate. First and second semicond...
07/16/2002
6420221Method of manufacturing a highly latchup-immune CMOS I/O structure
CMOS I/O structures are described which are latchup-immune by inserting p+ and n+ diffusion guard-rings into the NMOS and PMOS source side of a semiconductor substrate, respectively. P+ diffusion guard-rings surround individual n-channel transistors and n...
07/16/2002
6410378Method of fabrication of semiconductor structures by ion implantation
The present invention relates to formation of trench isolation structures that isolate active areas and a preferred doping in the fabrication of a CMOS device with a minimized number of masks. P-type dopant are implanted into a semiconductor substrate hav...
06/25/2002
6406974Method of forming triple N well utilizing phosphorus and boron ion implantations
A method of forming a triple N well is described. A first pattern mask layer is formed on a substrate. A first ion implantation step is performed to form an annular longitudinal deep N well in the substrate. A second ion implantation step is performed to ...
06/18/2002
6359316Method and apparatus to prevent latch-up in CMOS devices
A semiconductor (preferably a CMOS) device having one or more latch-up inhibitor diffusion regions. The latch-up inhibitor regions are adjacent to complementary P-channel and N-channel transistors, and typically function to inhibit or prevent latch-up, wi...
03/19/2002
6359472Semiconductor integrated circuit and its fabrication method
An integrated circuit having a CMOS circuit constituted by electrically connecting an n-type well 2, in which p-channel transistor Tp of the CMOS circuit is set, with a supply line Vdd through switching transistor Tps, and electrically connecting a p-type...
03/19/2002
6351014Semiconductor device having different field oxide sizes
According to a semiconductor device of the present invention, a field oxide film is formed so as to cover the main surface of an SOI layer and to reach the main surface of a buried oxide film. As a result, a pMOS active region of the SOI and an nMOS activ...
02/26/2002
6348372Method for reducing PN junction leakage
To reduce p-n junction leakage at the boundary between lightly doped wells formed in lightly doped bulk materials, a high concentration region is implanted at the junction. The high concentration region contains a relatively high dopant level, and thus re...
02/19/2002
6309940Latch-up resistant CMOS structure
Provided with a semiconductor device including: a semiconductor substrate having a first conductivity type; a first well having a second conductivity type formed in a first region in a major surface of the semiconductor substrate; a second well having the...
10/30/2001
6307233Electrically isolated double gated transistor
A gated field effect transistor (gated-FET) in which the body of the FET is electrically isolated from the substrate thereby reducing leakage current through parasitic bipolar action. The back-bias of the channel of the FET is jointly controlled by a diod...
10/23/2001
6303964Circuit device for protection against electrostatic discharge, immune to the latch-up phenomenon
The present invention relates to a circuit device for protection against electrostatic discharge, and being immune to the latch-up phenomenon. The circuit device is of the integrated type in a portion of a semiconductor integrated circuit. The device incl...
10/16/2001
6300209Method of fabricating triple well of semiconductor device using SEG
There is disclosed a triple well of a semiconductor device using SEG and method of forming the same. The method of forming a triple well of a semiconductor device using SEG according to the present invention is characterized in that it comprises the steps...
10/09/2001
6291323Method of fabrication of semiconductor structures by ion implantation
The present invention relates to the formation of trench isolation structures that isolate active areas and a preferred doping in the fabrication of a CMOS device with a minimized number of masks. Ions of a P-type dopant are implanted into a semiconductor...
09/18/2001
6274416Method for fabricating a semiconductor device including a latch-up preventing conductive layer
Provided with a semiconductor device which is adopted to reduce the resistance of a well without the need to increase the concentration of dopants in forming the well by depositing conductive layer patterns and then growing an epitaxial layer on the condu...
08/14/2001
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