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| Number | Title | Issue Date |
| 6482656 | Method of electrochemical formation of high Tc superconducting damascene interconnect for integrated circuit A semiconductor device including a damascene superconducting interconnect, formed of a Ba--Cu--Ca--O superconducting material. A method of forming a superconducting damascene interconnect structure, and the structure made thereby, the method including for... | 11/19/2002 |
| 6420189 | Superconducting damascene interconnected for integrated circuit A method of forming a superconducting damascene interconnect structure, and the structure made thereby, the method includes forming a cavity in an interlevel dielectric; forming a barrier layer in the cavity; forming a seed layer in the cavity over the ba... | 07/16/2002 |
| 6352741 | Planar high temperature superconductive integrated circuits for using ion implantation High temperature superconductive (HTS) integrated circuits can be fabricated in three ways according to the invention. First, a planar multiple layer HTS integrated circuit is fabricated using multiple HTS layers. The layers include altered regions which ... | 03/05/2002 |
| 6087711 | Integrated circuit metallization with superconductor BEOL wiring The present invention discloses an integrated circuit that is wired with a high-temperature superconductive material that is superconductive at temperatures of about 70° K and above, and methods of making the integrated circuit. The front-end manufacture... | 07/11/2000 |
| 6060664 | Electronic circuit component A prior-art electronic circuit component comprising an insulating film and a circuit conductive layer made of a superconducting metal suffers low reliability resulting from insufficient adhesion between these layers. An electronic circuit component of the... | 05/09/2000 |
| 5912068 | Epitaxial oxides on amorphous SiO2 on single crystal silicon A process for forming a structure including an epitaxial layer of a oxide material such as yttria-stabilized zirconia on a thick layer of amorphous silicon dioxide having a thickness of at least about 500 Angstroms on a single crystal silicon substrate an... | 06/15/1999 |
| 5880521 | Super-conductive wiring and semiconductor device using the same An integrated circuit device comprises a plurality of integrated circuit layers formed on a semiconductor substrate, a wiring layer having a ladder-like lattice and formed of a material exhibiting superconductivity in a longitudinal direction, the wiring ... | 03/09/1999 |
| 5760463 | Superconducting layer in contact with group III-V semiconductor layer for wiring structure A superconductor device which includes a first wiring part and a second wiring part which together form a superconductive wiring. The first wiring part is arranged onto a substrate and is made of a superconductor material. The second wiring part is made o... | 06/02/1998 |
| 5700715 | Process for mounting a semiconductor device to a circuit substrate A process for mounting one or more dies a substrate, such as by ball-bumps. In one embodiment, a thin layer of heat-reflective material, such as gold, is disposed over the surface of the die facing the substrate, to shield the substrate from heat generate... | 12/23/1997 |
| 5672569 | Process for fabricating a superconducting circuit A superconducting circuit having patterned superconducting wiring lines. Each wiring line consists of at least one portion (2') of the thin film (2) of an oxide superconductor deposited on a substrate (1). The portion (2') has a predetermined crystal orie... | 09/30/1997 |
| 5659201 | High conductivity interconnection line High conductivity interconnection lines are formed of high conductivity material, such as copper, employing barrier layers impervious to the diffusion of copper atoms. Higher operating speeds are obtained with conductive interconnection lines, preferably ... | 08/19/1997 |
| 5644143 | Method for protecting a semiconductor device with a superconductive line Various techniques for forming superconductive lines are described whereby superconductive lines can be formed by stamping, etching, polishing, or by rendering selected areas of a superconductive film (layer) non-superconductive. The superconductive mater... | 07/01/1997 |
| 5593918 | Techniques for forming superconductive lines Various techniques for forming superconductive lines are described whereby superconductive lines can be formed by stamping, etching, polishing, or by rendering selected areas of a superconductive film (layer) non-superconductive. The superconductive mater... | 01/14/1997 |
| 5420101 | Structures super conductor tracks and process for making them The invention relates to a structured superconductive track and a process for making it from epitaxial high temperature superconductor (HTSC) layers using lift off technique, in which a HTSC track deposited on an elevated substrate region is surrounded by... | 05/30/1995 |
| 5330616 | Electric device provided with carbon pattern structure and manufacturing method for the same An improved semiconductor device and manufacturing method for the same is described. The device is provided with an interleaved carbon pattern. The heat produced in the semi conductor device can be quickly dissipated and the undesirable temperature elevat... | 07/19/1994 |
| 5283465 | Superconducting lead on integrated circuit An improved electric device utilizing a superconducting material. In order to avoid undesirable oxidation during firing of a ceramic to be superconducting material formed on the substrate, the superconducting material is provided only on the position in w... | 02/01/1994 |
| 5273954 | Method for forming superconducting ceramics elongated body A method of manufacturing a superconducting ceramics elongated body by forming a longitudinally continuous superconducting layer on at least a part of the surface of a flexible ceramics elongated substrate by evaporation under the presence of oxygen ions.... | 12/28/1993 |
| 5274268 | Electric circuit having superconducting layered structure An electric circuit is provided on a semiconductor substrate with a supercoducting film. The surfaces being in contact with the superconducting film are made of heat-resistant non-oxide insulating materials so that the performance of the superconducting f... | 12/28/1993 |
| 5266815 | Semiconductor integrated circuit device having superconductive layer and isolation member with nitride isolation Technology for using a wiring of a superconductive material in semiconductor integrated circuit device. An isolation layer and/or a barrier layer are provided for preventing diffusion of harmful composition of the superconductive material for the semicond... | 11/30/1993 |
| 5232909 | Method for manufacturing superconducting ceramics elongated body A superconducting ceramics elongated body comprising a flexible ceramics elongated substrate and an oxide ceramics superconducting layer formed at least on a part of the surface of the ceramics elongated substrate to longitudinally extend along the cerami... | 08/03/1993 |
| 5227361 | Oxide superconducting lead for interconnecting device component with a semiconductor substrate via at least one buffer layer A superconducting device comprises a substrate having an electric connecting section and a copper oxide superconducting material thereon, and an electric interconnecting means for the electric connecting section and the superconducting material formed fro... | 07/13/1993 |
| 5212150 | Oxide superconducting lead for interconnecting device component with a semiconductor substrate via at least one buffer layer A superconducting device comprises a substrate having an electric connecting section and a copper oxide superconducting material thereon, and an electric interconnecting means for the electric connecting section and the superconducting material formed fro... | 05/18/1993 |
| 5183800 | Interconnection method for semiconductor device comprising a high-temperature superconductive material An interconnecting method for a semiconductor device which includes the steps of depositing a high-temperature superconductive material over an interlevel insulation layer, and irradiating an energy beam onto a high-temperature superconductive material la... | 02/02/1993 |
| 5130273 | Method for manufacturing a read only memory device using a focused ion beam to alter superconductivity A read only memory device comprises a first electrode, and a second electrode arranged overlapping with the first electrode so as to be geometrically in connection at the intersection. At least one of the first and second electrodes is formed of a ceramic... | 07/14/1992 |
| 5112802 | Superconducting ceramics elongated body and method of manufacturing the same A superconducting ceramics elongated body comprising a flexible ceramics elongated substrate and an oxide ceramics superconducting layer formed at least on a part of the surface of the ceramics elongated substrate to longitudinally extend along the cerami... | 05/12/1992 |
| 5104848 | Device and method of manufacturing a device A device comprising semiconductor elements and conductor tracks of an oxidic superconducting material, electrically conductive connections being formed between semiconductor elements and conductor tracks, is provided with an electrically conductive antidi... | 04/14/1992 |
| 5083188 | Integrated circuit having superconductive wirings An integrated circuit having a superconductive wiring comprises a semiconductor substrate, an integrated circuit device formed on the semiconductor substrate and a wiring connected to the integrated circuit device. The wiring is formed of a superconductiv... | 01/21/1992 |
| 5069748 | Method for forming refractory resistors with etch stop for superconductor integrated circuits This is a structure of, and method for preparation of, molybdenum resistors in a superconductor integrated circuit. It utilizes a pattern superconductor film; applying a titanium film on the patterned superconductor film; and then applying a molybdenum fi... | 12/03/1991 |
| 5021867 | Refractory resistors with etch stop for superconductor integrated circuits This is a structure of, and method for preparation of, molybdenum resistors in a superconductor integrated circxuit. It utilizes a pattern superconductor film; applying a titanium film on the patterned superconductor film; and then applying a molybdenum f... | 06/04/1991 |
| 5013526 | Superconducting alloys comprising tungsten, molybdenum, silicon and oxygen A superconducting material made of tungsten or molybdenum containing a specified amount of silicon, a wiring made of this superconducting material, and a semiconductor device using this wiring. The above-mentioned superconducting material undegoes no damage ev... | 05/07/1991 |
| 5012319 | Integrated electronic assembly comprising a transmission line Integrated electronic assemblies according to the invention, typically semiconductor IC chips, comprise an air gap transmission line. The line has high propagation speed and low dispersion, and can be readily manufactured. Various embodiments of the inven... | 04/30/1991 |
| 5001108 | Semiconductor device having a superconductive wiring Connecting a superconductive material wiring layer to an electrode formed of normal metals (i.e. non-superconductive metals, such as aluminum), and connecting a part of a semiconductor region to the normal metal. The normal metal can contact the supercond... | 03/19/1991 |
| 4990489 | Read only memory device including a superconductive electrode A read only memory device includes a first electrode and a second electrode arranged in an overlapping relation with the first electrode so as to be geometrically in connection at an intersection therewith corresponding to a storage location for one type ... | 02/05/1991 |
| 4960751 | Electric circuit having superconducting multilayered structure and manufacturing method for same An electric circuit is provided on a semiconductor substrate with a superconducting film. The surfaces being in contact with the superconducting film are made of heat-resistant non-oxide insulating materials so that the performance of the superconducting ... | 10/02/1990 |
| 4857974 | Circuit comprising conductive lines for the transfer of high-speed signals This circuit comprising conductive lines for the transfer of high-speed signals is formed from a semiconductor material in the presence of a two-dimensional gas 2DG between two of its layers (3 and 4). By a suitable choice of the conditions of the tempera... | 08/15/1989 |
| 4837609 | Semiconductor devices having superconducting interconnects A semiconductor device which includes either a single semiconductor chip bearing an integrated circuit (IC) or two or more electrically interconnected semiconductor chips, is disclosed. This device includes interconnects between device components (on the ... | 06/06/1989 |
| 4316200 | Contact technique for electrical circuitry In electrical circuitry, and particularly superconducting circuitry including Josephson tunnelling devices, it is often necessary to provide solder contacts to electrical lines, where the electical lines would be destroyed if there were interdiffusion bet... | 02/16/1982 |
| 3949274 | Packaging and interconnection for superconductive circuitry A three dimensional micro electronic module packaged for reduced signal propagation delay times includes a plurality of circuit carrying means, which may comprise unbacked chips, with integrated superconductive circuitry thereon. The circuit carrying mean... | 04/06/1976 |