U.S. patents available from 1976 to present.
U.S. patent applications available from 2005 to present.

Icon_funbox Bizarre Patents

Patent No. 5100138

Motorized Mobile Boxing Robot

A simulation environment for the sport of boxing utilizing a robotic machine interface system which carries a person

Newsletter  PatentStorm News

Make the Most of Our Site

See this month's Top Inventors and Most Cited Patents.

Stay on top of the latest innovations by subscribing to an RSS feed.

Registered users: Manage your profile.

 

Class 257/E21.438 - Using self-aligned silicidation, i.e., salicide (EPO)


Subclass of Class 257 - Active solid-state devices (e.g., transistors, solid-state diodes)
Definition: This subclass is indented under subclass E21.409. This
No. of patents: 547
Last issue date: 10/14/2008


1                      
NumberTitleIssue Date
7435669Method of fabricating transistor in semiconductor device
A method of fabricating a transistor in a semiconductor device. A gate oxide layer and a gate are formed on a semiconductor substrate. An oxide layer and a silicon nitride layer are stacked on the substrate. The stacked oxide and silicon nitride layers are etched ba...
10/14/2008
7432180Method of fabricating a nickel silicide layer by conducting a thermal annealing process in a silane gas
A method of fabricating a semiconductor device comprises the step of forming a nickel monosilicide layer selectively over a silicon region defined by an insulation film by a self-aligned process. The self-aligned process comprises the steps of forming a metallic nic...
10/07/2008
7429525Fabrication process of a semiconductor device
A method of fabricating a semiconductor device includes the steps of forming a metallic nickel film on a silicon substrate such that the metallic nickel film covers an insulation film on the silicon substrate and a silicon surface of the silicon substrate, annealing...
09/30/2008
7422942Method for fabricating a semiconductor device having an insulation film with reduced water content
A semiconductor device having a self-aligned contact hole is formed by providing a side wall oxide film on a gate electrode, covering the gate electrode and the side wall oxide film by an oxide film and further covering the oxide film by a nitride film, wherein the ...
09/09/2008
7402520Edge removal of silicon-on-insulator transfer wafer
A silicon-on-insulator transfer wafer having a front surface with a circumferential lip around a circular recess is polished. In one version, the circular recess on the front surface of the wafer is masked by filling the recess with spin-on-glass. The front surface ...
07/22/2008
7396764Manufacturing method for forming all regions of the gate electrode silicided
The technology which can improve the performance of a MOS transistor in which all the regions of the gate electrode were silicided is offered. A gate insulating film and a gate electrode of an nMOS transistor are laminated and formed in this order on a semico...
07/08/2008
7384852Sub-lithographic gate length transistor using self-assembling polymers
A semiconductor structure including at least one transistor located on a surface of a semiconductor substrate, wherein the at least one transistor has a sub-lithographic channel length, is provided. Also provided is a method to form such a semiconductor structure us...
06/10/2008
7371599Image sensor and method of forming the same
An image sensor includes a semiconductor substrate, a photo receiving area in the semiconductor substrate, a gate electrode installed in a lateral side of the photo receiving area on the semiconductor substrate, and a patterned dielectric layer covering the gate ele...
05/13/2008
7368363Method of manufacturing semiconductor device and method of treating semiconductor surface
A method of manufacturing a semiconductor device includes the steps of: exposing a semiconductor surface of a substrate; annealing the substrate in a hydrogen atmosphere at a hydrogen pressure between 200 Torr and 760 Torr and a temperature between 1000° C. and 105...
05/06/2008
7364995Method of forming reduced short channel field effect transistor
A method for manufacturing a semiconductor device capable of reducing a short channel effect, whereby the semiconductor device includes a pair of impurity regions for a source and a drain formed on a semiconductor substrate, a gate having a gate electrode used to co...
04/29/2008
7348248CMOS transistor with high drive current and low sheet resistance
A semiconductor structure and a method for forming the same are provided. The semiconductor structure includes a gate dielectric over a substrate, a gate electrode over the gate dielectric, a slim gate spacer along a side of the gate electrode, and a source/drain re...
03/25/2008
7344984Technique for enhancing stress transfer into channel regions of NMOS and PMOS transistors
A method and a semiconductor device are provided in which respective contact layers having a specific intrinsic stress may be directly formed on respective metal silicide regions without undue metal silicide degradation during an etch process for removing an unwante...
03/18/2008
7344932Use of silicon block process step to camouflage a false transistor
A technique for and structures for camouflaging an integrated circuit structure. A layer of conductive material having a controlled outline is disposed to provide artifact edges of the conductive material that resemble an operable device when in fact the device is n...
03/18/2008
7320939Semiconductor device fabricated by a method of reducing the contact resistance of the connection regions
A semiconductor device, fabricated by a method, having a semiconductor structure with a silicon region which forms at least one connection region in and/or on a surface of a substrate is disclosed. In one embodiment, the method includes i) forming, at least at the s...
01/22/2008
7309649Method of forming closed air gap interconnects and structures formed thereby
A method to form a closed air gap interconnect structure is described. A starting structure made of regions of a permanent support dielectric under the interconnect lines and surrounding interconnect vias with one or more sacrificial dielectrics present in the remai...
12/18/2007
7309637Method to enhance device performance with selective stress relief
A structure and method of fabrication of a semiconductor device having a stress relief layer under a stress layer in one region of a substrate. In a first example, a stress relief layer is formed over a first region of the substrate (e.g., PFET region) and not over ...
12/18/2007
7256096Semiconductor device having a dual-damascene gate and manufacturing method thereof
A method of manufacturing a semiconductor device having a dual-damascene gate including forming LDD regions by forming a gate oxide film on a semiconductor substrate, and by implanting lowly-concentrated impurities in the semiconductor substrate in accordance with a...
08/14/2007
7244996Structure of a field effect transistor having metallic silicide and manufacturing method thereof
A field effect transistor having metallic silicide layers is formed in a semiconductor layer on an insulating layer of an SOI substrate. The metallic silicide layers are composed of refractory metal and silicon. The metallic silicide layers extend to bottom surfaces...
07/17/2007
7223662Method of forming an epitaxial layer for raised drain and source regions by removing surface defects of the initial crystal surface
By substantially amorphizing a selectively epitaxially grown silicon layer used for forming a raised drain and source region and a portion of the underlying substrate, or just the surface region of the substrate (prior to growing the silicon overlayer), the number o...
05/29/2007
7220632Method of forming a semiconductor device and an optical device and structure thereof
An integration process where a first semiconductor protective layer and a second semiconductor protective layer are formed to protect the first and second semiconductor materials, respectfully, during processing to form an optical device, such as a photodetector, an...
05/22/2007
7220623Method for manufacturing silicide and semiconductor with the silicide
The present invention is directed to a method of manufacturing silicide used to reduce a contact resistance at a contact of a semiconductor device and a semiconductor device with the silicide manufactured by the same method. The method comprises the steps of: (a) cl...
05/22/2007
7217624Non-volatile memory device with conductive sidewall spacer and method for fabricating the same
The present invention relates to a non-volatile memory device having conductive sidewall spacers and a method for fabricating the same. The non-volatile memory device includes: a substrate; a gate insulation layer formed on the substrate; a gate structure formed on ...
05/15/2007
7217633Methods for fabricating an STI film of a semiconductor device
Methods for fabricating a shallow trench isolation (STI) of a semiconductor device are disclosed. A disclosed method includes: forming a trench on a semiconductor substrate, forming an oxide layer on the semiconductor substrate and the trench, forming a photoresist ...
05/15/2007
7211515Methods of forming silicide layers on source/drain regions of MOS transistors
Methods of forming MOS transistors include forming lightly and heavily doped source/drain regions adjacent to one another in a substrate and a gate electrode with a sidewall spacer thereon. A salicide process is performed on a surface of the heavily doped source/dra...
05/01/2007
7211491Method of fabricating gate electrode of semiconductor device
A method of fabricating a gate electrode of a semiconductor device is disclosed. A disclosed method comprises growing a silicon epitaxial layer on a silicon substrate; making at least one trench through the epitaxial layer and filling the trench with a first oxide l...
05/01/2007
7179739Methods of forming a semiconductor device including a metal silicide layer between a conductive plug and a bottom electrode of a capacitor
Embodiments of the present invention include methods of forming a contact to a capacitor in a semiconductor device. A metal silicide layer is formed at a top surface of a conductive plug of the semiconductor device that is coupled to a bottom electrode of the capaci...
02/20/2007
7169676Semiconductor devices and methods for forming the same including contacting gate to source
Semiconductors having electrically coupled gate and impurity doped regions and methods for fabricating the same are provided. A method in accordance with an embodiment of the invention comprises forming a gate electrode overlying a substrate and an impurity doped re...
01/30/2007
7148108Method of manufacturing semiconductor device having step gate
Disclosed herein is a method of manufacturing a semiconductor device having a step gate, which can improve the refresh characteristics of the device. The method comprises the steps of: forming on a silicon substrate having active and field regions a first hard mask ...
12/12/2006
7122449Methods of fabricating semiconductor structures having epitaxially grown source and drain elements
Methods for fabricating facetless semiconductor structures using commercially available chemical vapor deposition systems are disclosed herein. A key aspect of the invention includes selectively depositing an epitaxial layer of at least one semiconductor material on...
10/17/2006
7122871Integrated circuit field effect transistors including channel-containing fin having regions of high and low doping concentrations
Integrated circuit field effect transistors include an integrated circuit substrate and a fin that projects away from the integrated circuit substrate, extends along the integrated circuit substrate, and includes a top that is remote from the integrated circuit subs...
10/17/2006
7118954High voltage metal-oxide-semiconductor transistor devices and method of making the same
A method for fabricating metal-oxide-semiconductor devices is provided. The method includes forming a gate dielectric layer on a substrate; depositing a polysilicon layer on the gate dielectric layer; forming a resist mask on the polysilicon layer; etching the polys...
10/10/2006
6703296Method for forming metal salicide
A method for forming a metal salicide layer on a shallow junction is described. A substrate having a gate structure thereon and a shallow junction therein is provided. An atomic layer deposition (ALD) process is then performed to deposit a tungsten salici...
03/09/2004
6703291Selective NiGe wet etch for transistors with Ge body and/or Ge source/drain extensions
The wet etch stage of the salicide process normally used to fabricate polysilicon and silicon-based semiconductor transistors may not be appropriate for germanium-based transistors because the wet etch chemicals at such temperatures will dissolve the germ...
03/09/2004
6703648Strained silicon PMOS having silicon germanium source/drain extensions and method for its fabrication
A strained silicon p-type MOSFET utilizes a strained silicon channel region formed on a silicon germanium substrate. Silicon germanium regions are formed to the silicon germanium layer adjacent to ends of the strained silicon channel region, and shallow s...
03/09/2004
6703281Differential laser thermal process with disposable spacers
MOSFETs are fabricated with accurately defined, high and uniformly concentrated source/drain regions and extensions employing plural, sequential pre-amorphizing, implanting and laser thermal annealing steps with intervening spacer removal. Embodiments inc...
03/09/2004
6699755Method for producing a gate
A method for producing a gate on a semiconductor substrate. The semiconductor substratehas a first oxide layer, a conductive layer, a silicide layer, and a hard mask formed thereon. The method includes defining the hard mask to form a pattern of the gate,...
03/02/2004
6696345Metal-gate electrode for CMOS transistor applications
Described is a CMOS transistor structure with a multi-layered gate electrode structure and a method of fabrication. The gate electrode structure has a three-layered metallic gate electrode and a polysilicon layer. The first metallic layer acts as a barrie...
02/24/2004
6696354Method of forming salicide
A method of forming a salicide. A metal layer is formed on a silicon-based substrate comprising a gate with a spacer on the side wall of the gate and a source/drain is provided. Next, a first thermal treatment is performed to make the portions of the meta...
02/24/2004
6690072Method and structure for ultra-low contact resistance CMOS formed by vertically self-aligned CoSi2 on raised source drain Si/SiGe device
A method (and structure) of forming a vertically-self-aligned silicide contact to an underlying SiGe layer, includes forming a layer of silicon of a first predetermined thickness on the SiGe layer and forming a layer of metal on the silicon layer, where t...
02/10/2004
6686274Semiconductor device having cobalt silicide film in which diffusion of cobalt atoms is inhibited and its production process
In a semiconductor device having a cobalt silicide film, at least nickel or iron is contained in the cobalt silicide film for preventing the rise of resistance incidental to thinning of the film....
02/03/2004
1                      
 
Sign InRegister
Username  
Password   
forgot password?