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Class 257/E21.424 - Lateral single gate silicon transistor (EPO)


Subclass of Class 257 - Active solid-state devices (e.g., transistors, solid-state diodes)
Definition: This subclass is indented under subclass E21.409. This
No. of patents: 51
Last issue date: 05/27/2008


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NumberTitleIssue Date
7378318System and method for ensuring migratability of circuits by masking portions of the circuits while improving performance of other portions of the circuits
A system and method for ensuring the migratability of circuits into future technologies while minimizing fabrication costs and maintaining or improving power efficiency are provided. A mask layer is introduced to portions of the integrated circuit prior to a stress ...
05/27/2008
6515319Field-effect-controlled transistor and method for fabricating the transistor
An active surface with a source area, a channel area and a drain area is provided in a semiconductor substrate. Each of the areas lie adjacent to a main surface of the semiconductor substrate. At least one trench is provided in the main surface of the sem...
02/04/2003
6350641Method of increasing the depth of lightly doping in a high voltage device
A method for fabricating a high vltage device with double diffusion structure provides a pad oxide layer on a silicon substrate. A silicon nitride layer is formed and patterned to expose isolation regions. A first mask covers the partial isolation regions...
02/26/2002
6329256Self-aligned damascene gate formation with low gate resistance
In order to form a self-aligned damascene gate which enables the resistance of the gate to be reduced, a thick layer of dielectric material is formed over a semiconductor substrate in which drain and source regions have previously been implanted and annea...
12/11/2001
6323524Semiconductor device having a vertical active region and method of manufacture thereof
A semiconductor device and method of manufacture thereof is provided. According to one embodiment, a semiconductor device is formed by forming a trench within a substrate. An oxide layer is formed within the trench and portions of the oxide layer are remo...
11/27/2001
6225170Self-aligned damascene gate with contact formation
In order to form a self-aligned damascene gate with an attendant contact or contacts, a thick layer of dielectric material is formed over a semiconductor substrate in which drain and source regions have previously been implanted and annealed. This dielect...
05/01/2001
6144538High voltage MOS transistor used in protection circuits
An electrostatic discharge (ESD) protection circuit is formed on a semiconductor wafer. The semiconductor wafer comprises a substrate, an active region having a doped area formed in a predetermined area on the surface of the substrate, and a field oxide l...
11/07/2000
6140193Method for forming a high-voltage semiconductor device with trench structure
A method for forming high-voltage semiconductor devices that have trench structure, substantially facilitating the integration of the high-voltage devices and the low-voltage devices, is disclosed. The method includes providing a semiconductor substrate, ...
10/31/2000
6103589High-voltage device substrate structure and method of fabrication
A method for fabricating a high-voltage device substrate comprising the steps of forming a pad oxide layer and a mask layer over a substrate. Then, the pad oxide layer and the mask layer are patterned to define a region for a first ion implantation. Next,...
08/15/2000
6104069Semiconductor device having an elevated active region formed in an oxide trench
A process for forming a semiconductor device having an elevated active region is disclosed. The process includes forming a plurality of gate electrodes on the semiconductor substrate and disposing a thick oxide layer over the gate electrodes. A trench is ...
08/15/2000
6083800Method for fabricating high voltage semiconductor device
The present invention discloses a high voltage semiconductor device with high breakdown voltage without increment in area occupied an increase in the size of junction region. Each junction region includes: (i) a first impurity region of a first conductivi...
07/04/2000
6078086Metal oxide semiconductor field effect transistor and method of manufacturing the same
A MOSFET includes a semiconductor substrate of a first conductivity type including a field region and an active region; a gate insulating film on a portion of the active region, the gate insulating film having two edge parts and a mid-part, the two edge p...
06/20/2000
6054743High voltage MOS transistor
A high voltage MOS (Metal Oxide Semiconductor) transistor includes a semiconductor substrate of first conductivity type (P type). A pair of first diffused layers of second conductivity type (N type) are formed on the substrate. A pair of second diffused l...
04/25/2000
6037229High-voltage device substrate structure and method of fabrication
A method for fabricating a high-voltage device substrate comprising the steps of forming a pad oxide layer and a mask layer over a substrate. Then, the pad oxide layer and the mask layer are patterned to define a region for a first ion implantation. Next,...
03/14/2000
5998832Metal oxide semiconductor device for an electro-static discharge circuit
An improved metal oxide field effect transistor (MOSFET) provides an electro-static protection device with a high resistance to electro-static discharge. The electro-static discharge protection device has pre-gate heavily doped regions adjacent to the sou...
12/07/1999
5973379Ferroelectric semiconductor device
A ferroelectric semiconductor device (10) and a method of manufacturing the ferroelectric semiconductor device (10). The ferroelectric semiconductor device (10) has a layer (15) of ferroelectric material disposed on a semiconductor substrate (11) and a ga...
10/26/1999
5929484High voltage semiconductor device
The present invention discloses a high voltage semiconductor device with high breakdown voltage without increment in area occupied an increase in the size of junction region. Each junction region includes: (i) a first impurity region of a first conductivi...
07/27/1999
5897358Semiconductor device having fluorine-enhanced transistor with elevated active regions and fabrication thereof
A semiconductor device having a fluorine-enhanced transistor with elevated active regions and process for fabricating such a device is provided. A semiconductor device, consistent with one embodiment of the invention, includes a substrate and at least one...
04/27/1999
5872038Semiconductor device having an elevated active region formed in an oxide trench and method of manufacture thereof
A process for forming a semiconductor device having an elevated active region is disclosed. The process includes forming a plurality of gate electrodes on the semiconductor substrate and disposing a thick oxide layer over the gate electrodes. A trench is ...
02/16/1999
5851844Ferroelectric semiconductor device and method of manufacture
A ferroelectric semiconductor device (10) and a method of manufacturing the ferroelectric semiconductor device (10). The ferroelectric semiconductor device (10) has a layer (15) of ferroelectric material disposed on a semiconductor substrate (11) and a ga...
12/22/1998
5846862Semiconductor device having a vertical active region and method of manufacture thereof
A semiconductor device and method of manufacture thereof is provided. According to one embodiment, a semiconductor device is formed by forming a trench within a substrate. An oxide layer is formed within the trench and portions of the oxide layer are remo...
12/08/1998
5811340Metal oxide semiconductor field effect transistor and method of manufacturing the same
A MOSFET includes a semiconductor substrate of a first conductivity type including a field region and an active region; a gate insulating film on a portion of the active region, the gate insulating film having two edge parts and a mid-part, the two edge p...
09/22/1998
5804485High density metal gate MOS fabrication process
A high density metal gate metal-oxide semiconductor fabrication process to selectively and locally oxidize specific regions of a wafer without increasing the numbers of mask, so as to separately control the thickness of the oxide at the gate, P+ zones and...
09/08/1998
5770880P-collector H.V. PMOS switch VT adjusted source/drain
A PMOS device has an n-type body 12 and a triple source drain diffusion. A first drain region 14 is heavily p-doped to provide ohmic contact to the drain. A lightly doped drain region 16 extends to and beneath a portion of the gate 20. A third shallow mod...
06/23/1998
5734185MOS transistor and fabrication process therefor
An MOS transistor comprises a semiconductor substrate having a field region; a gate electrode formed on the semiconductor substrate through the intermediatry of a gate insulating film; and source/drain regions formed in the semiconductor substrate; wherei...
03/31/1998
5646054Method for manufacturing MOS transistor of high breakdown voltage
A high threshold voltage MOS transistor is described having a triple diffused drain structure in which low, medium and high concentration impurity layers overlap each other. The MOS transistor is manufactured according to a method including the steps of: ...
07/08/1997
5571737Metal oxide semiconductor device integral with an electro-static discharge circuit
An improved structure and process of fabricating a metal oxide field effect (MOSFET) which has a high resistance to electro-static discharge. The device has pre-gate heavily doped source and drain regions which overlap the gate electrode and the source an...
11/05/1996
5547903Method of elimination of junction punchthrough leakage via buried sidewall isolation
A method for forming MOSFET devices, with reduced exposure to source and drain leakage currents due to punchthrough phenomena, has been developed. The structure is fabricated using a buried insulator sidewall to isolate the source and drain regions. This ...
08/20/1996
5547895Method of fabricating a metal gate MOS transistor with self-aligned first conductivity type source and drain regions and second conductivity type contact regions
A method for manufacturing a CMOS transistor of integrated circuits having metal gates and self-aligned source and drain electrodes. The channel length can be precisely defined, and the leakage current can be reduced. Furthermore, the threshold voltage of...
08/20/1996
5523246Method of fabricating a high-voltage metal-gate CMOS device
A method of fabricating a high-voltage metal-gate CMOS device is disclosed. First, a semiconductor substrate of a first conductivity type having a well region of a second conductivity type is provided. Next, a barrier layer is formed and patterned to form...
06/04/1996
5376568Method of fabricating high voltage complementary metal oxide semiconductor transistors
A method for manufacturing CMOS transistors for integrated circuits which have metal gates and heavily doped source and drain electrode regions, thereby improving their resisting capability to a high voltage while reducing cycle time for manufacture. As a...
12/27/1994
5312766Method of providing lower contact resistance in MOS transistors
Germanium is used to significantly enhance the drift mobilities of minority carriers in the channels of N-channel and P-channel metal-oxide-semiconductor (MOS) transistors with silicon substrates. Germanium processing is also used to enhance the source/dr...
05/17/1994
5296386Method of providing lower contact resistance in MOS transistor structures
Germanium is used to significantly enhance the drift mobilities of minority carriers in the channels of N-channel and P-channel metal-oxide-semiconductor (MOS) transistors with silicon substrates. Germanium processing is also used to enhance the source/dr...
03/22/1994
5296387Method of providing lower contact resistance in MOS transistor structures
Germanium is used to significantly enhance the drift mobilities of minority carriers in the channels of N-channel and P-channel metal-oxide-semiconductor (MOS) transistors with silicon substrates. Germanium processing is also used to enhance the source/dr...
03/22/1994
5235202Radiation hardened field dielectric utilizing BPSG
A radiation hardened MOSFET is fabricated by forming a dielectric layer of boro-phosphosilicate glass (BPSG) over the field oxide layer of the MOSFET. The BPSG covers only a small part of the gate electrode of the MOSFET. The gate electrode of the MOSFET ...
08/10/1993
5047820Semi self-aligned high voltage P channel FET
An improved process to fabricate a high breakdown voltage MOSFET is disclosed. The process self-aligns the channel to the source and drain and semi self-aligns the gate electrode to the channel. The MOSFET also includes a boron field implant to extend the...
09/10/1991
5024962Method for preventing auto-doping in the fabrication of metal gate CMOS devices
A method of fabricating metal gate field effect transistors utilizing a rapid thermal oxidation process to form a sealing oxide which prevents auto-doping during the formation of the gate oxide....
06/18/1991
4520553Process for manufacturing an integrated insulated-gate field-effect transistor
A process is described for manufacturing integrated insulated-gate field-effect transistors comprising contacts on both the source region and the drain region which are self-aligned with respect to the gate electrode. In this process the gate area and the...
06/04/1985
4343078IGFET Forming method
An insulated-gate field effect transistor for high speed operation is disclosed in which the internal resistance of the gate electrode is reduced and the stray gate capacitance is maintained at a low value. In one embodiment, the reduction of the internal...
08/10/1982
4343079Self-registering method of manufacturing an insulated gate field-effect transistor
A method of manufacturing an IGFET device in an entirely self-registering manner, in which on the semi-conductor body a narrow silicon nitride strip is formed which covers only the active region of the body and the width of which is substantially equal to...
08/10/1982
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