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Class 257/E21.104 - Deposition on an insulating or a metallic substrate (EPO)


Subclass of Class 257 - Active solid-state devices (e.g., transistors, solid-state diodes)
Definition: This subclass is indented under subclass E21.102. This subclass
No. of patents: 27
Last issue date: 10/28/2008


NumberTitleIssue Date
7442587Processes for forming backplanes for electro-optic displays
A non-linear element is formed on a flexible substrate by securing the substrate to a rigid carrier, forming the non-linear element, and then separating the flexible substrate from the carrier. The process allows flexible substrates to be processed in a conventional...
10/28/2008
7439136Method of forming a layer comprising epitaxial silicon
The invention includes methods of forming epitaxial silicon-comprising material and methods of forming vertical transistors. In one implementation, a method of forming epitaxial silicon-comprising material includes providing a substrate comprising monocrystalline ma...
10/21/2008
7435633Electroluminescence device, manufacturing method thereof, and electronic apparatus
An organic electroluminescence device including: a substrate having conductivity on at least one side; a first insulation film, formed on one side of the substrate, while having an aperture which partially exposes the same side of the substrate; a semiconductor film...
10/14/2008
7393723Method of manufacturing a semiconductor device
A method of manufacturing a semiconductor device that forms laminate layers includes the steps of reducing contamination containing the single bond of carbon on at least one part of a surface on which the laminate films are formed by activated hydrogen before the la...
07/01/2008
7390678Method for fabricating semiconductor device
A PLZT film (30) is formed as the material film of a capacitor dielectric film and a top electrode film (31) is formed on the PLZT film (30). The top electrode film (31) comprises two IrOx films having different composition. Su...
06/24/2008
7384800Method of fabricating metal-insulator-metal (MIM) device with stable data retention
In the method of fabricating a metal-insulator-metal (MIM) device, a first electrode of α-Ta is provided. The Ta of the first electrode is oxidized to form a Ta2O5 layer on the first electrode. A second electrode of β-Ta is provided on the Ta...
06/10/2008
7382021Insulated gate field-effect transistor having III-VI source/drain layer(s)
A transistor includes one or more channel taps containing a stack consisting at least in part of a semiconductor an interfacial III-VI layered compound and a conductor. The III-VI compound consists primarily of atoms from Groups IIIA-B and from Group VIA of the Peri...
06/03/2008
7368336Organic insulator, organic thin film transistor array panel including organic insulator, and manufacturing method therefor
An insulating film according to an embodiment of the present invention has Chemical Formula 1 wherein the Rs are equal to or different from each other, m is an integer, the Rs have Chemical Formula ...
05/06/2008
7329924Integrated circuits and methods of forming a field effect transistor
Integrated circuits and methods of forming field effect transistors are disclosed. In one aspect, an integrated circuit includes a semiconductor substrate comprising bulk semiconductive material. Electrically insulative material is received within the bulk semicondu...
02/12/2008
7326981Methods and apparatuses for producing a polymer memory device
Embodiments of the invention provide a method for producing ferroelectric polymer devices (FPMDs) employing conditions that avoid or reduce detrimental impact on the ferroelectric polymer film. For one embodiment, a damascene patterning metallization technique is us...
02/05/2008
7297577SOI SRAM device structure with increased W and full depletion
An SOI device, and a method for producing the SOI device, for use in an SRAM memory having enhanced stability. The SRAM is formed with a wider W and a fully-depleted FET. The wider FET is extended by an expitaxial silicon sidewall, and the performance of the FET is ...
11/20/2007
7276416Method of forming a vertical transistor
The invention includes methods of forming epitaxial silicon-comprising material and methods of forming vertical transistors. In one implementation, a method of forming epitaxial silicon-comprising material includes providing a substrate comprising monocrystalline ma...
10/02/2007
7229901Fabrication of strained heterojunction structures
Growth of multilayer films is carried out in a manner which allows close control of the strain in the grown layers and complete release of the grown films to allow mounting of the released multilayer structures on selected substrates. A layer of material, such as si...
06/12/2007
6645835Semiconductor film forming method and manufacturing method for semiconductor devices thereof
A method for forming a semiconductor film capable allowing easy cleaning of the processing equipment and capable of forming an epitaxial film at low temperatures as well as a manufacturing method for semiconductor devices utilizing this forming method is ...
11/11/2003
6399429Method of forming monocrystalline silicon layer, method for manufacturing semiconductor device, and semiconductor device
Single-crystal silicon is deposited on an insulating substrate (1) with a crystalline sapphire layer (50) formed thereon as a seed, to form a silicon epitaxial layer (7). P-type impurity ions are implanted into a single-crystal silicon layer, and then N-t...
06/04/2002
6372558Electrooptic device, driving substrate for electrooptic device, and method of manufacturing the device and substrate
The present invention provides an active matrix substrate having a built-in high-performance driver, in which a single crystal silicon thin film having high electron/hole mobility is uniformly deposited at a relatively low temperature, and an electrooptic...
04/16/2002
5951757Method for making silicon germanium alloy and electric device structures
A method for fabricating silicon-germanium alloy on a sapphire substrate of the present invention comprises the steps of passivating a surface of a sapphire substrate, maintaining a deposition temperature of about 900 degrees C., exposing the passivated s...
09/14/1999
4479297Method of fabricating three-dimensional semiconductor devices utilizing CeO2 and ion-implantation.
A method for fabricating a three-dimensional multi-layer integrated circuit of single crystalline CeO2 and Si is proposed. This method is characterized in that a single crystalline CeO2 insulation layer, or the like, is formed on a single...
10/30/1984
4177084Method for producing a low defect layer of silicon-on-sapphire wafer
A method is provided for producing a low-defect layer of silicon on a sapphire substrate. A silicon-on-sapphire (SOS) wafer is formed by initially epitaxially depositing silicon on the sapphire substrate to form a monocrystalline layer which is substantia...
12/04/1979
4169746Method for making silicon on sapphire transistor utilizing predeposition of leads
The integrated circuit is manufactured upside down relative to conventional silicon-on-sapphire (SOS) processing techniques for manufacturing field effect transistors. First a conductive pattern, typically of a refractory metal, is deposited and defined o...
10/02/1979
4147584Method for providing low cost wafers for use as substrates for integrated circuits
The method of manufacture of the present invention provides a wafer that is better than a bulk monocrystalline silicon wafer and equivalent to silicon on sapphire (SOS) wafers for use as substrates for integrated circuits. The method comprises taking an i...
04/03/1979
4131496Method of making silicon on sapphire field effect transistors with specifically aligned gates
The method comprises forming a blind hole in a sapphire substrate using a sulfur hexafluoride gas etchant and an etch mask comprising a single layer of silicon nitride. The blind holes are filled with epitaxially grown silicon and field effect transistors...
12/26/1978
4119992Integrated circuit structure and method for making same
The integrated circuit is manufactured upside down relative to conventional silicon-on-sapphire (SOS) processing techniques for manufacturing field effect transistors. First a conductive pattern, typically of a refractory metal, is deposited and defined o...
10/10/1978
4069094Method of manufacturing apertured aluminum oxide substrates
A method for making an apertured aluminum oxide substrate by selectively masking a sapphire wafer, depositing aluminum oxide adjacent the wafer and the mask, and removing the aluminum oxide deposited adjacent the mask and the mask, whereby an aperture is ...
01/17/1978
4053326Photovoltaic cell
A photovoltaic cell includes a metal support which is coated with a metal having a low melting point on which a crystalline layer of a semiconductive material is deposited, the material being doped to form a p-n semiconductor. In preferred embodiments the...
10/11/1977
4052251Method of etching sapphire utilizing sulfur hexafluoride
A process for forming a blind hole having an isosceles trapezoidal cross-section in a sapphire substrate using a sulfur hexafluoride gas etchant and an etch mask of silicon nitride on top of silicon dioxide. A composite of sapphire, silicon dioxide and si...
10/04/1977
3953876Silicon solar cell array
Silicon semiconductor device array, e.g. solar cell device or array of devices; formed from bulk silicon deposited in the form of columnar crystallites bounded by substantially vertical grain boundaries. Junctions are formed across crystallites and along ...
04/27/1976
 
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