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Class 257/E21.09 - Deposition of semiconductor material on substrate, e.g., epitaxial growth, solid phase epitaxy (EPO)


Subclass of Class 257 - Active solid-state devices (e.g., transistors, solid-state diodes)
Definition: This subclass is indented under subclass E21.085. This subclass
No. of patents: 139
Last issue date: 10/21/2008


1        
NumberTitleIssue Date
7439165Method of fabricating tensile strained layers and compressive strain layers for a CMOS device
A process for forming both tensile and compressive strained silicon layers to accommodate channel regions of MOSFET or CMOS devices has been developed. After formation of shallow trench isolation structures as well as application of high temperature oxidation and ac...
10/21/2008
7435666Epitaxial growth method
Provided is an epitaxial growth method for forming a high-quality crystalline growth semiconductor wafer. The method includes forming a buffer layer on a single crystalline wafer using a single crystalline material; forming a mask layer on the buffer layer; forming ...
10/14/2008
7410913Method of manufacturing silicon rich oxide (SRO) and semiconductor device employing SRO
Provided are methods for manufacturing silicon rich oxide (SRO) layers useful in the fabrication of semiconductor devices, for example, non-volatile memory devices, and methods for fabricating semiconductor devices incorporating such SRO layers. The methods include ...
08/12/2008
7410888Method for manufacturing strained silicon
In accordance with a particular embodiment of the present invention, a method for manufacturing strained silicon is provided. In one embodiment, the method for manufacturing strained silicon includes inducing a curvature in a silicon wafer, depositing an epitaxial l...
08/12/2008
7410864Trench and a trench capacitor and method for forming the same
A method for fabricating a trench includes providing a semiconductor substrate made of a semiconductor material. A trench is etched into a surface of the semiconductor substrate such that a trench wall is produced. At least one layer is provided on the trench wall. ...
08/12/2008
7399716Precursor for hafnium oxide layer and method for forming hafnium oxide film using the precursor
A hafnium oxide precursor and a method for forming a hafnium oxide layer using the precursor are provided. The hafnium oxide precursor contains a nitrogen compound bound to HfCl4. ...
07/15/2008
7371665Method for fabricating shallow trench isolation layer of semiconductor device
A method for fabricating an STI layer of a semiconductor device is disclosed, to improve the integration of the semiconductor device in a method of increasing a moat area for a gate line by minimizing an isolation area between moat areas, which includes the steps of...
05/13/2008
7364982Process for preparing a bonding type semiconductor substrate
The process comprises a step of growing epitaxially mixed crystals of a compound semiconductor represented by the composition formula Inx(Ga1-yAly)1-xP on a GaAs substrate 12 to form an epi-wafer having an n-type cl...
04/29/2008
7361556Method of fabricating semiconductor side wall fin
A double gated silicon-on-insulator (SOI) MOSFET is fabricated by forming epitaxially grown channels, followed by a damascene gate. The double gated MOSFET features narrow channels, which increases current drive per layout width and provides low out conductance....
04/22/2008
7358112Method of growing a semiconductor layer
A method of growing a p-type nitride semiconductor material having magnesium as a p-type dopant by molecular beam epitaxy (MBE), comprises supplying ammonia gas, gallium and magnesium to an MBE growth chamber containing a substrate so as to grow a p-type nitride sem...
04/15/2008
7341927Wafer bonded epitaxial templates for silicon heterostructures
A heterostructure device layer is epitaxially grown on a virtual substrate, such as an InP/InGaAs/InP double heterostructure. A device substrate and a handle substrate form the virtual substrate. The device substrate is bonded to the handle substrate and is composed...
03/11/2008
7338886Implantation-less approach to fabricating strained semiconductor on isolation wafers
A method of fabricating a semiconductor substrate includes forming a buffer layer on the substrate. A Ge containing layer, such as a SiGe is formed over the buffer layer. The buffer layer includes defects at the interface of the substrate and buffer layer. The subst...
03/04/2008
7329596Method for tuning epitaxial growth by interfacial doping and structure including same
A method that allows for uniform, simultaneous epitaxial growth of a semiconductor material on dissimilarly doped semiconductor surfaces (n-type and p-type) that does not impart substrate thinning via a novel surface preparation scheme, as well as a structure that r...
02/12/2008
7312128Selective epitaxy process with alternating gas supply
In one example, a method of epitaxially forming a silicon-containing material on a substrate surface is presented which includes positioning a substrate into a process chamber. The substrate has a monocrystalline surface and at least a second surface, such as an amo...
12/25/2007
7294562Semiconductor substrate, method of manufacturing the same, semiconductor device, and method of manufacturing the same
A semiconductor substrate is disclosed which comprises a first single crystal silicon layer, an insulator formed to partially cover one main surface of the first single crystal silicon layer, a second single crystal silicon layer formed to cover a region of the firs...
11/13/2007
7288423In-situ mask removal in selective area epitaxy using metal organic chemical vapor deposition
A method for removing a mask in a selective area epitaxy process is provided. The method includes forming a first layer on a substrate and oxidizing the first layer. A patterned photoresist can be formed on the oxidized first layer. A portion of the oxidized first l...
10/30/2007
7265417Method of fabricating semiconductor side wall fin
A double gated silicon-on-insulator (SOI) MOSFET is fabricated by forming epitaxially grown channels, followed by a damascene gate. The double gated MOSFET features narrow channels, which increases current drive per layout width and provides low out conductance....
09/04/2007
7244659Integrated circuits and methods of forming a field effect transistor
Integrated circuits and methods of forming field effect transistors are disclosed. In one aspect, an integrated circuit includes a semiconductor substrate comprising bulk semiconductive material. Electrically insulative material is received within the bulk semicondu...
07/17/2007
7241700Methods for post offset spacer clean for improved selective epitaxy silicon growth
A gate structure is formed overlying a substrate. A source/drain region of the substrate is exposed to a soluction comprising ammonium hydroxide, hydrogen peroxide, and deionized water to etch an upper-most semiconductor porton of the source/drain region. ...
07/10/2007
7202142Method for producing low defect density strained -Si channel MOSFETS
A silicon strained channel MOSFET device and method for forming the same the method providing improved wafer throughput and low defect density including the steps of providing a silicon substrate; epitaxially growing a first silicon layer using at least one depositi...
04/10/2007
7157297Method for fabrication of semiconductor device
On a processed substrate having an engraved region as a depressed portion formed thereon, a nitride semiconductor thin film is laid. The sectional area occupied by the nitride semiconductor thin film filling the depressed portion is 0.8 times the sectional area of t...
01/02/2007
6667492Quantum ridges and tips
The present invention provides a quantum structure product comprising a substrate having quantum ridges and quantum tips on at least one surface thereof. In some embodiments of the invention quantum ridges may support quantum wires and the quantum tips ma...
12/23/2003
6620665Method for fabricating semiconductor device
A process control is performed for fabricating both a wafer for a device including a Ge-containing semiconductor film and a wafer for a device, for example, including no Ge-containing semiconductor film on a common fabrication line. When the wafer includi...
09/16/2003
6596555Forming of quantum dots
A method of forming, on a single-crystal semiconductor substrate of a first material, quantum dots of a second material, including growing by vapor phase epitaxy the second material on the first material in optimal conditions adapted to ensuring a growth ...
07/22/2003
6555221Method for forming an ultra microparticle-structure
A method for forming an ultra microparticle-structure composed of ultra microparticles including the steps of: forming on a substrate higher wettability parts and lower wettability parts to a material to be deposited, depositing on the substrate the material t...
04/29/2003
6459712Semiconductor devices
An insulating member (4) of an amorphous structure partially opened to expose a substrate (1; 1, 2, 3) is formed on the substrate. At least a compound semiconductor (5, 51, 52) containing at least nitrogen as a constituent element is deposited on the insu...
10/01/2002
6424004Semiconductor device having quantum dots
A method for forming quantum dots using agglomeration of a conductive layer and a semiconductor device resulting therefrom are disclosed. The method includes the steps of forming a first insulating layer on a substrate, forming a conductive layer on the f...
07/23/2002
6403976Semiconductor crystal, fabrication method thereof, and semiconductor device
A Si1-x Gex /Si1-y Cy short-period superlattice which functions as a single SiGeC layer is formed by alternately growing Si1-x Gex layers (0
06/11/2002
6377596Semiconductor materials, methods for fabricating semiconductor materials, and semiconductor devices
An insulating member (4) of an amorphous structure partially opened to expose a substrate (1; 1, 2, 3) is formed on the substrate. At least a compound semiconductor (5, 51, 52) containing at least nitrogen as a constituent element is deposited on the insu...
04/23/2002
6358316Method for producing semiconductor device, method for producing semiconductor laser device, and method for producing quantum wire structure
In a method for producing a semiconductor device, a compound semiconductor cap layer including no aluminum is grown on a compound semiconductor layer including aluminum, a mask pattern insulating film is formed on a part of the compound semiconductor cap ...
03/19/2002
6344403Memory device and method for manufacture
A semiconductor memory device with a floating gate that includes a plurality of nanoclusters (21) and techniques useful in the manufacturing of such a device are presented. The device is formed by first providing a semiconductor substrate (12) upon which ...
02/05/2002
6274518Method for producing a group III nitride compound semiconductor substrate
The present invention provides a method for producing a group III nitride compound semiconductor substrate including: (a) forming a first semiconductor film over a substrate, the first semiconductor film made of a first group III nitride compound semicond...
08/14/2001
6229197Epitaxial overgrowth method and devices
A vertical field effect transistor (700) and fabrication method with buried gates (704) having gate sidewall crystal orientation the same as the substrate surface and a low index substrate crystal orientation without tilt to a higher index direction. The ...
05/08/2001
6194237Method for forming quantum dot in semiconductor device and a semiconductor device resulting therefrom
Method for forming quantum dots using agglomeration of a conductive layer and a semiconductor device resulting therefrom are disclosed. The method includes the steps of forming a first insulating layer on a substrate, forming a conductive layer on the fir...
02/27/2001
6130142Quantum wires formed on a substrate, manufacturing method thereof, and device having quantum wires on a substrate
While a silicon substrate is heated, gold is evaporated thereon at a thickness of 0.6 nm, whereby melted alloy droplets are formed on the substrate surface. Then, the silicon substrate is heated to 450°-650° C. in a silane gas atmosphere of less than 0....
10/10/2000
6130143Quantum wires formed on a substrate, manufacturing method thereof, and device having quantum wires on a substrate
While a silicon substrate is heated, gold is evaporated thereon at a thickness of 0.6 nm, whereby melted alloy droplets are formed on the substrate surface. Then, the silicon substrate is heated to 450°-650° C. in a silane gas atmosphere of less than 0....
10/10/2000
6124209Method for treating a surface of a silicon single crystal and a method for manufacturing a silicon single crystal thin film
The surface of a silicon single crystal substrate 2 is exposed to a mixed gas of hydrogen fluoride gas and hydrogen gas at 0° C.-100° C. to remove a natural oxide film 3 formed on the surface of silicon single crystal substrate 2. The method, as a pre-t...
09/26/2000
6103600Method for forming ultrafine particles and/or ultrafine wire, and semiconductor device using ultrafine particles and/or ultrafine wire formed by the forming method
A quantum dot and quantum fine wire forming method is provided which can allow control of the position for crystalline particle growth and enables formation of particles with high uniformity in size and density and with high reproducibility. After an Si s...
08/15/2000
6097046Vertical field effect transistor and diode
A vertical field effect transistor (1400) and diode (1450) formed on a single III-V substrate. The diode cathode and the transistor drain or collector may be formed in a common layer (1408)....
08/01/2000
6074936Method of fabricating a quantum device
A method of fabricating quantum wire structures and devices, and quantum dot structures and devices comprise steps of: depositing an insulating layer on a semiconductor substrate, forming a line patterns and a square patterns in an insulating layer, formi...
06/13/2000
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