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Class 257/E21.033 - Comprising inorganic layer (EPO)


Subclass of Class 257 - Active solid-state devices (e.g., transistors, solid-state diodes)
Definition: This subclass is indented under subclass E21.023. This subclass
No. of patents: 476
Last issue date: 10/07/2008


1                      
NumberTitleIssue Date
7432212Methods of processing a semiconductor substrate
The invention includes methods of processing semiconductor substrates. In one implementation, a semiconductor substrate is provided which has an outer surface. Such surface has a peripheral region received about a peripheral edge of the semiconductor substrate. A la...
10/07/2008
7416995Method for fabricating controlled stress silicon nitride films
A method for fabricating a multiple layer silicon nitride film on a semiconductor substrate is provided herein. In one embodiment, a method for fabricating a multiple layer silicon nitride film on a semiconductor substrate includes providing a substrate over which t...
08/26/2008
7393707Method for manufacturing an electro-optical device
An object of the present invention is to provide an EL display device having high operation performance and reliability. A third passivation film 45 is disposed under the EL element 203 comprising a pixel electrode (anode) 46, an EL layer...
07/01/2008
7329613Structure and method for forming semiconductor wiring levels using atomic layer deposition
A method for forming a conductive wire structure for a semiconductor device includes defining a mandrel on a substrate, forming a conductive wire material on the mandrel by atomic layer deposition, and forming a liner material around the conductive wire material by ...
02/12/2008
7288420Method for manufacturing an electro-optical device
An object of the present invention is to provide an EL display device having high operation performance and reliability. A third passivation film 45 is disposed under the EL element 203 comprising a pixel electrode (anode) 46, an EL layer...
10/30/2007
7241688Aperture masks for circuit fabrication
Aperture masks and deposition techniques for using aperture masks are described. In addition, techniques for creating aperture masks and other techniques for using the aperture masks are described. The various techniques can be particularly useful in creating circui...
07/10/2007
7192789Method for monitoring an ion implanter
A method for monitoring an ion implanter is disclosed. In one embodiment, the method comprises providing a wafer, forming a barrier layer on the surface of the wafer wherein the barrier layer has a substantial blocking effect on ion implantation, performing an ion i...
03/20/2007
7176053Laser ablation method for fabricating high performance organic devices
A laser ablation method is utilized to define the channel length of an organic transistor. A substrate is coated with a deposition of a metal or conductive polymer deposition, applied in a thin layer in order to enhance the resolution that can be attained by laser a...
02/13/2007
7172965Method for manufacturing semiconductor device
After forming a stopper film on a semiconductor substrate having a copper wiring layer therein, an interlayer insulating film made of a low dielectric constant material is formed on the stopper film. Then, after forming a capping film on the interlayer insulating fi...
02/06/2007
7138341Process for making a memory structure
An exemplary method for making a memory structure comprises forming a first hard mask layer, forming at least one mask layer above the first hard mask layer, patterning the at least one mask layer, etching the at least one mask layer to form an opening having a firs...
11/21/2006
7115524Methods of processing a semiconductor substrate
The invention includes methods of processing semiconductor substrates. In one implementation, a semiconductor substrate is provided which has an outer surface. Such surface has a peripheral region received about a peripheral edge of the semiconductor substrate. A la...
10/03/2006
6225217Method of manufacturing semiconductor device having multilayer wiring
A first insulating film with a dielectric constant lower than that of a silicon oxide film is formed on a semiconductor substrate. Next, a metal film or a second insulating film, which has degrees of moisture absorption and deformation in an oxygen plasma...
05/01/2001
6140225Method of manufacturing semiconductor device having multilayer wiring
A first insulating film with a dielectric constant lower than that of a silicon oxide film is formed on a semiconductor substrate. Next, a second insulating film, which has degrees of moisture absorption and deformation in an oxygen plasma process and exp...
10/31/2000
6025115Processing method for etching a substrate
A processing method for etching a substrate is described. This method includes subjecting a surface of a substrate to be processed to selective irradiation with a light in a gas atmosphere to form a surface-modified layer. The substrate surface with the s...
02/15/2000
5981001Processing method for selectively irradiating a surface in presence of a reactive gas to cause etching
A processing method comprises: a first step of depositing on a substrate which is a specimen a film of any one of a semiconductor, a metal and an insulator; a second step of subjecting the surface of the film deposited in the first step, to irradiation with a ...
11/09/1999
5962194Processing method and apparatus
A processing method comprises: a first step of depositing on a substrate which is a specimen a film of any one of a semiconductor, a metal and an insulator; a second step of subjecting the surface of the film deposited in the first step, to irradiation with a ...
10/05/1999
5863706Processing method for patterning a film
A processing method is described which has a first step of depositing on a substrate a specimen film which may be any one of a semiconductor, a metal and a insulator. In a second step, the surface of the specimen film deposited in the first step, is irrad...
01/26/1999
5847465Contacts for semiconductor devices
A method for fabrication of metal to semiconductor contacts results in sloped sidewalls in contact regions. An oxide layer is deposited and etched back to form sidewall spacers. A glass layer is then deposited and heated to reflow. After reflow, an etch b...
12/08/1998
5837560Method of masking substrates leaving exposed facets
A method of masking a substrate to leave an exposed facet for processing during fabrication of a semiconductor devices including providing a substrate formed of a semiconductor material and having a structure projecting therefrom, the structure including ...
11/17/1998
5824455Processing method and apparatus
A processing method comprises: a first step of depositing on a substrate which is a specimen a film of any one of a semiconductor, a metal and an insulator; a second step of subjecting the surface of the film deposited in the first step, to irradiation with a ...
10/20/1998
5714306Processing method and apparatus
A processing method comprises: a first step of depositing on a substrate which is a specimen a film of any one of a semiconductor, a metal and an insulator; a second step of subjecting the surface of the film deposited in the first step, to irradiation with a ...
02/03/1998
5528058IGBT device with platinum lifetime control and reduced gaw
For IGBT, MCT or like devices, the substrate is formed with P+, N+ and N- layers and PN diffusions to define body and source regions in the N-layer and a MOS-gated channel at the upper surface. The N-layer is sized and doped (~1014 /cm3
06/18/1996
5409566Slope etching process
A slope etching process including dipping a pattern forming layer into a predetermined dipping solution containing an etching solution or wet etching and deionized water, so as to utilize a wet etching method only for isotropic etching. There is also prov...
04/25/1995
5334550Method of producing a self-aligned window at recessed intersection of insulating regions
An integrated circuit structure and process relating to a self-aligned window at the recessed junction of two insulating regions formed on the surface of a semiconductor body. The window may include a trench forming an isolation region between doped semic...
08/02/1994
5283202IGBT device with platinum lifetime control having gradient or profile tailored platinum diffusion regions
For IGBT, MCT or like devices, the substrate is formed with P+, N+ and N- layers and PN diffusions to define body and source regions in the N-layer and a MOS-gated channel at the upper surface. The N-layer is sized and doped (~1014 /cm3
02/01/1994
5283201High density power device fabrication process
A recessed gate power MOSFET is formed on a substrate (20) including a P-body layer (26), N-drain layer (24) and optional P+ layer (22) for IGBT. A trenching protective layer (30) formed on the substrate upper surface (28) is patterned to define exposed a...
02/01/1994
5262336IGBT process to produce platinum lifetime control
For IGBT, MCT or like devices, the substrate is formed with P+, N+ and N- layers and PN diffusions to define body and source regions in the N-layer and a MOS-gated channel at the upper surface. The N-layer is sized and doped (~1014 /cm3
11/16/1993
5256583Mask surrogate semiconductor process with polysilicon gate protection
A dopant-opaque layer of polysilicon is deposited on gate oxide on the upper substrate surface to serve as a pattern definer during fabrication of the device. It provides control over successive P and N doping steps used to create the necessary operative ...
10/26/1993
5246879Method of forming nanometer-scale trenches and holes
Nanometer thick metallic layers are fabricated on trenches or holes (espelly vias) within a substrate by depositing, by thermal decomposition of a volatile metal-containing precursor gas in the presence of a carrier gas at low pressure, a metallic layer ...
09/21/1993
5212103Method of making a heterojunction bipolar transistor
A semiconductor device includes an n+ type InGaAs layer at a surface of the device, a refractory metal emitter electrode making ohmic contact to the n+ layer without alloying and an externally accessible base region produced in the n...
05/18/1993
5204276Method of manufacturing semiconductor device
In the method of manufacturing a semiconductor device, a buffer oxide film, an oxidation-resistant film and a first poly-Si film containing a p-type impurity are successively formed to form a laminate structure on the n-type collector region, followed by ...
04/20/1993
5182234Profile tailored trench etch using a SF6 -O2 etching composition wherein both isotropic and anisotropic etching is achieved by varying the amount of oxygen
A dopant-opaque layer of polysilicon is deposited on gate oxide on the upper substrate surface to serve as a pattern definer during fabrication of the device. It provides control over successive P and N doping steps used to create the necessary operative ...
01/26/1993
5127989Method of forming a thin film pattern with a trapezoidal cross section
The present invention provides a method of forming a thin film pattern with a trapezoidal cross section. In this method, a resist pattern with an inverted-trapezoidal cross section is formed on a thin film. Using the resist pattern with the inverted-trape...
07/07/1992
5119150Compound semiconductor structure including layer limiting silicon diffusion
A semiconductor structure includes a compound semiconductor substrate, a compound semiconductor diffusion limiting layer containing aluminum, disposed on the substrate, and having a larger aluminum content than the substrate, a compound semiconductor laye...
06/02/1992
5110760Method of nanometer lithography
Nanometer thick vertical metallic structures are fabricated on a substrate by depositing a metallic layer on a substrate surface on which one or more buttresses are formed, etching the metallic layer to expose the horizontal surfaces of the substrate and ...
05/05/1992
5100813Method of manufacturing bipolar transistor
A method of manufacturing a bipolar transistor. A first mask material film pattern is formed on an internal base region prospective portion on a collector region of a first conductive type, and then a first conductive film is deposited. A recess around th...
03/31/1992
5089434Mask surrogate semiconductor process employing dopant-opaque region
A dopant-opaque layer of polysilicon is deposited on gate oxide on the upper substrate surface to serve as a pattern definer during fabrication of the device. It provides control over successive P and N doping steps used to create the necessary operative ...
02/18/1992
5079177Process for fabricating high performance BiCMOS circuits
A method of making complementary vertical bipolar transistors and complementary field effect transistors on the same substrate is described. The process includes forming buried layers in a semiconductor substrate which are spaced apart in a self-aligned m...
01/07/1992
5073812Heterojunction bipolar transistor
A semiconductor device includes an n+ type InGaAs layer at a surface of the device, a refractory metal emitter electrode making ohmic contact to the n+ layer without alloying, and an externally accessible base region produced in th...
12/17/1991
5070029Semiconductor process using selective deposition
A process for fabricating semiconductor devices is disclosed which utilizes a selective deposition process to reduce the total number of process steps and especially the total number of photolithography steps required. In accordance with one embodiment of...
12/03/1991
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