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| Number | Title | Issue Date |
| 8141847 | Method for controlling or regulating a vacuum valve A method for controlling or regulating a vacuum valve that includes a valve body (1) with a valve opening (2), a closing member (3), an actuator (5) for moving the closing member (3), and a control device (9) by which the ac... | 03/27/2012 |
| 8141846 | Vacuum sealing system and device An apparatus for a gate valve between chambers includes a valve housing defining a flow path. A male valve portion is rotatable on a fixed axis in the housing. The male valve portion including a first male mating surface positioned at a first angle less than perpend... | 03/27/2012 |
| 8132782 | Method for controlling or regulating a vacuum valve A method for controlling or regulating a vacuum valve that includes: a valve body (1) with a valve opening (2); a closing member (3) that can be moved between an open position and a closed position over a closing path (s) for closing the vacuum ... | 03/13/2012 |
| 8083207 | Apparatus for gate valve movement in a minimum-space wet process environment Improved gate movement is provided in a wet process environment in which fluid collecting from a gate occurs adjacent to an access opening provided in a wall of a process chamber while the gate is moved relative to the opening. A minimum space environment is adjacen... | 12/27/2011 |
| 7866629 | Gate valve with streamlined flow A gate valve comprising a valve body including at least a first seat adjacent to a groove. A gate is slideably carried in the valve body for movement between an open position wherein the gate is spaced from the at least one seat and a closed position wherein a porti... | 01/11/2011 |
| 7806383 | Slit valve Embodiments of a valve assembly for a process chamber having improved seal performance are provided herein. In some embodiments, a valve assembly for a process chamber includes a housing having an opening disposed in a wall thereof and through which a substrate may ... | 10/05/2010 |
| 7762527 | Vacuum valve A vacuum valve comprises a valve body with a valve opening, a valve plate which is adjustable from an open position, in which it releases the valve opening, to an intermediate position, in which it covers the valve opening but is lifted from the valve seat, into a c... | 07/27/2010 |
| 7611122 | Closure device for the vacuum-tight closing of an opening in a wall A closure device for closing an opening in a wall in a vacuum-tight manner comprises a closure plate, a carrying unit which carries the closure plate and which has at least one longitudinal piston-cylinder unit, and a base unit which carries the carrying unit and ha... | 11/03/2009 |
| 7441747 | Vacuum gate The improved vacuum gate of the present invention is capable of airtight isolation or interconnecting between two vacuum chambers. The improved vacuum gate is based on mechanical mechanism which simplifies the whole vacuum gate structure and provides more practical ... | 10/28/2008 |
| 7424855 | Slide arrangement A slide arrangement for blocking or closing off a channel disposed between a coal pulverizer and coal dust burners, and conveying a gas having a high proportion of coal dust. The slide arrangement includes a housing disposed in the channel wall and a shroud or steel... | 09/16/2008 |
| 7422653 | Single-sided inflatable vertical slit valve A vacuum chamber having a gate valve including a chamber housing defining an internal vacuum region and first and second openings through the chamber housing and a gate valve secured to the chamber housing. The gate valve includes a sealing door located in the proce... | 09/09/2008 |
| 7413162 | Vacuum valve A vacuum valve comprises a valve housing which has an inlet opening and an outlet opening, a valve disk which is located in the interior space of the valve housing and which is arranged at a carrying arm that is rigidly connected to a shaft which, for purposes of op... | 08/19/2008 |
| 7396001 | Valve for essentially gastight closing a flow path The invention relates to a valve, in particular a shuffle or sliding valve, for essentially gastight closing of a flow path (F). The valve includes a valve housing (1;1a) having a first wall (2) which has a first opening (3) and a first valve se... | 07/08/2008 |
| 7341237 | Valve mechanism for a vacuum valve A valve mechanism having at least one movable valve member for sealing of a valve opening in a housing. Movements of the individual movable valve members are accomplished essentially parallelly to, and perpendicularly to, the seat surface of the valve during the ope... | 03/11/2008 |
| 7341238 | Device for locking out a pressurized storage container and method for the same A device and method for locking out an explosion suppressor that includes a discharge valve with a load end and a discharge end. The load end and the discharge end define a discharge path therethrough. The discharge valve includes a side opening transverse of the di... | 03/11/2008 |
| 7322561 | Vacuum processing apparatus The invention provides a highly reliable plasma processing apparatus having stable sealing performance. The vacuum processing apparatus comprises a vacuum vessel 509 having its inside decompressed, an opening 1201 disposed on a wall of the vacuum vesse... | 01/29/2008 |
| 7309057 | Guillotine valve A guillotine valve, used for example in pipelines includes a single block body incorporating sealing elements, each in the form of an annular hose section, which are made of an elastomeric material and which are hollow along their entire circumference, each providin... | 12/18/2007 |
| 7296783 | Vacuum processing apparatus An inexpensive and reliable vacuum processing apparatus is provided. The vacuum processing apparatus comprises a sealed gate located between two vacuum vessels for allowing them to communicate with each other and a sample subjected to processing to be transferred fr... | 11/20/2007 |
| 7234679 | Gate valve A gate valve has a transfer chamber-side valve element and a process chamber-side valve element connected to a single shaft. A rotary latch pivotably supported on an inner surface of one of the valve element with the rotary latch having a latch surface at a forward ... | 06/26/2007 |
| 7198251 | Opening/closing mechanism for vacuum processing apparatus and vacuum processing apparatus using the same An opening/closing mechanism for a vacuum processing apparatus comprises a link mechanism comprising a supporting member having first and second valve elements for closing first and second opening portions, and a base end side member rotatably attached at a rear edg... | 04/03/2007 |
| 7134642 | Vacuum gate valve The invention provides a vacuum gate valve for closing off an opening. The vacuum gate valve can have a valve plate that can be turned so that the alignment of the valve plate will adapt to a valve seat when the valve plate is pressed against the valve seat. ... | 11/14/2006 |
| 7128305 | Unitary slot valve actuator with dual valves A unitary slot valve actuator is in a vacuum body between process and transport modules. A separate valve is provided on the unitary actuator for each of two valve slots, each slot being closed or opened according to the position of the unitary actuator. The separat... | 10/31/2006 |
| 7100892 | Non-rubbing gate valve for semiconductor fabrication apparatus A gate valve includes a valve main body having a gate valve body attached to a valve rod; a movement operation mechanism that moves the valve rod in a direction along an axis of the rod up to a position where the gate valve body stops up a flow passage port used for... | 09/05/2006 |
| 7073776 | Sluicing valve device A sluicing valve device in which a valve element is arranged in case members attachable to a pipe, and the valve element comprises a valve element core metal fitting, an elastic seal member covering the same, and a lifting and lowering shaft formed into a rod shape ... | 07/11/2006 |
| 7066443 | Gate valve A gate valve has a transfer chamber-side valve element and a process chamber-side valve element connected to a single shaft actuated with a single three-position air cylinder to selectively close a process chamber opening and a transfer chamber opening or fully open... | 06/27/2006 |
| 7059583 | Unitary slot valve actuator with dual valves A unitary slot valve actuator is in a vacuum body between adjacent vacuum chambers, such as process and transport modules. Separate valves are provided on the unitary actuator for each of two valve slots, each slot being closed or opened according to the position of... | 06/13/2006 |
| 7036794 | Method for control of a vacuum valve arranged between two vacuum chambers A method for controlling a vacuum valve arranged between two vacuum chambers comprises a valve body with a valve opening, a closure member which closes the valve opening in a closed state of the vacuum valve and which releases the valve opening in an open state of t... | 05/02/2006 |
| 7018504 | Loadlock with integrated pre-clean chamber A wafer carrier adapted to hold a plurality of wafers and is positioned on an elevator plate in a load lock. The elevator plate is adapted to move between a first position with the carrier in a first chamber of the load lock and a second position with the carrier in... | 03/28/2006 |
| 7007919 | Slit valve method and apparatus An actuator assembly for a slit valve door is configured to maintain a slit valve in a closed condition notwithstanding a high pressure differential between adjacent chambers that the slit valve isolates from each other. The slit valve door actuator assembly include... | 03/07/2006 |
| 7004453 | Pendulum valve with a full range of position control Embodiments of the present invention provide a pendulum valve with a full range of normal position control. The pendulum valve can include a valve housing having a flow channel, and a valve body that is movable within the valve housing between a fully open position ... | 02/28/2006 |
| 6994317 | Regulating vacuum valve A regulating vacuum valve comprises a valve housing with a through-channel, first and second valve plates which lie in adjacent and parallel planes and are mounted so as to be adjustable in their planes and can be moved into the through-channel from different sides ... | 02/07/2006 |
| 6978980 | Slide valve closure for the casting of a metal melt and a refractory plate unit belonging to it In a slide valve closure for the casting of a metal melt a slider plate and a stationary closure part are braced against each other by means of spring units or by other means. There is provided a casing framework attachable to a mould or the like, in which is fixed ... | 12/27/2005 |
| 6966538 | Gate valve A gate valve has a valve rod equipped with a valve plate having a pair of valve plate surfaces, wherein the valve rod is tilted by an actuator to thereby effect highly reliable valve opening/closing operation with a simple construction. In the gate valve, the valve ... | 11/22/2005 |
| 6916009 | Load-lock device for introducing substrates into a vacuum chamber A load-lock device for introducing substrates into a vacuum chamber comprises a load-lock chamber with at least one opening on the input side for introducing the substrates from an atmosphere area located in front of the input-side opening into an interior space loc... | 07/12/2005 |
| 6913243 | Unitary slot valve actuator with dual valves A unitary slot valve actuator is in a vacuum body between adjacent vacuum chambers, such as a process module and a transport module. Separate valves are provided on the unitary actuator for each of two valve body slots, each body slot being closed or opened accordin... | 07/05/2005 |
| 6902145 | Regulating slide valve Regulating slide valve comprising a valve body having a valve opening, and a valve plate which has two side surfaces and which is displaceable along a displacement path between an initial position in which it releases the valve opening and an end position in which i... | 06/07/2005 |
| 6893001 | Gate valve apparatus A gate valve apparatus comprising an elastic seal member inserted into a pipe, a pressure member for elastically deforming the elastic seal member under pressure, a drive shaft for moving the pressure member along the direction of insertion, a movable member for kee... | 05/17/2005 |
| 6863256 | Seal ring for pendulum valve assembly A valve assembly including a housing having a flow channel, a slide plate movable between a closed position and an opened position, and a seal ring surrounding the flow channel and engaging the slide plate in the closed position and disengaging the slide plate in th... | 03/08/2005 |
| 6764265 | Erosion resistant slit valve Embodiments of the present invention provide structures for reducing erosion of a slit valve utilized in the fabrication of semiconductor devices. Specifically, non-metallic slit valve components such as a compressible sealing member and a barrier that assist in sea... | 07/20/2004 |
| 6619618 | Gate valve In a gate valve having a rectangular gate, generation of flection at opposite end portions due to bending moment applied to the gate is suppressed easily. For this purpose, in the gate valve in which a central portion of a longer side of the rectangular g... | 09/16/2003 |
