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| Number | Title | Issue Date |
| 7931251 | Expanding gate valve An expanding gate valve having a valve body defining a valve chamber and flow passages and having spaced sealing surfaces. Gate members are moveable within the valve body between open and closed positions and at the closed position having sealing engagement with the... | 04/26/2011 |
| 7731156 | Vacuum valve A vacuum valve including a valve housing two valve openings, a closure member having two closure plates, a transverse drive unit for adjusting the closure member between an open position and an intermediate position where the closure plates cover the valve openings,... | 06/08/2010 |
| 7341237 | Valve mechanism for a vacuum valve A valve mechanism having at least one movable valve member for sealing of a valve opening in a housing. Movements of the individual movable valve members are accomplished essentially parallelly to, and perpendicularly to, the seat surface of the valve during the ope... | 03/11/2008 |
| 7270311 | Pendulum gate valve A pendulum gate valve includes a housing defining a valve chamber, the valve housing having a vacuum-chamber opening in a front wall and an access opening in a rear wall aligned with the vacuum-chamber opening and defining a through-hole extending from one side of t... | 09/18/2007 |
| 7234679 | Gate valve A gate valve has a transfer chamber-side valve element and a process chamber-side valve element connected to a single shaft. A rotary latch pivotably supported on an inner surface of one of the valve element with the rotary latch having a latch surface at a forward ... | 06/26/2007 |
| 7198251 | Opening/closing mechanism for vacuum processing apparatus and vacuum processing apparatus using the same An opening/closing mechanism for a vacuum processing apparatus comprises a link mechanism comprising a supporting member having first and second valve elements for closing first and second opening portions, and a base end side member rotatably attached at a rear edg... | 04/03/2007 |
| 7153319 | Trocar system having shielded trocar A trocar system is provided which preferably includes a cannula having an elongate cannula body. The cannula body includes medial and distal portions thereof having a first diameter and a proximal portion thereof connected to the medial portion and having a second d... | 12/26/2006 |
| 7128305 | Unitary slot valve actuator with dual valves A unitary slot valve actuator is in a vacuum body between process and transport modules. A separate valve is provided on the unitary actuator for each of two valve slots, each slot being closed or opened according to the position of the unitary actuator. The separat... | 10/31/2006 |
| 7114702 | Slide valve In a slide valve, especially for coating installations, for fluidic separation of two modules or chambers, interconnected through an opening, containing at least one slide plate, integrated in a housing transfixed by said opening, and which may be bidirectionally mo... | 10/03/2006 |
| 7090192 | Vacuum valve A vacuum valve comprising a valve body with a valve opening, a valve plate which is movable between an open position in which it lies next to the valve opening and releases the valve opening and a closed position in which the valve opening is covered and a diaphragm... | 08/15/2006 |
| 7086638 | Methods and apparatus for sealing an opening of a processing chamber In one embodiment, a slit valve is provided that is adapted to seal an opening and that includes a valve housing having a first wall, a first opening formed in the first wall, a second wall and a second opening formed in the second wall. The slit valve also includes... | 08/08/2006 |
| 7066443 | Gate valve A gate valve has a transfer chamber-side valve element and a process chamber-side valve element connected to a single shaft actuated with a single three-position air cylinder to selectively close a process chamber opening and a transfer chamber opening or fully open... | 06/27/2006 |
| 7059583 | Unitary slot valve actuator with dual valves A unitary slot valve actuator is in a vacuum body between adjacent vacuum chambers, such as process and transport modules. Separate valves are provided on the unitary actuator for each of two valve slots, each slot being closed or opened according to the position of... | 06/13/2006 |
| 7004453 | Pendulum valve with a full range of position control Embodiments of the present invention provide a pendulum valve with a full range of normal position control. The pendulum valve can include a valve housing having a flow channel, and a valve body that is movable within the valve housing between a fully open position ... | 02/28/2006 |
| 6997041 | Dual slide gate valve and method for using same A method and device for pressure testing a pipe line is provided wherein a fitting is inserted into the pipeline by inserting male ends of the pipeline into female ends of the fitting to define a flow path through the fitting extending along a longitudinal axis. The... | 02/14/2006 |
| 6959908 | Gate valve flexible wedge A flexible wedge has a pair of pressure retaining plates and a central wedge body therebetween. The pressure retaining plates have inclined seating surfaces on opposed outer faces thereof for mating with corresponding valve seats within the valve body to prevent sub... | 11/01/2005 |
| 6949173 | Continuous coating system A continuous coating system has several treatment chambers (1, 2) that are arranged one after the other in such a way that in each case, a wall (3) of one treatment chamber (1) having a passage (5) contacts a wall (4) in the adjace... | 09/27/2005 |
| 6913243 | Unitary slot valve actuator with dual valves A unitary slot valve actuator is in a vacuum body between adjacent vacuum chambers, such as a process module and a transport module. Separate valves are provided on the unitary actuator for each of two valve body slots, each body slot being closed or opened accordin... | 07/05/2005 |
| 6905107 | Inflatable slit/gate valve A sealable door assembly including a frontplate which faces an opening to be sealed, a backplate operatively coupled to the frontplate, and at least one inflatable member located between the frontplate and the backplate. When inflated, the inflatable member moves th... | 06/14/2005 |
| 6854708 | High-vacuum valve with retractable valve plate to eliminate abrasion A valve achieves a high-vacuum seal and opens and closes with no sliding or otherwise abrading contact between the sealing plate and the valve seat, while maintaining pressure of the plate against the valve seat in the event of a failure in the valve actuation mecha... | 02/15/2005 |
| 6601824 | Single shaft, dual cradle vacuum slot valve A single slot valve shaft is in a vacuum body between adjacent vacuum chambers, such as a process module and a transport module. Separate valves are provided on the single shaft actuator for each of two valve body slots, each body slot being closed or ope... | 08/05/2003 |
| 6564818 | Methods of implementing a single shaft, dual cradle vacuum slot valve A single slot valve shaft is in a vacuum body between adjacent vacuum chambers, such as a process module and a transport module. Separate valves are provided on the single shaft actuator for each of two valve body slots, each body slot being closed or ope... | 05/20/2003 |
| 6517048 | Isolation valves Isolation valves for selectively sealing a first region from a second region. A gate valve can include a housing which defines a channel between the first and second regions. The valve includes a gate, located in the housing, and displaceable between a st... | 02/11/2003 |
| 6390448 | Single shaft dual cradle vacuum slot valve A single slot valve shaft is in a vacuum body between adjacent vacuum chambers, such as a process module and a transport module. Separate valves are provided on the single shaft actuator for each of two valve body slots, each body slot being closed or ope... | 05/21/2002 |
| 6347918 | Inflatable slit/gate valve A sealable door assembly including a frontplate which faces an opening to be sealed, a backplate operatively coupled to the frontplate, and at least one inflatable member located between the frontplate and the backplate. When inflated, the inflatable memb... | 02/19/2002 |
| 6308932 | Isolation valves Isolation valves for selectively sealing a first region from a second region. A gate valve can include a housing which defines a channel between the first and second regions. The valve includes a gate, located in the housing, and displaceable between a st... | 10/30/2001 |
| 6302372 | Gate valve A gate valve (1) is constructed for the simultaneous blocking or clearing of two rectangular passage openings (8,9) of two chamber walls (4,5) that are provided between two vacuum chambers (1,3) and aligned with one another. To this end, it has two valve ... | 10/16/2001 |
| 6164622 | Compact expanding gate valve A compact expanding gate valve having a valve body defining a flowway and having spaced internal seat rings. Guide elements project internally from the valve body. A valve stem driven gate and segment assembly is movable within the valve body between open... | 12/26/2000 |
| 6158718 | Gate valve An improved gate valve having a body with horizontal inlet and outlet fluid flow passageways with first and a second seat surrounding the passageways, a stem supported in a vertical plane by the body, a gate positioned between the seats and being vertical... | 12/12/2000 |
| 6095180 | High-vacuum valve A high-vacuum valve arranged to prevent conduction of heat from a valve element to a low-temperature part through a valve shaft. After the valve element has been moved to a position facing opposite to a valve seat by rectilinear motion of the valve shaft,... | 08/01/2000 |
| 5722636 | Double disk gate assembly for block and bleed type valves A valve gate for sealing the inlet from the outlet of a block and bleed type valve consists of two independent disk-like members which are interconnected by a slide mechanism allowing the disk-like members to be moved simultaneously forwardly in a first c... | 03/03/1998 |
| 5445359 | Gate valve A gate valve [10] is disclosed having a primary [300, 302] and secondary [316] seal on the upstream and downstream sides of the gate [15], wherein the gate [15] forms a seal with the seat [300] which is activated mechanically [320] and is fluid powered, a... | 08/29/1995 |
| 5379983 | Shut-off valves for pipelines A shut-off slide valve for use in pipelines or for closing a container aperture includes a housing, a shut-off member formed of a sealing plate and a counter element spaced from the sealing plate and displaceable in the housing, and an actuation member fo... | 01/10/1995 |
| 5356113 | Isolation valve for single crystal pulling apparatus An isolation valve for a single crystal pulling apparatus providing a good sealing performance is disclosed. The apparatus comprises a casing having two opposite valve seats, a first valve seat having a first opening communicable with the main chamber of ... | 10/18/1994 |
| 5163478 | Spool valve having improved sealing characteristics A valve whose housing has valve spool receiving means arranged in it so that the spool is able to move between two switching positions reciprocatingly and is able to connect valve ducts in the housing with each other for the passage of fluid. For this pur... | 11/17/1992 |
| 5101861 | Slide valve A slide valve comprising: a valve body having two axially aligned openings provided with means for connection in a duct; a drive rod; a valve member; and a backing member; wherein the valve member includes a hollow opening out to both faces of the valve m... | 04/07/1992 |
| 5083748 | Radial-directed fluid-pressure-loaded all-metal-sealed gate valve A large diameter gate valve uses a radially directed fluid pressure loaded all metal seal formed by engaging and disengaging a fixed and a moveable seal element. The fixed element is formed of a circular flange which contains a pressure chamber with a def... | 01/28/1992 |
| 5029809 | Valve-control device and valve having such a control device Control device (1) for a valve (2) with a disc (3), comprising a body (4), two seals (5), two openings (7), spacer balls (8), cavities (9) in the inner faces (10) of the body (4) and of the seals (5), and an elastic return member (11) for the seals (5), t... | 07/09/1991 |
| 4923171 | Gate valve having a secondary seal A gate valve is disclosed having a secondary seal, wherein the gate forms a metal to metal seal with the seat and wherein a resilient seal is moved toward the gate in a closed position to form a secondary fluid-tight seal with the gate. A device for deene... | 05/08/1990 |
| 4903937 | Isolation valve for vacuum and non-vacuum application An isolation valve includes a housing having a port and a seal plate for sealing the port. The seal plate is linked to a shaft which carries a guide frame. To close the port, a drive mechanism drives the shaft linearly in one direction. The seal plate fir... | 02/27/1990 |
