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| Number | Title | Issue Date |
| 7349590 | Polarization modulation interrogation of grating-coupled waveguide sensors An optical interrogation system and a GCW sensor are described herein that are used to determine whether a biological substance (e.g., cell, molecule, protein, drug) is located in a sensing region of the GCW sensor. The optical interrogation system includes a light ... | 03/25/2008 |
| 7315379 | Evaluating method and apparatus thereof A measurement apparatus measures the spatial distributed characteristic of reflection of an object. Evaluate parameters used to evaluate the gloss character of the object are extracted based on the measurement result. An evaluate value indicating the gloss character... | 01/01/2008 |
| 7280199 | System for detecting anomalies and/or features of a surface A cylindrical mirror or lens is used to focus an input collimated beam of light onto a line on the surface to be inspected, where the line is substantially in the plane of incidence of the focused beam. An image of the beam is projected onto an array of charge-coupl... | 10/09/2007 |
| 7264971 | Read-head for optical diagnostic device A readhead for a photometric diagnostic instrument includes a housing adapted for incorporation within the photometric diagnostic instrument, and an elongated sample table operatively engaged with the housing. The sample table is configured to support elongated reag... | 09/04/2007 |
| 7256884 | Particle detecting system and method of detecting particles using the same There is provided a particle detector system and to detect particles on target including reticle and pellicle. The system includes a light transmitting device adapted to transmit light beam to a target through an electrowetting microlens, a light receiving device ad... | 08/14/2007 |
| 7157725 | Discrimination device for types or configurations of discrimination subjects A discrimination device which is disposed on a conveyance path of conveyed items, such as planographic printing plates, slip sheets and the like. The discrimination device is structured with a first sensor, which detects presence or absence of the conveyed items, an... | 01/02/2007 |
| 7145161 | Detecting location of edge of media sheet A method of one embodiment of the invention is disclosed that detects approachment of an edge of a media sheet by detecting light reflected by the media sheet. Upon detecting the approachment of the edge of the media sheet, the method detects the location of the edg... | 12/05/2006 |
| 7113624 | Imaging apparatus and method employing a large linear aperture An apparatus images a surface. An imager stage linearly translates the surface in a first direction. A fiber optic bundle has a first end of parallel first fiber ends defining a linear input aperture perpendicular to the first direction and parallel to the surface, ... | 09/26/2006 |
| 7110097 | Combined high speed optical profilometer and ellipsometer A system and method for measuring defects, film thickness, contamination, particles and height of a thin film disk or a silicon wafer. ... | 09/19/2006 |
| 7049620 | Media type sensing method for an imaging apparatus A method of correcting for sensitivity variation of media sensors includes determining a first signal level corresponding to a first calibration media having a first glossiness; determining a second signal level corresponding to a second calibration media having a s... | 05/23/2006 |
| 6969619 | Full spectrum endpoint detection A method of endpoint detection during plasma processing of a semiconductor wafer comprises processing a semiconductor wafer using a plasma, detecting radiation emission from the plasma during the semiconductor processing, and tracking data points representing change... | 11/29/2005 |
| 6960777 | Image-forming device sensing mechanism A sensing mechanism for an image-forming device of one embodiment of the invention is disclosed that includes a first light source, a second light source, a detector, and a controller. The first light source is positioned incident to a first side of media, whereas t... | 11/01/2005 |
| 6947146 | Optical object identification device and printing apparatus using the same An optical object identification device has a light emission element, an optical system condensing light from the light emission element, a photodetector integrated with a mask provided with a pinhole, and an identification unit for identifying a type of a measureme... | 09/20/2005 |
| 6914683 | Measurement of small, periodic undulations in surfaces In a method and apparatus for detecting small periodic wave patterns in technical surfaces, monochromatic coherent primary light is directed onto a workpiece surface approximately at right angles to the expected periodic wave patterns, and at an angle of incidence t... | 07/05/2005 |
| 6900449 | Media type sensing method for an imaging apparatus A media type sensing method for an imaging apparatus includes the steps of changing a light intensity of a light source by changing a drive signal, while monitoring for an output change of a comparator; determining a drive signal value of the drive signal at a point... | 05/31/2005 |
| 6825484 | Surface reflectivity discriminating device Apparatus and method for discriminating between plate and interleave paper in a CTP device having a cassette with printing plates and interleave paper. The device uses a light source for illuminating the topmost object in the cassette, a first optical sensor for rec... | 11/30/2004 |
| 6713775 | Method to correct for sensitivity variation of media sensors A method of correcting for sensitivity variation of media sensors includes the steps of determining a first reflectance ratio of a first calibration media having a first glossiness; determining a second reflectance ratio of a second calibration media having a second... | 03/30/2004 |
| 6208750 | Method for detecting particles using illumination with several wavelengths A process is provided for detecting small particles on wafer surfaces by irradiating the wafer surface with two light beams having a small difference in wavelength, collecting the light scattered by the wafer in at least one direction, separating the coll... | 03/27/2001 |
| 5764251 | Recording medium discriminating device, ink jet recording apparatus equipped therewith, and information system A recording medium discriminating device includes a device for measuring a multi-directional reflection function on a surface of a recording medium and a device for judging the kind of the recording medium based on the results derived from the measurement... | 06/09/1998 |
| 5703960 | Lumber defect scanning including multi-dimensional pattern recognition Grain defect scanning takes into account a broad set of data representing both wood grain structure and wood grain image to provide a multi-dimensional scan vector for an inspection point with wide variation therein relative to defect types. A library of ... | 12/30/1997 |
| 5644392 | Scanning system for lumber A scanning system for wood products to detect grain defects and product geometry simultaneously. Multiple scanner sets cast parallel beams of light at an angle of incidence in a plane that is normal to the surface of the wood product. Scanner sets are pro... | 07/01/1997 |
| 5625193 | Optical inspection system and method for detecting flaws on a diffractive surface An improved optical inspection system for detecting flaws on a diffractive surface containing surface patterns includes: an ultraviolet illumination means for illuminating a region on the diffractive surface to generate a scattered intensity distribution ... | 04/29/1997 |
| 5362969 | Processing endpoint detecting technique and detector structure using multiple radiation sources or discrete detectors A detector structure and technique for non-contact monitoring of a process being performed on a surface, such as in semiconductor wafer integrated circuit processing and flat panel display substrate processing, in order to determine when the process has r... | 11/08/1994 |
| 5252836 | Reflective grain defect scanning Grain structure defect scanning is accomplished by a pair of light detectors directed toward an inspection point illuminated by a collimated light beam incident upon the inspection surface at a given angle of incidence. One detector, the specular detector... | 10/12/1993 |
| 5155371 | Apparatus for detecting deformations in pressed members A device for detecting deformations in the surface of a workpiece includes a light source for illuminating the surface of the workpiece; a detector situated at a fixed predetermined distance from the light source and a displacing arrangement for effecting... | 10/13/1992 |
| 5087822 | Illumination system with incident beams from near and far dark field for high speed surface inspection of rolled aluminum sheet Apparatus and method for inspecting surface quality of a moving sheet of metal illuminates a surface of the moving sheet by the use of at least two lamps. The region which is illuminated by the lamps is inspected by a sensing device. The angle of incidenc... | 02/11/1992 |
| 5083035 | Position location in surface scanning using interval timing between scan marks on test wafers A particle imager and method for imaging particles on surfaces of substrates. A surface is raster scanned by a collimated light beam and particles on the surface are detected by the scattered light caused by the particles. During a scan path the intensity... | 01/21/1992 |
| 5072128 | Defect inspecting apparatus using multiple color light to detect defects A defect inspecting apparatus for discriminating one of two surfaces of a flat transparent object such as a pericle. The flat object is irradiated with a beam of light which is supplied from a light source and which is multiple-color light having predeter... | 12/10/1991 |
| 5008558 | System for detecting minute particles on or above a substrate A fine-particle measuring apparatus designed to measure fine particles attached to the surface of a substrate for a semiconductor device set in a processing unit for formation of films, etching, cleaning, etc. and fine particles suspended in the space abo... | 04/16/1991 |
| 4972091 | Method and apparatus for detecting the presence of flaws in a moving sheet of material The present disclosure describes an apparatus and a method for detecting the presence of flaws in a moving sheet of material. The apparatus comprises a light source for projecting a light beam; a beam shaping unit for shaping the light beam into a predete... | 11/20/1990 |
| 4954723 | Disk surface inspection method and apparatus therefor A method and apparatus for scanning a surface of an optical disk which has signal recording pits or bumps covered with a transparent layer, with a flying spot to detect surface defects of the optical disk surface. The optical disk is rotated at a constant... | 09/04/1990 |
| 4943734 | Inspection apparatus and method for detecting flaws on a diffractive surface An optical inspection system and method for detecting flaws on a diffractive surface such as a reticle or wafer, includes illuminating a surface to be inspected to generate a first scattered energy angular distribution in response to a flaw on the surface... | 07/24/1990 |
| 4933567 | Method and apparatus for nondestructively measuring subsurface defects in materials A method and apparatus are disclosed for nondestructively measuring the density and orientation of crystalline and other micro defects directly below the surface of a properly prepared material such as a semiconductor wafer. The material surface is illumi... | 06/12/1990 |
| 4866287 | Optical surface waviness measuring apparatus A surface waviness measuring apparatus for specularly reflecting surfaces has a light source (22) and an optical system (23) which directs a light beam (24) obliquely onto the surface (14), with the light beam (24) forming a small primary light bead (12) ... | 09/12/1989 |
| 4849645 | Substrate inspection system having two scattered light detecting bundles orthogonally positioned to each other Surface defects on a substrate (11) are detected by raster scanning the surface (10) with a laser beam (12). Light scattered by the substrate at a large angle with respect to a normal to the surface is collected by at least two bundles of light guide fibe... | 07/18/1989 |
| 4812664 | Apparatus for scanning a flat surface to detect defects A surface scanner useful for detecting defects on the surface of a water that is being processed in a vacuum equipment employs a light beam that scans the wafer surface in an arc. The scanning light beam impinges on the wafer surface at a low angle of inc... | 03/14/1989 |
| 4795911 | Surface examining apparatus for detecting the presence of foreign particles on the surface An apparatus usable with an object having a surface with a pattern, for examining the state of the surface, includes a projecting system for directing a light beam to the surface of the object, and a collecting system for collecting scattered light from t... | 01/03/1989 |
| 4704603 | Glue detection system A glue detecting system uses linear filament lamps and photodiodes mounted in the ends of nonreflective tubes to distinguish between diffuse and specular reflections from the surface of a moving article. Sensor photodetectors are positioned directly over ... | 11/03/1987 |
| 4563095 | Method and apparatus for monitoring the surface of elongated objects A method and apparatus for monitoring the surface of an elongated, normally-smooth object, such as coated cable, for certain flaws. The object is longitudinally movable along a path. Radiation, such as white light, is directed at the object such that it i... | 01/07/1986 |
| 4110047 | Inspection apparatus for automatically detecting the unevenness or the flaws of a coating A scanning inspection apparatus comprising two light beams each having a different angle of incidence to the surface of the object and light detecting means for receiving lights reflected by the surface of the object. Said two light beams are provided by ... | 08/29/1978 |
