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| Number | Title | Issue Date |
| 7671352 | Film scanner and detection apparatus therefor A detection apparatus for detecting perforation holes of a cinematographic film comprises at least one light source, at least one scanning sensor, which is arranged so as to receive light emitted by the light source after interaction with a perforation zone of the f... | 03/02/2010 |
| 7285767 | Methods and apparatus for inspecting an object A method for inspecting an object using a structured light measurement system that includes a light source and an imaging sensor. The method includes emitting light from the light source, polarizing each of a plurality of different wavelengths of the light emitted f... | 10/23/2007 |
| 7277172 | Measuring overlay and profile asymmetry using symmetric and anti-symmetric scatterometry signals Systems and methods are disclosed for using ellipsometer configurations to measure the partial Mueller matrix and the complete Jones matrix of a system that may be isotropic or anisotropic. In one embodiment two or more signals, which do not necessarily satisfy any ... | 10/02/2007 |
| 7268876 | General virtual interface algorithm for in-situ spectroscopic ellipsometric data analysis A method of characterizing the outermost material on an article manufactured by deposition or removal of material from its surface, which requires no prior knowledge of the composition of the article. ... | 09/11/2007 |
| 7177584 | Determining a media feature A method for determining a media feature includes directing light toward a media path and a reflector. The reflector converges the light on a light detector. Intensity data is collected from the light detector and analyzed to determine the media feature. ... | 02/13/2007 |
| 7164145 | Measuring fiber orientation by detecting dispersion of polarized light An image-based technique that measures the orientation of fibers in a moving web of nonwoven material. At least four light spots on one side of the web are illuminated essentially simultaneously with at least four plane-polarized incident substantially perpendicular... | 01/16/2007 |
| 7145163 | Apparatus for detecting light-transmissive sheet-like body Illuminating light emitted from a light source is led via a condenser lens, an optical fiber, a half-silvered mirror, and a condenser lens to a reflector. The reflector reflects the illuminating light to a CCD device through a telecentric optical system which compri... | 12/05/2006 |
| 7110114 | System and method for enhancing confocal reflectance images of tissue specimens A confocal scanning microscope system (10) using cross polarization effects and an enhancement agent (acetic acid) to enhance confocal microscope reflectance images of the nuclei of BCCs (basal cell carcinomas) and SCCs (squamous call carcinomas) in the confo... | 09/19/2006 |
| 6894780 | Pilot tone multiplexing of polarization states in heterodyne optical component analysis A method and apparatus for determining polarization-resolved scattering parameters of an optical device. A method comprises stimulating a port of the optical device with a stimulation field having at least two polarization states, measuring the optical field emergin... | 05/17/2005 |
| 6819409 | System for reading an information strip containing optically coded information A reading arrangement includes at least one linear detector arrangement which is arranged in parallel relationship above a reading plane and behind an optical imaging element and is oriented on to a reading region of the reading plane, lighting devices and an evalua... | 11/16/2004 |
| 6794635 | Apparatus and method for detecting an amount of depolarization of a linearly polarized beam An apparatus and a method for detecting an amount of depolarization of a linearly polarized beam transmitted by a birefringent medium in the direction of the optical axis thereof includes a first beam splitter for separating an on-axis portion of the linearly polari... | 09/21/2004 |
| 6734449 | Device for detecting the location of an edge of a transparent material, web edge control and printing press The invention relates to a device for detecting the location of an edge (2) of a transparent, anisotropic material (3,3′) comprising at least one sensor (1) with a light source (4), two polarization filters (6,7) with transmissio... | 05/11/2004 |
| 6717675 | System and method for determining fiber orientation in fibrous material webs A system and method for determining the orientation of fibers in a fibrous material web. The system includes at least one source of electromagnetic radiation disposed on one side of the fibrous material web, at least one sensor for sensing the electromagnetic radiat... | 04/06/2004 |
| 6639663 | Method and apparatus for detecting processing faults using scatterometry measurements A method for characterizing a misprocessed wafer includes providing a wafer having a grating structure; illuminating at least a portion of the grating structure; measuring light reflected from the grating structure to generate a reflection profile; and ch... | 10/28/2003 |
| 6521905 | Method and device for detecting the position of a transparent moving conveyor belt A method and device for detecting the position of a transparent conveyor belt including directing light beams (2) onto the region of an edge (3) of the conveyor belt, detecting a jump in intensity of the light beam (2, 2') as a consequence of the partial ... | 02/18/2003 |
| 6376829 | Method of and apparatus for inspecting surface irregularities of transparent plate A beam of light from a light source is irradiated toward a surface of a transparent plate at an angle of incidence ranging from 86 to 89 degrees or at an angle of incidence ranging from 60 to 89 degrees after being polarized as a P-polarized light beam or... | 04/23/2002 |
| 6194705 | Method and apparatus for detection position deviation of electron gun A method and apparatus for detecting position deviation of an electron gun in which, by increasing the light utilization efficiency to render the field of sight lighter and by reducing the amount of reflected light from the grid surface, the reflected lig... | 02/27/2001 |
| 5963316 | Method and apparatus for inspecting a surface state A method and apparatus for inspecting a surface state are used to examine first and second surfaces, e.g., two surfaces of a glass substrate on which a device pattern is formed, or one surface of a glass substrate and a pellicle for preventing attachment ... | 10/05/1999 |
| 5890095 | System for receiving and enhancing electromagnetic radiation input signals A spatial phase sensor having a lens or opening, or the like, through which electromagnetic radiation signals are directed. Mechanism is provided for receiving the electromagnetic radiation signals and for providing an enhanced electrical signal therefrom... | 03/30/1999 |
| 5666199 | Apparatus and process for detecting the presence of gel defects in oriented sheets or films based on polarization detection A gel defect detection system for the optical inspection of defects in oriented transparent and translucent sheet. The system utilizes two polarizing filters with adjustable orientations so that the transmission axis is from about 70 degrees to about 110 ... | 09/09/1997 |
| 5598266 | Device for detecting defects removed from fibrous material using optical inspection A device for detecting defects (2, 3) in fibrous materials (4, 22) includes members (16, 17) for squeezing the material against a film (1), a separating member (24) downstream of the squeezing members for separating the fibrous material from the film, and... | 01/28/1997 |
| 5585916 | Surface inspecting device A surface inspection device and method wherein an illumination system is arranged so that light from a laser diode is transformed into parallel light which is then directed through a half waveplate to a surface of a reticle to be inspected. A detecting sy... | 12/17/1996 |
| 5557040 | Method and apparatus for precipitation detection and differentiation A direct backscatter technique provides for the detection of precipitation in a measuring volume. A source light beam is projected into the measuring volume. Light in the volume, including source light scattered from any precipitation within the volume, i... | 09/17/1996 |
| 5506676 | Defect detection using fourier optics and a spatial separator for simultaneous optical computing of separated fourier transform components High speed pattern and defect detection in flat panel displays, integrated circuits, photo mask reticles, CRT color masks, printed circuit boards, and any other patterned devices, regular or irregular, uses analog optical computing. Using appropriate illu... | 04/09/1996 |
| 5319216 | Substrate detector with light emitting and receiving elements arranged in staggered fashion and a polarization filter A substrate detector device comprises a boat or chuck for holding substrates, a light emitting section having a plurality of light emitting elements, arranged side by side, for respectively applying light beams to the substrates, a light receiving section... | 06/07/1994 |
| 5302835 | Light detection system having a polarization plane rotating means and a polarizing beamsplitter An optical detection system includes a transmitting device for transmitting a light beam to create a field of view, a detecting arrangement for detecting a beam of reflected light resulting from reflection of the transmitted light off at least one object ... | 04/12/1994 |
| 5272351 | Differential polarization LADAR The present invention provides a long range LADAR (Laser Detection and Ranging), that employs in combination a 1.32 micron, Q-switched, diode-pumped Nd:YLF laser whose output beam is linearly polarized. A quarter-wave plate is positioned in front of the l... | 12/21/1993 |
| 5245403 | Apparatus for detecting extraneous substances on a glass plate An apparatus for detecting extraneous substances on a glass plate includes a first light projecting system arranged above a plane under examination on a glass plate, the surface of which is irradiated with an S-polarized laser beam at a first elevation an... | 09/14/1993 |
| 5225690 | Gap measuring device and method using frustrated internal reflection A narrow gap or unevenness of a surface of a specimen is measured by utilizing the tunnel effect of a light wave reflected at a boundary plane on the condition of total reflection. A laser beam emitted from a laser source is reflected at a surface of a pr... | 07/06/1993 |
| 5162660 | Paper roughness or glass sensor using polarized light reflection To detect roughness on a travelling surface of a web such as paper a beam of polarized light is directed at an angle onto the web and focused by a focal lens to illuminate a spot on the surface and a specularly reflected component of the light is collecte... | 11/10/1992 |
| 5107131 | Method and apparatus for edge detection of transparent films A method for detection of the edge and/or shape of transparent films, wherein the incident rays from a light source enter a polarizer to yield the linearly polarized light for irradiation to a transparent film with a property of rotatory polarization, and... | 04/21/1992 |
| 5049757 | Method for scanning a plurality of optical measuring reflectors and an apparatus for performing the method A method for scanning a plurality of optical measuring reflectors adapted to reflect a scan beam in a position-related manner to a position detector, which supplies signals relating to the position of the beam incidence point in the detector plane. So far... | 09/17/1991 |
| 5032734 | Method and apparatus for nondestructively measuring micro defects in materials A method and apparatus are disclosed for nondestructively measuring the density and orientation of crystalline and other micro defects on and directly below the surface of a properly prepared material such as a semiconductor wafer. The material surface is... | 07/16/1991 |
| 5008556 | Measuring a gap between a tube and a float An apparatus or method determines the gap between an assembly of a tube and a cylindrical float located substantially concentric to the tube. An elliptically polarized light beam at the wavelength for which the materials of the tube and the gap are transp... | 04/16/1991 |
| 4978862 | Method and apparatus for nondestructively measuring micro defects in materials A method and apparatus are disclosed for nondestructively measuring the density and orientation of crystalline and other micro defects on and directly below the surface of a properly prepared material such as a semiconductor wafer. The material surface is... | 12/18/1990 |
| 4945254 | Method and apparatus for monitoring surface layer growth A method of monitoring surface layer growth using light scattered off a surface illuminated e.g. by a laser. A small area of a surface of a substrate is illuminated and the light scattered in a non-specular direction is detected during cleaning and subseq... | 07/31/1990 |
| 4933567 | Method and apparatus for nondestructively measuring subsurface defects in materials A method and apparatus are disclosed for nondestructively measuring the density and orientation of crystalline and other micro defects directly below the surface of a properly prepared material such as a semiconductor wafer. The material surface is illumi... | 06/12/1990 |
| 4931657 | On-line texture sensing The texture of a travelling web is determined by instantaneously illuminating an area of the web via a strobe light and phtographing the illuminated area by a video camera correlated to operate in conjunction with the strobe. The signal from the camera is... | 06/05/1990 |
| 4904877 | Optical scanning apparatus for detecting faults in transparent material wherein the plane of incident light is arranged at the breuster angle to the normal to the surface An optical scanning apparatus for transparent, substantially flat material comprises a light source (21) and a mirror wheel (22) illuminated by the light beam. The mirror wheel generates a scanning beam which executes a periodic scanning movement in a sca... | 02/27/1990 |
| 4864123 | Apparatus for detecting the level of an object surface An apparatus for detecting the level of an object surface comprises a light source for supplying a light beam obliquely incident on the object surface, an imaging optical system provided to image the light beam reflected by the object surface, a light-rec... | 09/05/1989 |
