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Class 250/559.04 - Evaluation by regions, zones, or pixels


Subclass of Class 250 - Radiant energy
Definition: Subject matter wherein discrete sections of the material
No. of patents: 87
Last issue date: 09/13/2011


1      
NumberTitleIssue Date
8017927Apparatus, system, and method for print quality measurements using multiple adjustable sensors
An apparatus includes at least one scanner. Each scanner includes a plurality of sensors, and each sensor is capable of measuring one or more characteristics associated with a portion of a substrate. The substrate has printing produced by a printing system. The appa...
09/13/2011
7956339Single-sided lateral-field and phototransistor-based optoelectronic tweezers
Described herein are single-sided lateral-field optoelectronic tweezers (LOET) devices which use photosensitive electrode arrays to create optically-induced dielectrophoretic forces in an electric field that is parallel to the plane of the device. In addition, photo...
06/07/2011
7635853Analyzing reflection data for recording medium identification
A method is proved for analyzing frequency distribution of a reflection from a surface of a body to determine a type of body surface. Initially, a plurality of data points from a sensor that senses the reflection of the body's surface are provided. A first series of...
12/22/2009
7612355Optoelectronic tweezers for microparticle and cell manipulation
An optical image-driven light induced dielectrophoresis (DEP) apparatus and method are described which provide for the manipulation of particles or cells with a diameter on the order of 100 μm or less. The apparatus is referred to as optoelectric tweezers (OET) and...
11/03/2009
7465948Sheet-surface analyser and method of analysing a sheet-surface
The present invention relates to a sheet-surface analyser (10) including illuminating means (32) for casting shadows on the sheet-surface; capturing means (36) for capturing an image of the shadows; analysing means (40) for analysing the ...
12/16/2008
7398733Inline measurement and closed loop control method in printing machines
Spectral, densitometric, or color measured values are detected on sheet printing materials during the printing process in a sheet-fed printing press. The measured values are determined on sheets as they are moving through the printing press and the measured values a...
07/15/2008
7365310Increased depth of field for high resolution imaging for a matrix-based ion source
The invention provides a method of producing an in-focus image of an area on a sample plate for an ion source, e.g., a matrix-based ion source or any other type of ion source that employs a sample plate onto which samples are deposited. The method generally includes...
04/29/2008
7347369Counting process and device for planar substrates
A process includes the steps of loosening a pack of piled substrates, taking a first image of the piled planar substrates, the image being made of a two-dimensional array of single image detectors arranged in lines and columns, counting the number of edges of substr...
03/25/2008
7304291Information detecting device, sheet material processing apparatus equipped with information detecting device, and signal output device
Disclosed is an information detecting device capable of reducing fluctuation in detection accuracy. A recording sheet P transported through a transport path comes into contact with a displacing member, and, in this state, a motor is driven to rotate a cam, and the r...
12/04/2007
7301619Evaluating a multi-layered structure for voids
A method and apparatus measure properties of two layers of a damascene structure (e.g. a silicon wafer during fabrication), and use the two measurements to identify a location as having voids. The two measurements may be used in any manner, e.g. compared to one anot...
11/27/2007
7295301Dual stage defect region identification and defect detection method and apparatus
A method and apparatus for inspecting patterned substrates, such as photomasks, for unwanted particles and features occurring on the transmissive as well as pattern defects. A transmissive substrate is illuminated by a laser through an optical system comprised of a ...
11/13/2007
7256895Spherical scattering-light device for simultaneous phase and intensity measurements
A far-field measurement instrument has multiple imaging lenses cut into a pentagon shape and arranged in geodesic spherical configuration with a common field of view focused on the source of the scattered light to be measured. Aspheric lenses are used to facilitate ...
08/14/2007
7239817Device for identifying types of sheet materials
A device for identifying types of sheet materials has a detecting unit for detecting information regarding moisture of a sheet material; external force applicator for applying an external force to the sheet material; information obtaining unit for obtaining informat...
07/03/2007
7220978System and method for detecting defects in semiconductor wafers
A system and method for detecting defects in semiconductor wafers in a rapid non-destructive manner. Defects in semiconductor wafers can include micropipes and screw dislocations, stress striations, planer defects, polytype inclusions, and others. When a wafer is il...
05/22/2007
7217923Microstructured pattern inspection method
The edges of the reticle are detected with respect to the microstructured patterns exposed by the stepper, and the shapes of the microstructured patterns at the surface and at the bottom of the photoresist are detected. The microstructured patterns are evaluated by ...
05/15/2007
7199387Apparatus and method for detecting a predetermined pattern on a moving printed product
An apparatus and method for detecting a relatively narrow predetermined pattern, such as a trigger mark, on a moving printed product uses a plurality of sensor elements arranged linearly in an array and a switching apparatus for selecting a properly located subset o...
04/03/2007
7177025Measuring specular reflectance of a sample
Apparatus (10) for measuring absolute specular reflectance of a surface of a sample (22) includes a sample holder (12), a light source (18) for transmitting an incident light beam (16) onto a surface of the sample (22) and a...
02/13/2007
7173270Detector system for detecting a height of a particle, and lithographic apparatus and device manufacturing method including the same.
A lithographic apparatus transfers a pattern from a patterning device onto a substrate and includes a projection system to project a patterned radiation beam onto the substrate; a controllable actuator to adjust a distance between the projection system and the subst...
02/06/2007
7155356Quality and condition monitoring based on spectrum separating measurement
A method of controlling the quality and/or condition of a fibre web in a process for manufacturing and/or finishing the fibre web, which includes, monitoring the fibre web with at least one optical spectrum separating measurement device, determining a quality variab...
12/26/2006
7145654Method and apparatus to reduce spotsize in an optical metrology instrument
The measurement spot size of small-spot reflectometers, ellipsometers, and similar instruments can be reduced by placing an optical fiber along the optical path of the instrument, such as between an illumination source and a sample or the sample and a detector. The ...
12/05/2006
7092082Method and apparatus for inspecting a semiconductor wafer
An apparatus for inspecting a semiconductor wafer includes a vertically movable chuck plate for holding said semiconductor wafer, a first light source for illuminating an area on the wafer, a main imaging camera for detecting light scattered from the surface of the ...
08/15/2006
7075074Electron beam inspection apparatus and method for testing an operation state of an electron beam inspection apparatus
In a method for testing an operation state of an electron beam inspection apparatus, an electron beam sequentially scans a plurality of scan lines in a predetermined inspection area on a substrate. A detector detects secondary electrons emitted from the scan lines a...
07/11/2006
7070657Method and apparatus for depositing antireflective coating
This invention provides a stable process for depositing an antireflective layer. Helium gas is used to lower the deposition rate of plasma-enhanced silane oxide, silane oxynitride, and silane nitride processes. Helium is also used to stabilize the process, so that d...
07/04/2006
7065240Reticle inspection apparatus
A reticle inspection apparatus for detecting defects on a reticle 16 includes an image data generator 42 for generating image data of the reticle 16, a definition analyzer 44 for analyzing definition of image from the image data, a defini...
06/20/2006
7064822Evaluating a multi-layered structure for voids
A method and apparatus measure properties of two layers of a damascene structure (e.g. a silicon wafer during fabrication), and use the two measurements to identify a location as having voids. One of the two measurements is of resistance per unit length. The two mea...
06/20/2006
7064820Surface inspection method and surface inspection system
A surface inspection method in a surface inspection system which comprises a photodetection unit and a photodetection polarizing angle changing means, comprising the step of receiving a scattered reflection light from a substrate surface where standard particles are...
06/20/2006
7061598Darkfield inspection system having photodetector array
A darkfield surface inspection tool of the invention includes an illumination source for illuminating a workpiece and generating a light scattering pattern. The light scattering pattern being configured such that the positions of the light beams of the scattering pa...
06/13/2006
7053991Differential numerical aperture methods
Methods for differential numerical aperture analysis of samples, utilizing angle-of-incidence measurements resulting from variable illumination or observation numerical apertures, or both. Metrology applications are provided, and more particularly including scattero...
05/30/2006
7045765Device for counting stacked products
The present invention relates to a device for counting thin products (1) that can be stacked side-by-side in a tray (2), characterized in that it comprises at least one counting station comprised of at least one CIS module (31, 3
05/16/2006
6970194Defect correction in electronic imaging systems
A method for processing a video data stream including a series of pixel values corresponding to pixel sites in an electronic imaging device includes the step of filtering the video data stream in real time to correct or modify defective pixel values based on a plura...
11/29/2005
6965120Method and apparatus for quality control in the manufacture of foundry cores or core packets
A method and an apparatus for object recognition, in particular defect detection on workpieces, such as shot cores (1) or core packets, wherein the object is illuminated by a light source (4) and recorded and detected by means of a camera (3), a...
11/15/2005
6941009Method for evaluating pattern defects on a water surface
The invention concerns a method for evaluating pattern defects on a wafer surface, comprising the following steps: acquiring the surface data of a plurality of individual image fields (4) of a series-produced wafer (1); storing the data in a reference ...
09/06/2005
6936835Method and its apparatus for inspecting particles or defects of a semiconductor device
An apparatus for optically inspecting particles and/or defects correlates sizes of particles and/or defects to a cause of failure in an inspection result. A data processing circuit points out a cause of failure from the statistics on the inspection result, and displ...
08/30/2005
6934028Certification and verification management system and method for a web inspection apparatus
A certification system and method for inspecting of a roll of web material through a web inspection system which includes the inspection of the roll of web material to determine the number, type and location of one or more detectable flaws along the web material. Th...
08/23/2005
6920249Method and measuring instrument for determining the position of an edge of a pattern element on a substrate
A method and a measuring instrument for determining the position of an edge to be measured on a pattern on a substrate are described. A complete, nonlinear model intensity profile, which identifies the edge to be measured, of a model edge is ascertained and stored, ...
07/19/2005
6909105Method and device for representing an object
A process for obtaining an object image of at least one object (40) is described, wherein at least two partial images of the object (40) are taken under differing object conditions which are formed on the object with spatial patterns, wherein a non-lin...
06/21/2005
6904164Method of inspecting accuracy in stitching pattern elements
A method of quickly and accurately inspecting the stitching accuracy at which regions of a lithographic pattern are stitched at boundaries. The numerous regions of the lithographic pattern are exposed or delineated, one at a time. Inspected regions are scanned with ...
06/07/2005
6797975Method and its apparatus for inspecting particles or defects of a semiconductor device
Conventionally, a particle/defect inspection apparatus outputs a total number of detected particles/defects as the result of detection. For taking countermeasures to failures in manufacturing processes, the particles/defects detected by the inspection apparatus are ...
09/28/2004
6747697Method and apparatus for digital image defect correction and noise filtering
An adaptive median filter (40) provides dynamic detection and correction of digital image defects which are caused by defective or malfunctioning elements of a radiation detector array (20). The adaptive median filter receives (100) lines of pix...
06/08/2004
6743337Process and apparatus for determining the properties of a traveling material web
Process and apparatus for determining properties of a traveling material web. The process includes simultaneously illuminating a plurality of measuring points on the material web with electromagnetic radiation, and imaging, through at least one optical device, the p...
06/01/2004
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