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Class 250/489 - ION COLLECTORS


Subclass of Class 250 - Radiant energy
Definition: Subject matter wherein a claimed apparatus is disclosed
No. of patents: 20
Last issue date: 03/10/2009


NumberTitleIssue Date
7501640Low energy electron cooling system and method for increasing the phase space intensity and overall intensity of low energy ion beams
A low energy electron cooling system and method for increasing the phase space intensity and overall intensity of low energy ion beams, including a vacuum chamber to allow electron beam and ion beam merging and separation, a cathode to generate the electron beam, a ...
03/10/2009
7442945Faraday assembly of ion implantation apparatus
A Faraday assembly of an ion implantation apparatus includes a Faraday cup in a vacuum chamber, a driving shaft to which the Faraday cup is connected, a motor for inserting the driving shaft further into and drawing the driving shaft out of the vacuum chamber to cau...
10/28/2008
7427864Ion balance monitor
An ion balance monitor for simultaneous monitoring of the positive and negative ion production rates, and therefore ion concentration, by measurement of currents resulting from the presence of airborne ions as created for example by an air (gas) ionizer. Additionall...
09/23/2008
7421973System and method for performing SIMOX implants using an ion shower
An ion shower comprises a plasma source operable to generate source gas ions within a chamber, and an extraction assembly associated with a top portion of the chamber. The extraction assembly is operable to extract ions from the top portion of the chamber. The ion s...
09/09/2008
7355169Method of selectively inhibiting reaction between ions
A method of inhibiting the reaction between ions of opposite polarity is disclosed. The method includes exposing a population of ions to a resonance excitation frequency during a mass-to-charge altering reaction between a first subpopulation of ions and a second sub...
04/08/2008
7282702Ion neutralizer
An ion neutralizer enhances a heat transfer rate between a reflecting plate and a frame while preventing the reflecting plate from being bent due to thermal deformation. The ion neutralizer includes a frame and a plurality of reflecting plates integrally formed with...
10/16/2007
7180078Integrated planar ion traps
An apparatus for an ion trap includes an electrically conductive substrate having top and bottom surfaces and having vias that cross from the top surface to the bottom surface. The apparatus includes a pair of planar first electrodes supported over said top surface ...
02/20/2007
7064321Ion funnel with improved ion screening
An ion funnel screen ions from a gas stream flowing into a differential pump stage of a mass spectrometer, transfers them to a subsequent differential pump stage. The ion funnel uses apertured diaphragms between which gas escapes easily. Holders for the apertured di...
06/20/2006
7064317Method of selectively inhibiting reaction between ions
A method of inhibiting the reaction between ions of opposite polarity is disclosed. The method includes exposing a population of ions to a resonance excitation frequency during a mass-to-charge altering reaction between a first subpopulation of ions and a second sub...
06/20/2006
6946667Apparatus to decelerate and control ion beams to improve the total quality of ion implantation
An ion implantation method is disclosed in this invention. The disclosed method is for implanting a target wafer with ions extracted from an ion source traveling along an original ion beam path. The method includes steps of a) employing a set of deceleration electro...
09/20/2005
6822238Monitoring
The invention provides apparatus and methods which facilitate movement of an instrument relative to an item or location being monitored and/or the item or location relative to the instrument, whilst successfully excluding extraneous ions from the detection location....
11/23/2004
6653637X-ray detector and charged-particle apparatus
In a high-sensitivity X-ray detector, an image of the secondary electrons is little shifted and deformed by the astigmatism or the like even when it approaches very close to a specimen set on the stage of an electron microscope. When a beam of charged par...
11/25/2003
6566661Ion implanter with wafer angle and faraday alignment checking
A beam/wafer alignment arrangement has a laser and sensor mounted on the scanning magnet. Direct alignment of the wafer relative to the scanning magnet is determined by reflecting the beam in a specular surface on the wafer holder back to the sensor. Corr...
05/20/2003
5527731Surface treating method and apparatus therefor
A surface treating method of the invention comprises the steps of generating mixed chemical species containing an intended chemical species of ions necessary for surface treatment by ionization of a gas, selectively trapping the intended chemical species ...
06/18/1996
4545383Antenna structure for collection and detection of radiation
A tapered substantially cylindrical housing forming an antenna structure to collect radiation as an emission from a human body and consisting of an antenna, the antenna forming a reflective liner having an upward taper relative to the housing becoming red...
10/08/1985
4302679Method of determining the x-ray limit of an ion gauge
An ion gauge having a reduced "x-ray limit" and means for measuring that limit. The gauge comprises an ion gauge of the Bayard-Alpert type having a short collector and having means for varying the grid-collector voltage. The "x-ray limit" (i.e. the collector c...
11/24/1981
4286153Method and apparatus for the separation of isotope mixtures
Method and apparatus for separation of an isotope substance from a mixture of isotope substances such as UF6 by adiabatically decompressing the mixture in vaporous or gaseous form to cool the mixture to a temperature below 100° K. and irradiat...
08/25/1981
4250430Multi-stage collector for transit-time tubes
A multi-stage collector for a transit-time tube has a catcher plate with a hollow element extending inwardly therefrom and coaxially aligned with the electron beam of the tube....
02/10/1981
4179615Faraday dish for making measurements at the beam paths of a _heavy ion accelerator
A Faraday dish for making measurements at a beam path of a heavy ion accelerator comprising a supporting structure, a hollow outer conductor and an inner conductor coaxial with the outer conductor. The outer and inner conductors each have a first portion ...
12/18/1979
3986024Arrangement for electrical detection of ions for mass-spectroscopic determination of the mass-magnitudes and mass-intensities of ions
An arrangement for the electrical detection of ions for mass spectroscopic etermination of the mass values and of the mass intensities, in which a channel multiplier plate has a number of electron multipliers of minimum dimension, and is located behind the...
10/12/1976
 
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