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| Number | Title | Issue Date |
| 8148700 | Speciman holder and speciman holder movement device It is an object of the present invention to provide a significantly beneficial specimen holder which allows mounting one or more specimens, for example, a specimen to be examined and a standard adjustment specimen for aberration correction in one specimen holder at ... | 04/03/2012 |
| 8134131 | Method and apparatus for observing inside structures, and specimen holder An object of the invention is to provide a method and apparatus for observing inside structures and a specimen holder, wherein aging degradation of a good sample to a bad sample can be tracked in the same field of view, using the same specimen in order to determine ... | 03/13/2012 |
| 8115180 | Processing system A processing system includes a particle beam column for generating a particle beam directed to a first processing location; a laser system for generating a laser beam directed to a second processing location located at a distance from the first processing location; ... | 02/14/2012 |
| 8101924 | Object-positioning device for charged-particle beam system An object-positioning device comprises a rod-like object holder inserted in the chamber of a charged-particle beam system for moving the object outside the chamber, a support for slideably supporting at least a part of the side surface of the object holder, thus mak... | 01/24/2012 |
| 8076651 | Specimen stage apparatus and specimen stage positioning control method A specimen stage apparatus has a braking structure which can generate a braking force enough to stop a specimen stage while keeping a movable table from increasing in its weight. The specimen stage apparatus has an X guide fixed on an X base and representing a guide... | 12/13/2011 |
| 8074293 | Defective product inspection apparatus, probe positioning method and probe moving method For adjusting a positional relationship between a specimen and a probe to measure an electric characteristic of the specimen through a contact therebetween, a base table holding a specimen table holding the specimen and a probe holder holding the probe is positioned... | 12/06/2011 |
| 8063383 | Inertial positioner and an optical instrument for precise positioning We disclose a precision positioner based on an inertial actuator, an optical instrument for accurate positional readout and control, and an electrostatically clamped assembly for holding any instrument or device. All aspects of the present invention present a signif... | 11/22/2011 |
| 8058628 | Substrate processing apparatus and method Substrate processing methods and apparatus are disclosed. In some embodiments a substrate processing apparatus may comprise a support structure and a moveable stage including first and second stages. The moveable stage has one or more maglev units attached to the fi... | 11/15/2011 |
| 8035089 | Scanning probe apparatus In a scanning probe apparatus capable of always effectively canceling an inertial force to suppress vibration even in repetitive use while replacing a sample holding table or a probe, a stage for a sample or the probe includes a drive element for moving the sample h... | 10/11/2011 |
| 8003955 | Sample manipulation device A sample manipulation device comprises an observation unit, which is used to observe a sample and to select a target position at which a portion to be removed from the sample is located, and a specimen stage which receives the sample. The sample manipulation device ... | 08/23/2011 |
| 7989778 | Charged-particle optical system with dual loading options A charged-particle optical system (100) such as an electron microscope has a vacuum chamber (102) with a space (104) for accommodating a specific one (114) of multiple specimens in operational use. The charged-particle optical system has ... | 08/02/2011 |
| 7956333 | Moving module of a wafer ion-implanting machine A moving module of a wafer ion-implanting machine includes a wafer carrier, a moving shaft, a base, a pair of first magnets, a fixture body, and a plurality of second magnets. One end of the wafer carrier is pivotally connected to a wafer tray; and the other end is ... | 06/07/2011 |
| 7935937 | Method of forming TEM sample holder A TEM sample holder is formed from at least one nano-manipulator probe tip and a TEM sample holder pre-form. The probe tip is permanently attached to the TEM sample-holder pre-form to create a TEM sample holder before attachment of a sample to the point of the probe... | 05/03/2011 |
| 7919760 | Operation stage for wafer edge inspection and review The present invention relates to an operation stage of a charged particle beam apparatus which is employed in a scanning electron microscope for substrate (wafer) edge and backside defect inspection or defect review. However, it would be recognized that the inventio... | 04/05/2011 |
| 7897936 | Method and apparatus for specimen fabrication A sample fabricating method of irradiating a sample with a focused ion beam at an incident angle less than 90 degrees with respect to the surface of the sample, eliminating the peripheral area of a micro sample as a target, turning a specimen stage around a line seg... | 03/01/2011 |
| 7888655 | Transfer mechanism for transferring a specimen The invention relates to a transfer mechanism for transferring a specimen (2) from a first position in a first holder (40) to a second position in a second holder (10) and/or vice versa, each holder (10, 40) equipped to detachably hold th... | 02/15/2011 |
| 7851769 | Motorized manipulator for positioning a TEM specimen The invention relates to a motorized manipulator for positioning a TEM specimen holder with sub-micron resolution parallel to a y-z plane and rotating the specimen holder in the y-z plane, the manipulator comprising a base (2), and attachment means (30... | 12/14/2010 |
| 7791043 | Stage mechanism, electron microscope having the stage mechanism and method of controlling positioning of stage mechanism An electron microscope stage mechanism capable of performing high-accuracy positioning while limiting vibration and drift. An ultrasonic motor is used in a stage drive mechanism, and a fixing mechanism capable of increasing stop stiffness is combined integrally with... | 09/07/2010 |
| 7772567 | Specimen holding device and charged particle beam device A specimen holding device has a plurality of electrodes, and a moving mechanism for moving upward and downward a part of the plurality of electrodes. Further, the moving mechanism moves the part of the plurality of electrodes downward to evacuate from a path through... | 08/10/2010 |
| 7767979 | Method for coupling and disconnecting a co-operative composite structure of a sample carrier and a sample holder The invention relates to a composite structure of a sample carrier 20 and a sample holder 30 for use in a TEM, for example. The sample carrier is hereby separately embodied from the sample holder. Although such compositions are already known, the known... | 08/03/2010 |
| 7745802 | Specimen holder, specimen inspection apparatus, specimen inspection method, and method of fabricating specimen holder A specimen holder, a specimen inspection apparatus, and a specimen inspection method permitting a specimen consisting of cultured cells to be observed or inspected. Also, a method of fabricating the holder is offered. The holder has an open specimen-holding surface.... | 06/29/2010 |
| 7737416 | Sample transfer unit and sample transferring method There is provided a mini environment type transfer unit which can efficiently transfer a sample to a critical dimension scanning electron microscope (CD-SEM) even in the case of use of a SMIF pod which can store only one photomask. In addition to a load port, a stoc... | 06/15/2010 |
| 7690047 | Scanning probe apparatus A scanning probe apparatus for obtaining information of a sample, recording information in the sample, or processing the sample with relative movement between the sample and the apparatus, the apparatus is constituted by a probe; and a scanning stage including a dri... | 03/30/2010 |
| 7675043 | Mesh and method of observing rubber slice technical field Left and right sides of the mesh sandwiching the placing region therebetween are set as left and right to-be-fixed portions to be fixed to sample holder separation portions respectively to be moved in a stretch direction. A slit for dividing use is formed from a por... | 03/09/2010 |
| 7633070 | Substrate processing apparatus and method A substrate processing apparatus and method are disclosed. ... | 12/15/2009 |
| 7592606 | Manufacturing equipment using ION beam or electron beam Provided is a charged particle beam processing apparatus capable of improving yields by suppressing the spread of metal pollution to a semiconductor manufacturing process to a minimum. The charged particle beam processing apparatus includes an ion beam column 1 | 09/22/2009 |
| 7573047 | Wafer holder and sample producing apparatus using it A wafer holder includes: a frame-shaped holder main body which has an opening at its center and carries a wafer on its upper surface; guide members which contact the outer periphery of the wafer placed on the holder main body and position the wafer on the holder mai... | 08/11/2009 |
| 7566884 | Specimen holder for electron microscope A specimen holder has two levers on which probes for current measurement are carried. The levers are in contact with a spherical body, the spherical body acting as a pivotal point. When the levers are pushed by micrometer heads, the probes move in the X-direction. W... | 07/28/2009 |
| 7560705 | Workpiece handling scan arm for ion implantation system An ion implantation apparatus, system, and method are provided for connecting and disconnecting a workpiece holder from a scan arm. A twist head is provided, wherein an electrostatic chuck is operable to be mounted, wherein one or more rotating and non-rotating memb... | 07/14/2009 |
| 7521695 | Scanning electron microscope In order to provide a full-automatic scanning electron microscope which carries out investigation jobs full-automatically from fine adjustment to reviewing, the scanning electron microscope of the present invention has a function of calculating the accuracy of corre... | 04/21/2009 |
| 7511282 | Sample preparation Methods of extracting a TEM sample from a substrate include milling a hole on the sample and inserting a probe into the hole. The sample adheres to the probe, and can be processed on transferred while on the probe. In another embodiment, the sample is freed from a s... | 03/31/2009 |
| 7498589 | Scanning probe microscope A scanning probe microscope for measuring a surface profile of a sample by bringing a probe into close proximity to or contact with the surface of the sample and scanning the sample surface includes: a sample stage movable in at least one axis direction; the probe w... | 03/03/2009 |
| 7476872 | Method and apparatus for observing inside structures, and specimen holder An object of the invention is to provide a method and apparatus for observing inside structures and a specimen holder, wherein aging degradation of a good sample to a bad sample can be tracked in the same field of view, using the same specimen in order to determine ... | 01/13/2009 |
| 7442942 | Charged particle beam apparatus To include a focused ion beam apparatus fabricating a sliced specimen by processing a specimen as well as observing the sliced specimen, a scanning electron microscope observing the slice specimen, a gas-ion beam irradiation apparatus performing finishing processing... | 10/28/2008 |
| 7435974 | Electron microscope and specimen stage positioning control method for the electron microscope An electron microscope is disclosed, wherein a specimen stage includes a base having an X-slide guide member, a center table adapted to move along the X-slide guide member, and an X rod for driving the center table. A gap is formed in the coupling between the guide ... | 10/14/2008 |
| 7432503 | Scanning electron microscope and method for detecting an image using the same In the present invention, in order to realize both a reduction of an image detecting time and high quality image detection in a scanning electron microscope for measurement, inspection, defect review, or the like of semiconductor wafers, a low-magnification image is... | 10/07/2008 |
| 7425713 | Synchronous raster scanning lithographic system A multi-beam synchronous raster scanning lithography system includes a processor that generates electrical signals representing a desired exposure pattern at an output. A multi-beam source of exposing radiation generates a plurality of exposure beam. A beam modulato... | 09/16/2008 |
| 7423263 | Planar view sample preparation A method and apparatus is described for orienting samples for charged particle beam operations. A sample is attached to a probe with a major surface of the sample at a non-normal angle to the probe shaft, and the probe shaft is rotated to reorient the sample. The in... | 09/09/2008 |
| 7423269 | Automated feature analysis with off-axis tilting One embodiment relates to a method of automated microalignment using off-axis beam tilting. Image data is collected from a region of interest on a substrate at multiple beam tilts. Potential edges of a feature to be identified in the region are determined, and compu... | 09/09/2008 |
| 7423264 | Atomic force microscope In one embodiment, an atomic force microscope comprises a frame, a beam coupled to the frame at a first end and a second end, a probe mounted to the beam, means for inducing relative motion between the beam and an underlying surface, and means for detecting a charac... | 09/09/2008 |
