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| Number | Title | Issue Date |
| 8173971 | Sample transfer unit and sample transferring method There is provided a mini environment type transfer unit which can efficiently transfer a sample to a critical dimension scanning electron microscope (CD-SEM) even in the case of use of a SMIF pod which can store only one photomask. In addition to a load port, a stoc... | 05/08/2012 |
| 8158955 | Charged particle beam application apparatus An apparatus capable of improving image quality by making it possible to suck specimens of different sizes electrostatically, and uniformalizing an electric field of a specimen edge portion, while suppressing increase in prime cost is provided. Specimen holding mean... | 04/17/2012 |
| 7642523 | Vacuum chamber stage with application of vacuum from below A stage for processing a substrate, especially useful for vacuum applications, has a recess just large enough to hold a substantially flat substrate and a chuck or holder, but not much more. The perimeter of both top and bottom of the stage has air bearing surfaces ... | 01/05/2010 |
| 7612348 | Transverse magnetic field voltage isolator A voltage-isolating passageway for providing high voltage isolation between a component maintained at high DC voltage and a component maintained at a substantially lower voltage is described. The voltage-isolating passageway incorporates a transverse magnetic field ... | 11/03/2009 |
| 7601972 | Inspection system by charged particle beam and method of manufacturing devices using the system An inspection apparatus and a semiconductor device manufacturing method using the same. The inspection apparatus is used for defect inspection, line width measurement, surface potential measurement or the like of a sample such as a wafer. In the inspection apparatus... | 10/13/2009 |
| 7564044 | Method of inspecting thin film magnetic head element using scanning electron microscope, and inspecting holding jig A method of efficiently inspecting a thin film magnetic head is provided. The method including holding a slider bar having a plurality of the thin film magnetic head elements in a row by an inspecting holding jig made of a nonmagnetic material; loading the slider ba... | 07/21/2009 |
| 7544954 | Device for operating gas in vacuum or low-pressure environment and for observation of the operation A device for operating gas in the vacuum or low-pressure environment and for observation of the operation includes a housing. The housing has a thinner part formed at a side thereof, and at least one spacer mounted therein for partitioning off its inside into a gas ... | 06/09/2009 |
| 7531816 | Vacuum conveying apparatus and charged particle beam equipment with the same A charged particle beam examination equipment for examining and measuring a semiconductor wafer, comprising a wafer exchange portion for exchanging an unexamined wafer and an examiner wafer with each other, which has a first arm longitudinally sliding for reciprocat... | 05/12/2009 |
| 7456413 | Apparatus for evacuating a sample The invention relates to an apparatus for evacuating samples. A sample 4 is hereby placed in a cavity 3 of a sheet 1 with a smooth surface 2. A sole plate 5 Is placed upon this smooth surface 2, whereby the smooth surface | 11/25/2008 |
| 7442924 | Repetitive circumferential milling for sample preparation A method of sample extraction entails making multiple, overlapping cuts using a beam, such as a focused ion beam, to create a trench around a sample, and then undercutting the sample to free it. Because the sidewalls of the cut are not vertical, the overlapping cuts... | 10/28/2008 |
| 7435973 | Material processing system and method A material processing system for processing a work piece is provided. The material processing is effected by supplying a reactive gas and energetic radiation for activation of the reactive gas to a surrounding of a location of the work piece to be processed. The rad... | 10/14/2008 |
| 7432511 | Method of operating liquid in the vacuum or low-pressure environment and observing the operation and device for the operation and observation A method of operating liquid in a vacuum or low-pressure environment and observing the operation and a device for the operation and the observation respectively, including the steps of preparing a housing, putting the housing in the vacuum or low-pressure environmen... | 10/07/2008 |
| 7431813 | Multi-chambered substrate processing equipment having sealing structure between chambers thereof, and method of assembling such equipment Sealing structure provided between a transfer chamber and a chamber, such as a process chamber, connected to the transfer chamber includes an insert member, a docking member, and annular seals. The insert member is fixed to the exterior of the transfer chamber and t... | 10/07/2008 |
| 7425712 | Method of operating liquid in the vacuum or low-pressure environment and observing the operation and device for the operation and observation A method of operating liquid in a vacuum or low-pressure environment and observing the operation and a device for the operation and the observation respectively, including the steps of preparing a housing, putting the housing in the vacuum or low-pressure environmen... | 09/16/2008 |
| 7417242 | Method of measuring ion beam position A system, apparatus, and method for determining position and two angles of incidence of an ion beam to a surface of a workpiece is provided. A measurement apparatus having an elongate first and second sensor is coupled to a translation mechanism, wherein the first s... | 08/26/2008 |
| 7414250 | Cryogenic variable temperature vacuum scanning tunneling microscope A cryogenic variable temperature scanning tunneling microscope of novel design and component configuration, for use in conjunction with a variety of low temperature methodologies. ... | 08/19/2008 |
| 7408175 | Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former A substrate inspection apparatus 1-1 (FIG. 1) of the present invention performs the following steps of: carrying a substrate “S” to be inspected into an inspection chamber 23-1; maintaining a vacuum in said inspection chamber; ... | 08/05/2008 |
| 7394076 | Moving vacuum chamber stage with air bearing and differentially pumped grooves A stage for processing a substrate, especially useful for vacuum applications, has a recess just large enough to hold a substantially flat substrate and a chuck or holder but not much more. The perimeter of the recessed side has an air bearing surface separated from... | 07/01/2008 |
| 7388211 | Semi-closed observational environment for electron microscope A semi-closed observational environment for an electron microscope includes a housing having at least two spacers for partitioning itself into a receiving chamber, a gas chamber below the receiving chamber, a buffer chamber below the gas chamber, at least one gas in... | 06/17/2008 |
| 7381968 | Charged particle beam apparatus and specimen holder Information of a specimen holder or information of a specimen mounted on the specimen holder is stored in a memory inside the specimen holder mounted to an electron microscope. The memory is accessed to transmit the information of the specimen holder to the electron... | 06/03/2008 |
| 7381969 | Load lock control A control for pressurizing a load lock. The control initiates pressurization of the loadlock interior by coupling a source of gas to the loadlock interior. A representative load lock includes a pressure sensor and multiple valves to atmosphere where at least one suc... | 06/03/2008 |
| 7372027 | Electron beam apparatus and method for manufacturing semiconductor device A sample chamber and a column are connected to each other and comprise a magnetic substance. An exhaust section controls a pressure in the sample chamber and the column. A stage controller controls a stage, above which a sample is placed, in the sample chamber. An e... | 05/13/2008 |
| 7365342 | Device for operating gas in vacuum or low-pressure environment and for observation of the operation A device for operating gas in the vacuum or low-pressure environment and for observation of the operation includes a housing. The housing has a thinner part formed at a side thereof, and at least one spacer mounted therein for partitioning off its inside into a gas ... | 04/29/2008 |
| 7355174 | Charged particle beam emitting device and method for adjusting the optical axis A charged-particle beam emitting device which includes the following configuration devices so that a lowering in the image resolution will be suppressed even if a primary beam is tilted relative to a sample: A device for causing orbit of the primary beam to pass thr... | 04/08/2008 |
| 7355672 | Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatus A method for the removal of a deposition on an optical element of an apparatus including the optical element includes providing an H2 containing gas in at least part of the apparatus includes producing hydrogen radicals from H2 from the H2... | 04/08/2008 |
| 7342237 | Lithographic apparatus and device manufacturing method A lithographic apparatus comprising: an illumination system for providing a projection beam of radiation; a gas pressure controlled article clamp for clamping an article to be placed in a beam path of the projection beam of radiation; and a pressure circuit for cont... | 03/11/2008 |
| 7341393 | Mechanism for sealing A mechanism for connecting first and second members through a sealing member sandwiched therebetween includes a position adjustment portion which adjusts a position of the first member in a direction substantially perpendicular to a surface of the second member with... | 03/11/2008 |
| 7339167 | Charged particle beam apparatus A charged particle beam apparatus in which an electrostatic lens is used as a main focusing element to obtain a subminiature high-sensitivity high-resolution SEM, a drift tube for an electron beam is located inside a column between an electron source and a sample, a... | 03/04/2008 |
| 7335879 | System and method for sample charge control A system and method for characterizing and charging a sample. The system includes a vacuum chamber, a first apparatus in the vacuum chamber and configured to characterize a sample, and a second apparatus in the vacuum chamber and configured to charge the sample. The... | 02/26/2008 |
| 7323399 | Clean process for an electron beam source One embodiment of the present invention is a method for cleaning an electron beam treatment apparatus that includes: (a) generating an electron beam that energizes a cleaning gas in a chamber of the electron beam treatment apparatus; (b) monitoring an electron beam ... | 01/29/2008 |
| 7323695 | Reciprocating drive for scanning a workpiece A reciprocating drive system, method, and apparatus for scanning a workpiece are provided, wherein a motor comprising a rotor and stator operable to individually rotate about a first axis is operable to reciprocally translate the workpiece with respect to a stationa... | 01/29/2008 |
| 7321125 | Transverse magnetic field voltage isolator A voltage-isolating passageway for providing high voltage isolation between a component maintained at high DC voltage and a component maintained at a substantially lower voltage is described. The voltage-isolating passageway incorporates a transverse magnetic field ... | 01/22/2008 |
| 7315346 | Lithographic apparatus and device manufacturing method A lithographic projection apparatus is disclosed. The apparatus includes a support structure constructed to support a patterning structure. The patterning structure is adapted to pattern a beam of radiation according to a desired pattern. The apparatus also includes... | 01/01/2008 |
| 7312464 | Ion implantation apparatus An ion implantation apparatus structure is provided that does not allow gas to accumulate in the vicinity of a wafer when implantation ions to the wafer. The ion implantation apparatus includes a rotating body that rotates in a fixed direction, a vacuum chamber that... | 12/25/2007 |
| 7310130 | Lithographic apparatus and position measuring method In a lithographic apparatus, a measurement of the position of an object in an ambient space by an object position measuring system which is influenced by pressure variations in the ambient space, is corrected by an accurate measurement of the pressure in the ambient... | 12/18/2007 |
| 7301157 | Cluster tool for microscopic processing of samples A cluster tool includes multiple tools for microscopic processing of a sample positioned around a rotatable base. A sample holder on the base rotates the sample between the working areas of the tools. A slidable vacuum seal maintains a vacuum in a sample chamber for... | 11/27/2007 |
| 7291847 | Specimen tip and tip holder assembly A specimen tip holder assembly for mounting a specimen tip in a transmission electron microscope (TEM) is described. The specimen tip holder assembly comprises a tip holder for supporting a specimen tip. The tip holder is coupled to an elongate support for movement ... | 11/06/2007 |
| 7288774 | Transverse magnetic field voltage isolator An SEM wherein the entire imaging apparatus of the SEM is supported on air bearings. A multi-stage differentially pumped vacuum seal area provides a localized vacuum zone for wafer examination. A wafer leveling mechanism insures that the top surface of the wafer bei... | 10/30/2007 |
| 7274017 | Electron beam apparatus and high-voltage discharge prevention method Disclosed is an electron beam apparatus and method which can retain the state that minimizes the amount of water content contained at a gap between a high-voltage cable and a high-voltage introduction insulator to thereby prevent creation of high-voltage discharge a... | 09/25/2007 |
| 7259380 | Scanning mechanism of an ion implanter This invention discloses a scanning mechanism of an ion implanter. The mechanism is a PR-PRR type parallel mechanism with two subchains and two DOFs, driving the wafer holder to scan when the first subchain and the second subchain are translated in the same directio... | 08/21/2007 |
