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| Number | Title | Issue Date |
| 7973293 | Implantation quality improvement by xenon/hydrogen dilution gas A method comprises supplying a dopant gas in an arc chamber of an ion source. A dilutant is supplied to dilute the dopant gas. The dilutant comprises about 98.5 wt. % xenon and about 1.5 wt. % hydrogen. An ion beam is generated from the diluted dopant gas using the ... | 07/05/2011 |
| 7741616 | EUV light source, EUV exposure equipment, and semiconductor device manufacturing method A liquid in which fine solid Sn particles are dispersed in a resin is accommodated inside the heated tank 4. The resin pressurized by a pressurizing pump is conducted to a nozzle 1, so that a liquid-form resin is caused to jet from the tip end of the n... | 06/22/2010 |
| 7608839 | Plasma source and applications thereof A low-power atmospheric pressure plasma source, comprising a plasma-forming region for injection of a plasma-forming gas; an excitation region for injection of a source of reactive species downstream of the plasma-forming region; and a narrow converging plasma exit ... | 10/27/2009 |
| 7598500 | Ion source and metals used in making components thereof and method of making same An ion source is capable of generating and/or emitting an ion beam which may be used to deposit a layer on a substrate or to perform other functions. In certain example embodiments, techniques for reducing the costs associated with producing ion sources and/or eleme... | 10/06/2009 |
| 7586101 | Ion sources for ion implantation apparatus The invention relates to improving the efficiency of ion flow from an ion source, by reducing heat loss from the source both in the ion chamber of the ion source and its constituent parts (e.g. the electron source). This is achieved by lining the interior of the ion... | 09/08/2009 |
| 7518124 | Monatomic dopant ion source and method Monotomic dopant ions for ion implantation are supplied from vapour of a species containing plural atoms of the desired dopant. The vapour is fed to a plasma chamber and a plasma produced in the chamber with sufficient energy density to disassociate the vapour speci... | 04/14/2009 |
| 7491947 | Technique for improving performance and extending lifetime of indirectly heated cathode ion source A technique improving performance and lifetime of indirectly heated cathode ion sources is disclosed. In one particular exemplary embodiment, the technique may be realized as a method for improving performance and lifetime of an indirectly heated cathode (IHC) ion s... | 02/17/2009 |
| 7442941 | Ion generator An ion generator (10) generally includes: a shielding shell (11), a cathode device (16), and an annular anode (14). The shielding shell has a first end (113), an opposite second end (115) and a main body (111) therebe... | 10/28/2008 |
| 7439521 | Ion source with removable anode assembly An ion source has a removable anode assembly that is separable and from a base assembly to allow for ease of servicing the consumable components of the anode assembly. Such consumables may include a gas distributor, a thermal control plate, an anode, and one or more... | 10/21/2008 |
| 7435982 | Laser-driven light source An apparatus for producing light includes a chamber and an ignition source that ionizes a gas within the chamber. The apparatus also includes at least one laser that provides energy to the ionized gas within the chamber to produce a high brightness light. The laser ... | 10/14/2008 |
| 7425709 | Modular ion source A modular ion source design relies on relatively short modular core ALS components, which can be coupled together to form a longer ALS while maintaining an acceptable tolerance of the anode-cathode gap. Many of the modular components may be designed to have common c... | 09/16/2008 |
| 7425711 | Thermal control plate for ion source A thermal control plate is easily removable and replaceable in an ion source. The ion source has a removable anode assembly, including the thermal control plate, that is separable and from a base assembly to allow for ease of servicing consumable components of the a... | 09/16/2008 |
| 7423261 | Curved conduit ion sampling device and method An ion sampling apparatus for use in a mass spectrometry system. The ion sampling apparatus includes a target support for receiving a sample, an irradiation source for emitting energetic radiation or particles toward the target support, and a conduit having a curved... | 09/09/2008 |
| 7420191 | Discharge radiation source, in particular UV radiation The invention concerns a radiation source, comprising an anode (2), a cathode (3), an electric discharge gap (4) between the anode (2) and the cathode (3) and a gas input conduit (30) in the discharge gap (4). The gas... | 09/02/2008 |
| 7405411 | Ion source with multi-piece outer cathode In certain example embodiments of this invention, there is provided an ion source including an anode and a cathode. In certain example embodiments, a multi-piece outer cathode is provided. The multi-piece outer cathode allows precision adjustments to be made, thereb... | 07/29/2008 |
| 7397048 | Technique for boron implantation A technique for boron implantation is disclosed. In one particular exemplary embodiment, the technique may be realized by an apparatus for boron implantation. The apparatus may comprise a reaction chamber. The apparatus may also comprise a source of pentaborane coup... | 07/08/2008 |
| 7388195 | Apparatus and systems for processing samples for analysis via ion mobility spectrometry The invention provides an interface assembly for delivering an ionized analyte from an ionization apparatus into an ion mobility spectrometer. This allows analysis of biological and non-biological samples, even non-volatile solids, via differential mobility spectrom... | 06/17/2008 |
| 7368728 | Ionization source for mass spectrometry analysis A new ionization source named Surface Activated Chemical Ionization (SACI) has been discovered and used to improve the sensitivity of the mass spectrometer. According to this invention the ionization chamber of a mass spectrometer is heated and contains a physical n... | 05/06/2008 |
| 7365339 | Ion source A cathode holder of a tubular shape is inserted into an opening for a cathode of a plasma generating chamber with a tip of the cathode holder positioned outward from an inner wall surface of the plasma generating chamber. The cathode is held in the cathode holder so... | 04/29/2008 |
| 7342236 | Fluid-cooled ion source An ion source is cooled using a cooling plate that is separate and independent of the anode. The cooling plate forms a coolant cavity through which a fluid coolant (e.g., liquid or gas) can flow to cool the anode. In such configurations, the magnet may be thermally ... | 03/11/2008 |
| 7339181 | High flux, high energy photon source A high energy photon source for generating EUV radiation comprises a nozzle emitting a supersonic stream of source material, a laser or electrical/magnetic pre-ionization mechanism and a laser or electrical/magnetic excitation mechanism and a skimmer plate between t... | 03/04/2008 |
| 7301160 | Ion sources The invention relates to methods of controlling the effect of ions of an ionisable source gas that can react with interior surfaces of an arc chamber, by introducing ions of a displacement gas into the arc chamber, where the displacement gas ions are more chemically... | 11/27/2007 |
| 7276847 | Cathode assembly for indirectly heated cathode ion source A cathode in an indirectly heated cathode ion source is supported by at least one rod or pin. The cathode is preferably in the form of a disk, and the support rod is smaller in diameter than the disk to limit thermal conduction and radiation. In one embodiment, the ... | 10/02/2007 |
| 7256396 | Sensitive glow discharge ion source for aerosol and gas analysis A high sensitivity glow discharge ion source system for analyzing particles includes an aerodynamic lens having a plurality of constrictions for receiving an aerosol including at least one analyte particle in a carrier gas and focusing the analyte particles into a c... | 08/14/2007 |
| 7254006 | Ion generating element and ion generator, air conditioning apparatus, cleaner and refrigerator containing the same An inner electrode formed inside a dielectric body and a surface electrode formed on a surface of the dielectric body. The surface electrode is formed in a grid pattern with pointed parts formed inside the grid section. Each pointed part is in the shape of a triangl... | 08/07/2007 |
| 7223984 | Helium ion generation method and apparatus The invention provides methods and apparatus for generating helium ions. The methods involve providing a mixture of helium gas with a second gas in an ion source. The second gas has a lower ionization potential and larger molecules than that of helium. The helium ga... | 05/29/2007 |
| 7220976 | Ion source and ion implanter having the same A filament includes a filament rod having an electron-emitting portion, a pair of leads, and a pair of connection portions. The electron-emitting portion is disposed in the arc chamber. The leads extend from the sidewall of the arc chamber to the outside of the arc ... | 05/22/2007 |
| 7196337 | Particle processing apparatus and methods This invention relates to an apparatus for processing particles. The apparatus comprises a particle source having an exist aperture; an extraction electrode located at the exist aperture; an acceleration electrode adjacent to the extraction electrode; a processing c... | 03/27/2007 |
| 7183559 | Ion source with substantially planar design In certain example embodiments of this invention, there is provide an ion source including an anode and a cathode. In certain example embodiments, the cathode does not overhang over the anode, or vice versa. Since no, or fewer, areas of overhang are provided between... | 02/27/2007 |
| 7170070 | Ion implanters having an arc chamber that affects ion current density The present invention can provide ion implanter devices including an arc chamber including at least a first inner region and a second inner region, an electron emitting device disposed in the arc chamber adjacent the first inner region and adapted to emit electrons,... | 01/30/2007 |
| 7157704 | Corona discharge electrode and method of operating the same A method of operating a corona discharge device includes producing a high-intensity electric field in an immediate vicinity of at least one corona electrode and continuously or periodically heating the corona electrode to a temperature sufficient to mitigate an unde... | 01/02/2007 |
| 7102139 | Source arc chamber for ion implanter having repeller electrode mounted to external insulator An ion implanter has a source arc chamber including a conductive end wall at a repeller end of the arc chamber, the end wall having a central portion surrounding an opening. A ceramic insulator is secured to an outer surface of the end wall, such as by peripheral sc... | 09/05/2006 |
| 7098462 | Microfabricated device for selectively removing and analyzing airborne particulates from an air stream One embodiment of the present invention provides a system for ionizing airborne particulates. The system includes an insulating substrate and a first electroplated structure on the insulating substrate. This first electroplated structure includes an anchor and a pro... | 08/29/2006 |
| 7053333 | Vacuum arc plasma thrusters with inductive energy storage driver An apparatus for producing a vacuum arc plasma source device using a low mass, compact inductive energy storage circuit powered by a low voltage DC supply acts as a vacuum arc plasma thruster. An inductor is charged through a switch, subsequently the switch is opene... | 05/30/2006 |
| 7022999 | Ion implantation ion source, system and method A multi mode ion source is disclosed that includes an ion source incorporating an ionization chamber for ionizing gas species and configured to have at least two discrete modes of operation; namely, an arc-discharge mode and a non-arc discharge mode of operation. | 04/04/2006 |
| 7005634 | Ionization apparatus An ionization apparatus according to the present invention has a mechanism for causing metal ions emitted from an ion emitter to attach to an introduced target gas so as to generate ions of the sample gas and emits the ions of the sample gas to a mass spectrometer. ... | 02/28/2006 |
| 6998626 | Method of producing a dopant gas species This invention relates to a method of producing a dopant gas species containing a required dopant element for implanting in a target and to an ion source for implementing such a method. In particular, although not exclusively, this invention relates to producing dop... | 02/14/2006 |
| 6987364 | Floating mode ion source A cold-cathode closed-drift ion source includes an anode, a cathode and a power supply. In certain example embodiments, neither the positive nor negative terminals of the power supply are connected to ground, and the anode and cathode are also not connected to groun... | 01/17/2006 |
| 6936145 | Coating method and apparatus A method and apparatus used for the application of plating/coating in a cathodic arc process to improve coating uniformity, deposition rates, quality, cost, packaging, arc triggering, target wear and other improvements is described in the patent. The process improve... | 08/30/2005 |
| 6919690 | Modular uniform gas distribution system in an ion source A modular ion source design relies on relatively short modular anode layer source (ALS) components, which can be coupled together to form a longer ALS. For long ion sources, these shorter modular components allow for easier manufacturing and further result in a fina... | 07/19/2005 |
