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Class 250/424 - Methods


Subclass of Class 250 - Radiant energy
Definition: Subject matter comprising processes for removing from or
No. of patents: 221
Last issue date: 01/31/2012


1            
NumberTitleIssue Date
8106367Method and ionizer for bipolar ion generation
An ionizer includes a high voltage AC generator, and a planar ion emitter mounted on an insulating substrate and having an array of planar needles that protrude from an edge of the substrate. The high voltage AC generator may be actuated by a switch having a pair of...
01/31/2012
8097860Multiple nozzle gas cluster ion beam processing system and method of operating
A gas cluster ion beam (GCIB) processing system using multiple nozzles for forming and emitting at least one GCIB and methods of operating thereof are described. The GCIB processing system may be configured to treat a substrate, including, but not limited to, doping...
01/17/2012
8071957Soft chemical ionization source
A soft chemical ionization source can be small, require low power, reliably produce different ions depending on the operating conditions and configuration, and produce ions that ionize many sample chemicals in different phases in air, or solutions, or on surfaces. I...
12/06/2011
8053741Ion-generating device and electrical apparatus
An outer casing is partitioned, in a plan view, into a high-voltage transformer drive circuit block for disposing at least a high-voltage transformer drive circuit, a high-voltage transformer block for disposing at least a secondary side of a high-voltage transforme...
11/08/2011
7973292Neutralizer
A neutralizer 1 includes: a power supply circuit 11; an output controlling circuit 12 configured to convert a DC voltage generated by the power supply circuit 11 to a high-frequency voltage with frequency equal to or higher than an audibl...
07/05/2011
7960704Compact pyroelectric sealed electron beam
A non-radioactive source for Atmospheric Pressure Ionization is described. The electron-beam sealed tube uses a pyroelectric crystal(s). One end of the crystal is grounded while the other end has a metallic cap with sharp feature to generate an electron beam of a gi...
06/14/2011
7910896Micro discharge device ionizer and method of fabricating the same
A micro discharge device (MDD) ionizer and a method for fabricating the MDD ionizer are disclosed. The MDD ionizer includes a dielectric barrier having a first open end connected to an electrically conductive capillary tube and a second open end connected to a sampl...
03/22/2011
7872242Charged particle extraction device and method of design there for
The present invention provides a method for extracting a charged particle beam from a charged particle source. A set of electrodes is provided at the output of the source. The potentials applied to the electrodes produce a low-emittance growth beam with substantiall...
01/18/2011
7863582Ion-beam source
An ion-beam source comprising: a plasma-generation unit for generating plasma and an ion-extraction unit for extraction and acceleration of ions from the aforementioned plasma, where the ion-extraction unit is made in the form of at least one grid under a negative p...
01/04/2011
7820980High speed combination multi-mode ionization source for mass spectrometers
The present invention combines ionization modes produced by, for example, electrospray (ESI), atmospheric pressure chemical ionization (APCI), and thermospray for analysis of molecules. Specifically, this invention relates to the creation of a new source apparatus c...
10/26/2010
7812321Techniques for providing a multimode ion source
Techniques for providing a multimode ion source are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for ion implantation comprising an ion source that operates in multiple modes such that a first mode is an arc-disch...
10/12/2010
7759654Apparatus for generating corona discharges
The invention relates to an apparatus for generating corona discharges, comprising a first assembly, which first assembly is built up of at least one corona discharge space and at least one discharge electrode disposed in the corona discharge space, as well as a hig...
07/20/2010
7741615High energy crystal generators and their applications
Ferroelectric, pyroelectric and piezoelectric crystals are used to generate spatially localized high energy (up to and exceeding 100 keV) electron and ion beams, which may be used in a wide variety of applications including pulsed neutron generation, therapeutic X-r...
06/22/2010
7498588Tandem accelerator having low-energy static voltage injection and method of operation thereof
A method of producing an ion beam in a tandem accelerator, the method includes the acts of insulating, in a cavity containing an insulating gas under pressure, a beam tube having first and second ends and a terminal situated between the first and second ends; seatin...
03/03/2009
7442924Repetitive circumferential milling for sample preparation
A method of sample extraction entails making multiple, overlapping cuts using a beam, such as a focused ion beam, to create a trench around a sample, and then undercutting the sample to free it. Because the sidewalls of the cut are not vertical, the overlapping cuts...
10/28/2008
7442921Protein profiles with atmospheric pressure ionization
The invention relates to the acquisition of mass spectra of complex protein mixtures, often called protein profiles, for example to search for biomarkers which indicate stress situations, or to identify microbes. Up to now protein profiles have been acquired using i...
10/28/2008
7439521Ion source with removable anode assembly
An ion source has a removable anode assembly that is separable and from a base assembly to allow for ease of servicing the consumable components of the anode assembly. Such consumables may include a gas distributor, a thermal control plate, an anode, and one or more...
10/21/2008
7435951Ion source sample plate illumination system
The invention provides a mass spectrometry system ion source containing a sample plate and an illumination device that is configured to produce a light beam that contacts the sample plate surface to define a grazing angle between the light beam and the sample plate ...
10/14/2008
7435971Ion source
An exemplary ion source for creating a stream of ions has an aluminum alloy arc chamber body that at least partially bounds an ionization region of the arc chamber. The arc chamber body is used with a hot filament arc chamber housing that either directly or indirect...
10/14/2008
7429731Method and device for non-contact sampling and detection
A system for the stand-off detection of trace amounts of analyte materials such as explosives, chemical warfare agents, toxic industrial chemicals, and the like includes an ion source that is operably connected to an ion collection means and to a sensor. The ion sou...
09/30/2008
7425709Modular ion source
A modular ion source design relies on relatively short modular core ALS components, which can be coupled together to form a longer ALS while maintaining an acceptable tolerance of the anode-cathode gap. Many of the modular components may be designed to have common c...
09/16/2008
7425711Thermal control plate for ion source
A thermal control plate is easily removable and replaceable in an ion source. The ion source has a removable anode assembly, including the thermal control plate, that is separable and from a base assembly to allow for ease of servicing consumable components of the a...
09/16/2008
7423277Ion beam monitoring in an ion implanter using an imaging device
An image monitor system monitors characteristics of an ion beam employed in ion implantation. The monitored characteristics can include particle count, particle information, beam current intensity, beam shape, and the like. The system includes one or more image sens...
09/09/2008
7423261Curved conduit ion sampling device and method
An ion sampling apparatus for use in a mass spectrometry system. The ion sampling apparatus includes a target support for receiving a sample, an irradiation source for emitting energetic radiation or particles toward the target support, and a conduit having a curved...
09/09/2008
7417242Method of measuring ion beam position
A system, apparatus, and method for determining position and two angles of incidence of an ion beam to a surface of a workpiece is provided. A measurement apparatus having an elongate first and second sensor is coupled to a translation mechanism, wherein the first s...
08/26/2008
7411186Multimode ion source with improved ionization
A multimode ionization source with improved ionization characteristics that comprises an electrospray ionization source for providing a charged aerosol, an atmospheric pressure chemical ionization (APCI) source including a corona needle having an end positioned down...
08/12/2008
7405401Ion extraction devices, mass spectrometer devices, and methods of selectively extracting ions and performing mass spectrometry
There is disclosed a method of selectively extracting ions comprising the steps of: providing a supply of ions in a body of gas; generating a ponderomotive ion trapping potential generally along an axis; generating further potentials to provide ...
07/29/2008
7405411Ion source with multi-piece outer cathode
In certain example embodiments of this invention, there is provided an ion source including an anode and a cathode. In certain example embodiments, a multi-piece outer cathode is provided. The multi-piece outer cathode allows precision adjustments to be made, thereb...
07/29/2008
7397048Technique for boron implantation
A technique for boron implantation is disclosed. In one particular exemplary embodiment, the technique may be realized by an apparatus for boron implantation. The apparatus may comprise a reaction chamber. The apparatus may also comprise a source of pentaborane coup...
07/08/2008
7393761Method for fabricating a semiconductor device
A method for treating a gate stack in the fabrication of a semiconductor device by providing a substrate containing a gate stack having a dielectric layer formed on the substrate and a metal-containing gate electrode layer formed on the high-k dielectric layer, form...
07/01/2008
7372043Apparatus and method for ion production enhancement
The invention described herein provides a matrix-based ion source including a gas heating device for providing heated gas at a defined temperature to the ionization region of the ion source. The ion source may also include a temperature sensor. The heating device an...
05/13/2008
7368728Ionization source for mass spectrometry analysis
A new ionization source named Surface Activated Chemical Ionization (SACI) has been discovered and used to improve the sensitivity of the mass spectrometer. According to this invention the ionization chamber of a mass spectrometer is heated and contains a physical n...
05/06/2008
7368708Apparatus for producing ions from an electrospray assembly
The present invention relates to an apparatus for producing ions from an electrospray assembly. The apparatus comprises an ionization chamber, an electrospray assembly, an isolating electrode, an isolated ionization region within the ionization chamber and optionall...
05/06/2008
7365340Resonance method for production of intense low-impurity ion beams of atoms and molecules
The present invention comprehends a compact and economical apparatus for producing high intensities of a wide variety of wanted positive and negative molecular and atomic ion beams that have been previously impossible to previously produce at useful intensities. In ...
04/29/2008
7355171Method and apparatus for process monitoring and control
A method and apparatus for real-time monitoring of a gaseous environment during a semiconductor process. The method utilizes metastable electronic energy transfer to excite and ionize the chamber gaseous effluent and correlates the fluorescence signals from the exci...
04/08/2008
7351987Irradiation system with ion beam
An irradiation system comprises a beam generation source, a mass analysis device, a beam transformer, a deflector for scanning which swings the beam reciprocally, a beam parallelizing device, an acceleration/deceleration device, and an energy filtering device. Accor...
04/01/2008
7348553Aspects of mass spectral calibration
A method for calibrating and analyzing data from a mass spectrometer, comprising the steps of acquiring raw profile mode data containing mass spectral responses of ions with or without isotopes; calculating theoretical isotope distributions for each of at least one ...
03/25/2008
7342239Ion implanation method and device using thereof
An ion implantation method and device for forming an ion implantation area in a predetermined area of a substrate is provided. The method comprises the following steps. First, an ion beam is provided, then a first shape of cross-section and a first ion density distr...
03/11/2008
7342236Fluid-cooled ion source
An ion source is cooled using a cooling plate that is separate and independent of the anode. The cooling plate forms a coolant cavity through which a fluid coolant (e.g., liquid or gas) can flow to cool the anode. In such configurations, the magnet may be thermally ...
03/11/2008
7335081Method for manufacturing image-forming apparatus involving changing a polymer film into an electroconductive film
The present invention provides a method for manufacturing an electron-emitting device, comprising a step for forming a polymer film between a pair of electrodes formed on a substrate, a step for giving conductivity to the polymer film by heating, and a step for prov...
02/26/2008
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