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| Number | Title | Issue Date |
| 8188445 | Ion source An ion source includes an arc chamber having an extraction aperture, and a plasma sheath modulator positioned in the arc chamber. The plasma sheath modulator is configured to control a shape of a boundary between a plasma and a plasma sheath proximate the extraction... | 05/29/2012 |
| 8168957 | Magnetically enhanced, inductively coupled plasma source for a focused ion beam system The present invention provides an inductively coupled, magnetically enhanced ion beam source, suitable to be used in conjunction with probe-forming optics to produce an ion beam without kinetic energy oscillations induced by the source. ... | 05/01/2012 |
| 8153992 | Ionization emitter, ionization apparatus, and method for manufacturing ionization emitter Provided is an ionization emitter which can reduce a dead volume without deteriorating separating capacity. An ionization emitter (2) is provided with a tip (1) composed of a columnar or conical porous self-standing structure, and a channel for supplyi... | 04/10/2012 |
| 8153993 | Front plate for an ion source The present invention relates to a front plate for an ion source that is suitable for an ion implanter. The front plate according to the invention comprises obverse and reverse sides, an exit aperture for allowing egress of ions from the ion source that extends subs... | 04/10/2012 |
| 8143589 | Stable emission gas ion source and method for operation thereof A method of operating a focused ion beam device for emitting during operation a focused ion beam including ions of a gas generated at a first partial pressure, comprising cleaning an emitter tip positioned in an emitter tip region of the focused ion beam device, the... | 03/27/2012 |
| 8143591 | Covering wide areas with ionized gas streams Ion delivery manifolds with a gas transport channel, for receiving an ionized gas stream, and plural outlets that divide the gas stream into plural neutralization gas streams that are directed toward respective plural target regions are disclosed. At least generally... | 03/27/2012 |
| 8143590 | Ion source apparatus An ion source apparatus has an ion source assembly and a neutralizer. The ion source assembly has a body, a heat-dissipating device, an anode chunk and a gas distributor. The heat-dissipating device has a thermal transfer plate and a first thermal side sheet. The th... | 03/27/2012 |
| 8124942 | Plasma igniter for an inductively coupled plasma ion source A focused ion beam (FIB) system is disclosed, comprising an inductively coupled plasma ion source, an insulating plasma chamber containing the plasma, a conducting source biasing electrode in contact with the plasma and biased to a high voltage to control the ion be... | 02/28/2012 |
| 8101923 | System and method for spatially-resolved chemical analysis using microplasma desorption and ionization of a sample A method and system for desorbing and ionizing molecules from a sample for mass spectrometry using a microplasma device is disclosed. The system and method relies upon a microplasma device, or array of such devices, to partially ionize a gas to form a microplasma. T... | 01/24/2012 |
| 8101921 | Apparatus and method for inducing controllable jets in liquids A method for inducing a controllable jet in a transparent liquid is disclosed. The method comprises providing a gas-liquid interface, providing a laser source and generating a beam comprising a sequence of laser pulses, and focusing the beam to a target location wit... | 01/24/2012 |
| 8089052 | Ion source with adjustable aperture An ion implanter system including an ion source for use in creating a stream or beam of ions. The ion source has an ion source chamber housing that at least partially bounds an ionization region for creating a high density concentration of ions within the chamber ho... | 01/03/2012 |
| 8076650 | Multi-source plasma focused ion beam system The present invention provides a plasma ion beam system that includes multiple gas sources and that can be used for performing multiple operations using different ion species to create or alter submicron features of a work piece. The system preferably uses an induct... | 12/13/2011 |
| 8071956 | Cleaning of an extraction aperture of an ion source An ion source includes an arc chamber housing defining an arc chamber having an extraction aperture, and a wiper assembly comprising a wiper positioned outside the arc chamber in a parked position and configured to be driven from the parked position to operational p... | 12/06/2011 |
| 8063382 | Ozone-free ionic wind In one embodiment, an air mover may include a first electrode, a second electrode and an ionization device to selectively ionize molecules in an electric field between the first and second electrodes. The ionized molecules can drive airflow between the first and sec... | 11/22/2011 |
| 8030621 | Focused ion beam field source An apparatus for producing ions can include an emitter having a first end and a second end. The emitter can be coated with an ionic liquid room-temperature molten salt. The apparatus can also include a power supply and a first electrode disposed downstream relative ... | 10/04/2011 |
| 8022371 | Cathode having electron production and focusing grooves, ion source and related method A cathode having electron production and focusing grooves for an ion source of an ion implanter system, the ion source and a related method are disclosed. In one embodiment, the cathode includes a working surface having a plurality of electron production and focusin... | 09/20/2011 |
| 8017919 | Multi-electrode negative ion generator A negative ion generator includes a multi-electrode device with an emitter for generating a current. A first counter electrode includes an aperture therein with a distal end of said emitter being operatively positioned within said first counter electrode. A second c... | 09/13/2011 |
| 8017920 | Spin polarized ion beam generation apparatus and scattering spectroscopy apparatus using the spin polarized ion beam and specimen processing apparatus A spin polarized ion beam generation apparatus (30) can efficiently generate a spin polarized ion by using a pumping light generator (33) to an ion in a high frequency discharge tube (15) to irradiate optical pumping (33,34) by circularly... | 09/13/2011 |
| 8013312 | Vapor delivery system useful with ion sources and vaporizer for use in such system Vapor delivery systems and methods that control the heating and flow of vapors from solid feed material, especially material that comprises cluster molecules for semiconductor manufacture. The systems and methods safely and effectively conduct the vapor to a point o... | 09/06/2011 |
| 8003954 | Gas delivery system for an ion source An ion source has an arc chamber with an electron-emitting element and a repeller. A manifold assembly defines a cavity and a gas outlet configured to allow gas flow to the arc chamber. This gas outlet is closer to the repeller than the electron-emitting element. In... | 08/23/2011 |
| 7973291 | Electronic apparatus An electronic apparatus of the present invention includes an ion generator which generates ions in an atmosphere to remove chemical emission such as VOC and odor. The ion generator is arranged inside the duct which leads the chemical emission generated from the fixi... | 07/05/2011 |
| 7947965 | Ion source for generating negatively charged ions An ion source for generating negatively charged ions is presented and described, said ion source having a closure plate which is provided with an outlet opening and which has a wall which surrounds a combustion chamber, wherein the wall has a tubular section, which ... | 05/24/2011 |
| 7939810 | Mass spectrometer An electrically conductive heat-blocking plate 11 with an opening 12 for allowing thermions to pass through is provided between a filament 3, whose temperature can be as high as 2000° to 3000° C., and an ionization chamber 2. The heat-b... | 05/10/2011 |
| 7928406 | Method and system for extracting ion beams composed of molecular ions (cluster ion beam extraction system) A new type of triode extraction system, a Cluster Ion Beam Extraction System, is disclosed for broad energy range cluster ion beam extraction applications while still being applicable to atomic and molecular ion species as well. The extraction aperture plate contour... | 04/19/2011 |
| 7893408 | Methods and apparatus for ionization and desorption using a glow discharge A method for ionizing and desorbing a sample for analysis includes energizing a first and second electrode to produce a glow discharge at atmospheric pressure. The method further includes supplying a carrier gas to at least a portion of the glow discharge to create ... | 02/22/2011 |
| 7880148 | Reverse-Taylor cone ionization systems and methods of use thereof Ionization systems, methods of using ionization systems, ion source systems, methods of using ion source systems, and methods of ionization, are described herein. ... | 02/01/2011 |
| 7863581 | Focused negative ion beam field source An apparatus for producing negative ions including an emitter coated with an ionic liquid room-temperature molten salt, an electrode positioned downstream relative to the emitter, a power supply that applies a voltage to the emitter with respect to the electrode. Th... | 01/04/2011 |
| 7855373 | Charged particle gun An electron gun (1) includes an emitter (2), a tubular support (3) and an adaptor (4) for receiving the emitter. The adaptor includes a tapered plugging surface (7) and the tubular support includes a correspondingly tapered seating... | 12/21/2010 |
| 7842931 | Extraction electrode manipulator An extraction electrode manipulator system, comprising an ion source, a suppression electrode and a ground electrode, wherein the two electrode are supported by coaxially arranged two water cooled support tubes. A high voltage insulator ring is located on the other ... | 11/30/2010 |
| 7838842 | Dual mode ion source for ion implantation An ion source is disclosed for providing a range of ion beams consisting of either ionized clusters, such as B2Hx+, B5Hx+, B10Hx+, B18Hx+ | 11/23/2010 |
| 7834327 | Self-biasing active load circuit and related power supply for use in a charged particle beam processing system A load circuit device having a self-biasing active load circuit, and a related high voltage power supply configured to bias an optical element in a charged particle beam processing system, such as a gas cluster ion beam (GCIB) processing system. The high voltage pow... | 11/16/2010 |
| 7820979 | Pulsed ultraviolet ion source A system and method for providing a pulsed atmospheric source of ions for chemical analysis includes a chamber containing a pair of electrodes and a second chamber with the sample gas. A narrow pulse of high voltage is applied between the electrodes to form an arc w... | 10/26/2010 |
| 7812320 | Ion source element, ion implanter having the same and method of modifying the same An ion source element, an ion implanter having the ion source element and a method of modifying the ion source element are provided. In the ion source element, a chamber may have a cavity divided into a plurality of inner sections configured substantially perpendicu... | 10/12/2010 |
| 7804073 | Liquid metal ion gun An emitter of a Ga liquid metal ion source is constituted to include W12 of a base material and Ga9 of an ion source element covering a surface as construction materials. By making back-sputtered particles become elements (W and Ga) of the Ga liquid metal ion sour s... | 09/28/2010 |
| 7791041 | Ion source, ion implantation apparatus, and ion implantation method This ion source generates a ribbon-like ion beam whose dimension in the Y direction is larger than the dimension in the X direction. This ion source includes a plasma generating vessel having an ion extraction port extending in the Y direction, a plurality of cathod... | 09/07/2010 |
| 7767977 | Ion source An ion source includes an arc chamber having an extraction aperture, and a plasma sheath modulator. The plasma sheath modulator is configured to control a shape of a boundary between plasma and a plasma sheath proximate the extraction aperture. The plasma sheath mod... | 08/03/2010 |
| 7755062 | Ion source and ion implantation apparatus An ion source is to extract a ribbon-shaped ion beam longer in the Y direction in the Z direction and provided with a plasma generating chamber, a plasma electrode which is disposed near the end of the plasma generating chamber in the Z direction and has an ion extr... | 07/13/2010 |
| 7750313 | Ion source A cathode holder of a tubular shape is inserted into an opening for a cathode of a plasma generating chamber, the cathode holder positioned such that a surface thereof opposes or surrounds a side surface of a cathode. The cathode is held in the cathode holder so tha... | 07/06/2010 |
| 7737414 | Atomically sharp iridium tip A method for preparing an iridium tip with atomic sharpness. The method includes tapering an iridium wire to a needle shape and heating the iridium needle in an oxygen atmosphere. Also disclosed is an iridium needle having a pyramidal structure which terminates with... | 06/15/2010 |
| 7732787 | Ion implantation ion source, system and method An ion source is disclosed that is capable of providing ions of decaborane in commercial ion current levels to the ion extraction system of an ion implanter is provided, the ion source comprising an ionization chamber defined by walls enclosing an ionization volume,... | 06/08/2010 |
