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| Number | Title | Issue Date |
| 8164069 | Luminous body, electron beam detector using the same, scanning electron microscope, and mass analysis device A light-emitting body of rapid speed of response and high light emission intensity, and an electron beam detector, scanning electron microscope and mass spectroscope using this are provided. In the light-emitting body 10 according to the present invention, wh... | 04/24/2012 |
| 8164067 | Arrangement and method for the contrast improvement in a charged particle beam device for inspecting a specimen It is provided a charged particle beam device for inspecting a specimen, comprising a charged particle beam source adapted to generate a primary charged particle beam; an objective lens device adapted to direct the primary charged particle beam onto the specimen; an... | 04/24/2012 |
| 8164068 | Mask health monitor using a faraday probe In an ion implanter, an ion current measurement device is disposed behind a mask co-planarly with respect to a surface of a target substrate as if said target substrate was positioned on a platen. The ion current measurement device is translated across the ion beam.... | 04/24/2012 |
| 8093565 | Wind and temperature spectrometer with crossed small-deflection energy analyzer A wind and temperature spectrometer (WTS) may detect the angular and energy distributions of neutral atoms/molecules and ions in two mutually perpendicular planes. The measured energy distribution at a known angle near the peak may be used to infer the full wind vec... | 01/10/2012 |
| 8084751 | Detection arrangements in mass spectrometers An approach to extending the dynamic range of the detector of a mass spectrometer is described. In one embodiment, in the case of high intensity beams, means are provided to deflect the ion beam, after the collector slit (1), on to an attenuator (4), w... | 12/27/2011 |
| 8008631 | Method of acquiring offset deflection amount for shaped beam and lithography apparatus A method of acquiring an offset deflection amount for a shaped beam, includes forming reference images of first and second figures which can be shaped by first and second aperture plates placed on a lithography apparatus, and a reference image of a mark; forming fir... | 08/30/2011 |
| 7973290 | System and method of beam energy identification for single wafer ion implantation The present invention involves a beam energy identification system, comprising an accelerated ion beam, wherein the accelerated ion beam is scanned in a fast scan axis within a beam scanner, wherein the beam scanner is utilized to deflect the accelerated ion beam in... | 07/05/2011 |
| 7910895 | Luminous body, electron beam detector using the same, scanning electron microscope, and mass analysis device A light-emitting body of rapid speed of response and high light emission intensity, and an electron beam detector, scanning electron microscope and mass spectroscope using this are provided. In the light-emitting body 10 according to the present invention, wh... | 03/22/2011 |
| 7875860 | Charged particle beam profile measurement According to an embodiment, an apparatus for measuring the uniformity of a beam of charged particles at an exposure location includes a plurality of Faraday cups, each cup including an electrometer for determining the current collected by said cup, at least one mult... | 01/25/2011 |
| 7875859 | Ion energy analyzer and methods of manufacturing and operating An ion energy analyzer is described for use in diagnosing the ion energy distribution (IED) of ions incident on a radio frequency (RF) biased substrate immersed in plasma. The ion energy analyzer comprises an entrance grid exposed to the plasma, an ion selection gri... | 01/25/2011 |
| 7868300 | Lithography system, sensor and measuring method Lithography system, sensor and method for measuring properties of a massive amount of charged particle beams of a charged particle beam system, in particular a direct write lithography system, in which the charged particle beams ar... | 01/11/2011 |
| 7847267 | Scanning electron microscope having multiple detectors and a method for multiple detector based imaging A system and method for multi detector detection of electrons, the method includes the steps of directing a primary electron beam, through a column, to interact with an inspected object, directing, by introducing a substantial electrostatic field, electrons reflecte... | 12/07/2010 |
| 7847268 | Three modes particle detector The invention discloses a charged particle detecting apparatus for detecting positive ions, negative ions and electrons emitted from a sample, the apparatus comprising a housing, defining a chamber in its interior, which is confined by conductive walls, and has an o... | 12/07/2010 |
| 7842930 | Charged particle detector assembly, charged particle beam apparatus and method for generating an image A charged particle detector assembly comprises a particle detector, which has at least one particle sensitive region for detecting at least a portion of the spatial distribution of charged particles and for generating a two-dimensional optical signal which correlate... | 11/30/2010 |
| 7838841 | Measuring momentum for charged particle tomography Methods, apparatus and systems for detecting charged particles and obtaining tomography of a volume by measuring charged particles including measuring the momentum of a charged particle passing through a charged particle detector. Sets of position sensitive detector... | 11/23/2010 |
| 7807978 | Divergent charged particle implantation for improved transistor symmetry The present invention provides a method for implanting charged particles in a substrate and a method for manufacturing an integrated circuit. The method for implanting charged particles in a substrate, among other steps, includes projecting a beam of charged particl... | 10/05/2010 |
| 7732786 | Coupling energy in a plasmon wave to an electron beam A device for coupling energy in a plasmon wave to an electron beam includes a metal transmission line having a pointed end; a generator mechanism constructed and adapted to generate a beam of charged particles; and a detector microcircuit disposed adjacent to the ge... | 06/08/2010 |
| 7718977 | Stray charged particle removal device In order to reduce the exposure of a detector surface 180 of a photo-multiplier 160 to stray charged particles, an off-axis structure is interposed between the resonant structure and the detector surface of the photo-multiplier. By providing the off-ax... | 05/18/2010 |
| 7714299 | Particle detector A particle detector for detecting a particle beam includes a negatively charged electrode plate having a first side facing the particle beam, a second side opposite to the first side, and a through-hole extending from the first side to the second side for receiving ... | 05/11/2010 |
| 7714300 | High-speed high-efficiency solid-state electron detector One embodiment relates to a solid-state charged-particle detector. The detector includes a PIN diode and a conductive coating on the front-side of the PIN diode, wherein the front-side receives incident charged particles to be detected. In addition, the detector inc... | 05/11/2010 |
| 7696487 | Circuit pattern inspection apparatus The via chain conduction failure due to non-conduction caused by insufficient etching in a contact plug/via plug forming process can be detected precisely in a short time. For its achievement, a defect is detected at high speed by taking advantage of characteristics... | 04/13/2010 |
| 7679067 | Receiver array using shared electron beam A multi-frequency receiver for receiving plural frequencies of electromagnetic radiation (e.g., light) using a beam of charged particles shared between plural resonant structures. The direction of the beam of charged particles is selectively controlled by at least o... | 03/16/2010 |
| 7619223 | Beam current measuring instrument and beam current measuring method using same The invention provides a nondestructive measuring method and measuring apparatus that assures a high noise immunity and is capable of performing high-accuracy beam current measurements. The inventive beam current measuring apparatus includes a magnetism shielding pa... | 11/17/2009 |
| 7612347 | Charged particle beam apparatus and charged particle beam resolution measurement method A charged particle beam apparatus in accordance with one preferred form of this invention includes an irradiation unit for irradiating a charged particle beam, an instrumentation unit which performs instrumentation of a reflection signal from a mark as obtained by s... | 11/03/2009 |
| 7564043 | MCP unit, MCP detector and time of flight mass spectrometer The present invention relates to an MCP unit or the like having a structure intended to achieve a desired time response characteristic, without depending on a limitation imposed by a channel diameter of MCP. The MCP unit comprises the MCP for releasing secondary ele... | 07/21/2009 |
| 7560703 | Integrated segmented scintillation detector A signal conduction channel having a first element that receives electrons at a first end from a vacuum environment, produces photons as the electrons are received, and propagates the photons along a length of the first element to a distal second end, and a second e... | 07/14/2009 |
| 7531812 | Method and system for the directional detection of electrons in a scanning electron microscope A system detects electrons according to their emission direction in a scanning electron microscope. The system includes a scintillator electron detector and a set of electrodes focusing and controlling the electron flow. At least in two sectors of the electron flow ... | 05/12/2009 |
| 7521691 | Magnetic monitoring of a Faraday cup for an ion implanter This disclosure provides an approach for magnetic monitoring of a Faraday cup for an ion implanter. In this disclosure, there is a vacuum chamber and a Faraday cup located within the vacuum chamber. The Faraday cup is configured to move within the path of an ion bea... | 04/21/2009 |
| 7521690 | Particle detector A particle detector for detecting a particle beam includes a negatively charged electrode plate having a first side facing the particle beam, a second side opposite to the first side, and a through-hole extending from the first side to the second side for receiving ... | 04/21/2009 |
| 7511278 | Apparatus for detecting particles An apparatus for detecting particles, comprising a plurality of electrically conductive structures disposed on a support element. The structures are electrically insulated from one another and each structure can be electrically connected to an electronic read-out de... | 03/31/2009 |
| 7498585 | Method and apparatus for simultaneous detection and measurement of charged particles at one or more levels of particle flux for analysis of same A charged particle detector and method are disclosed providing for simultaneous detection and measurement of charged particles at one or more levels of particle flux in a measurement cycle. The detector provides multiple and independently selectable levels of integr... | 03/03/2009 |
| 7495230 | Using a polaron interaction zone as an interface to integrate a plasmon layer and a semiconductor detector An integrated plasmon detector includes a top layer of material adapted to generate a plasmon when excited by a beam of light incident onto a surface of the top layer, an interface layer joined to the top layer opposite from the surface of the top layer and adapted ... | 02/24/2009 |
| 7488950 | Crosswire sensor A sensor array is formed using sensor elements including first and second intersecting arrays of wires separated by radiation sensitive material. A common signal is input to the first array of the wires and signals from the second array of wires are summed to produc... | 02/10/2009 |
| 7485872 | Large area, pico-second resolution, time of flight detectors A detector for detecting a particle is disclosed. The detector includes a charge emitter that emits a charge in response to receipt of the particle, an anode for receiving the emitted charge, and electronics for determining whether there is received charge on the an... | 02/03/2009 |
| 7470915 | Detector system of secondary and backscattered electrons for a scanning electron microscope A system for detecting secondary and backscattered electrons in a scanning electron microscope includes a microporous plate (9) that is disposed between a lower scintillator (5) and an upper scintillator (12). The lower scintillator (5) f... | 12/30/2008 |
| 7462839 | Detector for variable pressure areas and an electron microscope comprising a corresponding detector A detector for scanning electron microscopes, which can be used under different pressure conditions in the specimen chamber of the electron microscope, designed for the detection of both electrons and light. For this purpose, the detector has a photodetector and a s... | 12/09/2008 |
| 7453070 | Methods and apparatus for beam density measurement in two dimensions A beam density measurement system includes a shield, a beam sensor, and an actuator. The beam sensor is positioned downstream from the shield in a direction of travel of a beam. The beam sensor is configured to sense an intensity of the beam, and the beam sensor has... | 11/18/2008 |
| 7442944 | Ion beam implant current, spot width and position tuning An ion beam tuning method, system and program product for tuning an ion implanter system are disclosed. The invention obtains an ion beam profile of the ion beam by, for example, scanning the ion beam across a profiler that is within an implant chamber; and tunes th... | 10/28/2008 |
| 7442945 | Faraday assembly of ion implantation apparatus A Faraday assembly of an ion implantation apparatus includes a Faraday cup in a vacuum chamber, a driving shaft to which the Faraday cup is connected, a motor for inserting the driving shaft further into and drawing the driving shaft out of the vacuum chamber to cau... | 10/28/2008 |
| 7442940 | Focal plane array incorporating ultra-small resonant structures A focal plane array electromagnetic radiation detector includes an array of micro-electromagnetic resonant detector cells. Each micro-electromagnetic resonant detector cell may include an ultra-small resonant structure for receiving an electromagnetic wave and adapt... | 10/28/2008 |
