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| Number | Title | Issue Date |
| 8188443 | Focusing method of charged particle beam and astigmatism adjusting method of charged particle A focusing method of a charged particle beam includes measuring a first set value to focus a beam on a position of a reference plane by using a lens coil, acquiring a first factor to change a set value of an electrostatic lens depending on a distance and a second fa... | 05/29/2012 |
| 8178850 | Chromatic aberration corrector for charged-particle beam system and correction method therefor An aberration corrector has two stages of multipole elements each of which has a thickness along the optical axis. Each multipole element produces a static electric or magnetic field of 3-fold symmetry and a static electromagnetic field of 2- or 3-fold symmetry supe... | 05/15/2012 |
| 8168956 | Scanning transmission electron microscope and method of aberration correction therefor A scanning transmission electron microscope (STEM) and method of aberration correction have autocorrelation function calculation means, aberration coefficient calculation means, and feedback control. At least two images are obtained by varying a value at which one o... | 05/01/2012 |
| 8153989 | Charged particle beam irradiating apparatus The present invention provides a charged particle beam irradiating apparatus capable of simply preventing unevenness or reduction in a peripheral portion of the dose distribution of a charged particle beam. A charged particle beam irradiating apparatus includ... | 04/10/2012 |
| 8153990 | Particle beam therapy system A particle beam therapy system that is capable of irradiating a target area with an irradiation beam suitable for a particle beam therapy using a spot scanning method includes a synchrotron, a beam transport system and an irradiation device. The beam transport syste... | 04/10/2012 |
| 8148698 | Charged particle beam writing apparatus A blanking deflector 23 is of the coaxial type and includes a rod-like inner electrode 231 and a cylindrical outer electrode 232 enclosing the inner electrode 231 such that an air gap through which the charged particle beam B passes is fo... | 04/03/2012 |
| 8143588 | Deflector array, exposure apparatus, and device manufacturing method A deflector array includes a plurality of deflectors, which deflect charged particle beams, arrayed on a substrate. Each of the plurality of deflectors includes a single opening formed in the substrate, and each of the plurality of deflectors includes a pair of elec... | 03/27/2012 |
| 8129693 | Charged particle beam column and method of operating same A charged particle beam column includes a charged particle beam source to generate a charged particle beam; an objective lens to focus the charged particle beam in an object plane; a first condenser lens disposed in a beam path of the charged particle beam between t... | 03/06/2012 |
| 8129695 | System and method for controlling deflection of a charged particle beam within a graded electrostatic lens A method and apparatus for controlling deflection, deceleration, and focus of an ion beam are disclosed. The apparatus may include a graded deflection/deceleration lens including a plurality of upper and lower electrodes disposed on opposite sides of an ion beam, as... | 03/06/2012 |
| 8129694 | Negative ion beam source vacuum method and apparatus used in conjunction with a charged particle cancer therapy system The invention comprises a negative ion beam source vacuum method and apparatus used as part of an ion beam injection system, which is used in conjunction with multi-axis charged particle or proton beam radiation therapy of cancerous tumors. The negative ion beam sou... | 03/06/2012 |
| 8124940 | Charged particle beam apparatus Disclosed herein is a scanning electron microscope having a function for positioning an object point of an objective lens at a defined position even under an electronic optical condition in which it is difficult to accurately control the position of the object point... | 02/28/2012 |
| 8110813 | Charged particle optical system comprising an electrostatic deflector A charged particle optical system comprising a beamlet generator for generating a plurality of beamlets of charged particles and an electrostatic deflector for deflecting the beamlets. The electrostatic deflector comprises first and second electrodes adapted for con... | 02/07/2012 |
| 8106366 | Ion beam control apparatus and method Provided are an ion beam control apparatus and a control method for controlling an ion beam energy expansion level and an ion beam size in a radial direction. An ion beam control apparatus Sa is provided with an ion beam generating unit 2, and an ion beam con... | 01/31/2012 |
| 8093563 | Ion beam stabilization Ion microscope methods and systems are disclosed. In general, the systems and methods provide high ion beam stability. ... | 01/10/2012 |
| 8093564 | Ion beam focusing lens method and apparatus used in conjunction with a charged particle cancer therapy system The invention comprises an ion beam focusing method and apparatus used as part of an ion beam injection system, which is used in conjunction with multi-axis charged particle or proton beam radiation therapy of cancerous tumors. The ion beam focusing system includes ... | 01/10/2012 |
| 8089051 | Electron reflector with multiple reflective modes One embodiment relates to a method of controllably reflecting electrons from an array of electron reflectors. An incident electron beam is formed from an electron source, and the incident beam is directed to the array of electron reflectors. A first plurality of the... | 01/03/2012 |
| 8084749 | Electrode for influencing ion motion in mass spectrometers An electrode for influencing ion motion in mass spectrometers, having a dielectric substrate and a conducting layer on portions of the substrate, wherein peripheral borders, edges or convex shapes of the conducting layer adjoin free regions of the substrate. Accordi... | 12/27/2011 |
| 8084750 | Curved ion guide with varying ion deflecting field and related methods An ion guide includes a plurality of curved electrodes and an ion deflecting device. The electrodes are arranged about and radially spaced from a central curved axis, and circumscribe a curved ion guide region from an ion entrance to an ion exit. The ion deflecting ... | 12/27/2011 |
| 8080809 | Charged particle beam writing apparatus and method thereof A charged particle beam writing apparatus includes a unit emitting a charged particle beam, a stage on which a target workpiece to be written is placed, a unit correcting a reference position of a small region in a writing region, based on a pattern distortion obtai... | 12/20/2011 |
| 8076649 | Charged particle beam writing apparatus and optical axis deviation correcting method for charged particle beam A charged particle beam writing apparatus includes a stage on which a target object is placed; an emitting unit configured to emit a charged particle beam to the stage side; a blocking unit arranged between the emitting unit and the stage and configured to block the... | 12/13/2011 |
| 8071954 | Hybrid phase plate The invention relates to a hybrid phase plate for use in a TEM. The phase plate according to the invention resembles a Boersch phase plate in which a Zernike phase plate is mounted. As a result the phase plate according to the invention resembles a Boersch phase pla... | 12/06/2011 |
| 8067747 | Parallel plate electrode arrangement apparatus and method A system for guiding an ion beam along an axis (Z), comprises at least one section having upper flat plate strip electrodes (Iu, 2u, 3u, 4u and 5u) and lower flat plate strip electrodes (Id, 2d... | 11/29/2011 |
| 8049181 | Method of suppressing beam position drift, method of suppressing beam dimension drift, and charged particle beam lithography system A lithography method and system have means for determining a convergence value dc from a relation of beam current to beam position drift (or beam dimension drift) produced in the past; means for finding a beam current i(t) as a function of the convergence... | 11/01/2011 |
| 8049180 | Achromatic mass separator An ion beam device is described. The ion beam device includes an ion beam source for generating an ion beam, the ion beam being emitted along a first axis, an aperture unit adapted to shape the ion beam, and an achromatic deflection unit adapted to deflect ions of t... | 11/01/2011 |
| 8044369 | Electrostatic deflection control circuit and method of electronic beam measuring apparatus An electrostatic deflection circuit and method of an electronic beam measuring apparatus which can achieve the high precision of the electronic beam measuring and contribute to the simplification of the structure of the apparatus is provided. In an analog arithmetic... | 10/25/2011 |
| 8039813 | Charged particle-optical systems, methods and components The present invention relates to a particle-optical component comprising a first multi-aperture plate, and a second multi-aperture plate forming a gap between them; wherein a plurality of apertures of the first multi-aperture plate is arranged such that each apertur... | 10/18/2011 |
| 8035086 | Aberration correction apparatus that corrects spherical aberration of charged particle apparatus To provide an aberration correction configuration that can realize both an aberration correction function for a long focus and an aberration correction function for a short focus. While having a conventional aberration correction apparatus configuration that has two... | 10/11/2011 |
| 8030620 | System and method for nano-pantography A method is provided for creating a plurality of substantially uniform nano-scale features in a substantially parallel manner in which an array of micro-lenses is positioned on a surface of a substrate, where each micro-lens includes a hole such that the bottom of t... | 10/04/2011 |
| 8026492 | Dual mode gas field ion source A focused ion beam device is provided, including: an ion beam column adapted to house a gas field ion source emitter with an emitter tip and an emitter area for generating ions, a heating means adapted to heat the emitter tip, one or more gas inlets adapted to intro... | 09/27/2011 |
| 8026491 | Charged particle beam apparatus and method for charged particle beam adjustment A charged particle beam apparatus facilitating adjusting a beam center axis of a charged particle beam in a case where optical conditions are modified or in a case where the beam center axis of the charged particle beam is moved due to state variation of the apparat... | 09/27/2011 |
| 8008630 | Ion implantation apparatus and method of correcting deviation angle of ion beam To increase a transport efficiency of an ion beam by correcting Y-direction diffusion caused by the space charge effect of the ion beam between an ion beam deflector, which separates the ion beam and neutrons from each other, and a target. An ion implantation appara... | 08/30/2011 |
| 8008629 | Charged particle beam device and method for inspecting specimen A charged particle beam device is provided. The device includes a primary objective lens for focusing a primary charged particle beam, the primary objective lens defining an optical axis, a specimen stage defining a specimen location area, a deflection unit for defl... | 08/30/2011 |
| 8003952 | Integrated deflectors for beam alignment and blanking in charged particle columns A charged particle beam column package includes an assembly (e.g., comprising a plurality of layers, which can have a component coupled to one of the layers), and at least one deflector between an extractor and aperture of the assembly. Further, at least one of the ... | 08/23/2011 |
| 7989777 | Method for inspecting settling time of deflection amplifier, and method for judging failure of deflection amplifier A method for inspecting a settling time of a deflection amplifier includes setting a settling time, performing shooting a plurality of times alternately to project two patterns of different types which are shaped by making a charged particle beam pass through a firs... | 08/02/2011 |
| 7982192 | Beam processing apparatus In a beam processing apparatus including a beam scanner having a two electrodes type deflection scanning electrode, the beam scanner further includes shielding suppression electrode assemblies respectively at vicinities of upstream side and downstream side of the tw... | 07/19/2011 |
| 7977649 | Plasma ion source mass spectrometer Provided is a plasma ion source mass spectrometer with an ion deflector lens having an improved removal ratio of photons and neutral particles as compared with the conventional art while an ion transmittance is maintained. The ion deflector includes an input side pl... | 07/12/2011 |
| 7977648 | Scanning aperture ion beam modulator A modulator for ions such as protons employs multiple shutter pairs to create independently movable apertures effecting a multiple pencil beam treatment of the patient thereby increasing treatment speed by eliminating the need for a custom compensator. ... | 07/12/2011 |
| 7973289 | Method for producing image contrast by phase shifting in electron optics According to the invention, the image contrast in electron optics can be improved without causing aberrations that are no longer tolerable by using, for production and correction of the at least one anamorphic image, quadrupole fields before and after this image who... | 07/05/2011 |
| 7960703 | Charged-particle beam lithography apparatus and device manufacturing method A charged-particle beam lithography apparatus includes a projection system that projects a charged-particle beam, and images a pattern on a substrate with the projected charged-particle beam. The projection system has a symmetrical magnetic doublet lens configured t... | 06/14/2011 |
| 7939809 | Charged particle beam extraction method and apparatus used in conjunction with a charged particle cancer therapy system The invention comprises a charged particle beam extraction method and apparatus used in conjunction with charged particle beam radiation therapy of cancerous tumors. The system uses a radio-frequency (RF) cavity system to induce betatron oscillation of a charged par... | 05/10/2011 |
