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| Number | Title | Issue Date |
| 8188429 | Scanning electron microscope for determining quality of a semiconductor pattern Disclosed herein is a scanning electron microscope capable of determining quality of a semiconductor pattern, deformation of contact-holes, and inclination of the sidewall of the contact-holes, respectively. To that end, the scanning electron microscope includes ima... | 05/29/2012 |
| 8173963 | Phase-shifting element and particle beam device having a phase-shifting element A phase-shifting element for shifting a phase of at least a portion of a particle beam is described, as well as a particle beam device having a phase-shifting element of this type. In the phase-shifting element and the particle beam device having a phase-shifting el... | 05/08/2012 |
| 8158940 | Magnetic domain imaging system A magnetic domain imaging system is offered which permits application of a strong magnetic field to a specimen. The imaging system includes a transmission electron microscope having an objective lens. The specimen that is magnetic in nature is placed in the upper po... | 04/17/2012 |
| 8153969 | Inspection method and inspection system using charged particle beam In an electric immersion lens having high resolution capability, secondary electrons generated from a specimen are accelerated to suppress the dependency of rotational action of the secondary electrons applied thereto by an objective lens upon energy levels of the s... | 04/10/2012 |
| 8153970 | Scanning electron microscope A scanning electron microscope for digitally processing an image signal to secure the largest focal depth and the best resolution in accordance with the magnification for observation is disclosed. The angle of aperture of an optical system having a plurality of conv... | 04/10/2012 |
| 8148685 | Transmission electron microscope micro-grid A transmission electron microscope (TEM) micro-grid includes a base and a plurality of electron transmission portions. The base includes a plurality of first carbon nanotubes and the first carbon nanotubes have a first density. Each electron transmission portions in... | 04/03/2012 |
| 8124934 | Scanning electron microscope It is facilitated in a scanning electron microscope to save the labor of executing the reproduction test, conduct basic analysis on a problem caused in execution of the automatic observation process, and confirm details resulting in the error. Upon detecting an erro... | 02/28/2012 |
| 8115169 | Method and apparatus of pattern inspection and semiconductor inspection system using the same A pattern inspection apparatus can be provided, for example, in a scanning electron microscope system. When patterns of a plurality of layers are included in a SEM image, the apparatus separates the patterns according to each layer by using design data of the plural... | 02/14/2012 |
| 8110800 | Scanning electron microscope system and method for measuring dimensions of patterns formed on semiconductor device by using the system The present invention is for providing a scanning electron microscope system adapted to output contour information fitting in with the real pattern edge end of a sample, and is arranged to generate a local projection waveform by projecting the scanning electron micr... | 02/07/2012 |
| 8110801 | Layered scanning charged particle microscope package for a charged particle and radiation detector A scanning charged particle microscope includes a layered charged particle beam column package; a sample holder; and a layered micro-channel plate detector package located between the column package and the sample holder. ... | 02/07/2012 |
| 8106357 | Scanning electron microscope and method for processing an image obtained by the scanning electron microscope In the case where a specimen is imaged by a scanning electron microscope, it is intended to acquire an image of a high quality having a noise component reduced, thereby to improve the precision of an image processing. The intensity distribution of a beam is calculat... | 01/31/2012 |
| 8106358 | Layered scanning charged particle microscope with differential pumping aperture A scanning charged particle apparatus includes a layered charged particle beam column package; a sample holder; and a layered differential pumping aperture that assists in maintaining two different vacuums. ... | 01/31/2012 |
| 8093558 | Environmental cell for a particle-optical apparatus The invention relates to an environmental cell for use in e.g. an electron microscope. The environmental cell shows an aperture (15) for passing the beam produced by the electron microscope to a sample (6) placed inside the environmental cell. The envi... | 01/10/2012 |
| 8080790 | Scanning electron microscope An object of the present invention is to provide a scanning electron microscope suitable for monitoring apparatus conditions of the microscope itself, irrespective of the presence of charge-up, specimen inclination, and the like. In order to achieve the object, prop... | 12/20/2011 |
| 8080791 | X-ray detector for electron microscope Multiple detectors arranged in a ring within a specimen chamber provide a large solid angle of collection. The detectors preferably include a shutter and a cold shield that reduce ice formation on the detector. By providing detectors surrounding the sample, a large ... | 12/20/2011 |
| 8071944 | Portable electron microscope using micro-column Provided is a portable electron microscope using a microcolumn. The portable electron microscope includes a microcolumn, a low vacuum pump, a high vacuum pump, an ultra-high vacuum ion pump, a first chamber for receiving and fixing the microcolumn and a sample to be... | 12/06/2011 |
| 8067732 | Electron beam apparatus An electron beam emitted from an electron gun (G) forms a reduced image on a sample (S) through a non-dispersion Wien-filter (5-1), an electromagnetic deflector (11-1), a beam separator (12-1), and a tablet lens (17- | 11/29/2011 |
| 8067733 | Scanning electron microscope having a monochromator A scanning electron microscope having a monochromator that can automatically adjust an electron beam entering the monochromator and operating conditions of the monochromator. The scanning electron microscope having a monochromator is equipped with, between an electr... | 11/29/2011 |
| 8058614 | Electron microscope for inspecting and processing of an object with miniaturized structures and method thereof The disclosure relates to a method for manufacturing an object with miniaturized structures. The method involves processing the object by supplying reaction gas during concurrent directing an electron beam onto a location to be processed, to deposit material or abla... | 11/15/2011 |
| 8039796 | Phase contrast electron microscope A phase contrast electron microscope has an objective (8) with a back focal plane (10), a first diffraction lens (11), which images the back focal plane (10) of the objective (8) magnified into a diffraction intermediate image plan... | 10/18/2011 |
| 8030614 | Charged particle beam apparatus and dimension measuring method There is provided a charged particle beam apparatus which allows implementation of a high-reliability and high-accuracy dimension measurement even if height differences exist on the surface of a sample. The charged particle beam apparatus includes the following conf... | 10/04/2011 |
| 8026482 | Charged particle beam apparatus and control method therefor Potentials at a plurality of points on a diameter of a semiconductor wafer 13 are measured actually. Then, a potential distribution on the diameter is obtained by spline interpolation of potentials between the actually-measured points adjacent in the diameter... | 09/27/2011 |
| 8022365 | Charged particle beam equipments, and charged particle beam microscope In an electron microscope to which a phase retrieval method is applied, an image size determined by a pixel size p of a diffraction pattern, a camera length L, and a wavelength λ of an illumination beam is allowed to have a certain relation with an illumination are... | 09/20/2011 |
| 7989768 | Scanning electron microscope A scanning electron microscope having a charged particle beam that when in a state being irradiated toward a sample, a voltage is applied to the sample so that the charged particle beam does not reach the sample. The scanning electron microscope also detects informa... | 08/02/2011 |
| 7977633 | Phase plate, in particular for an electron microscope The invention concerns a phase plate, in particular for an electron microscope, which is disposed in an electron beam path (4), comprises at least one thin film (8, 8a-h), which thin film is at least partially permeable to electron beams,... | 07/12/2011 |
| 7973283 | Method for regulating scanning sample surface charge in continuous and leap-and-scan scanning mode imaging process A method for regulating sample surface charge has been proposed in this invention. The processes of applying a charged particle beam to a first area and applying a flood energized beam gun with gaseous molecules to a second area are executed in the method when the s... | 07/05/2011 |
| 7973282 | Charged particle beam apparatus and dimension measuring method There is provided a charged particle beam apparatus which allows implementation of a high-reliability and high-accuracy dimension measurement even if height differences exist on the surface of a sample. The charged particle beam apparatus includes the following conf... | 07/05/2011 |
| 7964845 | Charged particle beam device The charged particle beam device of this invention separately detects secondary signal particles emitted from the surface of a sample, dark field signal particles scattered within and transmitted through the sample, bright field signal particles transmitted through ... | 06/21/2011 |
| 7964846 | Retractable lens-coupled electron microscope camera with image sensor in electron microscope vacuum chamber A lens-coupled camera for an electron microscope is disclosed. The camera includes a CCD, a scintillator, at least one lens, and a mirror, such that at least the CCD and scintillator are housed in the vacuum chamber of the electron microscope, which has only one vac... | 06/21/2011 |
| 7952074 | Method and apparatus for inspecting integrated circuit pattern A circuit pattern inspection method and an apparatus therefore, in which the whole of a portion to be inspected of a sample to be inspected is made to be in a predetermined changed state, the portion to be inspected is irradiated with an image-forming high-density e... | 05/31/2011 |
| 7939801 | Electron beam observation device using pre-specimen magnetic field as image-forming lens and specimen observation method An electron beam observation device includes a mechanism which disposes a specimen at an upstream side in an electron beam traveling direction outside an objective lens, from which an image is transferred under a magnification of ⅕ to 1/30, in addition to an insid... | 05/10/2011 |
| 7935927 | Method and apparatus for observing a specimen A method and device for observing a specimen, in which a convergent electron beam is irradiated and scanned from a desired direction, on a surface of a calibration substrate on which a pattern with a known shape is formed, and a beam SEM image of the pattern formed ... | 05/03/2011 |
| 7923686 | Transmission electron microscope An apparatus which permits high-angle annular dark-field (HAADF) imaging comprises an electron gun, a specimen chamber in which a specimen is set, a gas cylinder for supplying environmental gas around the surface of the specimen through both a gas flow rate controll... | 04/12/2011 |
| 7902506 | Phase-shifting element and particle beam device having a phase-shifting element A phase-shifting element for shifting a phase of at least a portion of a particle beam is described, as well as a article beam device having a phase-shifting element of this type. In the phase-shifting element and the particle beam device having a phase-shifting ele... | 03/08/2011 |
| 7884326 | Manipulator for rotating and translating a sample holder A manipulator for use in e.g. a Transmission Electron Microscope (TEM) is described, said manipulator capable of rotating and translating a sample holder (4). The manipulator clasps the round sample holder between two members (3A, 3B), said memb... | 02/08/2011 |
| 7880144 | Liquid medium for preventing charge-up in electron microscope and method of observing sample using the same An object of the present invention is to provide a medium; a specimen; a method for preparing the specimen; a method for observing the specimen; a sample cell; and an electron microscope capable of easily solving the problem of charge-up and further capable of obser... | 02/01/2011 |
| 7875851 | Advanced process control framework using two-dimensional image analysis The claimed subject matter provides a system and/or a method that facilitates utilizing a resolution enhancement for a circuit feature. A scanning electron microscope component (104, 204, 304, 404) can provide at least one two-dimensional image of the circuit... | 01/25/2011 |
| 7872232 | Electronic microscope apparatus To enable measurement of an elastically scattered electron image, a characteristic-X-ray-based element image and an electron-beam-energy-spectroscopy-based element image with a high S/N and high spatial resolution in an electronic microscope having a function to pro... | 01/18/2011 |
| 7868290 | Material processing system and method A material processing system for processing a work piece is provided. The material processing is effected by supplying a reactive gas and energetic radiation for activation of the reactive gas to a surrounding of a location of the work piece to be processed. The rad... | 01/11/2011 |
| 7855364 | Projection electronic microscope for reducing geometric aberration and space charge effect A projection electronic microscope is provided for improving geometric aberration and a space charge effect within a zooming range using a zoom type transfer lens system in a projection/image formation optical system. The projection electronic microscope comprises a... | 12/21/2010 |
