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| Number | Title | Issue Date |
| 8158939 | High resolution gas field ion column An ion beam apparatus and a method for providing an energy-filtered primary ion beam are described. Therein, a primary ion beam having an asymmetric first energy distribution is generated by means of an ion source. The primary ion beam is energy filtered using, for ... | 04/17/2012 |
| 8108942 | Probe microscope A probe microscope includes a cantilever having a probe, a displacement detecting optical system, an observation optical system, an objective lens, and a parallel glass. The displacement detecting optical system includes a first light source and a light detecting el... | 01/31/2012 |
| 8097847 | Particle-optical systems and arrangements and particle-optical components for such systems and arrangements A particle-optical arrangement comprises a charged-particle source for generating a beam of charged particles; a multi-aperture plate arranged in a beam path of the beam of charged particles, wherein the multi-aperture plate has a plurality of apertures formed there... | 01/17/2012 |
| 8074291 | Harmonic correcting controller for a scanning probe microscope A scanning probe microscope and method for operating the same to correct for errors introduced by a repetitive scanning motion are disclosed. The microscope includes an actuator that moves the probe tip relative to the sample in three directions. The actuator execut... | 12/06/2011 |
| 8063364 | Particle optical device with magnet assembly A particle optical apparatus has a particle source for generating at least one beam of charged particles, and a magnet arrangement having two pole plates, which are arranged spaced apart from one another, such that the at least one beam of charged particles in opera... | 11/22/2011 |
| 8053725 | Beam quality in FIB systems Applicants have found that the asymmetrical energy distribution of ions from an ion source allow chromatic aberration to be reduced by filtering ions in the low energy beam tail without significantly reducing processing time. A preferred embodiment includes within a... | 11/08/2011 |
| 8003939 | Foreign matter or abnormal unsmoothness inspection apparatus and foreign matter or abnormal unsmoothness inspection method A foreign matter detecting apparatus includes a detecting device for detecting foreign matter by measuring smoothness of a surface of an object undergoing measurement, a marking device for providing a dent on the surface of the object with a predetermined horizontal... | 08/23/2011 |
| 7982187 | Method and apparatus for photon-assisted evaluation of a plasma Described are a method and apparatus for evaluating a least one characteristic of a plasma. The described method uses photons to raise the excitation state to or past the point of ionization of atoms which will traverse the plasma to be evaluated. The ionization of ... | 07/19/2011 |
| 7947953 | Charged particle detection apparatus and detection method A detection apparatus for use in a charged particle beam device is provided. The detection apparatus includes a separation field generating portion adapted to generate a separation field separating positively and negatively charged secondary particles, at least one ... | 05/24/2011 |
| 7902505 | Charged particle beam apparatus When a sample includes repeated cells, a scale pattern corresponding to the repeated cells is generated. Next, the scale pattern generated is superimposed on the image of the repeated cells of the sample, thereby identifying a destination cell. Moreover, disposition... | 03/08/2011 |
| 7897918 | System and method for focused ion beam data analysis A system and method for improving FIB milling endpointing operations. The methods involve generating real-time images of the area being milled and real-time graphical plots of pixel intensities with an increased sensitivity over native FIB system generated images an... | 03/01/2011 |
| 7872230 | Micro-sample processing method, observation method and apparatus As sample sizes have decreased to microscopic levels, it has become desirable to establish a method for thin film processing and observation with a high level of positional accuracy, especially for materials which are vulnerable to electron beam irradiation. The tec... | 01/18/2011 |
| 7858937 | Mass spectrometer A sample S is irradiated with a two-dimensionally spread ray of laser light to simultaneously ionize substances within a two-dimensional area on the sample. The resultant ions are mass-separated by a TOF mass separator 4 without changing the interrelationship... | 12/28/2010 |
| 7804068 | Determining dopant information Methods that include using a noble gas ion beam to determine dopant information for a sample are disclosed, the dopant information including dopant concentration in the sample, dopant location in the sample, or both. ... | 09/28/2010 |
| 7786436 | FIB based open via analysis and repair An improved method, apparatus, and control/guiding software for localizing, characterizing, and correcting defects in integrated circuits, particularly open or resistive contact/via defects and metal bridging defects, using FIB technology. An apparatus for identifyi... | 08/31/2010 |
| 7781732 | Real-time S-parameter imager Disclosed is a fully automated system capable of producing high quality real-time S-parameter images. It is a useful and versatile tool in Material Science and Solid State Technology for determining the location of subsurface defect types and concentrations on bulk-... | 08/24/2010 |
| 7772552 | Methods and devices for atom probe mass resolution enhancement In an atom probe or other mass spectrometer wherein a specimen is subjected to ionizing pulses (voltage pulses, thermal pulses, etc.) which induce field evaporation of ions from the specimen, the evaporated ions are then subjected to corrective pulses which are sync... | 08/10/2010 |
| 7728293 | Structures and methods for measuring beam angle in an ion implanter The present invention involves an ion beam angular measurement apparatus for providing feedback for a predetermined set ion beam angle comprising an arrangement of composite pillars formed on an insulating material and wherein the composite pillars selectively allow... | 06/01/2010 |
| 7683318 | Laser atom probe A laser atom probe (100) situates a counter electrode between a specimen mount and a detector (106), and provides a laser (116) having its beam (122) aligned to illuminate the specimen (104) through the aperture (110) of the... | 03/23/2010 |
| 7629577 | Foreign matter or abnormal unsmoothness inspection apparatus and foreign matter or abnormal unsmoothness inspection method A foreign matter or abnormal unsmoothness inspection apparatus is constituted by a detecting member for detecting a foreign matter or abnormal unsmoothness by measuring smoothness of a surface of a substrate-like measuring object, a marking device for providing an d... | 12/08/2009 |
| 7601953 | Systems and methods for a gas field ion microscope In one aspect the invention provides a gas field ion microscope that includes an ion source in connection with an optical column, such that an ion beam generated at the ion source travels through the optical column and impinges on a sample. The ion source includes a... | 10/13/2009 |
| 7579590 | Method of measuring thin layers using SIMS A method for measuring the thickness of a layer is provided, comprising (a) providing a structure (101) comprising a first layer disposed on a second layer; (b) impinging (103) the structure with a first ion beam comprising a first isotope, thereby spu... | 08/25/2009 |
| 7535000 | Method and system for identifying events in FIB A method, system and apparatus are presented for real time analysis of images in a focused beam system. In various embodiments, marker positions are displayed as graphical elements on the image of a sample being processed. Selected characteristics of all or a portio... | 05/19/2009 |
| 7531797 | Probe-holding apparatus, sample-obtaining apparatus, sample-processing apparatus, sample-processing method and sample-evaluating method A sample processing apparatus includes a stage for supporting a sample, a first temperature controller for controlling a temperature of the sample, an ion beam generator for irradiating the sample with an ion beam, and a detector for detecting a signal emitted from ... | 05/12/2009 |
| 7511270 | Nanotube probe and a method for manufacturing the same The present invention realizes a nanotube probe with high durability that can be manufactured in short time with less impurities adhered to the holder sustaining the nanotube. The nanotube probe according to this invention is constructed by fastening a nanotube 8... | 03/31/2009 |
| 7504623 | Device and method for milling of material using ions A milling device is disclosed for the preparation of microscopy specimens or other surface science applications through the use of ion bombardment. The device provides the ability to utilize both gross and fine modification of the specimen surface through the use of... | 03/17/2009 |
| 7501624 | System and method for detecting concealed nuclear materials, radiological materials and chemical explosives A system for producing beams of high energy photons and neutrons and a method to use such beams to actively interrogate and detect concealed nuclear materials, radiological materials, and chemical explosives. ... | 03/10/2009 |
| 7442927 | Scanning ion probe systems and methods of use thereof Briefly described, embodiments of this disclosure, among others, include scanning ion probe systems, methods of use thereof, scanning ion source systems, methods of use thereof, scanning ion probe mass spectrometry systems, methods of use thereof, methods of simulta... | 10/28/2008 |
| 7442922 | Method for locally highly resolved, mass-spectroscopic characterization of surfaces using scanning probe technology The invention relates to a combined method in which a high-resolution image of a sample surface is recorded by means of scanning force microscopy and the locally high-resolution, chemical nature (which is correlated with this) of the sample surface is measured by me... | 10/28/2008 |
| 7442928 | Charged particle beam apparatus When a sample includes repeated cells, a scale pattern corresponding to the repeated cells is generated. Next, the scale pattern generated is superimposed on the image of the repeated cells of the sample, thereby identifying a destination cell. Moreover, disposition... | 10/28/2008 |
| 7442942 | Charged particle beam apparatus To include a focused ion beam apparatus fabricating a sliced specimen by processing a specimen as well as observing the sliced specimen, a scanning electron microscope observing the slice specimen, a gas-ion beam irradiation apparatus performing finishing processing... | 10/28/2008 |
| 7442924 | Repetitive circumferential milling for sample preparation A method of sample extraction entails making multiple, overlapping cuts using a beam, such as a focused ion beam, to create a trench around a sample, and then undercutting the sample to free it. Because the sidewalls of the cut are not vertical, the overlapping cuts... | 10/28/2008 |
| 7439501 | Direct write nanolithography using heated tip A device for sculpting a substrate includes a vertically displaceable probe having a nano-scale dimensioned probe tip. A displacement mechanism is configured to adjust a vertical displacement between the probe tip and the substrate. A heating mechanism selectively h... | 10/21/2008 |
| 7435957 | Charged particle beam equipment and charged particle microscopy On the basis of a displacement of the field of view before and after a deflection of a charged particle beam, extracted from a first specimen image, including a displacement of the field of view recorded by causing a charged particle beam to deflect by a predetermin... | 10/14/2008 |
| 7427753 | Method of cross-section milling with focused ion beam (FIB) device A method of milling a cross section of a wafer and a milling device. The method includes a coarse scanning of at least two milling frames and a fine scanning of at least one milling frame. The milling device is adapted to cross-section milling of a wafer, said milli... | 09/23/2008 |
| 7423269 | Automated feature analysis with off-axis tilting One embodiment relates to a method of automated microalignment using off-axis beam tilting. Image data is collected from a region of interest on a substrate at multiple beam tilts. Potential edges of a feature to be identified in the region are determined, and compu... | 09/09/2008 |
| 7423266 | Sample height regulating method, sample observing method, sample processing method and charged particle beam apparatus In a sample height regulating method, an area including the observation point on the sample is scan-irradiated with a first charged particle beam to obtain a first secondary electron image including the observation point. An area including the observation point on t... | 09/09/2008 |
| 7420166 | Real-time S-parameter imager Disclosed is a fully automated system capable of producing high quality real-time S-parameter images. It is a useful and versatile tool in Material Science and Solid State Technology for determining the location of subsurface defect types and concentrations in bulk-... | 09/02/2008 |
| 7417444 | Method and apparatus for inspecting integrated circuit pattern A circuit pattern inspection method and an apparatus therefor, in which the whole of a portion to be inspected of a sample to be inspected is made to be in a predetermined charged state, the portion to be inspected is irradiated with an image-forming high-density el... | 08/26/2008 |
| 7414243 | Transmission ion microscope Transmission ion microscope. A bright light ion source generates an ion beam that is focused on a sample by an electrostatic condenser lens means. An objective lens focuses the ion beam transmitted through the sample to form an image. A projector lens enlarges the i... | 08/19/2008 |
