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| Number | Title | Issue Date |
| 8191168 | Method of preparing a transmission electron microscope sample and a sample piece for a transmission electron microscope Provided is a method of preparing a sample piece for a transmission electron microscope, the sample piece for a transmission electron microscope including a substantially planar finished surface which can be observed with the transmission electron microscope and a g... | 05/29/2012 |
| 8178838 | High-density FIB-SEM tomography via real-time imaging A method and an apparatus are for three-dimensional tomographic image generation in a scanning electron microscope system. At least two longitudinal marks are provided on the top surface of the sample which include an angle therebetween. In consecutive image recordi... | 05/15/2012 |
| 8178837 | Logical CAD navigation for device characteristics evaluation system A navigation system for easily determining defective positions is provided. In the case of CAD navigation to defective positions, logical information for indicating defective positions is created in a CAD format, instead of CAD data of physical information indicatin... | 05/15/2012 |
| 8168947 | Electrostatic latent image evaluation device, electrostatic latent image evaluation method, electrophotographic photoreceptor, and image forming device An electrostatic latent image evaluation device includes an optical scanner configured to irradiate laser light of a wavelength of 400 nm-800 nm on a photoreceptor sample, and form an electrostatic latent image, an electron gun configured to irradiate a charged part... | 05/01/2012 |
| 8158937 | Particle beam system A particle beam system is offered which can prevent contamination of the inside of the objective lens, the objective lens being located at the front end of the optical column. The particle beam system has an optical column equipped with a particle beam source for em... | 04/17/2012 |
| 8153966 | Electrode unit and charged particle beam device A high-resolution sample image is acquired by eliminating both of charge over an entire sample (global charge) and charge in a local region irradiated with a primary charged particle beam (local charge). An electrode unit (50) according to the present inventi... | 04/10/2012 |
| 8124932 | Charged particle beam apparatus and method adjusting axis of aperture A charged particle beam apparatus includes a charged particle source, an aperture, an object lens, an observing unit, an aperture driving portion, and a control portion. The control portion includes a spot pattern forming portion that forms a plurality of spot patte... | 02/28/2012 |
| 8093556 | Device and method for analyzing a sample A device and method for analyzing a sample, in particular a sample which contains low-density materials, is provided. Ions of a predefined mass and/or a predefined elementary charge are selected from a plurality of ions. The selected ions are directed onto the sampl... | 01/10/2012 |
| 8074292 | High resolution wide angle tomographic probe The present invention concerns the enhancing of the mass resolution of wide angle tomographic atom probes. The invention consists of an atom probe also comprising a sample-holding device and a detector which are separated from one another by a distance L and enclose... | 12/06/2011 |
| 8071943 | Mask inspection apparatus and image creation method Provided is a mask inspection apparatus including: emitting unit for emitting electron beams onto a sample; electron detecting unit for detecting the quantity of electrons produced, by the emission of the electron beams, from the sample with patterns formed thereon;... | 12/06/2011 |
| 8051493 | Probe microscopy and probe position monitoring apparatus A method of determining the position of a probe tip. An evanescent electromagnetic field is generated extending beyond an interface boundary between a first medium, having a first refractive index, and a second medium, having a second refractive index which is great... | 11/01/2011 |
| 8046843 | Nanometer scale instrument for biochemically, chemically, or catalytically interacting with a sample material An instrument includes a probe having a porous tip, a tip positioning apparatus to position the tip with respect to a sample material, a probe positioning apparatus to position the probe and sample material with respect to each other, and a controller. The controlle... | 10/25/2011 |
| 8026481 | Charged particle apparatus, scanning electron microscope, and sample inspection method An object of the invention is to be able to select easily and quickly inspection recipes which are appropriate to samples from any number of inspection recipes. A calculating device displays a plurality of inspection recipes on the GUI. An inspection recipe includes... | 09/27/2011 |
| 8011016 | SPM probe with shortened cantilever An SPM probe with an elongated support element and a cantilever projecting beyond the front face of the support element and carrying a scanning tip, with the cantilever arranged at a front face side of the support element of the probe, protruding there from a front ... | 08/30/2011 |
| 7994476 | Apparatus and method for enhancing voltage contrast of a wafer A system for electrically testing a semiconductor wafer, the system including (a) at least one charged particle beam focus effecting component and (b) at least one detector adapted to collect charged particles scattered from the wafer; wherein the system is adapted ... | 08/09/2011 |
| 7989766 | Sample inspection apparatus A sample inspection apparatus in which a fault in a semiconductor sample can be measured and analyzed efficiently. A plurality of probes are brought into contact with the sample. The sample is irradiated with an electron beam while a current flowing through the prob... | 08/02/2011 |
| 7982186 | Method and apparatus for obtaining images by raster scanning charged particle beam over patterned substrate on a continuous mode stage A method of raster scanning a sample on a continuously moving stage for charged-particle beam imaging said sample is disclosed. The method includes line scanning a charged-particle beam across a surface of the sample repeatedly to form on the surface at least one 2-... | 07/19/2011 |
| 7968843 | Method and apparatus for simultaneous SEM and optical examination Method and apparatus capable of observing a liquid sample. An optical image of the sample and an image using a primary beam, such as an electron beam or charged-particle beam, can be obtained at the same time. The apparatus has a film including a first surface on wh... | 06/28/2011 |
| 7960695 | Micromachined electron or ion-beam source and secondary pickup for scanning probe microscopy or object modification An e-beam or ion beam imaging and exposure system is built into the end of an AFM cantilever which images using the scanning capabilities built into the AFM. In one embodiment, a boron doped diamond cold cathode is formed into the cantilever with an associated accel... | 06/14/2011 |
| 7958563 | Method for using an atomic force microscope The present invention relates to a method of using an atomic force microscope comprising exciting natural lower and higher vibration modes of a microlever (M) placed on a sample, and analyzing the variation of one variable of a first output signal (Ai cos... | 06/07/2011 |
| 7956324 | Charged particle beam apparatus for forming a specimen image The invention provides a charged particle beam apparatus capable of preventing image errors in a display image and capturing a clear display image. A display image displayed on a display unit has a rectangular shape having sides that are substantially parallel to co... | 06/07/2011 |
| 7943903 | Defect inspection method and its system A method for enabling management of fatal defects of semiconductor integrated patterns easily, the method enables storing of design data of each pattern designed by a semiconductor integrated circuit designer, as well as storing of design intent data having pattern ... | 05/17/2011 |
| 7939800 | Arrangement and method for compensating emitter tip vibrations The present invention provides a charged particle beam apparatus with a charged particle beam source including an emitter with an emitter tip; and supporting member for supporting the emitter. Further, the apparatus includes an emitter location-measuring device for ... | 05/10/2011 |
| 7932494 | Method for characterizing vibrational performance of charged particle beam microscope system and application thereof A method of characterizing the vibrational performance of a charged particle beam microscope system having at least one encoder is disclosed. The encoder is part of a control system for controlling the speed of a stage whereupon a sample is secured for imaging. A pl... | 04/26/2011 |
| 7932493 | Method and system for observing a specimen using a scanning electron microscope It is intended to reduce the auto focusing time and to increase the stability in a case that a defect on a specimen that has been detected by an inspection apparatus is observed by using a scanning electron microscope. One or more regions to be used for auto focusin... | 04/26/2011 |
| 7930766 | Fluid delivery for scanning probe microscopy The following invention pertains to the introduction of a gas (or fluid) around a SPM probe or Nanotool™ to control chemical activity e.g. oxygen to promote oxidation, argon to inhibit oxidation or clean dry air (CDA) to inhibit moisture to control static charging... | 04/19/2011 |
| 7928377 | Charged particle beam apparatus and sample manufacturing method It is possible to carry out a highly accurate thin film machining by irradiation of an ion beam to a sample and a high-resolution STEM observation of the sample by irradiating an electron beam with a high throughput almost without moving the sample. The FIB irradiat... | 04/19/2011 |
| 7910884 | Apparatus and method for inspection and measurement An electrification control electrode B is installed at a measured or inspected specimen side of an electrification control electrode A, and a constant voltage is applied from an electrification control electrode control portion of an electrification control electrod... | 03/22/2011 |
| 7902504 | Charged particle beam reflector device and electron microscope A charged particle beam reflector device is configured to include at least two electrostatic mirrors arranged with a predetermined interval on a linear optical axis, each having a through hole through which a charged particle beam radiated from an electron gun along... | 03/08/2011 |
| 7884322 | Scanning electron microscope and a method for pattern composite inspection using the same A scanning electron microscope capable of performing alone the critical dimension measurement and the defect inspection is provided. The scanning electron microscope has a reference image storage unit for storing a reference image transcribing a reference pattern, a... | 02/08/2011 |
| 7863563 | Carbon tube for electron beam application Embodiments of the present invention provide an apparatus employing an electron beam to expose the structure of a micro device and produce an image of the structure. The apparatus includes an electron gun producing the electron beam; an electron beam column having o... | 01/04/2011 |
| 7863564 | Electric charged particle beam microscope and microscopy An electric charged particle beam microscope is provided in which a specimen movement due to a specimen rotation is classified into a repeatable movement and a non-repeatable movement, a model of movement is determined for the repeatable movement, a range of movemen... | 01/04/2011 |
| 7858935 | Method and system for conducting event-streamed spectrum imaging A method and system for conducting event-streamed spectrum imaging concurrently collects electron and spectral signals resulting from a raster scan of a sample. The signals are formatted and assembled as a packet stream. The packet stream is transmitted to a host wh... | 12/28/2010 |
| 7856665 | Apparatus and method for scanning capacitance microscopy and spectroscopy An apparatus and technique for measuring the electrical capacitance between a conducting tip of a scanning probe microscope and a sample surface is described. A high frequency digital vector network analyzer is connected to the probe tip of the cantilever of an atom... | 12/21/2010 |
| 7842920 | Methods and systems of performing device failure analysis, electrical characterization and physical characterization An analysis system has a charged particle beam instrument and a scanning probe microscope operably coupled with the charged particle beam instrument. A stage defines an aperture, the stage is adapted to support the sample over the aperture and finely move the sample... | 11/30/2010 |
| 7838828 | Semiconductor device inspection apparatus A semiconductor device inspection apparatus having a noise subtraction function includes an electron gun, a stage for holding a sample, a main detector for detecting a signal discharged from the sample, and at least one or more sub detector for detecting noise gener... | 11/23/2010 |
| 7829852 | Device having etched feature with shrinkage carryover In an embodiment of the present invention, a device includes a first etched feature located in a critical dimension scanning electron microscope (CD-SEM) characterization location, the first etched feature having an upper section, a middle section, and a lower secti... | 11/09/2010 |
| 7825377 | Electron beam apparatus with aberration corrector An electron beam apparatus with an aberration corrector using multipole lenses is provided. The electron beam apparatus has a scan mode for enabling the operation of the aberration corrector and a scan mode for disabling the operation of the aberration corrector and... | 11/02/2010 |
| 7818816 | Substrate patterning by electron emission-induced displacement Disclosed are methods and devices for patterning micro- and/or nano-sized pattern elements on a substrate using field emitted electrons from an element. Disclosed methods and devices can also be utilized to form nano- and micron-sized depressions in a substrate acco... | 10/19/2010 |
| 7814565 | Nanostructure on a probe tip Techniques for forming a nanostructure on a probe tip are provided. ... | 10/12/2010 |
