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| Number | Title | Issue Date |
| 8183526 | Mirror monochromator for charged particle beam apparatus One embodiment relates to an apparatus for generating a charged particle beam with reduced energy width. A charged particle source is configured to generate a charged particle beam with a range of energies. An energy-dispersive device bends the high-energy component... | 05/22/2012 |
| 8178836 | Electrostatic charge measurement method, focus adjustment method, and scanning electron microscope A method and a device are disclosed for suppressing error in electrostatic charge amount or defocus on the basis of electrostatic charge storage due to electron beam scanning when measuring the electrostatic charge amount of the sample or a focus adjustment amount b... | 05/15/2012 |
| 8153965 | Apparatus and method for merging a low energy electron flow into a high energy electron flow An apparatus for merging a low energy electron flow into a high energy electron flow may include: a high energy electron path for accommodating the high energy electron flow; and a plurality of magnetic elements arranged to guide the low energy electron flow through... | 04/10/2012 |
| 8143573 | Charged particle beam apparatus A charged particle beam impinging on a specimen is set to have left and right tilt angles corresponding to a parallactic angle. A control unit is provided which scans the beam over the specimen while giving a left tilt and a right tilt corresponding to the parallact... | 03/27/2012 |
| 8129679 | Method for discrimination of backscattered from incoming electrons in imaging electron detectors with a thin electron-sensitive layer Methods are disclosed for operating a device having a high energy particle detector wherein the particles create first incoming traversal events, outgoing backscatter events, higher-order in and out events and incoming events caused by particles which backscatter ou... | 03/06/2012 |
| 8089044 | Method for correcting astigmatism in electron emission spectromicroscopy imaging A method for correcting astigmatism of an electronic optical column of an electron emission spectromicroscope, comprising the steps of: forming a reference structure on a surface of a sample comprising a structure of interest to be... | 01/03/2012 |
| 8071942 | Sample holder apparatus to reduce energy of electrons in an analyzer system and method A sample holder apparatus and method for reducing the energy of charged particles entering an annular-acceptance analyzer includes use of an electrically isolated sample support member having a sample receiving surface configured to receive a sample and electrically... | 12/06/2011 |
| 8022364 | Electron spin detector, and spin polarized scanning electron microscope and spin-resolved x-ray photoelectron spectroscope using the electron spin detector An electron spin detector includes plural magnetoresistive sensors and a deceleration lens of an electron beam, and each magnetoresistive sensor is inclined so that the electron beam spread by the deceleration lens can be input perpendicularly to the magnetoresistiv... | 09/20/2011 |
| 8013298 | Electrostatic electron spectrometry apparatus An apparatus for spectrometry that includes a spectrometer configured for second order focusing and capable of 2π azimuthal collection. ... | 09/06/2011 |
| 7999225 | Charged particle source with integrated energy filter The invention describes a particle source in which energy selection occurs. The energy selection occurs by sending a beam of electrically charged particles 103 eccentrically through a lens 107. As a result of this, energy dispersion will occur in an im... | 08/16/2011 |
| 7977630 | Electron microscope There is disclosed an electron microscope that achieves low-magnification imaging while the objective lens is kept at high excitation in the same way as during high-magnification imaging. An objective minilens located immediately behind the objective lens demagnifie... | 07/12/2011 |
| 7947951 | Multi-beam ion/electron spectra-microscope This invention is a multi-beam charged particle instrument that can simultaneously focus electrons and a variety of positive and negative ions, such as Gallium, Oxygen and Cesium ions, onto the same material target. In addition, the instrument has provision to simul... | 05/24/2011 |
| 7928376 | Element mapping unit, scanning transmission electron microscope, and element mapping method There is provided an element mapping unit, scanning transmission electron microscope, and element mapping method that enable to acquire an element mapping image very easily. On the scanning transmission electron microscope, the electron beam transmitted through an o... | 04/19/2011 |
| 7919749 | Energy filter for cold field emission electron beam apparatus An electron beam apparatus and a method for providing an energy-filtered primary electron beam are described. Therein, a primary electron beam having an asymmetric first energy distribution is generated by means of an electron source. The primary electron beam is hi... | 04/05/2011 |
| 7902503 | Slit disk for modified faraday cup diagnostic for determining power density of electron and ion beams A diagnostic system for characterization of an electron beam or an ion beam includes an electrical conducting disk of refractory material having a circumference, a center, and a Faraday cup assembly positioned to receive the electron beam or ion beam. At least one s... | 03/08/2011 |
| 7902502 | Multichannel energy analyzer for charged particles The present invention provides charged particle energy deflectors, analyzers, devices, device components and methods for terminating charged particle systems and electrically isolating device components. One embodiment of the present invention provides a transparent... | 03/08/2011 |
| 7884321 | Method and system for non-destructive distribution profiling of an element in a film A method to determine a distribution profile of an element in a film. The method comprises exciting an electron energy of an element deposited in a first film, obtaining a first spectrum associating with the electron energy, and removing a background spectrum from t... | 02/08/2011 |
| 7855362 | Contamination pinning for auger analysis Electron spectroscopy methods and apparatus are disclosed. A beam of primary electrons is applied to a measurement location on a surface of a sample. A pinning flux of electrons is applied to one or more pinning regions proximate the measurement location. The pinnin... | 12/21/2010 |
| 7838827 | Monochromator and scanning electron microscope using the same An invention providing a scanning electron microscope composed of a monochromator capable of high resolution, monochromatizing the energy and reducing chromatic aberrations without significantly lowering the electrical current strength of the primary electron beam. ... | 11/23/2010 |
| 7825376 | Scintillator aspects for X-ray fluorescence visualizer, imager, or information provider One aspect relates to optically detecting an at least one scintillated viewable and/or visible photon that has been converted from the at least one induced X-ray fluorescing photon. The aspect can also relate to optically detecting an at least one scintillated viewa... | 11/02/2010 |
| 7772551 | Refractive index variable element and method of varying refractive index A refractive index variable element includes a structure including quantum dots having discrete energy levels and a dielectric matrix surrounding the quantum dots, and an electron injector injecting an electron into the quantum dots through the dielectric matrix. | 08/10/2010 |
| 7755042 | Auger electron spectrometer with applied magnetic field at target surface A scanning electron beam apparatus with an Auger spectrometer. The apparatus includes at least an electron column for generating a primary electron beam, a magnetic objective lens configured to focus the primary electron beam onto a surface of a target substrate, an... | 07/13/2010 |
| 7745782 | Electrostatic charge measurement method, focus adjustment method, and scanning electron microscope A method and a device are disclosed for suppressing error in electrostatic charge amount or defocus on the basis of electrostatic charge storage due to electron beam scanning when measuring the electrostatic charge amount of the sample or a focus adjustment amount b... | 06/29/2010 |
| 7745783 | Monochromator and radiation source with monochromator A monochromator (1) for a charged particle optics, in particular, for electron microscopy, comprises at least one first deflection element (2, 3) with an electrostatic deflecting field (2′, 3′) for generating a dispersion (4) in the p... | 06/29/2010 |
| 7723680 | Electron multiplier having electron filtering A system for detecting ions is disclosed. The system includes a detector having a plurality of dynodes arranged in an electron cascading configuration, and a power supply circuit electrically coupled to the plurality of dynodes. The plurality of dynodes include a fi... | 05/25/2010 |
| 7683317 | Method and system for detecting hidden defects A method for detecting hidden defects and patterns, the method includes: receiving an object that comprises an opaque layer positioned above an intermediate layer; defining an energy band in response to at least one characteristic of the opaque layer and at least on... | 03/23/2010 |
| 7642513 | Device for obtaining the image and/or spectra of electron energy loss The inventive device for obtaining the electron energy loss image and/or spectra includes an image sensor, a control for at least two deflectors for alternately exposing at least two photosensitive parts of the image sensor, sensor reading means for generating the r... | 01/05/2010 |
| 7569816 | Electron spectrometer A field terminating imaging electron spectrometer being used for imaging electrons created within a magnetic field such as an image produced with a magnetic projection lens in a photoelectron microscope. The preferred embodiment is a CHA with magnetic input and outp... | 08/04/2009 |
| 7560691 | High-resolution auger electron spectrometer One embodiment relates to a high-resolution Auger electron spectrometer in a scanning electron beam apparatus. An electron source generates a primary electron beam, and an immersion objective lens is configured to focus the primary electron beam onto a surface of a ... | 07/14/2009 |
| 7547881 | Nanowire electron scattering spectroscopy Methods and devices for spectroscopic identification of molecules using nanoscale wires are disclosed. According to one of the methods, nanoscale wires are provided, electrons are injected into the nanoscale wire; and inelastic electron scattering is measured via ex... | 06/16/2009 |
| 7521674 | Method for trapping uncharged multi-pole particles Apparatus and method for trapping uncharged multi-pole particles comprises a bound cavity for receiving the particles, and a multiplicity of electrodes coupled to the cavity for producing an electric field in the cavity. In a preferred embodiment, the electrodes are... | 04/21/2009 |
| 7507956 | Charged particle beam energy width reduction system for charged particle beam system The present invention provides a charged particle beam energy width reduction system. The system comprises a first element acting in a focusing and dispersive manner in an x-z-plane; a second element acting in a focusing and dispersive manner in the x-z-plane; a cha... | 03/24/2009 |
| 7470901 | Charged particle spectrometer and detector therefor A charged particle (e.g. photoelectron) spectrometer is operable in a first mode to produce an energy spectrum relating to the composition of a sample being analysed, and in a second mode to produce a charged particle image of the surface of the sample being analyse... | 12/30/2008 |
| 7459680 | Method of analysis using energy loss spectrometer and transmission electron microscope equipped therewith A method of analysis using an energy loss spectrometer and a transmission electron microscope equipped with the energy loss spectrometer. The spectrometer has a CCD camera for recording plural spectra as one photoelectric device image and a controller for batch read... | 12/02/2008 |
| 7456399 | Calibrating multiple photoelectron spectroscopy systems A method comprising obtaining a first set of spectral data for a first sample film measured by a first system, extracting intensities for one or more elemental species associated with the first sample film to provide a first set of extracted intensities using a func... | 11/25/2008 |
| 7453062 | Energy-filtering cathode lens microscopy instrument An energy filtering microscopy instrument is provided. An objective lens is disposed for reception of electrons in order to form an electron diffraction pattern in a backfocal plane of the objective lens. An entrance aperture disposed in the backfocal plane of the o... | 11/18/2008 |
| 7439500 | Analyzing system and charged particle beam device The present invention relates to an analyzing system with improved detection scheme and a charged particle beam device comprising the same. The analyzing system for analyzing a beam of charged particles has a divider to divide the beam of charged particles according... | 10/21/2008 |
| 7439520 | Ion optics systems In various embodiments, provided are ion optics systems comprising two or more pairs of ion condensers arranged where the first member and second member of each pair are disposed on opposite sides of a first plane such that the first member of the pair has a positio... | 10/21/2008 |
| 7432502 | Information acquisition method and apparatus for information acquisition The invention is to provide a method and an apparatus for observing a substance having a stable morphology in a liquid medium such as water. The method comprises the steps of obtaining a composition in which the substance is maintained in a liquid medium, bringing t... | 10/07/2008 |
| 7420163 | Determining layer thickness using photoelectron spectroscopy According to one embodiment of the invention, photoelectron spectroscopy is used to determine the thickness of one or more layers in a single or multi-layer structure on a substrate. The thickness may be determined by measuring the intensities of two photoelectron s... | 09/02/2008 |
