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| Number | Title | Issue Date |
| 7612331 | Code disk with a plurality of tracks having different patterns A code disk for a high-resolution encoder that can detect an absolute position and a method for manufacturing a mold to produce the code disk are provided. The code disk is formed by using transparent substrate. The code disk includes a plurality of tracks provided ... | 11/03/2009 |
| 7608814 | Optical structure for localising an electromagnetic field and detector or emitter device including such a structure An optical structure enabling properties of the surface plasmons to be used is defined from a substantially binary, parameterizable unit pattern ME. The parameters a, b, c, d and hg of the pattern are chosen so as to maximize the co... | 10/27/2009 |
| 7485847 | Displacement sensor employing discrete light pulse detection Optical sensors, and methods for operating optical sensors, are disclosed. One such sensor may include: a reflector positioned a distance from a reflective diffraction grating and a light source for providing light. A first portion of the light can be reflected from... | 02/03/2009 |
| 7470892 | Optical encoder An optical encoder includes an incoherent light source; a first grating, which is an amplitude grating having a first grating period, for spatial amplitude modulation of the incoherent light from the light source; a second grating, which is a phase grating having a ... | 12/30/2008 |
| 7443518 | Measuring instrument, in particular for transmission measurement in vacuum system A measuring instrument, in particular for transmission measurement with transparent substrates, comprises a measuring head with a light emitting element for emitting a light beam and a light receiver element for recording an incident light beam, and a retro-reflecto... | 10/28/2008 |
| 7440113 | Littrow interferometer An apparatus and method for measuring displacement includes a light beam directed to an interferometer core that splits the light beam into first and second component beams. The first component beam is directed to a diffraction grating at approximately a Littrow ang... | 10/21/2008 |
| 7433048 | Interferometer systems for measuring displacement and exposure systems using the same Interferometer systems for measuring displacement include a displacement interferometer. This interferometer includes a displacement converter responsive to a measuring beam of light. The displacement converter is configured to transform movement thereof in a direct... | 10/07/2008 |
| 7425697 | Origin detection method for optical encoder An optical encoder equipped with an origin detection apparatus has a scale provided with an optical grating, a plurality of light receiving elements that is provided in association with the pitch of the optical grating and movable relative to the scale and a light s... | 09/16/2008 |
| 7417218 | Triple grating optical encoder with light transmitting area in optical path An optical encoder is a reflecting triple grating type optical encoder. A light projecting section of the optical encoder which includes a combination of a bare chip LED and a first grating of a first pitch p1, irradiates a predetermined light. A photodetecti... | 08/26/2008 |
| 7414731 | Microscope and interferometer thereof An interferometer comprises a light source unit, a first splitter, a reference beam unit and a detection unit. The light source unit provides a laser beam. The first splitter receives the laser beam from the light source unit and splits the laser beam into a first b... | 08/19/2008 |
| 7414730 | High precision interferometer apparatus employing a grating beamsplitter Measurement of a distance change between a reference surface and a target is provided. A substrate has a first surface facing the target and including a grating. The grating and target combine to form an optical interferometer responsive to changes in distance betwe... | 08/19/2008 |
| 7405392 | Optical rotary encoder An optical encoder includes: a rotary slit plate having a rotation angle detection track including an optical slit; a light source for applying light to the optical slit; light detecting elements for rotation angle detection and arranged at positions to which light ... | 07/29/2008 |
| 7405389 | Dense multi-axis array for motion sensing The present disclosure describes an optical displacement sensor having a dense multi-axis array of photosensitive elements. Generally, the sensor includes a two dimensional array of multiple photosensitive elements. In one embodiment, the array includes multiple lin... | 07/29/2008 |
| 7394062 | Displacement-measuring optical scale and optical encoder using same When a convex lens 13 comes close to 0-th order transmitted light T0 with rotation of an optical scale 11, the 0-th order transmitted light T0 derived from a light beam L emitted from a light source 15 and transmitted through a dif... | 07/01/2008 |
| 7394550 | Displacement detector The displacement detector includes: a light source 140; a beam splitter 170 for dividing the light, which is sent from the light source 140, into two beams of light; reflection mirrors 181, 182 provided for the two beams of light sent fro... | 07/01/2008 |
| 7391011 | Optical encoder capable of detecting absolute position In two phases signals (A, B) outputted from a scale or a scale having a discontinuous portion provided in its incidental member to a light receiving portion, a region in which amplitudes of the two phases signals (A, B) are small corresponds to outputs when a reflec... | 06/24/2008 |
| 7388181 | Apparatus for adjusting applied voltage in display system using diffractive optical modulator Disclosed herein is an apparatus for adjusting applied voltage in a display system using a diffractive optical modulator. The apparatus for adjusting applied voltage can measure the intensity of diffracted light emitted from the diffractive optical modulator, and ad... | 06/17/2008 |
| 7385179 | Optical encoder for measuring displacement At least one exemplary embodiment is directed to an optical encoder which includes a first diffraction grating having a desired optical effective aperture ratio at an appropriate gap position so as to eliminate and/or reduce high-harmonic components from the light i... | 06/10/2008 |
| 7369253 | Systems and methods for measuring sample surface flatness of continuously moving samples Measurement of sample surface flatness of a continuously moving sample. A conveyor continuously conveys a sample beneath a grating disposed at a non-zero angle with respect to the plane of conveyance. The relative distance between the sample and the angled grating c... | 05/06/2008 |
| 7365306 | Standard member for length measurement, method for producing the same, and electron beam length measuring device using the same This invention provides an electron beam length measuring technology including a standard component for length measurement that has a finer standard dimension, and its producing method. The standard component for length measurement has a semiconductor member on whic... | 04/29/2008 |
| 7362452 | Method of adjusting the operating region of a tool component to a pre-determined element The invention describes a method of positioning an image field of, for example, an electron microscope at a specific structure in a regular grid of nominally identical structures. Such structures can, for example, be memory cells on a chip. Such memory cells nowaday... | 04/22/2008 |
| 7358865 | Optical encoder and apparatus using optical encoder An optical encoder includes a cylindrical reflective scale, a point light source for irradiating the reflective scale, and light-receiving elements for receiving the light beams reflected by the reflective scale. The pitch of the reflective scale is set to an approp... | 04/15/2008 |
| 7359826 | Method and device for detection of oscillations by a position measuring system A method for detecting the angular change of a scanning device with respect to at least one scale of a position measuring system by detecting several angular positions of the scanning device in relation to the at least one scale by detecting position measurements of... | 04/15/2008 |
| 7355720 | Optical displacement sensor An optical displacement sensor is disclosed which uses a vertical-cavity surface-emitting laser (VCSEL) coupled to an optical cavity formed by a moveable membrane and an output mirror of the VCSEL. This arrangement renders the lasing characteristics of the VCSEL sen... | 04/08/2008 |
| 7355953 | Optical pickup for cutting off optical noise and optical recording and/or reproducing apparatus using the same An optical pickup includes a light source which emits light, a grating which separates a portion of the light emitted from the light source, a reflecting member which reflects another portion of the light emitted from the light source, a monitoring photodetector dis... | 04/08/2008 |
| 7352475 | Measuring method and apparatus using shearing interferometry, exposure method and apparatus using the same, and device manufacturing method A measuring apparatus for irradiating measuring light and for measuring optical performance of a target optical system includes a barrel for housing the target optical system, the barrel being rotatable around an optical axis of the target optical system, and an ill... | 04/01/2008 |
| 7348529 | Optical device and optical pickup device An optical device diffracts incident light with a hologram element 19 and receives the diffracted light with light receiving regions 20A to 29 on a light receiving element 12. The light receiving element 12 separately receives refl... | 03/25/2008 |
| 7348544 | Optical encoder with discontinuous optical grating An optical encoder includes a light-emitting unit, a scale with a discontinuous part, and a plurality of light-receiving elements arranged in relationship to a pitch of the scale. In the optical encoder, a light beam from the light-emitting unit reflects off the sca... | 03/25/2008 |
| 7349101 | Lithographic apparatus, overlay detector, device manufacturing method, and device manufactured thereby A device according to one embodiment of the invention may be applied to measure the overlay (e.g. as a machine performance number) quickly and over an expanded range of locations (possibly everywhere) on a wafer. One method using such a device includes measuring the... | 03/25/2008 |
| 7345273 | Integrated optical encoder A rotary switch including a control element, a light-emitting device arranged on a printed circuit board and configured to emit light, and at least two receivers arranged on the printed circuit board in correspondence with the light-emitting device and configured to... | 03/18/2008 |
| 7338613 | System and process for automated microcontact printing An automated process for microcontact printing is provided, comprising the steps of providing a substrate and a stamp; automatically aligning the substrate and stamp so that the stamp is aligned relative to the substrate to impart a pattern to the substrate at a des... | 03/04/2008 |
| 7332711 | Photoelectric encoder, scale therefor and method for manufacturing the same A main scale 10 has protrusive grating 12 of a thin film of e.g. Cr formed on a base member 11. The base member 11 and the Cr thin film constitute a reflecting face which is set to provide the sufficient quantity of received light on a li... | 02/19/2008 |
| 7332709 | Photoelectric encoder A photoelectric encoder includes a light source of an illumination light beam. The encoder also includes a movable grating which has grating lines and which is displaceable in a direction intersecting the grating lines. An index grating serves as a reference for dis... | 02/19/2008 |
| 7328889 | Measuring unit, partition member, mold for molding the partition member, and production method for the partition member A measuring unit is removably connected to a sample analyzer. The measuring unit includes a first member having a first channel through which a sample is allowed to pass, a second member having a second channel through which the sample is allowed to pass, and a part... | 02/12/2008 |
| 7330326 | Recordable disk rotational speed error correction circuit An error correction circuit for determining an error in rotational speed of a recordable disk of a disk drive includes a sinusoidal error calculation portion adapted to generate a true oscillation error signal, and a summation portion adapted to combine the true osc... | 02/12/2008 |
| 7329858 | Optical encoder and electronic equipment having same An optical encoder includes a mobile object having a plurality of aligned slits, a light-emitting portion for emitting light toward the mobile object, and a light-receiving portion 103 for receiving the light which has passed the mobile object. The light-rece... | 02/12/2008 |
| 7327005 | Optical semiconductor package with incorporated lens and shielding An optical semiconductor module including an optical semiconductor component that has a front face including an optical sensor. Encapsulation, defining a cavity in which the optical component is disposed, includes external electrical connections for the optical semi... | 02/05/2008 |
| 7327661 | Optical pickup and optical information recording apparatus using the same An optical pickup includes a diffraction grating partitioned into three areas, in which the phase of periodic grating groove structure in an area is successively shifted from that in the adjacent area by 90°. In the generation of a differential push-pull signal, an... | 02/05/2008 |
| 7324212 | Optical encoder having slanted optical detector elements for harmonic suppression An optical encoder includes a source of a light beam, an optical grating that generates a spatial pattern of interference fringes, and an optical detector which includes generally elongated detector elements that sample the interference fringe pattern at spatially s... | 01/29/2008 |
| 7319526 | Apparatus for detecting displacement A displacement detection apparatus (100) includes a main scale (110) and a detection head (120). The detection head (120) includes a light emission/reception unit (130) and an optical device unit (140). The optical device un... | 01/15/2008 |