Class 219/648 - Levitation

Subclass of Class 219 - Electric heating
Definition: Subject matter wherein the workpiece is subjected to electromagnetic
No. of patents: 29
Last issue date: 07/05/2011

Number	Title	Issue Date
7973267	Apparatus and method for levitation of an amount of conductive material An apparatus for levitation of an amount of conductive material including a coil for keeping the material in levitation using a varying electric current in the coil. The apparatus has two coils, a first coil and a second coil, both coils generating an alternating el...	07/05/2011
7427329	Temperature control for single substrate semiconductor processing reactor A reactor for heat treatment of a substrate having a process chamber within a substrate enclosing structure, and a support structure configured to position a substrate at a predetermined spacing between the upper part and the bottom part within the process chamber d...	09/23/2008
7372548	Levitated reticle-masking blade stage A method, apparatus, and system for controlling a reticle-masking blade in a photolithography system. A reticle-masking blade is supported with a reticle-masking blade carriage assembly. The reticle-masking blade carriage assembly is levitated at a position with res...	05/13/2008
7359037	Drive for reticle-masking blade stage A method, apparatus, and system for controlling a reticle-masking blade in a photolithography system. A reticle-masking blade is supported with a reticle-masking blade carriage assembly. The reticle-masking blade carriage assembly is levitated at a position with res...	04/15/2008
7067012	CVD coating device The invention relates to a device for depositing especially, crystalline layers onto one or more, especially, also crystalline substrates in a process chamber using reaction gases which are guided into said process chamber, where they undergo pyrolytic reaction. The...	06/27/2006
7057144	Induction heating device In an induction heating apparatus, in order to decrease the buoyancy exerted on an object to be heated which is made of a material having high electrical conductivity and low magnetic permeability, such as aluminum, an electrical conductor is provided between a heat...	06/06/2006
6950175	System, method, and apparatus for a magnetically levitated and driven reticle-masking blade stage mechanism A method, apparatus, and system for controlling a reticle-masking blade in a photolithography system. A reticle-masking blade is supported with a reticle-masking blade carriage assembly. The reticle-masking blade carriage assembly is levitated at a position with res...	09/27/2005
6906789	Magnetically levitated and driven reticle-masking blade stage mechanism having six degrees freedom of motion A method, apparatus, and system for controlling a reticle-masking blade in a photolithography system. A reticle-masking blade is supported with a reticle-masking blade carriage assembly. The reticle-masking blade carriage assembly is levitated at a position with res...	06/14/2005
6452140	Floating/melting using dummy micro-gravitational field by magnetic force A substance 6 is located in a gradient magnetic field and held in a levitating state by a magnetic force produced by the gradient magnetic field. The substance 6 as such in the levitating state is heated and melted by ray or heat irradiation or by a resis...	09/17/2002
6288465	Combined externally pressurized gas-magnetic bearing assembly and spindle device utilizing the same A combined externally pressurized gas and magnetic bearing assembly (3) includes an externally pressurized gas bearing (9) and a magnetic bearing (8) that are integrated together so as to have component parts common to both of the externally pressurized g...	09/11/2001
6064046	Clearance retaining system for a high frequency heating coil An automatic plate bending system using high frequency induction heating has many universal poles for bearing a steel plate, a member to be heated, by supporting it from below, the height positions of front end portions of the universal poles themselves b...	05/16/2000
5889813	Levitation melting furnace A cooling water conduit extending through a segment of a crucible is curved inward in the portion around a molten metal tapping hole....	03/30/1999
5887018	Longitudinal electromagnetic levitator An electromagnetic levitator is disclosed, comprising: a plurality of longitudinal sections formed from a conducting material and arranged around a longitudinal axis. The longitudinal sections are connected to a power source such that when the levitator i...	03/23/1999
5747780	Apparatus for conveying and processing a wafer in a physically contact-free state At the front side of a wafer cassette fitted to a wafer feeding unit of a magnetic levitation wafer conveying device, a wafer stopper for preventing the wafer waiting in the wafer cassette from popping out is provided. The wafer supplied from the magnetic...	05/05/1998
5636241	Levitation melting crucibles Disclosed is a levitation melting crucible which can facilitate penetration of magnetism into the crucible and which can prevent a molten metal from being contaminated by an insulating material. The levatation melting crucible comprises a cylindrical main...	06/03/1997
5528620	Levitating and melting apparatus and method of operating the same In addition to a first driving device which moves only a lower crucible, and a first control device which controls the first driving device, a second driving device which changes the vertical relative position of an upper crucible and an induction coil, a...	06/18/1996
5319670	Velocity damper for electromagnetically levitated materials A system for damping oscillatory and spinning motions induced in an electromagnetically levitated material. Two opposed field magnets are located orthogonally to the existing levitation coils for providing a DC quadrupole field (cusp field) around the mat...	06/07/1994
5247144	Levitation heating method and levitation heating furnace A plasma lamp placed at the first focal point of an elliptical mirror spherically radiates, the light from the plasma lamp being reflected on said elliptical mirror so as to be spherically condensed to a specimen levitated by an electric field at the seco...	09/21/1993
5196999	Electrostatic levitation furnace An electrostatic levitation furnace is used for production of microgravity material in space. The furnace comprises a rotary elliptical mirror having a reflection surface of a rotary elliptical body at the inside; a plasma lamp disposed at a first focal p...	03/23/1993
5155651	Levitator with rotation control A levitator which is mounted on a space station; for example, for use in material science experiments in space. The levitator has a position detector for detecting the position of a sample, a variable power supply whose output voltage varies in accordance...	10/13/1992
5150272	Stabilized electromagnetic levitator and method A device for providing electromagnetic levitating forces and heating is described. A plurality of separate coils are provided, each powered by a separate power amplifier. Each coil may be supplied with two separate frequencies, one to levitate, and the ot...	09/22/1992
4896849	Sample levitation and melt in microgravity A system is described for maintaining a sample material in a molten state and away from the walls of a container in a microgravity environment, as in a space vehicle. A plurality of sources of electromagnetic radiation, such as an infrared wavelength, are...	01/30/1990
4762553	Method for making rapidly solidified powder System and method for producing metal or alloy powder are described comprising an electromagnetic levitating coil having an outlet for supporting a molten source of the metal or alloy and controllably discharging a molten stream thereof, an electromagneti...	08/09/1988
4761579	Electromagnetic levitation device A two-dimensional network of alternating (N,S) magnetic poles is generated by a heavy gauge conductor (F) having an alternating current from an excitation source (G) passing therethrough. The conductor follows zigzag go and return paths (T1,T6) without an...	08/02/1988
4578552	Levitation heating using single variable frequency power supply A levitation heating system uses only a single power supply for both levitation and heating, but permits the frequency of the power supply to be changed to control heating effects independently of levitation forces. The levitation force is kept constant b...	03/25/1986
4565571	Method for producing low density porous metals or hollow metallic spheres Disclosed are methods, utilizing electromagnetic levitation, for producing low density, porous metal structures and hollow metallic spheres, using particulate material as a starting point. As an initial step, a porous article of sufficient green strength ...	01/21/1986
4531037	Process and means to control the average heating power induced in a flat conducting product maintained electromagnetically in position without contact A method and system for controlling the heating of a product in an electromagnetic induction heating installation having a pair of essentially identical inductors placed on either side of the product with the poles of one of the inductors of the pair faci...	07/23/1985
4518840	Method and apparatus for minimizing the power induced in a flat conducting product maintained in position electromagnetically without contact A method and apparatus for minimizing the power induced in a moving or stationary, flat, conducting product which is maintained in position without contact by electromagnetic forces. Inductors on each side of the product subject certain zones of the produ...	05/21/1985
4008387	Automatically controlled crystal growth The Czochralski growth of a crystal may be automatically controlled to provide uniform crystal cross-sectional area by weighing the crucible containing the melt from which the crystal is grown and deriving a weight signal which is compared with its expect...	02/15/1977

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Class 219/648 - Levitation