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Class 219/121.76 - Multiple beams


Subclass of Class 219 - Electric heating
Definition: Subject matter having plural coherent light beams.
No. of patents: 299
Last issue date: 01/17/2012


1                
NumberTitleIssue Date
8097829Laser processing method and laser processing apparatus
A laser processing method involving moving first and second laser beams relative to a workpiece, wherein the first and second laser beams have at least a differing wavelength or intensity. The method including irradiating the first and second laser beams through fir...
01/17/2012
8053705Laser assisted machining process with distributed lasers
Laser assisted machining process and machine utilizing multiple distributed laser units that are strategically distributed around the workpiece being machined to simultaneously heat the workpiece, creating a desired temperature distribution for laser assisted machin...
11/08/2011
8035877Laser treatment apparatus and method of manufacturing semiconductor device
A laser treatment apparatus is provided which is capable of irradiating a laser beam to the position where a TFT is to be formed over the entire surface of a large substrate to achieve the crystallization, thereby forming a crystalline semiconductor film having a la...
10/11/2011
7989729Detecting and repairing defects of photovoltaic devices
An apparatus for both detecting and repairing a shunt defect in a solar cell substrate. A shunt detection module detects the shunt defect in the substrate, using at least one of lock-in thermography and current-voltage testing. A process diagnostic module determines...
08/02/2011
7939782Processing method and processing apparatus using interfered laser beams
Provided are a processing method and a processing apparatus which are capable of suppressing a disturbance attributable to a surface wave in a processing by interfered laser beams, in particular, a processing by the interfered laser beams of a pulsed laser having a ...
05/10/2011
7919726Laser irradiation apparatus, laser irradiation method, and method for manufacturing a semiconductor device
It is an object to provide a laser irradiation apparatus for enlarging an area of a beam spot and reducing a proportion of a region with low crystallinity. It is also an object to provide a laser irradiation apparatus for enhancing throughput with a CW laser beam. F...
04/05/2011
7763828Laser thermal processing with laser diode radiation
A method and apparatus for performing laser thermal processing (LTP) using a two-dimensional array of laser diodes to form a line image, which is scanned across a substrate. The apparatus includes a two-dimensional array of laser diodes, the radiation from which is ...
07/27/2010
7679800Laser treatment apparatus and method of manufacturing semiconductor device
A laser treatment apparatus is provided which is capable of irradiating a laser beam to the position where a TFT is to be formed over the entire surface of a large substrate to achieve the crystallization, thereby forming a crystalline semiconductor film having a la...
03/16/2010
7473866Laser processing apparatus
A laser processing apparatus comprising a chuck table, laser beam irradiation means for irradiating a workpiece held on the chuck table with a laser beam, and processing feed means for processing-feeding the chuck table and the laser beam irradiation means relative ...
01/06/2009
7435927Semiconductor link processing using multiple laterally spaced laser beam spots with on-axis offset
Multiple laser beams selectively irradiate electrically conductive structures on or within a semiconductor substrate. The structures are arranged in a plurality of substantially parallel rows extending in a generally lengthwise direction. One method propagates first...
10/14/2008
7402772Laser processing method and processing device
Embodiments of the invention provide a laser processing apparatus and method. The laser processing apparatus includes a holder that holds a processing target, a first laser source that emits pulsed laser beam, and a second laser source that emits continuous-wave las...
07/22/2008
7368681Apparatus for simultaneous laser welding
A device for the simultaneous welding of work pieces and containing a plurality of laser light sources. The laser light sources are positioned on at least one circle in such a manner that the partial beams emitted by the laser light sources produce at least one regi...
05/06/2008
7364952Systems and methods for processing thin films
The present disclosure is directed to methods and systems for processing a thin film samples. In an exemplary method, semiconductor thin films are loaded onto two different loading fixtures, laser beam pulses generated by a laser source system are split into first l...
04/29/2008
7357486Method of laser machining a fluid slot
A method of laser machining a fluid slot includes directing a UV laser beam towards a substrate with microelectronics to form a slot through the substrate. ...
04/15/2008
7332689Tacking method and apparatus
An apparatus for tacking a multi-lumen tubular assembly together comprises a laser, an optical member and a placement tray for retaining the tubular assembly. A portion of the optical member defines a window that is substantially transparent to laser energy emitted ...
02/19/2008
7304265Method and system for machining fragile material
In a method for processing brittle material, a laser light from a laser light source irradiates the brittle material and transports an irradiating position of the laser light along a predetermined line, wherein the laser light L from a plurality of laser light sourc...
12/04/2007
7301981Methods for synchronized pulse shape tailoring
A plurality of subresonators (12, 14), having different design configurations, share a common resonator section (18) such that the lasing action can be substantially synchronized to provide coherent laser pulses that merge the different respective puls...
11/27/2007
7291806Robot laser processing system
A robot laser processing system (10) comprises at least one robot controller (14) for controlling at least one robot, a host controller (12) connected to the robot controller through a first network (11) for overall control of the robot c...
11/06/2007
7287312Method of manufacturing a magnetic head device
A manufacturing method of a magnetic head device includes a preheating step of irradiating a laser beam to terminal pads of a magnetic head slider and to connection pads of a lead conductor member that is to be electrically connected to the magnetic head slider, a s...
10/30/2007
7289549Lasers for synchronized pulse shape tailoring
A plurality of subresonators (12, 14), having different design configurations, share a common resonator section (18) such that the lasing action can be substantially synchronized to provide coherent laser pulses that merge the different respective puls...
10/30/2007
7282666Method and apparatus to increase throughput of processing using pulsed radiation sources
A material processing system and method is disclosed for processing materials such as amorphous silicon in an annealing processes and lithography processes on a silicon wafer, as well as ablation processes. A first laser generates periodic pulses of radiation along ...
10/16/2007
7279721Dual wavelength thermal flux laser anneal
A thermal processing apparatus and method in which a first laser source, for example, a CO2 emitting at 10.6 μm is focused onto a silicon wafer as a line beam and a second laser source, for example, a GaAs laser bar emitting at 808 nm is focused onto the...
10/09/2007
7268062Method of crystallizing a semiconductor film using laser irradiation
There is provided an optical system for reducing faint interference observed when laser annealing is performed to a semiconductor film. The faint interference conventionally observed can be reduced by irradiating the semiconductor film with a laser beam by the use o...
09/11/2007
7262385Material processing device
A device for material processing, such as welding, joining, cutting, inspecting and the like, includes an energy beam source and one or more energy beam transfer devices. The one or more transfer devices may direct an energy beam at one or more predetermined locatio...
08/28/2007
7245412On-the-fly laser beam path error correction for specimen target location processing
A laser-based workpiece processing system includes sensors connected to a sensor controller that converts sensor signals into focused spot motion commands for actuating a beam steering device, such as a two-axis steering mirror. The sensors may include a beam positi...
07/17/2007
7223937Laser beam processing method and laser beam processing machine
A laser beam processing method for forming deteriorated layers along a dividing line in the inside of a workpiece by applying a pulse laser beam of a wavelength capable of passing through the workpiece along the dividing line formed on the workpiece, wherein a plura...
05/29/2007
7220256Laser system and method for treatment of biological tissues
A system for and method of performing laser assisted surgery is disclosed. Laser radiation is preferably delivered to a target area of tissue using a Er:YAG laser source. The laser radiation is delivered to the target area in bursts of laser radiation comprising set...
05/22/2007
7218431Laser treatment apparatus and method of manufacturing semiconductor device
A laser treatment apparatus is provided which is capable of irradiating a laser beam to the position where a TFT is to be formed over the entire surface of a large substrate to achieve the crystallization, thereby forming a crystalline semiconductor film having a la...
05/15/2007
7199330Systems and methods for forming a laser beam having a flat top
Multiple laser beams, each having a shape such as a Gaussian profile, can be incoherently combined to obtain a shaped, flat top laser beam. The combined laser beams can provide power levels necessary for material processing applications such as annealing, drilling, ...
04/03/2007
7193175High precision, rapid laser hole drilling
A laser system produces a first laser beam for rapidly removing the bulk of material in an area to form a ragged hole. The laser system produces a second laser beam for accurately cleaning up the ragged hole so that the final hole has dimensions of high precision.
03/20/2007
7187507Optical component and laser irradiation apparatus
The present invention provides an optical component for fixing a lens comprising a base, a holder, and a fastener. The base has a concave side surface and at least one first hole. The holder has a cylindrical shape and has a second hole penetrating through a center ...
03/06/2007
7170029Method and apparatus for deflashing of integrated circuit packages
This invention relates to a method and apparatus for deflashing integrated circuit (IC) packages by laser irradiation. The method and apparatus include two lasers scanning flash area for performing deflashing operation. CO2 laser is used to remove top lay...
01/30/2007
7167194Printing a code on a product
A method for printing is described. The method includes providing a printing system for printing a code on a product moving in a direction. The code is constructed from a plurality of pixels in a first data set indicating the positions of the pixels and generates a ...
01/23/2007
7163294Method and apparatus for providing an interface between a liquid crystal display controller and a laser projection display
An apparatus is provided for controlling a laser projection device (LPD). The apparatus is comprised of a liquid crystal display controller, a laser projection display controller, and a laser projection display engine. The liquid crystal display controller is adapte...
01/16/2007
7157661Method and apparatus for laser machining
A laser-machining method is provided in which a laser beam is generated with an energy intensity distribution that is a Gaussian distribution. The laser beam is shaped by applying a phase modulation based on a phase distribution expressed by a first order function h...
01/02/2007
7157038Ultraviolet laser ablative patterning of microstructures in semiconductors
Patterns with feature sizes of less than 50 microns are rapidly formed directly in semiconductors, particularly silicon, GaAs, indium phosphide, or single crystalline sapphire, using ultraviolet laser ablation. These patterns include very high aspect ratio cylindric...
01/02/2007
7158553Master oscillator/power amplifier excimer laser system with pulse energy and pointing control
Pulse parameters of a gas discharge laser system can be optimized and controlled for precision applications such as microlithography. Important laser pulse parameters typically vary in the beginning of a pulse burst, and the directionality of the output beam typical...
01/02/2007
7154067Hardening method and apparatus utilizing laser beams
A material, such as track member for a linear motion guide, having a plurality of rows of portions to be hardened which are thermally influenced on each other, is hardened by emitting laser beams so as to simultaneously irradiate a plurality of rows of portions of t...
12/26/2006
7141758Laser processing installation with readily accessible cutting unit
A machine tool installation for laser cutting of sheet workpieces has a workpiece support, an elongated machine frame of generally C-shaped configuration providing an arm extending over the workpiece support, a pair of tracks on the arm and extending longitudinally ...
11/28/2006
7139294Multi-output harmonic laser and methods employing same
A solid-state laser (10) has a laser resonator (20) with output ports (22) at both ends to provide two separate laser micromachining beams (42). A set of wavelength converters (26) can be employed to convert the laser machining bea...
11/21/2006
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