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| Number | Title | Issue Date |
| 8058585 | Plasma processing method, plasma processing apparatus and storage medium A plasma processing method includes the steps of: loading a substrate on a lower electrode, the substrate having a resist mask formed on a transcription film; supplying a processing gas into a processing chamber; forming a magnetic field, which is oriented toward on... | 11/15/2011 |
| 7880113 | Plasma discharge method and structure for verifying a hermetical seal A method and structure use characteristics of a plasma discharge for verifying a hermetic seal. The plasma discharge is created in a hermetically sealed cavity by a pair of spaced electrodes that extend from tips inside the hermetically sealed cavity to contacts out... | 02/01/2011 |
| 7863540 | Plasma reactor The present invention provides a plasma reactor which can suppress deactivation of components (active components) activated by plasma when causing exhaust gas to flow through a plasma generating space to ensure efficient reaction between the active components and pa... | 01/04/2011 |
| 7838792 | Plasma processing apparatus capable of adjusting temperature of sample stand A plasma processing apparatus is provided which processes a sample held on a sample table arranged in a process chamber in a vacuum container by using a plasma formed in the process chamber. The plasma processing apparatus comprises: paths arranged in the sample tab... | 11/23/2010 |
| 7781695 | Inductively coupled plasma/partial oxidation reformation of carbonaceous compounds to produce fuel for energy production Inductively coupled plasma (ICP) reforming converts carbonaceous compounds into a fuel for use in generating electrical power. Energy rich hydrocarbon fuels, such as coal, marine diesel, oils, and hydrocarbon wastes are employed as a feedstock for the ICP, which tra... | 08/24/2010 |
| 7754995 | Plasma processing apparatus and plasma processing method A plasma processing apparatus comprising at least a plasma processing chamber for plasma-processing an object; object-holding means for disposing the object in the plasma processing chamber; and plasma-generating means for generating a plasma in the plasma processin... | 07/13/2010 |
| 7741578 | Gas shielding structure for use in solid free form fabrication systems A solid free form fabrication (SFF) system and method is used to fabricate a three-dimensional structure in a continuous manner from successive layers of feedstock material. The system includes a gas shielding structure that is configured to protect a targeted regio... | 06/22/2010 |
| 7741577 | Modular hybrid plasma reactor and related systems and methods A device, method and system for generating a plasma is disclosed wherein an electrical arc is established and the movement of the electrical arc is selectively controlled. In one example, modular units are coupled to one another to collectively define a chamber. Eac... | 06/22/2010 |
| 7626134 | Transmissive dynamic plasma steering apparatus for radiant electromagnetic energy An ionized plasma based radiant electromagnetic energy steering or diverting apparatus wherein controlled differences in plasma density and resulting plasma electron density achieve phase shift, reflection or refraction of the controlled radiant electromagnetic ener... | 12/01/2009 |
| 7608796 | Plasma generating electrode and plasma reactor A plasma generating electrode capable of generating plasma with a high energy level by using a small amount of electric power is provided. The plasma generating electrode includes at least a pair of unit electrodes including a unit electrode as an anode and a unit e... | 10/27/2009 |
| 7595462 | Plasma processing method and plasma processing apparatus A plasma processing is performed by using a plasma processing apparatus which includes a first electrode and a second electrode disposed relatively movable to the first electrode between which an object to be processed is disposed, and a solid dielectric material di... | 09/29/2009 |
| 7576296 | Thermal synthesis apparatus An apparatus for thermal conversion of one or more reactants to desired end products includes an insulated reactor chamber having a high temperature heater such as a plasma torch at its inlet end and, optionally, a restrictive convergent-divergent nozzle at its outl... | 08/18/2009 |
| 7576297 | Bonding apparatus and method A bonding apparatus including a capillary 40 having a high-frequency coil 50 on its tip end portion and allowing a bonding wire 2 to pass therethrough, a position changing unit for changing the position of the tip of the bonding wire, a gas supp... | 08/18/2009 |
| 7501599 | Apparatus for plasma synthesis of metal oxide nanopowder A process and apparatus for the synthesis of metal oxide nanopowder from a metal compound vapour is presented. In particular a process and apparatus for the synthesis of TiO2 nanopowder from TiCl4 is disclosed. The metal compound vapour is reac... | 03/10/2009 |
| 7479615 | Wide range static neutralizer and method Static neutralization of a charged object is provided by generating, in an ionizing cell or module, an ion cloud having a mix of positively and negatively charged ions, and reshaping the ion cloud by redistributing the ions into two regions of opposite polarity by u... | 01/20/2009 |
| 7459654 | Controlled fusion in a field reversed configuration and direct energy conversion A system and apparatus for controlled fusion in a field reversed configuration (FRC) magnetic topology and conversion of fusion product energies directly to electric power. Preferably, plasma ions are magnetically confined in the FRC while plasma electrons are elect... | 12/02/2008 |
| 7435929 | Methods for monitoring or controlling the ratio of hydrogen to water vapor in metal heat treating atmospheres Methods for monitoring a heat treating atmosphere supply a preselected gas atmosphere at a preselected temperature to a heat treating furnace. The preselected temperature is not greater than a temperature at which wustite (FeO) forms. The methods sense the preselect... | 10/14/2008 |
| 7432467 | Plasma processing apparatus A plasma processing apparatus performs a desired plasma processing on a target substrate by using a plasma generated from a processing gas by forming a high frequency electric field in an evacuable processing chamber having an electrode. The plasma processing appara... | 10/07/2008 |
| 7411148 | Plasma generation apparatus A plasma generation apparatus includes: a chamber having a chamber lid and defining an airtight reaction region; a susceptor in the chamber; a gas supplier supplying a process gas to the chamber; and a toroidal core vertically disposed with respect to the susceptor ... | 08/12/2008 |
| 7394041 | Apparatus for treating a waste gas using plasma torch Disclosed is a waste gas treatment apparatus having a waste gas inlet for flowing a waste gas into a main combustion chamber provided in empty space inside a body, and a plasma torch configured to propagate flames against the waste gas flowing through the waste gas ... | 07/01/2008 |
| 7371991 | Iron beam irradiation device and insulating spacer for the device Disclosed is a structure aimed to reduce the frequency of replacement of an insulating spacer arranged between grids of an ion beam irradiation device. More specifically, disclosed is a so-called insulating spacer arranged in order to maintain insulation between the... | 05/13/2008 |
| 7355429 | On-chip power supply noise detector Techniques for on-chip detection of integrated circuit power supply noise are disclosed. By way of example, a technique for monitoring a power supply line in an integrated circuit includes the following steps/operations. A first signal and a second signal are precon... | 04/08/2008 |
| 7342236 | Fluid-cooled ion source An ion source is cooled using a cooling plate that is separate and independent of the anode. The cooling plate forms a coolant cavity through which a fluid coolant (e.g., liquid or gas) can flow to cool the anode. In such configurations, the magnet may be thermally ... | 03/11/2008 |
| 7339145 | Apparatus and a method for induction heating of pieces of electrically conducting and non-magnetic material An apparatus and a method for induction heating of pieces or blanks (10) of electrically conducting and non-magnetic material, wherein a device creates a static magnetic field (3) and a second device is arranged to cause a relative movement (4) ... | 03/04/2008 |
| 7323136 | Containerless mixing of metals and polymers with fullerenes and nanofibers to produce reinforced advanced materials The present invention relates to fullerene, nanotube, or nanofiber filled metals and polymers. This invention stems from a cross-disciplinary combination of electromagnetic and acoustic processing and property enhancement of materials through fullerene or nanofiber ... | 01/29/2008 |
| 7323400 | Plasma processing, deposition and ALD methods A plasma processing method includes providing a substrate in a processing chamber, the substrate having a surface, and generating a plasma in the processing chamber. The plasma provides at least two regions that exhibit different plasma densities. The method include... | 01/29/2008 |
| 7315009 | Material for welding and welded article A material for welding 5 having a region 11 in which welding such as laser welding or arc welding is performed, the region including indentations 5a-1 which are produced by carrying out a first working step comprising embossing, V-... | 01/01/2008 |
| 7309842 | Shielded monolithic microplasma source for prevention of continuous thin film formation A monolithic microplasma source includes a dielectric substrate having an outer surface that is exposed to a time varying electric field. A gap layer is positioned on an inner surface of the dielectric substrate. A shield including a slit is positioned on the gap la... | 12/18/2007 |
| 7309843 | Plasma-assisted joining Methods and apparatus for plasma-assisted joining of one or more parts together are provided. The joining process may include, for example, placing at least first and second joining areas in proximity to one another in a cavity, forming a plasma in the cavity by sub... | 12/18/2007 |
| 7305311 | Arc detection and handling in radio frequency power applications A radio frequency power delivery system comprises an RF power generator, arc detection circuitry, and control logic responsive to the arc detection circuitry. A dynamic boundary is computed about the measured value of a parameter representative of or related to the ... | 12/04/2007 |
| 7297892 | Systems and methods for laser-assisted plasma processing A controllable heat source, such as a laser or flame torch, can be used to pre-heat a portion of the surface of a workpiece, such as a glass optic or semiconductor wafer. Reactive atom plasma (RAP) processing can be used to modify the pre-heated surface portion, as ... | 11/20/2007 |
| 7285247 | Apparatus and method for operating a fuel reformer so as to purge soot therefrom A method of operating a fuel reformer includes advancing a first air/fuel mixture having a first air-to-fuel ratio into the fuel reformer. The method further includes determining if a soot purge is to be performed and generating a purge-soot signal in response there... | 10/23/2007 |
| 7281478 | Assembled cathode and plasma igniter with such cathode This invention relates to a plasma igniter for directly igniting the pulverized coal burner. Said plasma igniter consists of a plasma generator which includes a composite anode, an combined type cathode, an electromagnetic coil and a transmitting coil; a pulverized ... | 10/16/2007 |
| 7279654 | Current sensor A current sensor for installation on a conductor without breaking the conductor may include an insulating base having a conductor supporting portion and a conductive coil disposed within an outer surface of the insulating base. A magnetically permeable conductor ret... | 10/09/2007 |
| 7273015 | Method and apparatus for combustion of residual carbon in fly ash A system for combustion and removal of residual carbon within fly ash particles in which the fly ash particles are fed into an array of process units for combustion. The fly ash particles are subjected to heat and motive air such that as the fly ash particles pass t... | 09/25/2007 |
| 7271363 | Portable microwave plasma systems including a supply line for gas and microwaves Portable microwave plasma systems including supply lines for providing microwaves and gas flow are disclosed. The supply line includes at least one gas line or conduit and a microwave coaxial cable. A portable microwave plasma system includes a microwave source, a w... | 09/18/2007 |
| 7262384 | Reaction vessel and method for synthesizing nanoparticles using cyclonic gas flow A reaction vessel and a method for efficiently producing and collecting nanoparticles in the reaction vessel using cyclonic gas flow. Gas is injected through an inlet tangentially positioned relative to the axis of the vessel to cause the gas to form an outer helica... | 08/28/2007 |
| 7250196 | System and method for plasma plating An exemplary system and method for plasma plating are provided to generate a deposition layer on a substrate. The method for plasma plating includes positioning a substrate within a vacuum chamber, positioning a depositant in a filament within the vacuum chamber, re... | 07/31/2007 |
| 7244281 | Method and apparatus for trapping and purging soot from a fuel reformer A plasma fuel reformer assembly for producing reformate gas includes a fuel reformer having an air/fuel input assembly, an electrode assembly, and a soot trap positioned downstream of the electrode assembly. The electrode assembly includes a first electrode and a se... | 07/17/2007 |
| 7234413 | Plasma processing apparatus In a plasma processing apparatus, microwaves being transmitted in a waveguide pass through a microwave transmitted window via first and second slot antennas provided in a magnetic field side, so as to form surface waves. Process gas in a chamber is excited by the su... | 06/26/2007 |
