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| Number | Title | Issue Date |
| 5124522 | High accuracy, high flexibility energy beam machining system A high precision system for machining substrates by means of an energy beam includes real time digital signal processor control and a deflection system providing control, within a predetermined field of the substrate, of the angle at which the beam machin... | 06/23/1992 |
| 4910377 | System for creating holes in surgical needle materials There is disclosed a system for creating holes in surgical needle materials, respectively. A large number of needle materials are held by a holder. An image of the proximal end faces of the needle materials is picked up by an image pickup device. A moving... | 03/20/1990 |
| 4560880 | Apparatus for positioning a workpiece in a localized vacuum processing system Apparatus for positioning a semiconductor wafer with respect to a localized vacuum envelope so as to maintain a prescribed gap between the tip of the vacuum envelope and the wafer includes an x-y table, a stage assembly movable along the z-axis for holdin... | 12/24/1985 |
| 4549067 | Method for checking printing form surfaces engraved by means of an electron beam An electron beam generator designed for engraving surfaces of printing form cylinders is switched to microscope operation during engraving pauses in order to make engraved cups visible immediately and without additional auxiliary equipment. During microsc... | 10/22/1985 |
| 4546232 | Method for the topically precise subsequent engraving of printing cylinders A method for the topically precise subsequent-engraving of printing cylinders wherein special marks are engraved in the cylinder and evaluated. The marks are engraved in the form of cups forming a cup track. The cups serve as reference marks for an axial ... | 10/08/1985 |
| 4528451 | Gap control system for localized vacuum processing Apparatus for controlling the gap between localized vacuum processing envelope apparatus and a workpiece as the workpiece, typically a semiconductor wafer, is moved laterally with respect to the envelope apparatus. The envelope apparatus includes an envel... | 07/09/1985 |
| 4527042 | Method and apparatus for vacuum sealing a vacuum container assembly A method and apparatus for vacuum sealing a vacuum container assembly (A) such as a vacuum bottle having an inner container (1b) and an outer container (1a). The vacuum container assembly (A) is heat treated in one location in a vacuum chamber (21) of a v... | 07/02/1985 |
| 4433243 | Electron beam exposure apparatus With the invention an electron beam scans reference marks formed on a sample so as to determine the positions of the reference marks. The sample is scanned by the electron beam with respect to the positions of the reference marks thereby to form a desired... | 02/21/1984 |
| 4378482 | Electron-beam stage X-Y positioning instrumentation Electron-beam stage X-Y positioning instrumentation is provided. The electron-beam stage has a number of metal blocks affixed to its bottom. Fixed orthogonal noncontact gage heads are used to sense the distance of the heads from the parallel faces of a pr... | 03/29/1983 |
| 4338508 | Inscribing apparatus and methods Apparatus and methods for inscribing workpieces for the fabrication of masks and direct fabrication of microcircuits are described. The invention is primarily concerned with correcting for positional errors and to this end two coaxial beams (20,32) are di... | 07/06/1982 |
| 4324973 | Energy beam drilling apparatus having optical fiber link position sensor Disclosed is an electron beam drilling system wherein an optical fiber link is used to prevent deviant drilling. The position of fixtures within a vacuum chamber is monitored by alignable fiber segments. The junctions of the segments form couples which tr... | 04/13/1982 |
| 4291219 | Apparatus for maintaining alignment of a shrinking weld joint in an electron-beam welding operation The present invention is directed to an apparatus for automatically maintaining a shrinking weld joint in alignment with an electron beam during an electron-beam multipass-welding operation. The apparatus utilizes a biasing device for continually urging a... | 09/22/1981 |
| 4219719 | Method and apparatus for automatically positioning a workpiece relative to a scanning field or mask A method for automatically positioning a workpiece having at least one marking, specifically a wafer for integrated circuits which is to be processed in a charged-particle beam apparatus, relative to a scanning field or mask. In the method, a scanning bea... | 08/26/1980 |
| 4152599 | Method for positioning a workpiece relative to a scanning field or a mask in a charged-particle beam apparatus An improved method for positioning a workpiece having at least one marking in a charged-particle beam apparatus relative to either a scanning field or a mask and in which a scanning beam linearly scans the workpiece and a signal is generated by the scanni... | 05/01/1979 |
| 3988567 | Method of detecting the state of fusion of the workpiece in welding In welding a workpiece from its one side by arc or electron beam welding, a method of detecting the state of fusion of the workpiece which comprises superposing on the arc or electron beam current a signal current selected from the group consisting of pos... | 10/26/1976 |
| 3974381 | Method of electron beam welding with X-ray detection Welding method and apparatus for detecting the penetration depth of an electron beam weld, in which X-rays which occur are guided through several plates of an absorption device to a ray receiver, the plates comprising of plurality of bores of equal diamet... | 08/10/1976 |
| 3934187 | Device for the accurate positioning of an object holder in relation to the elements of a particle-type optical system, and a particle-type optical system equipped with said device A device for the accurate positioning of an object holder in relation to the elements of a particle-type optical system, for example an electron-optical system, comprises for each direction of displacement a comparator which compares the position required... | 01/20/1976 |
