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Class 219/121.31 - Workpiece position control


Subclass of Class 219 - Electric heating
Definition: Subject wherein the workpiece or a support therefore is
No. of patents: 62
Last issue date: 05/13/2008


1    
NumberTitleIssue Date
7372059Plasma-based EUV light source
Various mechanisms are provided relating to plasma-based light source that may be used for lithography as well as other applications. For example, a device is disclosed for producing extreme ultraviolet (EUV) light based on a sheared plasma flow. The device can prod...
05/13/2008
7326377Solid-free-form fabrication process and apparatus including in-process workpiece cooling
A solid free form fabrication system for manufacturing a component by successively building feedstock layers representing successive cross-sectional component slices includes a platform for receiving and supporting the feedstock layers, a feedstock supplying apparat...
02/05/2008
7215095Driving apparatus, exposure apparatus, and device manufacturing method
A driving apparatus for moving an object. The apparatus includes a first actuator which drives the object in X and Y directions, a second actuator which drives a reaction force counter which receives a reaction force generated when the first actuator drives the obje...
05/08/2007
6906280Fast pulse nonthermal plasma reactor
A fast pulsed nonthermal plasma reactor includes a discharge cell and a charging assembly electrically connected thereto. The charging assembly provides plural high voltage pulses to the discharge cell. Each pulse has a rise time between one and ten nanoseconds and ...
06/14/2005
6894298Arrangement for generating extreme ultraviolet (EUV) radiation based on a gas discharge
The invention is directed to a method and an arrangement for generating extreme ultraviolet (EUV) radiation, i.e., radiation of high-energy photons in the wavelength range from 11 to 14 nm, based on a gas discharge. The object of the invention, to find a novel possi...
05/17/2005
6761851Apparatus and method for hardening metal by varying the engagement between irradiation and metal
The present invention provides an apparatus for hardening a metal article, comprising a holding device, an energy beam generator pointed at the holding device for directing energy beams at the holding device, and a movement system supporting the holding device, wher...
07/13/2004
6469273Method and device for heating metal components using electron irradiation in a vacuum chamber
To achieve uniform heating of metal components in all their regions, a method and device for heating metal components using electron irradiation in a vacuum chamber includes multilayer holding elements having an outer layer facing the electron radiation. ...
10/22/2002
6421893Production line of car component
A production line for assembling a pair of left and right car components, capable of assembling a pair of high quality car components by on line at high operating efficiency and productivity and capable of controlling jigs and molds with high dimensional ...
07/23/2002
6112390Apparatus for manufacturing hemmed workpieces
A workpiece which is made by integrally combining an outer member and an inner member through hemming is manufactured efficiently in a common apparatus. An outer member and an inner member are combined to alternately subassemble two kinds of workpieces at...
09/05/2000
6011240Method and apparatus for butt welding together sheet blanks
An apparatus is disclosed for positioning, clamping and welding together proximal edge portions of two sheet blanks. The apparatus incorporates a high energy laser and sheet clamping mechanism used to clamp each sheet blank in place between an associated ...
01/04/2000
5929765Method and apparatus for positioning and aligning workpieces
A method for positioning and aligning workpieces, in particular one or more metal plates that are to be joined, against at least one stop, involves transmitting a position signal, preferably an electrical signal, between the workpiece and the stop, and us...
07/27/1999
5517059Electron and laser beam welding apparatus
A method and apparatus for electron or laser beam welding of semiconductor subassemblies to larger terminal members, without exposing semiconductor chips in such subassemblies to detrimental welding "flash"....
05/14/1996
5171964High accuracy, high flexibility, energy beam machining system
A high precision system for machining substrates by means of an energy beam includes real time digital signal processor control and a deflection system providing control, within a predetermined field of the substrate, of the angle at which the beam machin...
12/15/1992
5132507Apparatus and a method for checking a semiconductor
An apparatus for checking a semiconductor comprising an X-Y stage for movably holding a semiconductor chip in terms of X-Y coordinates, a charged particle beam radiating device for radiating a charged particle beam on the semiconductor chip held in the X-...
07/21/1992
5124522High accuracy, high flexibility energy beam machining system
A high precision system for machining substrates by means of an energy beam includes real time digital signal processor control and a deflection system providing control, within a predetermined field of the substrate, of the angle at which the beam machin...
06/23/1992
5039836Radiation manufacturing apparatus and method
An apparatus and method for reacting on articles of manufacture with radiation such as generated by an electron gun, laser or other means directed against a substrate wherein controlled movement of the substrate and/or the radiation is effected under the ...
08/13/1991
5023427Method and apparatus for automatically aligning proximal edges of sheets to be butt welded
There is provided a method and device for automatically aligning the proximal edges of two or more appreciably magnetic sheets to be connected along abutting edges. The device preferably includes supports to align the magnetic sheets in substantially plan...
06/11/1991
4831230Surface shaping and finishing apparatus and method
An apparatus and method for shaping and surface finishing articles and material of manufacture by means of intense radiation. In one form intense radiation, such as generated by an electron beam or beam of coherent light energy generated by a laser is con...
05/16/1989
4818838Apparatus for preselecting and maintaining a fixed gap between a workpiece and a vacuum seal apparatus in particle beam lithography systems
Disclosed is a particle beam lithography system (10) having a workpiece loading/unloading position to one side of a particle beam (32) and beam column (12) where a workpiece (14), to be processed, is placed in a vacuum chuck (100) to eliminate any irregul...
04/04/1989
4804395Electrode arrangement for lensing method
A system is provided for positioning a pair of electrodes on either side of the end portion of an optical fiber extending through a contact, to establish an arc through a cross-aperture in the contact and across the fiber to melt the fiber into a lens, wh...
02/14/1989
4777371Support material for electron beam systems
Support elements for electron beam systems for semiconductor manufacture must be subject to at most minimal temperature influences, as they have important effects on the adjustment precision. The composition of such support elements from a glass ceramic w...
10/11/1988
4755203Optic fiber positioning for lensing method
A system is described for forming a lens at the end of an optical fiber which extends through a hole in a contact, so the tip of the lens lies at a desired lens position located a predetermined distance rearward of the tip of the contact. The fiber is fix...
07/05/1988
4743283Alternating current arc for lensing system and method of using same
A system is provided for forming an end of an optical fiber into a lens, which produces a lensed fiber having an especially smooth lens surface and high strength near the intersection of the lens and the rest of the fiber. A lens is formed by establishing...
05/10/1988
4718928Quick access contact mounting fixture
A fixture is provided which enables the rapid mounting of an optical fiber contact with its forward end at a predetermined position and orientation with respect to arc-creating electrodes. The fixture includes a frame with a vertical slot having a width g...
01/12/1988
4680443Process and apparatus for electron beam welding grids for a nuclear fuel assembly
The apparatus is for welding grids, particularly for a nuclear fuel assembly, constituted by two sets of strips at right angles and whose terminal portions are made fast to a belt. It comprises, in an enclosure with a controlled atmosphere provided with a...
07/14/1987
4678891Method for adjusting an electrical device by electrode trimming
The frequency of a quartz crystal resonator (10) having a known radius (R) initially is adjusted upward toward a nominal resonant frequency in a "rough adjust" phase in which one or more lasered holes (24) are formed in a central portion of an outer elect...
07/07/1987
4642438Workpiece mounting and clamping system having submicron positioning repeatability
A high precision, high throughput submicrometer workpiece positioning system, particularly useful as a workpiece positioning means in electron beam lithography tools. The positioning system increases mechanical stability by essentially eliminating mechani...
02/10/1987
4632059Evaporator device for the evaporation of several materials
An evaporator device system having an electron jet heating device for the vaporization of several materials onto a substrate in a vacuum chamber includes at least two crucibles for the reception of respective evaporation materials. These crucibles are con...
12/30/1986
4561358Apparatus for conveying articles through an irradiation beam
Apparatus for conveying articles of length L through an irradiation beam of width B, where L substantially exceeds B. The articles are supported on carriers which are suspended between and more along two tracks positioned with the beam therebetween. The c...
12/31/1985
4560880Apparatus for positioning a workpiece in a localized vacuum processing system
Apparatus for positioning a semiconductor wafer with respect to a localized vacuum envelope so as to maintain a prescribed gap between the tip of the vacuum envelope and the wafer includes an x-y table, a stage assembly movable along the z-axis for holdin...
12/24/1985
4528451Gap control system for localized vacuum processing
Apparatus for controlling the gap between localized vacuum processing envelope apparatus and a workpiece as the workpiece, typically a semiconductor wafer, is moved laterally with respect to the envelope apparatus. The envelope apparatus includes an envel...
07/09/1985
4467170Electron beam drilling apparatus
An electron beam drilling apparatus for drilling a number of holes in a substrate by an electron beam is disclosed. The holes are drilled at a high speed by scanning the electron beam along a direction perpendicular to the direction of movement of the wor...
08/21/1984
4410800Electron beam exposure system
In an electron beam exposure system, a table on which a target was mounted is accelerated in Y direction and then decelerated. During this movement, the speed of the target is detected. An electron beam which is directed to the target is deflected in X di...
10/18/1983
4376885Process and apparatus for producing a ring unit for the valve parts of labyrinth valves
For producing the seat or valve member of a labyrinth valve a number of rings of different diameter are placed one inside the other as a workpiece with their blade-like edges turned in the same direction. The group of rings is then slipped over the middle...
03/15/1983
4370541Electron beam chamber for butt welding pipes
An electron beam welding chamber for butt joining elongate members 1,2 extending longitudinally at the center of the chamber. The chamber comprises an envelope 7 defining the welding enclosure 6 and which rests on a fixed structure 8. The electron gun equ...
01/25/1983
4369349Transducer diaphragm elements and methods and apparatus for making same
A diaphragm and a first tubular member are combined into a one-piece transducer diaphragm element by electron beam welding. The first tubular member is formed as a first heat sink contacting one major surface of the diaphragm. A second tubular member is p...
01/18/1983
4358657Sealing system for a movable vacuum chamber of a charged particle beam machine
A system for sealing the working vacuum chamber of a charged particle beam machine which is movable with respect to a workpiece is disclosed. The system includes a housing with a central compartment having wire-shaped elements urged against the workpiece ...
11/09/1982
4335297Electron beam processor
An electron beam processor with an energy storage line and matched field emission diode that define a high energy electron beam generator. A transport system positions a specimen to be thermally processed in a processing station. Energy stored on the line...
06/15/1982
4327273Method of treating a workpiece with electron beams and apparatus therefor
A vacuum chamber for welding in which to place a workpiece is hermetically connected to a vacuum chamber for an electron beam gun in which to place an electron beam gun, and the former is kept at a vacuum of 1×10-4 Torr while the latter, at a ...
04/27/1982
4317022Electron beam welding machine
An electron beam welding machine comprises an electron gun including a first beam adjusting means, a second beam adjusting means disposed spaced from the first beam adjusting means so as to be movable in the direction of an electron beam path, and positio...
02/23/1982
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