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Class 219/121.29 - Swept or scanned


Subclass of Class 219 - Electric heating
Definition: Subject matter wherein the beam of charged particles is
No. of patents: 42
Last issue date: 04/25/2006


1    
NumberTitleIssue Date
7034314Projection apparatus for projecting a pattern formed on a mask onto a substrate and a control method for a projection apparatus
A projection apparatus includes a charged particle beam source, a reduction lens, a charged particle shaping aperture having an arcuate opening, a collimator lens, and first and second projection lenses. A charged particle beam emerging from the charged particle bea...
04/25/2006
6919574Electron beam exposure apparatus, deflection apparatus, and electron beam exposure method
An electron beam exposure apparatus for exposing a wafer by an electron beam incorporates a circuit structure for conducting a scan test to self-diagnose the electrical connections. The electron beam exposure apparatus includes: an electron beam generating section f...
07/19/2005
6436466Method for the operation of an electron beam
A method is disclosed for the operation of a high-power electron beam for the vaporization of materials in a target. With this method, static and dynamic deflection errors are corrected. First, the static and dynamic deflection errors are ascertained by m...
08/20/2002
6214408Method for the operation of an electron beam
A method is disclosed for the operation of a high-power electron beam for the vaporization of materials in a target. With this method, static and dynamic deflection errors are corrected. First, the static and dynamic deflection errors are ascertained by m...
04/10/2001
6110318System for selective electron beam irradiation
Provided is the ability to selectively irradiate a designated irradiation target portion of a target material with a beam of electrons. Target material is moved at a substantially constant velocity in one direction along a path that is intersected by an e...
08/29/2000
5346554Apparatus for forming a thin film
An apparatus for forming a thin film irradiates an electron beam on a vaporizable substance held in a crucible. A pair of electromagnets are disposed in coplanar relation and at right angles to each other to generate a magnetic field which deflects the el...
09/13/1994
5306447Method and apparatus for direct use of low pressure vapor from liquid or solid precursors for selected area laser deposition
Methods and apparatus for selectively depositing a layer of material from a gas phase to produce a part comprising a plurality of deposited layers. The apparatus includes a computer controlling a directed energy beam, such as a laser, to direct the laser ...
04/26/1994
5196041Method of forming an optical channel waveguide by gettering
A method of forming an optical channel waveguide by gettering includes forming on a substrate a porous waveguide layer containing an index of refraction raising dopant in a compound; sealing a portion of the waveguide layer along a path; and reacting the ...
03/23/1993
5194079Method of forming an optical channel waveguide by thermal diffusion
A method of forming an optical channel waveguide includes forming on a substrate a waveguide layer of silica doped with an index of refraction raising dopant whose concentration profile in a first dimension includes a higher concentration region and an ad...
03/16/1993
5178658Method for forming an optical waveguide by selective volatization
A method of forming an optical waveguide which includes the steps of forming on a substrate a waveguide layer including at least one host medium and one dopant medium, one of which is more volatile than the other; and heating the waveguide layer to select...
01/12/1993
5004926Device for the irradiation of a product on both faces
A device for the dual-face irradiation of a product is disclosed. The disclosure lies in the fact that a scanning of the electron beam is done during the pulse so as to prevent a scanning along the axis of the scanning chamber and that the divergent scann...
04/02/1991
4973818Device and method for the control and monitoring of an electron beam for metal working
A device and a method for the control and monitoring of a deflectable electron beam is provided for the working of metal wherein the electron beam is not permitted to go beyond an allowed working area. With this device with the aid of a Teach-In method th...
11/27/1990
4847466Plasma torch having a longitudinally mobile arc root, and process for controlling the displacement thereof
The invention concerns plasma torches comprising an upstream electrode (12), a downstream electrode (11), a chamber (15) for the injection of plasma producing gas, a priming electrode (13) and optionally a magnetic field coil (14), in which the upstream r...
07/11/1989
4591688System and method for processing a work piece by a focussed electron beam
A welder utilizes a focussed electron beam which is deflected along the processing path required to weld two pieces together and is also oscillated about the processing path in accordance with a modulation curve. The modulation curve is approximated by a ...
05/27/1986
4562332Surface crack healing with high-energy beam
A method for healing surface cracks 10, especially in metals, by scanning a high-energy, diffused, pulsed electron-beam past a crack 10 in a slowly moving specimen object 12. The crack 10 moves laterally with respect to the beam so that the beam pattern 1...
12/31/1985
4532888Electron-beam coating of very broad strips
Electron-beam (EB) coating of broad strips with improved film quality, and without undue scattering and deflection of the electron beam at long beam paths is accomplished with a shielding mantle, placed between the EB gun and the evaporation crucible, pro...
08/06/1985
4524717Electron beam strip-coating apparatus
The present invention is a coating apparatus for temperature-sensitive broad strips or similar substrates. To obtain a high quality of coating, it is necessary to minimize the path of the electron beam (EB) through the vapor cloud, and to keep away backsc...
06/25/1985
4492873Apparatus for electron beam irradiation of objects
An apparatus for electron beam irradiation of objects comprises an electron beam shaper 1 providing a ribbon-shaped beam 7 and a deflecting electromagnet 8 with a frame-type magnetic circuit 9 to direct the beam 7 onto an irradiated object 6 substantially...
01/08/1985
4400609Device for detecting seam between abutting workpieces by electron beam
A device, for tracking a seam between abutting workpieces by a scanning electron beam, includes a scanning electron beam generating source, a power supply source of the scanning electron beam generating source, at least one secondary emission detector acc...
08/23/1983
4376886Method for electron beam welding
This invention concerns a process of welding by an electron beam. The process is one in which the beam is rapidly deflected from point to point of a predetermined matrix of spots over which the beam rests for predetermined lengths of time in order to prod...
03/15/1983
4363953Electron beam scribing method
A plurality of band-shaped regions on a specimen are successively scanned by an electron beam having a ribbon-shaped rectangular cross-section. This scanning is effected by deflecting the electron beam electrostatically in the direction of the shorter sid...
12/14/1982
4348576Position regulation of a charge carrier beam
In a charge carrier beam machine, as an electron beam welding machine, a system for establishing the relative position of a beam impingement spot on a workpiece surface and a machine reference position, as a beam gun axis, comprises an X-ray sensor defini...
09/07/1982
4305096Method of detecting weld lines
In a method of detecting a weld line, the positions of the weld line and the welding wire are detected from the video signal of the weld, which is provided by an industrial television camera. The video signal of the weld is compared with a predetermined t...
12/08/1981
4272665Energy beam welding a gap of varying width
A method of energy beam welding, as electron beam welding is disclosed, wherein the supply rate of filler material is continuously varied in accordance with the width of a gap between two workpiece parts to be welded together. Further, the specific energy...
06/09/1981
4223200Charged particle beam processing with magnetic field compensation
A device for compensating for spurious magnetic fields in an energy beam device includes first and second pairs of electromagnetic poles arranged along the particle path and providing magnetic fields to compensate for spurious magnetic fields which might ...
09/16/1980
4164640Method and apparatus for positioning a charged particle beam
A method and apparatus for seam welding by means of a charged particle beam is disclosed, wherein any misalignment of the beam with respect to the gap between opposed surfaces of two workpiece parts to be joined is compensated for by a double deflection o...
08/14/1979
4160150Method and apparatus for energy beam welding
In welding a workpiece of considerable thickness with an energy beam, as an electron beam, focussed into a focal point on a beam axis, the tendency of molten material flowing out of the welding zone is eliminated or at least considerably reduced by contin...
07/03/1979
4158122Method of measuring and stabilizing the diameter of heating point on workpiece in electron beam welding machine and on automatic device for realization thereof
In the course of welding an electron welding beam is regularly deflected by means of linearly growing pulses to an electrons pickup arranged as a Faraday beam trap. As the electron beam travels in the course of deflection, it crosses the slit in the Farad...
06/12/1979
4152599Method for positioning a workpiece relative to a scanning field or a mask in a charged-particle beam apparatus
An improved method for positioning a workpiece having at least one marking in a charged-particle beam apparatus relative to either a scanning field or a mask and in which a scanning beam linearly scans the workpiece and a signal is generated by the scanni...
05/01/1979
4121086Method for irradiation of round-section cylindrical objects with accelerated electrons
A method for irradiation of round-section cylindrical objects, such as pipes, with accelerated electrons, whereby three objects are placed together in the area of intersection of three ribbon or strip electron beams directed at an angle of 120° to one an...
10/17/1978
4110594Pattern mask generating method and apparatus
High-density multilayered integrated circuits are fabricated by first generating all photomasks for the respective layers concurrently during the same exposure operation. Since ambient conditions are identical during generation of these related masks, mas...
08/29/1978
4099062Electron beam lithography process
In an electron beam lithography process, shapes are formed which differ from the beam spot size and the grid by employing multiple overlapping exposures having a reduced exposure level....
07/04/1978
4085501Method for fabrication of integrated optical circuits
Method and apparatus are disclosed for making integrated optical circuits. A waveguide in the form of a thin layer of dielectric material is modified as to its coherent radiation transmitting properties by electron beam impingement thereon so as to modula...
04/25/1978
4081794Alloy junction archival memory plane and methods for writing data thereon
A memory plane for an archival, non-volatile mass storage memory has a planar semiconductor diode with each of a plurality of small P-N junction diodes alloyed into the surface of its fabricated layer responsive to a selectively-actuated scanned energy be...
03/28/1978
4042801Electron beam apparatus
In order to provide exceptionally high beam deflection speed in apparatus utilizing a magnetically deflected electron beam, such as an electron microscope or an electron beam welding machine, a ferro-magnetic yoke having opposed internal poles arranged to...
08/16/1977
4034181Adhesive-free process for bonding a semiconductor crystal to an electrically insulating, thermally conductive stratum
A broad silver coated direct band-gap semiconductor crystal is bonded to a sapphire face plate without using any adhesive by a process of positioning the crystal with a broad surface against the sapphire, and bombarding the crystal with an electron beam r...
07/05/1977
4012620Electron beam seam finding device
This invention relates to a method and apparatus for determining the relative position between the point of impingement of an electron beam on a work surface and the seam between parts to be welded. The seam is scanned by oscillating a low power electron ...
03/15/1977
4008402Method and apparatus for electron beam alignment with a member by detecting X-rays
A method and apparatus are provided for alignment of an electron beam with precisely located areas of a major surface of a member. Marks of predetermined shape are formed of X-ray producing material and are positioned adjacent the major surface of the mem...
02/15/1977
3993889Seam tracking method improvement
This invention is for a method for controlling the motion of an electron beam gun with respect to a workpiece so that the electron beam will follow the path along the seam between the two parts which are to be welded. The electron beam scans the seam in a...
11/23/1976
3975613Electron beam-generating system
In an electron beam-generating system including an electron-emitting cathode, a beam focusing electrode, and an anode electrode for accelerating the emitted electrons, the magnetic fields for deflecting the beam to material to be heated and for periodical...
08/17/1976
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