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Class 216/94 - Etching using radiation (e.g., laser, electron-beam, ion-beam, etc.)


Subclass of Class 216 - Etching a substrate: processes
Definition: Process wherein radiation is used separately or simultaneously
No. of patents: 149
Last issue date: 05/03/2011


1        
NumberTitleIssue Date
7935266Wet etching method using ultraviolet-light and method of manufacturing semiconductor device
A substrate supporting film to be etched is held on a rotating stage. Ultraviolet light having a wavelength of 200 nm or shorter radiated from first lamps irradiates the film in air, thereby removing an organic coatings from the film and making the surface of the fi...
05/03/2011
7927499Substrate having blind hole and method for forming blind hole
A substrate having a blind hole and a method for forming the blind hole. The method includes: (a) providing a substrate having a lower dielectric layer, a copper layer, and an upper dielectric layer; and (b) forming an upper dielectric layer through hole and a coppe...
04/19/2011
7763179Color laser engraving and digital watermarking
A color laser engraving method engraves a document including a surface layer and one or more sub-layers. The sub-layer includes different colors and orientations of ink. A laser provides openings in the surface layer—to expose color ink in the sub-layer—to creat...
07/27/2010
7691281Method of producing a reflective design
A method of producing a reflective design includes the steps of lasering a pattern on an adhesive side of a reflective laminated material. The lasering ablates the adhesive and causes these areas to not adhere. The reflective laminate material is applied to a substr...
04/06/2010
7534365Ultra-violet assisted anisotropic etching of PET
A method for etching a substrate is described wherein a substrate is positioned in a solution of solvent and the substrate is exposed to excitation energy. The method may be applied to the production of thermocouple devices wherein the substrate is poly-ethylene-ter...
05/19/2009
7452478Method for converting and purifying materials for modifying surfaces of semiconductor nanoparticles
This invention provides a method for converting materials for stabilizing surfaces of semiconductor nanoparticles. In this method, surfaces of semiconductor nanoparticles are first modified and then dissolved by photoetching in the presence of materials for stabiliz...
11/18/2008
7419612Method of creating pores in a thin sheet of polyimide
The invention concerns a method which consists in first subjecting the polyimide sheet to ionic bombardment, followed by an irradiation in the visible domain and finally a relatively brief chemical etching. Said method enables a thin polyimide sheet comprising pores...
09/02/2008
7385183Substrate processing apparatus using neutralized beam and method thereof
In a substrate processing apparatus using a neutralized beam and a method thereof, the substrate processing apparatus includes: an ion source for emitting an ion beam at an emitting angle; reflectors at which the ion beam emitted by the ion source is incident and su...
06/10/2008
7374791Method for making and measuring a coating on the surface of a medical device using an ultraviolet laser
This invention relates to a method for manufacturing an implantable medical device, having a surface covered with a coating that can include a desired amount of a biologically active material, using an ultraviolet (UV) laser. The invention also pertains to a method ...
05/20/2008
7355259Photodiode array and optical receiver device including the same
Disclosed is a photodiode array which includes a plurality of p-i-n photodiodes arrayed on a semi-insulative semiconductor substrate, each photodiode including an n-type semiconductor layer grown on the substrate, an i-type semiconductor layer grown on the n-type se...
04/08/2008
7338637Microfluidic device with thin-film electronic devices
A microfluidic device for analysis of a sample. The microfluidic device includes a substrate portion that at least partially defines a chamber for receiving the sample. The substrate portion includes a substrate having a surface. The substrate portion also includes ...
03/04/2008
7334625Manufacture of casting cores
A method for forming an investment casting core comprises cutting a patterned core precursor from refractory metal-based sheet. The cutting forms recast along the cuts. An oxide is grown on non-recast areas. The recast is substantially chemically removed but substan...
02/26/2008
7323699Apparatus and method for modifying an object
A method and apparatus includes positioning a reactant on a surface in specific location and then directing an energy source from a device at the reactant such that it modifies the surface to either remove material or add material. ...
01/29/2008
7316786Method of polishing film to be polished
A method is provided that includes a main laminate making step of forming a plurality of main magnetic poles onto a substrate, covering each magnetic pole with a first protective film, and forming onto the first protective film a stopper film provided with openings ...
01/08/2008
7312135Laser processing apparatus
The present invention provides a laser processing apparatus having a laser oscillator for outputting a pulsed laser beam; deflection unit for deflecting the pulsed laser beam to irradiate a object to be processed with the deflected pulsed laser beam; a mounting base...
12/25/2007
7306744Method of manufacturing a nozzle plate
A method of manufacturing a nozzle plate 2 is disclosed. The nozzle plate 2 has a plurality of nozzle openings 22 through each of which a droplet is adapted to be ejected. The method includes the steps of: preparing a processing substrate (silic...
12/11/2007
7293345Method of manufacturing a thin film magnetic recording head
A invention provides a method of manufacturing a thin film magnetic head is provided, capable of forming a magnetic pole layer as easily as possible. By etching a lower insulating layer and the upper insulating layer by RIE using a fluorine-based gas (CF4
11/13/2007
7287318Biosensor
A biosensor is provided that comprises a plate element with a pre-determined reaction zone and a recess positioned adjacent to the reaction zone. The biosensor also comprises a reagent that is positioned on the reaction zone. In preferred embodiments, the recess cir...
10/30/2007
7279111Monolithic printhead with built-in equipotential network and associated manufacturing method
An actuating assembly (50) for ink jet printheads consists of a silicon die (61), which comprises a groove (45) and a lamina (64), and of a structure (75) produced monolithically in the same production process. The actuating assemb...
10/09/2007
7195989Electrochemical fabrication methods using transfer plating of masks
Three-dimensional structures are electrochemically fabricated by depositing a first material onto previously deposited material through voids in a patterned mask where the patterned mask is at least temporarily adhered to a substrate or previously formed layer of ma...
03/27/2007
7188001System and method for temperature control
A system for controlling the temperature of a reaction mixture comprises at least one heating device for heating the mixture and a power regulator for regulating the amount of power supplied to the heating device. A controller in communication with the power regulat...
03/06/2007
7166186Laser decapsulation apparatus and method
A decapsulation apparatus 100 has a laser 8 that removes plastic encapsulant from a device 24. Chamber 20 is sealed. Exhaust port 9 removes debris and fumes. The device 24 is positioned and scanned using an X,Y table 2. A hi...
01/23/2007
7150811Ion beam for target recovery
A charged particle beam apparatus and method for locally removing material from a predetermined location on a workpiece, such as the removal of a metallization layer covering an alignment mark on a wafer. The invention is particularly suited for high-volume mass pro...
12/19/2006
7144520Etching method and apparatus
An etching apparatus comprises a workpiece holder (21) for holding a workpiece (X), a plasma generator (10, 20) for generating a plasma (30) in a vacuum chamber (3), an orifice electrode (4) disposed between the workpiece holder (
12/05/2006
7141176Methods and apparatuses for assembling elements onto a substrate
Methods and apparatuses for assembling elements onto a substrate. The surfaces of the elements and/or the substrate are treated and the elements are dispensed over the substrate in a slurry. In one example of the invention, the substrate is exposed to a surface trea...
11/28/2006
7138066Gear surface treatment procedure
A method of surface treating heat treated members to remove oxide scale. The heat treated members are subjected to a staged series of discrete chemical and physical cleaning steps yielding a substantially scale-free surface readily adaptable for subsequent applicati...
11/21/2006
7132673Device and method for milling of material using ions
A milling device is disclosed for the preparation of microscopy specimens or other surface science applications through the use of ion bombardment. The device provides the ability to utilize both gross and fine modification of the specimen surface through the use of...
11/07/2006
7122126Wet processing using a fluid meniscus, apparatus and method
A wet processing apparatus and method that takes advantage of a fluid meniscus to process at least a portion of a surface of an object. After one surface of the object has been processed another side or surface of the object can be similarly processed. This processi...
10/17/2006
7109118Electrochemical fabrication methods including use of surface treatments to reduce overplating and/or planarization during formation of multi-layer three-dimensional structures
A method of fabricating three-dimensional structures from a plurality of adhered layers of at least a first and a second material wherein the first material is a conductive material and wherein each of a plurality of layers includes treating a surface of a first mat...
09/19/2006
7081600Method and apparatus for cover assembly for thermal cycling of samples
A flexible heating cover assembly for an apparatus for heating samples of biological material with substantial temperature uniformity includes a housing having a plurality of engageable enclosure components; a resistive heater having a plurality of heater element ar...
07/25/2006
7081282Optically variable marking
The invention relates to an optically variable marking comprising a semiopaque substrate with a first surface that is covered with an optically variable layer that is for example a liquid crystal polymer layer or a layer comprising pearlescent pigments, and a second...
07/25/2006
7081208Method to build a microfilter
Methods are provided for making microfilters by subtractive techniques which remove a component or part of a filter material to form pores in the filter material and additive techniques which deposit a filter material onto a porous underlying substrate. All the meth...
07/25/2006
7056446Method of manufacturing nano-gap electrode
A method of easily manufacturing a nano-gap electrode by using a focused ion beam lithography includes a layer depositing step of depositing an electrode layer and a metal mask layer in this order on an insulating substrate, a mask pattern forming step of etching th...
06/06/2006
7044376Authentication method and apparatus for use with compressed fluid printed swatches
Authentication systems, apparatus, and methods authenticate an identification marking including a nanocrystalline material. One or more properties of the marking are ascertained to provide a measured profile. The measured profile is compared to at least one member o...
05/16/2006
7026255Method and device for photo-electrochemically etching a semiconductor sample, especially gallium nitride
In a method for photo-electrochemical etching of a semiconductor sample, the semiconductor sample is brought in contact with an electrolyte liquid. The contact area formed thereby is illuminated through the electrolyte liquid with UV light. The photo-current created...
04/11/2006
7022193Apparatus and method for treating surfaces of semiconductor wafers using ozone
An apparatus and method for treating surfaces of semiconductor wafers with a reactive gas, such as ozone, utilizes streams of gaseous material ejected from a gas nozzle structure to create depressions on or holes through a boundary layer of processing fluid formed o...
04/04/2006
7007383Methods for forming dovetails for turbine buckets
A dovetail preform having linearly extending hooks and slots is finished to provide arcuate slots and hooks for securement of the finished bucket dovetail to a correspondingly-shaped dovetail of a turbine wheel. An electrode having the general configuration of the d...
03/07/2006
7007855Wafer identification mark
A semiconductor wafer including a plurality of pits in the semiconductor wafer. The pits are arranged in an information-providing pattern and are readable after completion of processing on the wafer. ...
03/07/2006
7005617Apparatus and method for thermally cycling samples of biological material with substantial temperature uniformity
An apparatus for thermally cycling samples of a biological material including a thermal block assembly including a plurality of sample holders for receiving samples of biological material; a heat sink thermally coupled to the thermal block assembly, the heat sink tr...
02/28/2006
7003372Appearance processing method and aspheric lens fabricating method using the same
Disclosed is an appearance processing method comprising: designing a reference appearance for designing a set shape as a theoretical value; producing a specimen; comparing the reference appearance with the specimen and thus setting a deviation region; performing ion...
02/21/2006
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