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Class 216/90 - Relative movement between the substrate and a confined pool of etchant


Subclass of Class 216 - Etching a substrate: processes
Definition: Process including the step of causing a relative motion
No. of patents: 186
Last issue date: 09/07/2010


1          
NumberTitleIssue Date
7790052Substrate receiving method
A substrate receiving apparatus and a method thereof that prevents substrate damage from occurring when a substrate is loaded/unloaded on/from a cassette. The present invention includes a cassette having a plurality of plates inside so as to receive a plurality of s...
09/07/2010
7425278Process of etching a titanium/tungsten surface and etchant used therein
An etchant which includes an aqueous solution of between about 30% and about 38% concentrated hydrogen peroxide, said percentages being by volume, based on the total volume of the solution; between about 3.5 ml and about 20 ml per liter of phosphoric acid; and an am...
09/16/2008
7387963Semiconductor wafer and process for producing a semiconductor wafer
A semiconductor wafer has an edge region with no defects larger than or equal to 0.3 μm. The wafers are produced by a process, comprising (a) providing a semiconductor wafer having a rounded and etched edge; (b) polishing the edge of the semiconductor wafer, in whi...
06/17/2008
7368017Method and apparatus for semiconductor wafer planarization
Broadly speaking, the present invention provides a method and an apparatus for planarizing a semiconductor wafer (“wafer”). More specifically, the present invention provides for depositing a planarizing layer over the wafer, wherein the planarizing layer serves ...
05/06/2008
7364666Flexible circuits and method of making same
Disclosed is a method for making flexible circuits in which portions of a tie layer are removed by etching the underlying polymer. Also disclosed are flexible circuits made by this method. ...
04/29/2008
7326305System and method for decapsulating an encapsulated object
A system and method for the selective etching or removal of encapsulating material from an encapsulated object, such as a semiconductor, includes depositing an encapsulant-removal agent, such as a solvent or acid, onto the surface of the object. A flow of heated gas...
02/05/2008
7314575Manufacturing method of glass substrate for magnetic disk, and manufacturing method of magnetic disk
A method for manufacturing a glass substrate for a magnetic disk comprises mirror surface polishing and cleaning of a glass substrate, wherein polishing agent of which the principal component is rare-earth oxide with content of fluorine 5% by weight or less, is supp...
01/01/2008
7307023Polishing method of Cu film and method for manufacturing semiconductor device
A method for polishing a Cu film comprises contacting a Cu film formed above a semiconductor substrate with a polishing pad attached to a turntable, and supplying a first chemical liquid which promotes the polishing of the Cu film and a second chemical liquid which ...
12/11/2007
7291282Method of fabricating a mold for imprinting a structure
The present invention provides a method of fabricating an imprint mold for molding a structure. The method includes directing a first and a second flux for forming a first material and a second material, respectively, to a substrate to form a layered structure havin...
11/06/2007
7291283Combined wet etching method for stacked films and wet etching system used for same
A combined wet etching method for stacked films which is capable of performing etching processes in a collective manner while controlling an amount of side-etching on each of stacked films and of making uniform side edges. In the wet etching method, two or more type...
11/06/2007
7288207Etching liquid for controlling silicon wafer surface shape and method for manufacturing silicon wafer using the same
A method for manufacturing a silicon wafer includes a planarizing process 13 for polishing or lapping the upperside and lowerside surfaces of a thin disk-shaped silicon wafer obtained by slicing a silicon single crystal ingot, an etching process for dipping t...
10/30/2007
7279115Method to reduce stacking fault nucleation sites and reduce V drift in bipolar devices
A method is disclosed for preparing a substrate and epilayer for reducing stacking fault nucleation and reducing forward voltage (Vf) drift in silicon carbide-based bipolar devices. The method includes the steps of etching the surface of a silicon carbide...
10/09/2007
7276449Gas assisted method for applying resist stripper and gas-resist stripper combinations
A method for moving resist stripper across the surface of a semiconductor substrate includes applying a wet chemical resist stripper, such as an organic or oxidizing wet chemical resist stripper, to at least a portion of a photomask positioned over the semiconductor...
10/02/2007
7261986Photoconductive member for an electrophotographic machine and method of forming same
A method for producing a substrate for a photoconductive member includes etching the substrate with a self-limiting acid that removes the metal oxides from but does not affect the surface roughness of the substrate inner and outer surface. ...
08/28/2007
7258833High-energy cascading of abrasive wear components
In accordance with the present invention, a method for manufacturing tungsten carbide components is provided. The method includes forming a composite material out of tungsten carbide powder and binder powder, pressing the composite material into a plurality of compo...
08/21/2007
7259252Nanoparticles having oligonucleotides attached thereto and uses therefor
The invention provides methods of detecting a nucleic acid. The methods comprise contacting the nucleic acid with one or more types of particles having oligonucleotides attached thereto. In one embodiment of the method, the oligonucleotides are attached to nanoparti...
08/21/2007
7253277Nanoparticle polyanion conjugates and methods of use thereof in detecting analytes
This invention provides polyanionic polymer conjugates containing non-nucleotide polyanionic polymers that are useful in detecting target analytes such as proteins or small molecules. The invention also provides nanoparticles bound to polyanionic polymer conjugates ...
08/07/2007
7252782Chemical mechanical polishing aqueous dispersion and chemical mechanical polishing method
A chemical mechanical polishing aqueous dispersion comprises abrasives (A) containing ceria, an anionic water-soluble polymer (B) and a cationic surfactant (C), wherein the amount of the anionic water-soluble polymer (B) is in the range of 60 to 600 parts by mass ba...
08/07/2007
7250499Nanoparticles having oligonucleotides attached thereto and uses therefor
The invention provides methods of detecting a nucleic acid. The methods comprise contacting the nucleic acid with one or more types of particles having oligonucleotides attached thereto. In one embodiment of the method, the oligonucleotides are attached to nanoparti...
07/31/2007
7238472Non-alloying core shell nanoparticles
The present invention relates composite core/shell nanoparticles and a two-step method for their preparation. The present invention further relates to biomolecule-core/shell nanoparticle conjugates and methods for their preparation. The invention also relates to met...
07/03/2007
7208587Nanoparticles having oligonucleotides attached thereto and uses therefor
The invention provides methods of detecting a nucleic acid. The methods comprise contacting the nucleic acid with one or more types of particles having oligonucleotides attached thereto. In one embodiment of the method, the oligonucleotides are attached to nanoparti...
04/24/2007
7204911Process and apparatus for forming discrete microcavities in a filament wire using a polymer etching mask
A microcavity-forming system for making microcavities in a wire (especially a tungsten filament wire). The system has a coating station receiving the wire and applying a polymer coating to the wire. A mask-forming station receives the polymer-coated wire and blows m...
04/17/2007
7182821Substrate processing method and substrate processing apparatus
Disclosed is a substrate processing method including a substrate rotating step for rotating a substrate with the substrate held almost horizontally within a chamber; a peripheral edge processing step for discharging a processing liquid to a lower surface of the subs...
02/27/2007
7169556Nanoparticles having oligonucleotides attached thereto and uses therefor
The invention provides methods of detecting a nucleic acid. The methods comprise contacting the nucleic acid with one or more types of particles having oligonucleotides attached thereto. In one embodiment of the method, the oligonucleotides are attached to nanoparti...
01/30/2007
7147687Non-alloying core shell nanoparticles
The present invention relates composite core/shell nanoparticles and a two-step method for their preparation. The present invention further relates to biomolecule-core/shell nanoparticle conjugates and methods for their preparation. The invention also relates to met...
12/12/2006
7135055Non-alloying core shell nanoparticles
The present invention relates to composite core/shell nanoparticles and a two-step method for their preparation. The present invention further relates to biomolecule-core/shell nanoparticle conjugates and methods for their preparation. The invention also relates to ...
11/14/2006
7122126Wet processing using a fluid meniscus, apparatus and method
A wet processing apparatus and method that takes advantage of a fluid meniscus to process at least a portion of a surface of an object. After one surface of the object has been processed another side or surface of the object can be similarly processed. This processi...
10/17/2006
7118665Surface treatment process for enhancing a release rate of metal ions from a sacrificial electrode and a related sacrificial electrode
The present invention discloses a surface treatment process for enhancing both the release rate of metal ions from a sacrificial electrode, and the working life of the electrode. A high density of micro pores are formed on the surface of the sacrificial electrode. C...
10/10/2006
7115688Nanoparticles with polymer shells
The invention provides a method of preparing nanoparticles having at least one polymer shell attached to them, each polymer shell having a selected property or properties. The method comprises attaching initiation monomers to the surfaces of the nanoparticles, conta...
10/03/2006
7098320Nanoparticles having oligonucleotides attached thereto and uses therefor
The invention provides methods of detecting a nucleic acid. The methods comprise contacting the nucleic acid with one or more types of particles having oligonucleotides attached thereto. In one embodiment of the method, the oligonucleotides are attached to nanoparti...
08/29/2006
7094131Microelectronic substrate having conductive material with blunt cornered apertures, and associated methods for removing conductive material
A microelectronic substrate and method for removing conductive material from a microelectronic substrate. In one embodiment, the microelectronic substrate includes a conductive or semiconductive material with a recess having an initially sharp corner at the surface ...
08/22/2006
7090786Aqueous dispersion for chemical/mechanical polishing
The aqueous dispersion comprising (A) abrasive grains, (B) at least one compound selected from the group consisting of 2-bromo-2-nitro-1,3-propanediol, 2-bromo-2-nitro-1, 3-butanediol, 2,2-dibromo-2-nitroethanol, and 2,2-dibromo-3-nitrilopropionamide, and (C) an org...
08/15/2006
7063800Methods of cleaning copper surfaces in the manufacture of printed circuit boards
The present invention sets forth an improved method of microetching a metal substrate by contacting the substrate with an aqueous composition comprising a sodium persulfate or hydrogen peroxide oxidizing agent, acid, and one or more additives. When the oxidizing age...
06/20/2006
7056447Semiconductor processing methods
Embodiments in accordance with the present invention provide for removing organic materials from substrates, for example substrates employed in the fabrication of integrated circuits, liquid crystal displays and the like. Such embodiments also provide for forming se...
06/06/2006
7045370Dicing and testing optical devices, including thin film filters
A technique for fabricating a plurality of thin film filters (“TFFs”), and other optical devices, from a wafer. A device or TFF wafer is affixed to a carrier having a pattern of notches formed thereon corresponding to a pattern into which the wafer is to be dice...
05/16/2006
7022244Method and apparatus for generation of fine particles
To supply microfine liquid droplets to a microscopic space for enabling micromachining and provide a method and an apparatus for forming the microfine liquid droplets, there is provided a method and an apparatus for generating liquid fine particles, comprising atomi...
04/04/2006
7018554Method to reduce stacking fault nucleation sites and reduce forward voltage drift in bipolar devices
A method is disclosed for preparing a substrate and epilayer for reducing stacking fault nucleation and reducing forward voltage (Vf) drift in silicon carbide-based bipolar devices. The method includes the steps of etching the surface of a silicon carbide...
03/28/2006
7005080Nonabrasive media with accellerated chemistry
The invention is an improvement in the metal finishing processes disclosed in U.S. Pat. No. 4,818,333. The improvement arises in the use of nonabrasive media, such as stainless steel or plastic, in combination with chemicals that are reactive to the metal surface pr...
02/28/2006
6974669Bio-barcodes based on oligonucleotide-modified nanoparticles
The present invention relates to a screening methods, compositions, and kits for detecting for the presence or absence of one or more target analytes, e.g. proteins such as antibodies, in a sample. In particular, the present invention relates to a method that utiliz...
12/13/2005
6969761Nanoparticles having oligonucleotides attached thereto and uses therefor
The invention provides methods of detecting a nucleic acid. The methods comprise contacting the nucleic acid with one or more types of particles having oligonucleotides attached thereto. In one embodiment of the method, the oligonucleotides are attached to nanoparti...
11/29/2005
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