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| Number | Title | Issue Date |
| 7846346 | Processing apparatus and method A processing method for transferring a relief pattern of a mold to a resist includes the steps of compressing the mold having the relief pattern against the resist on a substrate, irradiating an exposure light onto the resist through the mold, vibrating the mold and... | 12/07/2010 |
| 7828984 | Imprint method, imprint apparatus, and process for producing chip An imprint method for imprinting an imprint pattern of a mold onto a pattern formation material on a substrate so as to realize a high throughput includes the steps of bringing the imprint pattern and the pattern formation material into contact with each other; appl... | 11/09/2010 |
| 7807065 | Processing method A processing method for forming a first pattern on a substrate to which a resist is applied includes the steps of pressing an original having a second pattern that has a relief reverse to that of the first pattern, against the resist on the substrate, and irradiatin... | 10/05/2010 |
| 7455789 | Stamper, lithographic method of using the stamper and method of forming a structure by a lithographic pattern A stamper includes a substrate and a plurality of protrusions of different heights formed on one of the surfaces of the substrate, the protrusions of larger height having a stack structure formed of at least two layers of at least two types of materials, thereby tra... | 11/25/2008 |
| 7410904 | Sensor produced using imprint lithography The disclosure relates to a process including depositing an imprintable layer on a substrate. The imprintable layer is imprinted into the pattern of an imprint-fabricated ribbon. The pattern from the imprintable layer is transferred to the substrate to be used to fa... | 08/12/2008 |
| 7396475 | Method of forming stepped structures employing imprint lithography The present invention provides a method for forming a stepped structure on a substrate that features transferring, into the substrate, an inverse shape of the stepped structure disposed on the substrate. ... | 07/08/2008 |
| 7378028 | Method for fabricating patterned magnetic recording media A method of fabricating a patterned magnetic layer comprises sequential steps of: (a) providing a workpiece comprising a non-magnetic substrate, a layer of magnetic material overlying a surface of the substrate, and a layer of a non-magnetic material overlyin... | 05/27/2008 |
| 7374417 | Stamper and transfer apparatus A stamper and a transfer apparatus that utilizes the stamper, which is capable of accurately transferring its own pattern onto an article, such as a substrate, without being affected by any distribution of convex portions on the stamper surface or any contour of the... | 05/20/2008 |
| 7368753 | Thin film transistor array substrate and fabricating method thereof A thin film transistor array substrate includes a first conductive pattern group including a gate electrode of a thin film transistor and a gate line connected to the gate electrode; a semiconductor pattern defining a channel of the thin film transistor; a second co... | 05/06/2008 |
| 7361454 | Method of forming contact hole and method of manufacturing semiconductor device A method of forming a contact hole according to an embodiment of the present invention comprises exposing a resist film formed on a semiconductor substrate to a light using a first photomask in which mask patterns are arranged two-dimensionally at a predetermined pi... | 04/22/2008 |
| 7360851 | Automated pattern recognition of imprint technology An apparatus and method for control of spreading of liquid drops are disclosed. An initial pattern of drops of liquid is deposited on a first surface. A second surface is brought into sufficient contact with the initial pattern of the drops that the liquid starts to... | 04/22/2008 |
| 7357077 | Data carrier, method for the production thereof and gravure printing plate The invention relates to a data carrier having a security element that is at least visually testable and has an embossing in at least a partial area, the embossing being a halftone blind embossing executed by inkless intaglio printing, and to a method for producing ... | 04/15/2008 |
| 7354525 | Specimen surface processing apparatus and surface processing method For a surface processing apparatus using a plasma, a mixed gas of a fluorine-containing gas and an oxygen gas is used as an ashing gas. A mixed gas of an oxygen gas and a fluorine-containing gas is introduced as an ashing gas. This allows the following steps to be c... | 04/08/2008 |
| 7354698 | Imprint lithography An imprinting method is disclosed which involves irradiating a photo-curable imprintable medium in a flowable state on a substrate with radiation to initiate curing of the medium, after the irradiating, contacting the medium with a template to form an imprint in the... | 04/08/2008 |
| 7351660 | Process for producing high performance interconnects A method for fabricating high performance vertical and horizontal electrical connections in a three dimensional semiconductor structure. A dielectric film is imprinted with a stamp pattern at high vacuum and with precise temperature and stamping pressure control. Th... | 04/01/2008 |
| 7347683 | Mold and molding apparatus using the same A molding apparatus for patterning a workpiece includes a mold having a pattern to be transferred to the workpiece, with the pattern including recesses, a first support member for supporting the mold, and a second support member, arranged opposite to the first suppo... | 03/25/2008 |
| 7341441 | Nanoprint equipment and method of making fine structure Provided is a nanoprint apparatus in which a substrate and a mold formed on its surface with fine concavities and convexities are heated and pressed with each other through the intermediary of a buffer member interposed therebetwen, including a mechanism for success... | 03/11/2008 |
| 7314833 | Method for manufacturing substrate for discrete track recording media and method for manufacturing discrete track recording media According to one embodiment, a method for manufacturing a substrate for a discrete track recording media, the method includes forming an imprint resist layer on a substrate, imprinting, on the imprint resist layer, a stamper formed with patterns of protrusions and r... | 01/01/2008 |
| 7315068 | Interface layer for the fabrication of electronic devices The present invention is directed to methods for making electronic devices with a thin anisotropic conducting layer interface layer formed between a substrate and an active device layer that is preferably patterned conductive layer. The interface layer preferably pr... | 01/01/2008 |
| 7303703 | Nano-imprint system with mold deformation detector and method of monitoring the same A system for nano-imprint with mold deformation detector is disclosed for real-time monitoring of the deformation of the mold. An electrostatic plate capacitor is embedded in the mold, serving as the deformation detector. The capacitor includes two opposite metal fi... | 12/04/2007 |
| 7299547 | Method for manufacturing tape wiring board A method for manufacturing a tape wiring board in accordance with the present invention may employ an imprinting process in forming a wiring pattern, thereby reducing the number of processes for manufacturing a tape wiring board and allowing the manufacturing proces... | 11/27/2007 |
| 7299535 | Methods for making data storage media and the resultant media Methods for forming data storage media and the media formed thereby are disclosed herein. In one embodiment, the method for forming a data storage media, comprises: injection molding a substrate comprising surface features, wherein said surface features have greater... | 11/27/2007 |
| 7294294 | Surface modified stamper for imprint lithography A method of performing imprint lithography of a surface substrate includes a stamper having a thin lubricant coating thereon to facilitate release of the stamper from the imprinted surface to reduce degradation of image replication. Embodiments of the invention incl... | 11/13/2007 |
| 7291284 | Fabrication of sub-50 nm solid-state nanostructures based on nanolithography Combination of nanolithography and wet chemical etching including the fabrication of nanoarrays of sub-50 nm gold dots and line structures with deliberately designed approximately 12-100 nm gaps. These structures were made by initially using direct write nanolithogr... | 11/06/2007 |
| 7282550 | Composition to provide a layer with uniform etch characteristics The present invention includes a composition to form a layer on a substrate having uniform etch characteristics. To that end, the composition has a plurality of components, a subset of which has substantially similar rates of evaporation for an interval of time.... | 10/16/2007 |
| 7282456 | Self-repair and enhancement of nanostructures by liquification under guiding conditions In accordance with the invention, the structure of a patterned nanoscale or near nanoscale device (“nanostructure”) is repaired and/or enhanced by liquifying the patterned device in the presence of appropriate guiding conditions for a period of time and then per... | 10/16/2007 |
| 7281921 | Scatterometry alignment for imprint lithography Described are methods for patterning a substrate by imprint lithography. Imprint lithography is a process in which a liquid is dispensed onto a substrate. A template is brought into contact with the liquid and the liquid is cured. The cured liquid includes an imprin... | 10/16/2007 |
| 7281316 | Perpendicular pole structure and method of fabricating the same A magnetic structure, such as a pole tip, and method for forming the same includes forming a pole tip layer of magnetic material. A layer of polyimide precursor material is added above the pole tip layer and cured. A silicon-containing resist layer is added above th... | 10/16/2007 |
| 7277619 | Nano-imprinted photonic crystal waveguide This invention relates to a method for forming a nano-imprinted photonic crystal waveguide, comprising the steps of: preparing an optical film on a substrate; preparing a template having a plurality of protrusions of less than 500 nm in length such that the protrusi... | 10/02/2007 |
| 7261830 | Applying imprinting material to substrates employing electromagnetic fields The present invention comprises a method for applying a liquid, such as imprinting material, to a substrate that features use of an electromagnetic field to rapidly spread the liquid over a desired portion of the substrate, while confining the same to the desired re... | 08/28/2007 |
| 7261831 | Positive tone bi-layer imprint lithography method The present invention provides a method to pattern a substrate which features creating a multi-layered structure by forming, on the substrate, a patterned layer having protrusions and recessions. Formed upon the patterned layer is a conformal layer, with the multi-l... | 08/28/2007 |
| 7253091 | Process for assembling three-dimensional systems on a chip and structure thus obtained A method for assembling an electronic system with a plurality of layers. Recesses in formed in one or more dielectric layers and electronic components are positioned within the recesses. One or more layers containing the components are placed on a host substrate con... | 08/07/2007 |
| 7238543 | Methods for marking a bare semiconductor die including applying a tape having energy-markable properties A method used for marking a semiconductor wafer or device. The method and apparatus have particular application to wafers or devices which have been subjected to a thinning process, including backgrinding in particular. The present method comprises reducing the cros... | 07/03/2007 |
| 7235464 | Patterning method The invention relates to a method for creating a pattern on a substrate comprising a first alignment structure, using an elastomeric stamp comprising a patterning structure and a second alignment structure. The method comprises a moving step for moving the elastomer... | 06/26/2007 |
| 7229847 | Forming electrical contacts to a molecular layer The present invention provides a process for forming electrical contacts to a molecular layer in a nanoscale device, the nanoscale device, and a method of manufacturing an integrated circuit comprise such devices. The process includes coating a surface of a stamp wi... | 06/12/2007 |
| 7224026 | Nanoelectronic devices and circuits Diode devices with superior and pre-settable characteristics and of nanometric dimensions, comprise etched insulative lines (8, 16, 18) in a conductive substrate to define between the lines charge carrier flow paths, formed as elongate channels (20) at... | 05/29/2007 |
| 7223635 | Oriented self-location of microstructures with alignment structures An electronic apparatus comprising one or more microstructures on a substrate and a method for fabricating the electronic apparatus. The microstructures have alignment structures that allow the microstructures to be oriented in receptacles having shapes that are com... | 05/29/2007 |
| 7217562 | Gradient structures interfacing microfluidics and nanofluidics, methods for fabrication and uses thereof The present invention relates to a device for interfacing nanofluidic and microfluidic components suitable for use in performing high throughput macromolecular analysis. Diffraction gradient lithography (DGL) is used to form a gradient interface between a microfluid... | 05/15/2007 |
| 7214624 | Resist pattern forming method, magnetic recording medium manufacturing method and magnetic head manufacturing method A mold having a pattern of a concavo-convex surface including protrusion and recess is prepared and the pattern is transferred to a resist layer formed on a substrate by an imprinting method. The side surface of a protrusion of the transferred resist pattern is then... | 05/08/2007 |
| 7195734 | Device and method in connection with the production of structures Device in connection with the lithography of structures of nanometer size, which device comprises a first main part (1) with a first principally plane surface (2a) and a second main part (3) with a second principally plane surface (9 | 03/27/2007 |
