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Class 216/24 - FORMING OR TREATING OPTICAL ARTICLE


Subclass of Class 216 - Etching a substrate: processes
Definition: Process wherein etching is used in forming or treating of
No. of patents: 917
Last issue date: 05/29/2012


1                      
NumberTitleIssue Date
8187482Flat panel display and method of manufacturing the same
A flat panel display and a method of manufacturing the same are disclosed. In one embodiment, the manufacturing method includes: i) preparing a substrate, ii) forming a plurality of subpixels on the substrate and iii) forming a light resonating layer including two o...
05/29/2012
8187481Random texture anti-reflection optical surface treatment
A surface relief structure consisting of a random distribution of surface features with varying feature profile and depth, is described. The texture serves to suppress the reflection of electromagnetic waves in the optical region of the spectrum without dispersing a...
05/29/2012
8182706Method for texturing silicon wafers for producing solar cells
In a method for texturing silicon wafers for producing solar cells, the step of introducing a silicon wafer involves the use of a texturing solution which is at a temperature of at least 80 degrees Celsius and which comprises water admixed with 1 percent by weight t...
05/22/2012
8142672Manufacturing method of opto-electric hybrid board
An opto-electric hybrid board manufacturing method which improves the alignment accuracy of an optical element with respect to a core of an optical waveguide. When a core (7) of an optical waveguide (W) is formed on a surface of an electric circuit board (E),...
03/27/2012
8137572Reflective planar lightwave circuit waveguide
A method of making a planar lightwave circuit (PLC) waveguide capable of being integrated with a surface-mounted component is presented. The method entails etching a silicon substrate to form a slanted wall, forming a nonreflective waveguide portion on the silicon s...
03/20/2012
8114304Method for producing electronic components
In order to achieve an integration of functional structures into the housing of electronic components, provision is made of a method for producing an electronic component comprising at least one semiconductor element having at least one sensor-technologically active...
02/14/2012
8092699Method for forming phase grating
A method for forming a phase grating is disclosed. First, a substrate is provided. Second, a first dielectric layer with a tapered recess or bulge is formed on the substrate. Later, a second dielectric layer is formed to fill the tapered recess and to cover the firs...
01/10/2012
8083956Display device and method for manufacturing display device
To provide a display device with higher image quality and reliability or a large-sized display device with a large screen at low cost with high productivity. A function layer (such as a coloring layer or a pixel electrode layer) used in the display device is formed ...
12/27/2011
8052883Method for forming periodic structure
A method for forming a periodic structure is disclosed. A structural layer and an optical modulation element are provided. A light is emitted to pass through the optical modulation element to irradiate interference strips on the structural layer. A photoelectrochemi...
11/08/2011
8048324Method of manufacturing optical waveguide and method of manufacturing package board
A method of manufacturing an optical waveguide includes: forming a first reflective bump and a second reflective bump, which have inclined surfaces formed on sides opposite to each other and which are disposed with a predetermined distance in-between, on an upper si...
11/01/2011
8029684Self-emission panel and method of manufacturing the same
A self-emission panel and a method of manufacturing a self-emission panel which can prevent emission failures from occurring due to various factors, thereby achieving a self-emission panel that is free from emission failures. The self-emission panel is manufactured ...
10/04/2011
8029683Etching of solar cell materials
A solar cell is fabricated by etching one or more of its layers without substantially etching another layer of the solar cell. In one embodiment, a copper layer in the solar cell is etched without substantially etching a topmost metallic layer comprising tin. For ex...
10/04/2011
8021561Optical component having features extending different depths into a light transmitting medium
The optical device includes a plurality of waveguides and an optical grating. A first portion of the waveguides act as input waveguide configured to carry a light beam that includes multiple light signals to the optical grating. The optical grating is configured to ...
09/20/2011
8012362Electromagnetic shielding light-transmitting member and method for manufacturing same
Disclosed is an electronic shielding light-transmitting member having an adhesive (2) and an electromagnetic shielding material (3) between two release films (1) and (4). By removing one of the release films (1) and (4) from...
09/06/2011
8002998Method of producing a slab type two-dimensional photonic crystal structure
A first main face of a substrate of a dielectric single crystal is etched to form recesses in the substrate. A second main face of the substrate is mechanically processed to form a slab, so that the recesses pass through the substrate to form through holes. ...
08/23/2011
7998356Optical integrated device manufacturing process
The invention relates to a process for manufacturing an integrated optical device. The method involves forming a silicon dioxide multilayer structure on a silicon substrate containing, in a first region a core layer of a waveguide of the optical device. The core inc...
08/16/2011
7938973Arc layer having a reduced flaking tendency and a method of manufacturing the same
By incorporating a material exhibiting a high adhesion on chamber walls of a process chamber during sputter etching, the defect rate in a patterning sequence on the basis of an ARC layer may be significantly reduced, since the adhesion material may be reliably expos...
05/10/2011
7935263Method of producing a porous semiconductor film on a substrate
The invention relates to a method of producing a porous semiconductor film and the film resulting from such production. It furthermore relates to an electronic device incorporating such film and to potential uses of such film. ...
05/03/2011
7927497Integrated thin-film solar cells and method of manufacturing thereof and processing method of transparent electrode for integrated thin-film solar cells and structure thereof, and transparent substrate having processed transparent electrode
The present invention relates to integrated thin film solar cells, and more particularly, to integrated thin film solar cells, which minimize the loss of integrated solar cells caused at the time of a manufacturing process and become available at a low cost process,...
04/19/2011
7927498Solar cell and method of texturing solar cell
A solar cell and a method of texturing a solar cell are disclosed. The method includes coating an ink containing metal particles on a surface of a substrate, drying the ink to attach the metal particles to the surface of the substrate, and differentially etching the...
04/19/2011
7919004Removing reflective layers from EUV mirrors
A method for removing at least one reflective layer (4a, 4b) from an optical element (1) for EUV lithography, wherein the optical element (1) has a substrate (2) and an interlayer (6) between the substrate (...
04/05/2011
7897057Sensor for detection of gas such as hydrogen and method of fabrication
A gas sensor system and its method of fabrication is disclosed. The sensor system comprises an optrode, light source, and a light detector. In a sensor for hydrogen gas, the optrode is comprised of a porous substrate into which an intimate mixture of reagent and cat...
03/01/2011
7879249Methods of forming a lens master plate for wafer level lens replication
Methods of forming a lens master plate. In one embodiment, a substrate is coated with a polymer material layer. Isolated sections are formed in the polymer material layer. The isolated sections are formed into lens shapes using a lens master. ...
02/01/2011
7833425Method for fabricating micro and nano structures
A method of forming an array of selectively shaped optical elements on a substrate, the method including the steps of providing the substrate, the substrate having an optical layer placed thereon; placing a layer of particles on the optical layer; performing an etch...
11/16/2010
7794612Method of manufacturing a display substrate
A method of manufacturing a display substrate includes forming a first metallic pattern including gate and storage conductors and a gate electrode of a switching device on a base substrate, forming a gate insulation layer, forming a second metallic pattern and a cha...
09/14/2010
7731860Ion beam method for removing an organic light emitting material
A method of removing an organic, preferably polymeric, light-emitting material (4) from defined areas of a substrate (1) comprises the steps of arranging a shadow mask (5) to overlie the organic material other than in the defined areas, and appl...
06/08/2010
7727410Process for formation of three-dimensional photonic crystal
A process for forming a three-dimensional photonic crystal comprises the steps of providing a base material having a first face and a second face adjoining to each other at a first angle, forming a first mask on the first face, dry-etching the first face in a direct...
06/01/2010
7722777Method of preparing core rods for optical fiber preforms
Core rods or other glass components associated with optical fiber preforms are cleaned by loading them into a number of first sleeves, and partially obstructing entrance and exit ends of the sleeves to retain the components. The sleeves are contained inside a second...
05/25/2010
7713428Method of fabricating polymer modulators with etch stop clads
A process that comprises dry etching a trench into a side clad polymer layer using an underlying passive polymer layer as an etch stop, and then back filling the trench with an electro-optic polymer. ...
05/11/2010
7704402Optical element manufacturing method, optical element, Nipkow disk, confocal optical system and 3-D measurement device
An optical element manufacturing method includes: disposing a light-shielding layer (14) that includes at least an Si layer as an uppermost layer, on a substrate (12) used as a base member, forming an optical aperture (14a) at the light-s...
04/27/2010
7674391Manufacturing method of optical semiconductor device
It is an objective to control the occurrence of the disorder of a far-field pattern and of an optical axial shift. A manufacturing method of a semiconductor laser device has the step for preparing a semiconductor substrate which has growth of a multi-layer including...
03/09/2010
7635437Method of manufacturing near field light generation element
A near field light generation element is manufactured by forming a truncated quadrangular pyramid on a substrate by forming an etching mask having a shape the same as but larger than that of a top face of the truncated quadrangular pyramid, and isotropic etching the...
12/22/2009
7591957Method for atmospheric pressure reactive atom plasma processing for surface modification
Reactive atom plasma processing can be used to shape, polish, planarize and clean the surfaces of difficult materials with minimal subsurface damage. The apparatus and methods use a plasma torch, such as a conventional ICP torch. The workpiece and plasma torch are m...
09/22/2009
7582219Method of fabricating reflective mirror by wet-etch using improved mask pattern and reflective mirror fabricated using the same
A method is provided of fabricating a reflective mirror having a reflective surface on which light is incident. This method includes: coating at least one of opposite faces of a plate-shaped etchable material made of a single crystal material, with a film-like etchi...
09/01/2009
7517465Ultra lightweight photovoltaic device and method for its manufacture
An ultra lightweight semiconductor device such as a photovoltaic device is fabricated on a non-etchable barrier layer which is disposed upon an etchable substrate. The device is contacted with an appropriate etchant for a period of time sufficient to remove at least...
04/14/2009
7510664Apparatus and method for atmospheric pressure reactive atom plasma processing for shaping of damage free surfaces
Fabrication apparatus and methods are disclosed for shaping and finishing difficult materials with no subsurface damage. The apparatus and methods use an atmospheric pressure mixed gas plasma discharge as a sub-aperture polisher of, for example, fused silica and sin...
03/31/2009
7485236Interference display cell and fabrication method thereof
An optical interference display unit with a first electrode, a second electrode and support structures located between the two electrodes is provided. The second electrode has at least a first material layer and a second material layer. At least one material layer o...
02/03/2009
7455787Etching of solar cell materials
A solar cell is fabricated by etching one or more of its layers without substantially etching another layer of the solar cell. In one embodiment, a copper layer in the solar cell is etched without substantially etching a topmost metallic layer comprising tin. For ex...
11/25/2008
7445723Optical scanner and method of fabricating the same
An optical scanner and a fabricating method thereof are provided. The optical scanner includes a base substrate, a frame, a H-shaped stage, supporters, and a stage driving structure. An interconnection layer having a predetermined pattern is formed on the base subst...
11/04/2008
7432026Method of manufacturing dichroic filter array
A method of manufacturing a dichroic filter array is provided and comprises forming a first dichroic filter material layer on a substrate, and then forming a patterned photoresist layer on the first dichroic filter material layer. The exposed portion of the first di...
10/07/2008
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