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| Number | Title | Issue Date |
| 8182703 | Tuning fork resonator element and tuning fork resonator A tuning fork resonator element that has a base portion, first and second resonating arms extending from the base portion in a first direction, and a support frame sandwiching the first and second resonating arms and being connected to the base portion includes: a f... | 05/22/2012 |
| 8142669 | Electromechanical element, electric circuit device and production method of those An electromechanical element includes a mechanically movable element through a hollow formed on a substrate, and a plurality of holes formed in the movable element. In the electromechanical element, the plurality of holes are arranged such that at least two holes ar... | 03/27/2012 |
| 8137569 | Method of fabricating a membrane having a tapered pore A method of fabricating a membrane having a tapered pore, a polymeric membrane having a tapered pore, and uses of such polymeric membrane are disclosed. The membrane includes apertures of increasing diameter which are aligned with each other to form the tapered pore... | 03/20/2012 |
| 8123962 | Alternating self-assembling morphologies of diblock copolymers controlled by variations in surfaces Methods for fabricating sublithographic, nanoscale microstructures arrays including openings and linear microchannels utilizing self-assembling block copolymers, and films and devices formed from these methods are provided. In some embodiments, the films can be used... | 02/28/2012 |
| 8123963 | Method for producing a semiconductor component and a semiconductor component produced according to the method A method for producing a semiconductor component includes forming an n-doped layer in a p-doped layer of the semiconductor component, wherein the n-doped layer comprises at least one of: a sieve-like layer or a network-like layer. The method also includes porously e... | 02/28/2012 |
| 8123961 | Extensions of self-assembled structures to increased dimensions via a “bootstrap” self-templating method Methods for fabricating sublithographic, nanoscale arrays of openings and linear microchannels utilizing self-assembling block copolymers, and films and devices formed from these methods are provided. Embodiments of the invention use a self-templating or multilayer ... | 02/28/2012 |
| 8123960 | Sub-10 nm line features via rapid graphoepitaxial self-assembly of amphiphilic monolayers Methods for fabricating sublithographic, nanoscale microchannels utilizing an aqueous emulsion of an amphiphilic agent and a water-soluble, hydrogel-forming polymer, and films and devices formed from these methods are provided. ... | 02/28/2012 |
| 8114301 | Graphoepitaxial self-assembly of arrays of downward facing half-cylinders Methods for fabricating sublithographic, nanoscale microstructures in line arrays utilizing self-assembling block copolymers, and films and devices formed from these methods are provided. ... | 02/14/2012 |
| 8114300 | Multi-layer method for formation of registered arrays of cylindrical pores in polymer films Methods for fabricating sublithographic, nanoscale polymeric microstructures utilizing self-assembling block copolymers, and films and devices formed from these methods are provided. ... | 02/14/2012 |
| 8110117 | Method to form a recess for a microfluidic device A method includes forming a recess in a first surface of a substrate, the recess having a width, depth, and height selected to correspond to a width, depth, and height of a fluid chamber, forming a sacrificial material in the recess, forming a first heater element, ... | 02/07/2012 |
| 8105496 | Method of fabricating MEMS devices (such as IMod) comprising using a gas phase etchant to remove a layer Improvements in an interferometric modulator that cavity defined by two walls. ... | 01/31/2012 |
| 8097174 | MEMS device and interconnects for same A microelectromechanical systems device having an electrical interconnect connected to at least one of an electrode and a movable layer within the device. At least a portion of the electrical interconnect is formed from the same material as a movable layer of the de... | 01/17/2012 |
| 8097173 | Magnetic porous particles and method of making The invention provides porous particles that produce a predetermined optical response and that may be manipulated magnetically. A preferred particle of the invention has a porous structure that produces a predetermined optical response and magnetic material adhered ... | 01/17/2012 |
| 8088293 | Methods of forming reticles configured for imprint lithography The invention includes methods of forming reticles configured for imprint lithography, methods of forming capacitor container openings, and methods in which capacitor container openings are incorporated into DRAM arrays. An exemplary method of forming a reticle incl... | 01/03/2012 |
| 8083953 | Registered structure formation via the application of directed thermal energy to diblock copolymer films Methods for fabricating sublithographic, nanoscale linear microchannel arrays over surfaces without defined features utilizing self-assembling block copolymers, and films and devices formed from these methods are provided. Embodiments of the methods use a multilayer... | 12/27/2011 |
| 8066890 | Spatial light modulator with multi-layer landing structures A method of fabricating a spatial light modulator. The method includes providing a first substrate including a first bonding surface, forming a first layer coupled to the bonding surface, wherein the first layer is characterized by a first set of material parameters... | 11/29/2011 |
| 8048322 | Method for manufacturing thermal interface material having carbon nanotubes A method for manufacturing a thermal interface material includes the following steps: providing a carbon nanotube array formed on a substrate, the carbon nanotube array having a number of carbon nanotubes and a number of interstices between the adjacent carbon nanot... | 11/01/2011 |
| 8043513 | Gimbal-less micro-electro-mechanical-system tip-tilt and tip-tilt-piston actuators and a method for forming the same Fully monolithic gimbal-less micro-electro-mechanical-system (MEMS) devices with large static optical beam deflection and fabrications methods are disclosed. The devices can achieve high speed of operation for both axes. Actuators are connected to a device, or devic... | 10/25/2011 |
| 8034247 | Manufacturing method of silicon nozzle plate and manufacturing method of inkjet head A manufacturing method of a silicon nozzle plate, having; a film forming process to provide the film representing an etching mask for etching the silicon substrate on a surface of the silicon substrate; a pattern film forming to form a pattern film by partially remo... | 10/11/2011 |
| 7993534 | Chemical microreactor and method thereof A method for forming a chemical microreactor includes forming at least one capillary microchannel in a substrate having at least one inlet and at least one outlet, integrating at least one heater into the chemical microreactor, interfacing the capillary microchannel... | 08/09/2011 |
| 7981303 | Method of manufacturing monocrystalline silicon micromirrors A novel silicon micromirror structure for improving image fidelity in laser pattern generators is presented. In some embodiments, the micromirror is formed from monocrystalline silicon. Analytical- and finite element analysis of the structure as well as an outline o... | 07/19/2011 |
| 7976714 | Single SOI wafer accelerometer fabrication process Methods for producing a MEMS device from a single silicon-on-insulator (SOI) wafer. An SOI wafer includes a silicon (Si) handle layer, a Si mechanism layer and an insulator layer located between the Si handle and Si mechanism layers. An example method includes etchi... | 07/12/2011 |
| 7951299 | Method of fabricating a microresonator A method of fabricating a microresonator is disclosed. Initially, silica is deposited on a substrate, and the substrate is etched to form a pillar, the top portion of which supports the silica. The microresonator is then formed from the silica. Next, the pillar is e... | 05/31/2011 |
| 7892440 | Wet etching process The present invention illustrates a bulk silicon etching technique that yields straight sidewalls, through wafer structures in very short times using standard silicon wet etching techniques. The method of the present invention employs selective porous silicon format... | 02/22/2011 |
| 7875193 | Method for manufacturing probe structure of probe card A method for manufacturing a probe structure of a probe card is disclosed. In accordance with the present invention, a portion of a substrate exposed through a crossing region of one more probe beam regions defined by a first mask layer pattern and a windows defined... | 01/25/2011 |
| 7875194 | Method for manufacturing hydrogen sensors using Pd nano wire Disclosed is a method for manufacturing a hydrogen sensor using Pd nano-wires. The method includes steps of forming an external electrode pattern on a substrate applying a first resin layer to the substrate and forming a resin layer nano-channel pattern; depositing ... | 01/25/2011 |
| 7871529 | System for fabricating nanocoils using a wet etch technique Novel applications of nanocoil technology and novel methods of fabricating nanocoils for use in such applications and others. Such applications include microscopic electro-mechanical systems (MEMS) devices including nanocoil mirrors, nanocoil actuators and nanocoil ... | 01/18/2011 |
| 7862731 | Method for producing insulation structures To form an isolation structure in a semiconductor substrate, at least two trenches are formed with a rib therebetween in the semiconductor substrate, and then the semiconductor material in the area of the trenches and particularly the rib is converted to an electric... | 01/04/2011 |
| 7862732 | Method for forming micro lenses and semiconductor device including the micro lenses In a method for forming micro lenses, a lens material layer made of an inorganic material is formed on a substrate, and an intermediate layer made of an organic material is formed on the lens material layer. Then, a mask layer made of an organic material is formed o... | 01/04/2011 |
| 7850861 | Microfluidic device, and related methods A method of making a microfluidic device is provided. The method features patterning a permeable wall on a substrate, and surrounding the permeable wall with a solid, non-permeable boundary structure to establish a microfluidic channel having a cross-sectional dimen... | 12/14/2010 |
| 7828981 | Semiconductor probe with high resolution resistive tip and method of fabricating the same A semiconductor probe with a high-resolution tip and a method of fabricating the same are provided. The semiconductor probe includes: a cantilever doped with a first impurity; a resistive convex portion projecting from an end portion of the cantilever and lightly do... | 11/09/2010 |
| 7824560 | Manufacturing method for ink jet recording head chip, and manufacturing method for ink jet recording head A manufacturing method for a substrate for an ink jet head, including formation of an ink supply port in a silicon substrate, the method includes a step of forming, on one side of the substrate, an etching mask layer having an opening at a position corresponding ink... | 11/02/2010 |
| 7820063 | Micromirror device and a method of making the same A reflective and deformable micromirror device comprises a reflective micromirror plate attached to a deformable hinge that is formed on and held by a hinge post on a substrate. The substrate has an addressing electrode formed thereon. A selected dielectric material... | 10/26/2010 |
| 7807061 | Optical gas concentration detector and method of producing structure used in the detector A method of producing a structure by three-dimensionally processing a flat member includes a preparing, a first forming and a second forming. In the preparing, a substrate is prepared. In the first forming, an etching mask is formed on the substrate. The etching mas... | 10/05/2010 |
| 7794610 | Optical components and production thereof The invention relates to a method for making an actuation system for an optical component comprising: etching of a first face of a component, to form pads on it, etching of a second face of the component, to expose... | 09/14/2010 |
| 7794611 | Micropump for integrated device for biological analyses A micropump includes a body (10) of semiconductor material, accommodating fluid-tight chambers (32), having an internal preset pressure, lower than atmospheric pressure. The fluid-tight chambers (32), sealed by a diaphragm (35) that can b... | 09/14/2010 |
| 7790045 | Formation of close-packed sphere arrays in V-shaped grooves The present invention relates to the self-assembly of a spherical-morphology block copolymer into V-shaped grooves of a substrate. Although spherical morphology block copolymers typically form a body-centered cubic system (bcc) sphere array in bulk, the V-shaped gro... | 09/07/2010 |
| 7785481 | Method for fabricating micromachined structures A method for fabricating micromachined structures is provided. At least one cavity is formed on a substrate and then a dielectric material different from the material of the substrate is filled in the at least one cavity. Next, a circuitry layer including a first et... | 08/31/2010 |
| 7767099 | Sub-lithographic interconnect patterning using self-assembling polymers The present invention is directed to the formation of sublithographic features in a semiconductor structure using self-assembling polymers. The self-assembling polymers are formed in openings in a hard mask, annealed and then etched, followed by etching of the under... | 08/03/2010 |
| 7686967 | Temperature controlled microfabricated two-pin liquid sample dispensing system A cooled liquid sample dispensing system comprises a pair of pins for holding a droplet of liquid therebetween and a cooling element. Each pin includes a tip spaced predetermined distance from the other pin to define a sample acquisition region. The pins acquire and... | 03/30/2010 |
