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| Number | Title | Issue Date |
| 8158011 | Method of fabrication of cubic boron nitride conical microstructures A conical structure of cubic Boron Nitride (cBN) is formed on a diamond layered substrate. A method of forming the cBN structure includes steps of (a) forming diamond nuclei on a substrate, (b) growing a layer of diamond film on the substrate, (c) depositing a cBN f... | 04/17/2012 |
| 8147704 | Wide area stamp for antireflective surface Nanoimprint molds for molding a surface of a material are provided. A nanoimprint mold includes a body with a molding surface that is formed by shaped nanopillars. The nanopillars may be formed on a substrate and shaped by performing at least a first partial oxidati... | 04/03/2012 |
| 8142670 | Micro-oscillating element and method of making the same A micro-oscillating element includes a frame, a movable functional portion, and a torsional joint for joining the frame and the functional portion. The micro-oscillating element also includes first and second comb-tooth electrodes for generation of the driving force... | 03/27/2012 |
| 8114302 | Method of fabricating cantilever type probe and method of fabricating probe card using the same Disclosed is a method of fabricating a cantilever type probes. According to this method, after forming grooves each in tip portion and dummy tip portion regions of a substrate, the tip portion and dummy tip portion are formed with filling the grooves of the tip port... | 02/14/2012 |
| 8070966 | Group III-nitride layers with patterned surfaces A fabrication method produces a mechanically patterned layer of group III-nitride. The method includes providing a crystalline substrate and forming a first layer of a first group III-nitride on a planar surface of the substrate. The first layer has a single polarit... | 12/06/2011 |
| 8062535 | Video rate-enabling probes for atomic force microscopy Method for producing a probe for atomic force microscopy with a silicon nitride cantilever and an integrated single crystal silicon tetrahedral tip with high resonant frequencies and low spring constants intended for high speed AFM imaging. ... | 11/22/2011 |
| 8029681 | Master recording medium for magnetically transferring servo pattern to the magnetic recording medium and method of manufacturing the same Provided are a master recording medium and a method of manufacturing the master recording medium. The master recording medium includes: a plate; and a magnetic layer which is formed on the plate for magnetically transferring of a servo pattern that is to be formed o... | 10/04/2011 |
| 7976715 | Method using block copolymers for making a master mold with high bit-aspect-ratio for nanoimprinting patterned magnetic recording disks A method for making a master mold that is used in the nanoimprinting process to make patterned-media disks with patterned data islands uses guided self-assembly of a block copolymer into its components. Conventional or e-beam lithography is used to first form a patt... | 07/12/2011 |
| 7959815 | Transparent textured substrate and methods for obtaining same The invention concerns a transparent substrate whereof part at least of the outer surface has the form of a web comprising protuberances, 80% of them at least, having heights ranging between 40 and 250 nm, mean diameters between 1 and 500 nm, 80% at least of the dis... | 06/14/2011 |
| 7951300 | Water-scale needle array Methods for wafer-scale fabrication of needle arrays can include mechanically modifying a wafer to produce a plurality of vertically-extending columns. The columns are etched to round and reshape the columns into substantially uniformly shaped needles. Needle arrays... | 05/31/2011 |
| 7947187 | Method of manufacturing piezoelectric resonator When forming an opening conforming to a groove of a quartz resonator in a metal film serving as a mask of the quartz resonator by conducting etching, the outer periphery of the metal film is wavingly etched. Therefore, when the groove is formed on the quartz resonat... | 05/24/2011 |
| 7935262 | Method of manufacturing fine patterns A method of manufacturing fine patterns includes providing a base portion having a plurality of protruding portions with recess portions therebetween, depositing a material layer on the protruding portions, the material layer including grooves in an upper surface th... | 05/03/2011 |
| 7906030 | Dry etching method, fine structure formation method, mold and mold fabrication method A WC substrate 7 is etched by using plasma 50 generated from a mixed gas of a gas including a halogen atom and a gas including a nitrogen atom. ... | 03/15/2011 |
| 7901586 | Method of manufacturing self-ordered nanochannel-array and method of manufacturing nanodot using the nanochannel-array A method of manufacturing a nanochannel-array and a method of fabricating a nanodot using the nanochannel-array are provided. The nanochannel-array manufacturing method includes: performing first anodizing to form a first alumina layer having a channel array formed ... | 03/08/2011 |
| 7871530 | Near-field optical probe based on SOI substrate and fabrication method thereof Provided is near-field optical probe including: a cantilever arm support portion that is formed of a lower silicon layer of a silicon-on-insulator (SOI) substrate, the cantilever arm support portion having a through hole formed therein at a side of the lower silicon... | 01/18/2011 |
| 7867402 | Method for realizing a multispacer structure, use of said structure as a mold and circuital architectures obtained from said mold A method realizes a multispacer structure including an array of spacers having same height. The method includes realizing, on a substrate, a sacrificial layer of a first material; b) realizing, on the sacrificial layer, a sequence of mask spacers obtained by Sn... | 01/11/2011 |
| 7862733 | Method for manufacturing a probe The present invention provides a probe manufacturing method in which, after a metal material for a probe is deposited on a base table, the probe can be detached from the base table relatively easily. A sacrificial layer is formed on a base table. The sacrificial lay... | 01/04/2011 |
| 7824561 | Method for manufacturing probe structure A method for manufacturing a probe structure is disclosed. In accordance with the method, two semiconductor substrates having different crystal directions are bonded and selectively etched utilizing an etch selectivity due to the different crystal directions to form... | 11/02/2010 |
| 7767100 | Patterning method and field effect transistors A patterning method with a filling material with a T-shaped cross section is used as a mask during patterning to produce structures having sublithographic dimensions, such as a double-fin field effect transistor. ... | 08/03/2010 |
| 7767101 | Method for fabricating probe for use in scanning probe microscope A method of fabricating a probe tip for use in a scanning probe microscope, includes the steps of: forming a triangular prism provided with a passivation film by patterning a {111} general silicon wafer, the passivation film being deposited on two sidewalls of the t... | 08/03/2010 |
| 7727407 | Amorphous material processing method There are provided a method of processing an amorphous material which is capable of forming surface projections of uniform height in desired positions on the amorphous material, and a magnetic disk substrate using the amorphous material. A predetermined pressure is ... | 06/01/2010 |
| 7718077 | Fabricating a structure usable in an imprint lithographic process A method of fabricating an article usable in an imprint lithographic process is disclosed. The method includes patterning masking material layers on a substrate thereby forming a multi-layer mask and sequentially removing portions of the substrate based on the multi... | 05/18/2010 |
| 7662299 | Nanoimprint lithography template techniques for use during the fabrication of a semiconductor device and systems including same A method for forming a template useful for nanoimprint lithography comprises forming at least one pillar which provides a topographic feature extending from a template base. At least one conformal pattern layer and one conformal spacing layer, and generally a plural... | 02/16/2010 |
| 7591955 | Method for forming an etched soft edge metal foil and the product thereof A metal processing method includes etching to remove material from a thin metal part. A pattern of etch resistant material is used to prevent etching of the metal in desired locations. The etch resistant material is intentionally applied to unclean surfaces so that ... | 09/22/2009 |
| 7534359 | Process for producing structure, structure thereof, and magnetic recording medium The present invention relates to a process for producing a structure having holes at prescribed positions. The structure is produced through steps of (A) providing an impressing member having protrusions, and a substrate, (B) forming a layer, on the substrate, from ... | 05/19/2009 |
| 7534360 | Method of making diamond product and diamond product The method of making a diamond product in accordance with the present invention comprises the steps of forming a diamond substrate (50) with a mask layer (52), and etching the diamond substrate (50) formed with the mask layer (52) with a ... | 05/19/2009 |
| 7524428 | Display device and method of manufacturing transparent substrate for display device A display device comprises a substrate and a laminate structure formed on the substrate and comprising a plurality of layers including a display region. The laminate structure has a recessed/projected portions at least one of an outermost surface of display side and... | 04/28/2009 |
| 7514013 | Devices with thermoelectric and thermodiodic characteristics and methods for manufacturing same The present invention relates to methods for forming thermoelectric and thermodiodic devices including a monolayer of multiple conductive material units with a first surface including a composite of multiple conductive units in electrical contact with a conductive s... | 04/07/2009 |
| 7491341 | Method of making tapered capillary tips with constant inner diameters Methods of forming electrospray ionization emitter tips are disclosed herein. In one embodiment, an end portion of a capillary tube can be immersed into an etchant, wherein the etchant forms a concave meniscus on the outer surface of the capillary. Variable etching ... | 02/17/2009 |
| 7442316 | Microcontact printing method using imprinted nanostructure and nanostructure thereof A microcontact printing method using an imprinted nanostructure is provided, wherein the microcontact printing is introduced to a nanoimprint lithography process to pattern a self-assembled monolayer (SAM). The method includes forming a nanostructure on a substrate ... | 10/28/2008 |
| 7431854 | Method for directly forming a cutter mold with double etching and apparatus thereof A method for directly forming a cutter mold with double etching and an apparatus thereof includes the following steps: a metal plate for being made, the cutter mold is tightly pressed with a light-resisting agent membrane first, an image of cutter mold drawing, whic... | 10/07/2008 |
| 7429333 | Method for fabricating microneedle array and method for fabricating embossing mold of microneedle array The present invention discloses a method for fast fabricating microneedle arrays with an embossing process and a method for fabricating an embossing mold of a microneedle array, wherein a master pattern of a high aspect ratio silicon microneedle array is fabricated ... | 09/30/2008 |
| 7410590 | Transferable micro spring structure A method for mounting the micro spring structures onto cables or contact structures includes forming a spring island having an “upside-down” stress bias on a first release material layer or directly on a substrate, forming a second release material over at least... | 08/12/2008 |
| 7410591 | Method and system for making a nano-plate for imprint lithography Provided is a method and system for manufacturing a nano-plate. The method includes depositing two or more types of film around a central core to form a plurality of film layers, each film layer being of a different type than its adjacent layers. Next, the deposited... | 08/12/2008 |
| 7396475 | Method of forming stepped structures employing imprint lithography The present invention provides a method for forming a stepped structure on a substrate that features transferring, into the substrate, an inverse shape of the stepped structure disposed on the substrate. ... | 07/08/2008 |
| 7387742 | Silicon blades for surgical and non-surgical use Ophthalmic surgical blades are manufactured from either a crystalline or polycrystalline material, preferably in the form of a wafer. The method comprises preparing the crystalline or polycrystalline wafers by mounting them and machining trenches into the wafers. Me... | 06/17/2008 |
| 7371247 | Method and apparatus for penetrating tissue A tissue penetrating system includes a plurality of penetrating members each having a tip. A penetrating member driver is coupled to the plurality of penetrating members. Each tip of a penetrating member is uncovered during launch of the penetrating member by the pe... | 05/13/2008 |
| 7367119 | Method for forming a reinforced tip for a probe storage device Systems and methods in accordance with the present invention can include a tip contactable with a media. In an embodiment, the tip comprises a substantially hollow structure formed of a metal. The tip can be formed by depositing a first metal layer over silicon ther... | 05/06/2008 |
| 7366382 | Optical beam diagnostic device and method An optical beam diagnostic device includes one or more sets of coherent optical fiber bundles, wherein one end of the coherent optical fiber bundles is arranged to receive optical information from a dynamic moving or static optical beam or beams, and the other end o... | 04/29/2008 |
| 7357876 | Eliminating printability of sub-resolution defects in imprint lithography The present invention provides a method of forming a desired pattern in a layer positioned on a substrate with a mold, the method including, inter alia, contacting the layer with the mold forming a shape therein having a plurality of features extending in a first di... | 04/15/2008 |
