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| Number | Title | Issue Date |
| 7358186 | Method and apparatus for material deposition in semiconductor fabrication Broadly speaking, a method and an apparatus are provided for depositing a material on a semiconductor wafer (“wafer”). More specifically, the method and apparatus provide for selective heating of a surface of the wafer exposed to an electroless plating solution.... | 04/15/2008 |
| 7291253 | Detection of an unstable additive breakdown product in a plating bath The 3-mercaptopropylsulfonic acid (MPSA) breakdown product of the bis(sodiumsulfopropyl)disulfide (SPS) additive used in acid copper plating baths accelerates copper electrodeposition and can be detected by cyclic voltammetric stripping (CVS) analysis. In the presen... | 11/06/2007 |
| 7270733 | Method and apparatus for real time monitoring of industrial electrolytes The present invention relates generally to any electrolyte and methods for monitoring the constituents contained therein. More specifically, the present invention relates to plating baths and methods for monitoring the constituents contained therein based on chemome... | 09/18/2007 |
| 7229543 | Apparatus for controlling and/or measuring additive concentration in an electroplating bath A method for measuring a target constituent of an electroplating solution using an electroanalytical technique is set forth in which the electroplating solution includes one or more constituents whose by-products skew an initial electrical response to an energy inpu... | 06/12/2007 |
| 7195703 | Electrode for analytical voltammetry An electrode for use in analytical voltammetry, wherein the electrode has a uniform composition and contains an alloy in a solid state, the alloy containing a pure metal or compound having a low overvoltage for hydrogen and a few percent of at least one second metal... | 03/27/2007 |
| 6942782 | Method and apparatus for measuring deposit forming capacity of fluids using an electrochemically controlled pH change in the fluid proximate to a piezoelectric microbalance A method and apparatus for measuring the deposit forming propensity of a continuously flowing fluid having a bulk pH of about 1 to about 12 comprising measuring the rate at which deposit forms on a quartz crystal microbalance having a top side comprising a working e... | 09/13/2005 |
| 6899805 | Automated chemical management system executing improved electrolyte analysis method A method for determining the concentration of an additive X of an electrochemical bath that includes at least one further component Y is set forth. In accordance with the method, a predetermined amount of a starting solution is provided. The starting solution compri... | 05/31/2005 |
| 6814855 | Automated chemical management system having improved analysis unit A method and apparatus for measuring a target constituent of an electroplating solution using an electroanalytical technique is set forth. In accordance with the method, at least two electrodes are employed to execute the electroanalytical technique. Gasses that are... | 11/09/2004 |
| 6709561 | Measurement of the concentration of a reducing agent in an electroless plating bath The concentration of a reducing agent in an electroless bath for plating a first metal is determined from the effect of the reducing agent on the electrodeposition rate of a second metal. For electroless cobalt and nickel baths, a sample of the electroless plating b... | 03/23/2004 |
| 6627118 | Ni alloy particles and method for producing same, and anisotropic conductive film A crystalline Ni alloy particle for an anisotropic conductive film comprising Ni and a metalloid element such as P, B, etc. and having a structure in which a Ni intermetallic compound phase is precipitated can be produced by preparing substantially amorph... | 09/30/2003 |
| 6627066 | Method of measuring the concentration of a leveler in a plating liquid The concentration of a leveler in a plating liquid that is used by a plating apparatus for filling metal such as copper in interconnection trenches and holes defined in the surface of a semiconductor substrate or the like is determined based on a peak are... | 09/30/2003 |
| 6533920 | Device for detecting an end point of electro-plating and method thereof A device for detecting an end point of electro-plating comprises a mandrel having a substrate and a patterned conductive layer with a main conductive area and an insulated conductive area on the substrate, an insulation region interposed between the main ... | 03/18/2003 |
| 6375829 | Method and apparatus for measuring scaling capacity of calcium oxalate solutions using an electrochemically controlled pH change in the solution proximate to a piezoelectric microbalance This invention is directed to a method and apparatus for measuring the rate of calcium oxalate scale formation in a continuously flowing solution having a pH of from about 2 to about 3 comprising measuring the rate of deposition of calcium oxalate scale f... | 04/23/2002 |
| 5833830 | Redox control in the electrodeposition of metals In one embodiment, a method of electrowinning a metal from an electrolyte comprises the steps of measuring the redox potential of the electrolyte to obtain a measured value, comparing the measured value with a predetermined optimum value and adding a redo... | 11/10/1998 |
| 5755954 | Method of monitoring constituents in electroless plating baths A method for monitoring the constituents present in an electroless plating bath solution. The method involves measuring ac spectra using a working electrode which has a high hydrogen overvoltage. First, a selected dc potential is applied to a working elec... | 05/26/1998 |
| 5753101 | Method of monitoring constituents in conversion coating baths A method for monitoring the constituents present in conversion coating bath solutions. The method involves using specific ac and dc voltammetry and using platinum or other noble metal working electrodes. First, a selected dc potential is applied to a work... | 05/19/1998 |
| 5650061 | Large amplitude sinusoidal voltammetry A large amplitude sine wave is applied as the excitation potential to a amperometric measurement to produce a current output that is a phase shifted sine wave containing faradaic information at many frequencies. A current obtained from a conventional pote... | 07/22/1997 |
| 5391271 | Method of monitoring acid concentration in plating baths A method of monitoring the concentration of certain plating bath major constituents such as acid is provided which is insensitive to the effects of hydrogen produced during plating. The method involves applying an ac signal superimposed on a dc potential ... | 02/21/1995 |
| 5350500 | Electrokinetic potential measurement The measurement of electrokinetic potential is of importance in paper-making. A measuring cell (12) for a specific potential known as streaming potential of the kind disclosed in EP B1 0 079 726 is now provided with measuring electrodes (40, 42) of a meta... | 09/27/1994 |
| 5336380 | Method of monitoring major constituents in plating baths A method of monitoring major constituents within a plating bath. The method involves applying an electrical signal to a working electrode positioned within the plating bath solution, varying signal parameters, and measuring the resultant response signal. ... | 08/09/1994 |
| 5324400 | Electrode preconditioning method for a plating bath monitoring process A method of preconditioning an electrode for use in a plating bath monitoring process. The method involves applying at least one anodic signal to an electrode in contact with the plating bath solution in order to yield a reproducibly clean and stabilized ... | 06/28/1994 |
| 5324399 | Method and system for monitoring quality of phosphate coating A method and system for monitoring the quality of a phosphate coating on a metal surface having a large surface area. The method comprises applying a current or potential between the metal surface and one or more counter electrodes while they are in the p... | 06/28/1994 |
| 5320724 | Method of monitoring constituents in plating baths A method of monitoring a plating bath which combines ac and dc voltammetry to accurately measure major and trace constituent concentrations. The method involves applying both ac and dc voltammetric signals to a pretreated electrode in contact with the pla... | 06/14/1994 |
| 5298129 | Method of selectively monitoring trace constituents in plating baths A method of selectively monitoring particular trace constituents within a plating bath containing multiple trace constituents. The method provides improved selectivity over known voltammetric techniques for certain plating baths and trace constituents. Th... | 03/29/1994 |
| 5298130 | Method of monitoring major constituents in plating baths containing codepositing constituents A method of monitoring the concentration of metal ions comprising a major constituent in a plating bath which is insensitive to the effects of other codepositing constituents within the bath. The method involves applying a brief plating signal to a pretre... | 03/29/1994 |
| 5298131 | Method of monitoring metal ion content in plating baths A method of monitoring in-tank and on-line metal ion content within a plating bath. The method involves the steps of applying a pretreatment signal to a sensing electrode positioned within the plating bath, applying a sweep signal to the pretreated sensin... | 03/29/1994 |
| 5298132 | Method for monitoring purification treatment in plating baths A method for monitoring the status of a plating bath purification treatment cycle. The method involves applying a swept dc measurement signal to a pretreated electrode which is in contact with the plating solution, and monitoring the resultant response cu... | 03/29/1994 |
| 5275711 | Rotating cylinder-throwing power electrode This invention pertains to an apparatus and method for measuring throwing power of electroplating solutions. The apparatus is easy to use and gives reproducible measurements. The apparatus emulates the performance of a conventional Haring Blum cell. The m... | 01/04/1994 |
| 5252192 | Electrolytic pump An apparatus and method for producing an adjustable constant flow of electrochemical fluid. The apparatus is designed for use in an in-tank electrochemical plating bath sensor. The apparatus and method utilize pumping electrodes placed within an electrode... | 10/12/1993 |
| 4969978 | Apparatus and method for tunnel current measurement observed simultaneously with electrochemical measurement Apparatus and method for tunnel current measurement observed simultaneously with electrochemical measurement using an electrochemical cell. The electrochemical cell holds a tip, a counter electrode, a reference electrode and a sample in a solution. In the... | 11/13/1990 |
| 4834842 | Method of measuring the effective inhibitor concentration during a deposition of metal from aqueous electrolytes and test apparatus therefor The effectiveness of organic additives acting as inhibitors during the electrolytic deposition of metals from aqueous electrolytes, which contain organic additives for improving the deposition of metal, is electrically measured. In order to permit an impr... | 05/30/1989 |
| 4820643 | Process for determining the activity of a palladium-tin catalyst The effectiveness of a palladium-tin catalyst for subsequent plating thereon is determined by employing cyclic voltammetry.... | 04/11/1989 |
| 4808276 | Method for checking in a moving mode the continuity of a metal covering on a metal wire of different nature A method is disclosed for checking and obtaining in a moving mode the continuity of a metal covering on a metal wire of different nature belonging to the group of a wire being treated by a current strength and issuing from a covering bath and wire, the tr... | 02/28/1989 |
| 4735693 | Process for producing carbon fiber A method for detecting the surface characteristic of a carbon fiber, which comprises making the carbon fiber travel through an electrolyte solution, applying an electric potential in said solution between the carbon fiber serving as a working electrode an... | 04/05/1988 |
| 4725339 | Method for monitoring metal ion concentrations in plating baths A rotating disk electrode system operates at constant speed in a solution whose metal ion concentration is held constant at multiple concentrations within a range of concentration. The current at the working electrode is recorded, while the potential at t... | 02/16/1988 |
| 4718990 | Method for detecting start of electroless plating A method for detecting a start point of electroless plating, which comprises the steps of: immersing a couple of metal electrodes in an electroless plating solution; connecting the metal electrodes to a DC power supply to serve as an anode and a cathode, ... | 01/12/1988 |
| 4654126 | Process for determining the plating activity of an electroless plating bath A process for monitoring an electroless plating bath to determine whether it is in a take mode by electrolessly depositing a film of the metal of the plating bath onto a substrate to provide a preplated cathode; providing the cathode, a reference electrod... | 03/31/1987 |
| 4631116 | Method of monitoring trace constituents in plating baths A method for monitoring the minor constituents present in a plating bath solution which affect plating deposit properties. The method involves applying a predetermined dc potential to a working electrode positioned within the plating bath solution. A cons... | 12/23/1986 |
| 4629536 | Multilayer depth profile method Methods are provided for analyzing multilayer structures. The multilayer structure is electrolytically anodized at constant current through a plurality of layers of the structure over a predetermined surface area. During the anodization, the change of the... | 12/16/1986 |
| 4620882 | Process for continuously coloring stainless steel A continuous process for coloring a stainless steel strip by continuously causing the strip to pass through a coloring solution wherein a potential difference between the steel of the strip and a reference electrode in the coloring solution is monitored r... | 11/04/1986 |
