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| Number | Title | Issue Date |
| 7632391 | Critical orifice gap setting for grooving fluid dynamic bearings An apparatus and method are provided for electrochemically etching grooves in a working surface. In an aspect, a frame holds a working surface about an axis and facing an electrode movable along the axis. The electrode, axially movable, has surface carrying a groove... | 12/15/2009 |
| 7544283 | Method and apparatus for removing thin metal films A system for removing a thin metal film is disclosed. The system comprises an inclined metal plate electrode for guiding a downward electrolyte flow, an auxiliary electrode placed on either the upstream or downstream side of the metal plate electrode such that a par... | 06/09/2009 |
| 7427345 | Method and device for regenerating ion exchanger, and electrolytic processing apparatus A method and device for regenerating an ion exchanger can regenerate an ion exchanger easily and quickly, and can minimize a load upon cleaning of the regenerated ion exchanger and disposal of waste liquid. A method for regenerating a contaminated ion exchanger incl... | 09/23/2008 |
| 7318278 | Method of manufacture of a heart valve support frame Methods for forming a support frame for flexible leaflet heart valves from a starting blank include converting a two-dimensional starting blank into the three-dimensional support frame. The material may be superelastic, such as NITINOL, and the method may include be... | 01/15/2008 |
| 7311808 | Device and method for increasing mass transport at liquid-solid diffusion boundary layer A device and method for increasing the mass transport rate of a chemical or electrochemical process at the solid and fluid interface in a fluid cell. The device includes a membrane in close contact with surface of the work piece, to separate the process cell into tw... | 12/25/2007 |
| 7285036 | Pad assembly for electrochemical mechanical polishing Embodiments of a pad assembly for processing a substrate are provided. The pad assembly includes a processing layer having a working surface adapted to process a substrate, a lower layer coupled to and disposed below the processing layer, and an electrode having an ... | 10/23/2007 |
| 7252737 | Pedestal with integral shield Generally, a substrate support member for supporting a substrate is provided. In one embodiment, a substrate support member for supporting a substrate includes a body coupled to a lower shield. The body has an upper surface adapted to support the substrate and a low... | 08/07/2007 |
| 7208069 | Device for etching semiconductors with a large surface area The device etches semiconductors with a large surface area in a trough-shaped receptacle containing a liquid electrolyte. A sample head is mounted inside the etching trough, and is provided with a device for holding at least one semiconductor wafer. The device is ti... | 04/24/2007 |
| 7169286 | Process control methods of electropolishing for metal substrate preparation in producing YBCO coated conductors Disclosed is a reel-to-reel substrate tape polishing and cleaning system including precleaning, electropolishing section and post cleaning sections and which is suitable for polishing and cleaning long lengths of metal substrate tape used in the manufacture of HTS-c... | 01/30/2007 |
| 7160431 | Method and device for forming a dynamic pressure-generating groove in a fluid dynamic pressure bearing A method and apparatus for forming a fluid dynamic pressure groove in a fluid dynamic pressure bearing is provided. The method is accomplished by initially positioning and securing multiple workpieces to be machined to their respective machining devices. An electroc... | 01/09/2007 |
| 7144482 | Method and apparatus for forming grooves within journals and on flat plates An apparatus, method and means is provided for electrochemical machining of hydrodynamic bearing assemblies in spindle motors. In an aspect, a cartridge is provided that receives and accurately positions an electrode in three dimensions in a near frictionless manner... | 12/05/2006 |
| 7137868 | Pad assembly for electrochemical mechanical processing Embodiments of a pad assembly for processing a substrate are provided. The pad assembly includes a processing layer having a working surface adapted to process a substrate, a lower layer coupled to and disposed below the processing layer, and an electrode having an ... | 11/21/2006 |
| 7067048 | Method to improve the control of electro-polishing by use of a plating electrode an electrolyte bath A method and apparatus which uses a plating electrode in an electrolyte bath. The plating electrode works to purify an electrolyte polishing solution during the electro-polishing process. Preferably, the plating electrode is employed in a closed loop feedback system... | 06/27/2006 |
| 7045040 | Process and system for eliminating gas bubbles during electrochemical processing A method and system for preventing gas bubble formation on a selected region of a wafer surface as the surface is brought in contact with a process solution for an electrochemical process is provided. The present invention employs the process solution to prevent or ... | 05/16/2006 |
| 7029365 | Pad assembly for electrochemical mechanical processing Embodiments of a pad assembly for processing a substrate are provided. The pad assembly includes a processing layer having a working surface adapted to process a substrate, a lower layer coupled to and disposed below the processing layer, and an electrode having an ... | 04/18/2006 |
| 6979248 | Conductive polishing article for electrochemical mechanical polishing An article of manufacture, method, and apparatus are provided for planarizing a substrate surface. In one aspect, an article of manufacture is provided for polishing a substrate including a polishing article having a body comprising at least a portion of fibers coat... | 12/27/2005 |
| 6977036 | Method and apparatus for substrate polishing A method and apparatus are provided for polishing a substrate surface. In one aspect, an apparatus for polishing a substrate includes a conductive polishing pad and an electrode having a membrane disposed therebetween. The membrane is orientated relative the conduct... | 12/20/2005 |
| 6913683 | Method and device for the production of pipe segments from a hollow pipe A method for the production of pipe segments from a pipe (10) in which the pipe (10) is rotated about its longitudinal axis, while an electrode (20) is positioned in the vicinity of the outer surface (11) of the pipe (10) and elect... | 07/05/2005 |
| 6866769 | Drive head and ECM method and tool for making same A drive head for a bolt, fastener, coupling, nut or other driveable head made from a less malleable metal such as a powder metal nickel alloy. The drive head has an upper drive portion having at least six convex corners spaced around the outer periphery thereof, eac... | 03/15/2005 |
| 6841057 | Method and apparatus for substrate polishing A method and apparatus are provided for polishing a substrate surface. In one aspect, an apparatus for polishing a substrate includes a conductive polishing pad and an electrode having a membrane disposed therebetween. The membrane is orientated relative the conduct... | 01/11/2005 |
| 6835299 | Electrochemical machining method and apparatus An electrochemical machining technique involves moving a cathode (2) towards an anodic workpiece (1). A current is passed through an electrolyte which flows between the cathode (2) and workpiece (1) so as to cause material to be removed e... | 12/28/2004 |
| 6833063 | Electrochemical edge and bevel cleaning process and system The present invention provides an edge cleaning system and method in which a directed stream of a mild etching solution is supplied to an edge area of a rotating workpiece, including the front surface edge and bevel, while a potential difference between the workpiec... | 12/21/2004 |
| 6773576 | Anode assembly for plating and planarizing a conductive layer A particular anode assembly can be used to supply a solution for any of a plating operation, a planarization operation, and a plating and planarization operation to be performed on a semiconductor wafer. The anode assembly includes a rotatable shaft disposed within ... | 08/10/2004 |
| 6726830 | Steel strip descaling apparatus and a steel strip manufacturing apparatus using the descaling apparatus This invention relates to an improved apparatus and method for electrolytic descaling of steel strips. The apparatus comprises electrodes integrated with nozzles having jet openings for dispensing electrolyte onto the surface of the steel strips. By jetting the elec... | 04/27/2004 |
| 6723224 | Electro-chemical polishing apparatus Generally, a method and apparatus for electro-chemical polishing a metal layer disposed on a substrate is provided. In one embodiment, the electro-chemical polishing apparatus generally includes a substrate support having a plurality of contact members, a cathode an... | 04/20/2004 |
| 6709565 | Method and apparatus for uniform electropolishing of damascene ic structures by selective agitation The present invention pertains to apparatus and methods for planarization of metal surfaces having both recessed and raised features, over a large range of feature sizes. The invention accomplishes this by increasing the fluid agitation in raised regions with respec... | 03/23/2004 |
| 6663765 | Method and device for the manufacture of the medical expanding stents Method and device for manufacturing of expandable cylindrical metal meshes for use in expandable stents and in particular for customized manufacturing. The method includes determining the type and size of the stent to be implanted, electrochemically formi... | 12/16/2003 |
| 6660138 | Electropolishing process means for an inner surface of a long tube The present invention is an electropolishing process and device for electropolishing an inner surface of a long tube, especially applied to a long tube of greater than two meters and a diameter range between 0.3 and 5 cm. Wherein, the present invention co... | 12/09/2003 |
| 6652658 | Method for machining/cleaning by hydroxide ion in ultrapure water A method for clean processing wherein an object and a high pressure nozzle are disposed a specific distance apart from each other inside a washing tank containing only ultra-pure water, an ion exchange material or catalyst material that increases the amou... | 11/25/2003 |
| 6592743 | Production of gas separators for use in fuel cells and equipment used therefor A method for producing a separator integrated with a gas flow channel of fuel cells efficiently at low costs without deteriorating processing accuracy and the like. A plane-facing electrode nozzle 30 is placed oppositely to the face to be processed, which... | 07/15/2003 |
| 6547950 | Cathode rinsing station and method A cathode station (10) for a pipe electrochemical polishing system (12) has a valve (20) for preventing a cleaning fluid (56) from entering into a pipe (28). A cathode (14) is pulled into the cathode station (10) by a cathode puller cable (16) after a pol... | 04/15/2003 |
| 6547945 | Method and apparatuses for electrochemically treating an article An electrochemical cell for use in electrochemical processes, such as plating processes, has a first electrode which extends circumferentially about at least a portion of an electrode chamber. The article being treated is the second electrode and is dispo... | 04/15/2003 |
| 6544403 | Method for manufacturing fluid bearing A method for manufacturing a fluid bearing is provided. A mask member having at least two sets of grooves provided at least two places along an axial direction is affixed to an outer surface of an electrode section of a fluid bearing manufacturing tool. E... | 04/08/2003 |
| 6544402 | Method and apparatus for manufacturing a wire A method and an apparatus for manufacturing a wire, particularly a sawtooth wire for all-steel sawtooth wire card clothings, wherein the surface of a wire-shaped intermediate product, such as a wire already provided with sawteeth, is smoothened in an elec... | 04/08/2003 |
| 6447668 | Methods and apparatus for end-point detection An apparatus for detecting the end-point of an electropolishing process of a metal layer formed on a wafer includes an end-point detector. The end-point detector is disposed adjacent the nozzle used to electropolish the wafer. In one embodiment, the end-p... | 09/10/2002 |
| 6428681 | System and method for reversing electrolyte flow during an electropolishing operation A pipe electrochemical polishing system (10, 10a) for in place polishing of a pipe (28(has provision for detecting the instant position of a cathode (14) within the pipe (28) such as cable marks (52) and cable mark sensor (50), an infrared camera (60), he... | 08/06/2002 |
| 6413403 | Method and apparatus employing pad designs and structures with improved fluid distribution An apparatus capable of assisting in controlling an electrolyte flow and distribution of an electric field, a magnetic field, or an electromagnetic field in order to process a substrate is provided with improved fluid distribution. A support member having... | 07/02/2002 |
| 6387242 | Method and tool for electrochemical machining A machining process for forming a raised area in a wall of a predrilled hole includes distributing electrolyte via a workpiece internal cavity to a number of predrilled holes. Next, position a template including at least one electrode coated with an insul... | 05/14/2002 |
| 6379528 | Electrochemical machining process for forming surface roughness elements on a gas turbine shroud The back side recessed cooling surface of a shroud defining in part the hot gas path of a turbine is electrochemically machined to provide surface roughness elements and spaces therebetween to increase the heat transfer coefficient. To accomplish this, an... | 04/30/2002 |
| 6368493 | Electrolytic machining method and apparatus An anode as a workpiece, and a cathode opposed to the anode with a predetermined spacing are placed in ultrapure water. A catalytic material promoting dissociation of the ultrapure water and having water permeability is disposed between the workpiece and ... | 04/09/2002 |
