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| Number | Title | Issue Date |
| 8052861 | Electrolytic etching method and method of producing a solar battery The present invention relates to a method and apparatus for partial etching or pattern etching using an electrolysis reaction, wherein, conventionally, there was the problem that an etching line could not be finely formed on a cell edge because of apparatus problems... | 11/08/2011 |
| 7638030 | Electrolytic processing apparatus and electrolytic processing method An electrolytic processing apparatus which, while eliminating a CMP processing entirely or reducing a load on a CMP processing to the least possible extent, can process and flatten a conductive material formed in the surface of a substrate, or can remove (clean) ext... | 12/29/2009 |
| 7479214 | ECM trepan of bars An ECM apparatus includes a stationary cathode tool having a passage, and a drive mechanism for moving a bar-shaped workpiece through the passage of the cathode tool while simultaneously rotating the workpiece. Electrolyte flows, from a manifold on one end of the ca... | 01/20/2009 |
| 7427345 | Method and device for regenerating ion exchanger, and electrolytic processing apparatus A method and device for regenerating an ion exchanger can regenerate an ion exchanger easily and quickly, and can minimize a load upon cleaning of the regenerated ion exchanger and disposal of waste liquid. A method for regenerating a contaminated ion exchanger incl... | 09/23/2008 |
| 7344623 | System and method for radially positioning a workpiece for electrochemical machining A system and method are described for radially positioning a workpiece for electrochemical machining. In one embodiment, a pressurized air chamber is configured to contain pressurized air. In addition, an expandable diaphragm is configured to position the workpiece ... | 03/18/2008 |
| 7311522 | Endodontic instruments and method of manufacturing same A method of manufacturing an endodontic instrument using an electrochemical (ECG) grinding process. An instrument blank is formed from stock material, and an electric current is applied between an electrically conductive grinding wheel, acting as a cathode, and the ... | 12/25/2007 |
| 7303662 | Contacts for electrochemical processing Systems and methods for electrochemically processing. A contact element defines a substrate contact surface positionable in contact a substrate during processing. In one embodiment, the contact element comprises a wire element. In another embodiment the contact elem... | 12/04/2007 |
| 7270735 | System and method for holding and releasing a workpiece for electrochemical machining A system and method are described for holding and releasing a workpiece for electrochemical machining. In one embodiment, a workpiece holder has a workpiece surface that couples to the workpiece when negative pressure is applied to provide a seal between the workpie... | 09/18/2007 |
| 7232514 | Method and composition for polishing a substrate Polishing compositions and methods for removing conductive materials from a substrate surface are provided. In one aspect, a composition includes an acid based electrolyte system, one or more chelating agents, one or more corrosion inhibitors, one or more inorganic ... | 06/19/2007 |
| 7211178 | Fixture for electro-chemical machining On a fixture for electro-chemical machining for the production of long, curved cavities (11) in a component (12), the working electrode (3) of the electro-chemical machining tool (1) is connected to a guide body (1a) which m... | 05/01/2007 |
| 7208076 | Substrate processing apparatus and method A substrate processing apparatus can perform an electrolytic processing, which is different from a common, conventional etching, to remove (clean off) a conductive material (film) formed on or adhering to a bevel portion, etc. of a substrate, or process a peripheral... | 04/24/2007 |
| 7207498 | Fluid dispense tips A fluid dispense tip includes a bevel at an opening to reduce the amount of surface tension, or “land”, at the opening. The bevel is formed by grinding in a longitudinal direction such that any tooling scars resulting from the grinding operation are likewise lon... | 04/24/2007 |
| 7204926 | Tandem blisk electrochemical machining A tandem blisk is mounted in a multiaxis electrochemical machine. A first row of blades is electrochemically machined in sequence. A second row of blades is then electrochemically machined in sequence while the blisk is still mounted in the machine. The machine is i... | 04/17/2007 |
| 7160432 | Method and composition for polishing a substrate Polishing compositions and methods for removing conductive materials from a substrate surface are provided. In one aspect, a method is provided for processing a substrate to remove conductive material disposed over narrow feature definitions formed in a substrate at... | 01/09/2007 |
| 7153410 | Methods and apparatus for electrochemical-mechanical processing of microelectronic workpieces Methods and apparatuses for electrochemical-mechanical processing of microelectronic workpieces. One embodiment of an electrochemical processing apparatus in accordance with the invention comprises a workpiece holder configured to receive a microelectronic workpiece... | 12/26/2006 |
| 7153777 | Methods and apparatuses for electrochemical-mechanical polishing Methods and apparatuses for removing material from a microfeature workpiece are disclosed. In one embodiment, the microfeature workpiece is contacted with a polishing surface of a polishing medium, and is placed in electrical communication with first and second elec... | 12/26/2006 |
| 7144482 | Method and apparatus for forming grooves within journals and on flat plates An apparatus, method and means is provided for electrochemical machining of hydrodynamic bearing assemblies in spindle motors. In an aspect, a cartridge is provided that receives and accurately positions an electrode in three dimensions in a near frictionless manner... | 12/05/2006 |
| 7134935 | Lubricated razor blade edge sanitizer and sharpener An automatic razor blade sharpener simultaneously sharpens and sanitizes multiple edges of a spring-loaded disposable razor blade cartridge without edge overheating by lubricated gentle contact of the blade edges with a moving rubber or polymeric compliant belt that... | 11/14/2006 |
| 7128825 | Method and composition for polishing a substrate Polishing compositions and methods for removing conductive materials from a substrate surface are provided. In one aspect, a composition includes an acid based electrolyte system, one or more chelating agents, one or more corrosion inhibitors, one or more inorganic ... | 10/31/2006 |
| 7125477 | Contacts for electrochemical processing Systems and methods for electrochemically processing. A contact element defines a substrate contact surface positionable in contact a substrate during processing. In one embodiment, the contact element comprises a wire element. In another embodiment the contact elem... | 10/24/2006 |
| 7112270 | Algorithm for real-time process control of electro-polishing Method and apparatus for process control of electro-processes. The method includes electro-processing a wafer by the application of two or more biases and determining an amount of charge removed as a result of each bias, separately. In one embodiment, an endpoint is... | 09/26/2006 |
| 7112122 | Methods and apparatus for removing conductive material from a microelectronic substrate A method and apparatus for removing conductive material from a microelectronic substrate is disclosed. One method includes disposing an electrolytic liquid between a conductive material of a substrate and at least one electrode, with the electrolytic liquid having a... | 09/26/2006 |
| 7101465 | Electrolytic processing device and substrate processing apparatus There is provided an electrolytic processing device including: a processing electrode to be brought into contact with or close to a workpiece; a feeding electrode for supplying electricity to the workpiece; an ion exchanger disposed in at least one of spaces between... | 09/05/2006 |
| 7094131 | Microelectronic substrate having conductive material with blunt cornered apertures, and associated methods for removing conductive material A microelectronic substrate and method for removing conductive material from a microelectronic substrate. In one embodiment, the microelectronic substrate includes a conductive or semiconductive material with a recess having an initially sharp corner at the surface ... | 08/22/2006 |
| 7077721 | Pad assembly for electrochemical mechanical processing Embodiments of a processing pad assembly for processing a substrate are provided. The processing pad assembly includes an upper layer having a processing surface and an electrode having a top side coupled to the upper layer and a bottom side opposite the top side. A... | 07/18/2006 |
| 7077945 | Cu—Ni—Fe anode for use in aluminum producing electrolytic cell A method of producing aluminum in an electrolytic cell containing alumina dissolved in an electrolyte, the method comprising the steps of providing a molten salt electrolyte at a temperature of less than 900° C. having alumina dissolved therein in an electrolytic c... | 07/18/2006 |
| 7066800 | Conductive polishing article for electrochemical mechanical polishing An article of manufacture and apparatus are provided for planarizing a substrate surface. In one aspect, an article of manufacture is provided for polishing a substrate including polishing article comprising a body having at least a partially conductive surface adap... | 06/27/2006 |
| 7059948 | Articles for polishing semiconductor substrates Methods, articles of manufacture, and apparatus are provided for depositing a layer, planarizing a layer, or combinations thereof, a material layer on a substrate. In one embodiment, an article of manufacture is provided for polishing a substrate, comprising a polis... | 06/13/2006 |
| 7056429 | Push belt, ring element and method and device for electrochemical machining thereof Method for deburring and/or rounding a side face of a thin-sheet and annular metal element (1), such as a ring element (1) for use in a push belt for continuously variable transmission, wherein the ring element (1), in a machining step, is recei... | 06/06/2006 |
| 7030032 | Photodiode passivation technique A method for passivating a photodiode so as to reduce dark current, Isdark, due to the exposed semiconductor material on the sidewall of the device. The method includes etching away sidewall surface damage using a succinic acid-hydrogen peroxide based sid... | 04/18/2006 |
| 7029365 | Pad assembly for electrochemical mechanical processing Embodiments of a pad assembly for processing a substrate are provided. The pad assembly includes a processing layer having a working surface adapted to process a substrate, a lower layer coupled to and disposed below the processing layer, and an electrode having an ... | 04/18/2006 |
| 7025891 | Method of polishing C4 molybdenum masks to remove molybdenum peaks A method of treating a molybdenum (moly) mask used in a C4 process to pattern C4 contacts. The moly mask has a wafer side which contacts a wafer during the C4 process and has a rough surface that includes spikes/projections of moly. The moly mask also has a non wafe... | 04/11/2006 |
| 7022216 | Electrolytic etching of metal layers A method for selectively removing a layer of electrolytically dissoluble metal such as copper overplate from a substrate such as a low-k dielectric comprising: providing a substrate bearing on a major surface thereof a layer of ele... | 04/04/2006 |
| 6979248 | Conductive polishing article for electrochemical mechanical polishing An article of manufacture, method, and apparatus are provided for planarizing a substrate surface. In one aspect, an article of manufacture is provided for polishing a substrate including a polishing article having a body comprising at least a portion of fibers coat... | 12/27/2005 |
| 6969299 | Razor blade sharpener An automatic razor blade sharpener simultaneously sharpens multiple edges of a spring-loaded disposable razor blade cartridge by gently contacting the blade edges with a moving rubber or polymeric compliant belt that is motor driven. The disposable razor blade handl... | 11/29/2005 |
| 6962524 | Conductive polishing article for electrochemical mechanical polishing Embodiments of a ball assembly are provided. In one embodiment, a ball assembly includes a housing, a ball, a conductive adapter and a contact element. The housing has an annular seat extending into a first end of an interior passage. The conductive adapter is coupl... | 11/08/2005 |
| 6957783 | Dispense tip with vented outlets In a fluid pump and cartridge assembly, a cartridge includes a material inlet port, a material outlet port, and a feed screw. The feed screw delivers fluid to be dispensed from the fluid inlet to the outlet port. The fluid inlet is preferably elongated in a directio... | 10/25/2005 |
| 6913683 | Method and device for the production of pipe segments from a hollow pipe A method for the production of pipe segments from a pipe (10) in which the pipe (10) is rotated about its longitudinal axis, while an electrode (20) is positioned in the vicinity of the outer surface (11) of the pipe (10) and elect... | 07/05/2005 |
| 6911396 | Method of producing metallic film Concentration of electric current due to an additive (particularly, a brightener) remaining or precipitated in a high concentration at grain boundary triple points and wiring groove portions in the surface layer of a copper plating film is obviated, whereby preceden... | 06/28/2005 |
| 6910864 | Turbine bucket airfoil cooling hole location, style and configuration First, second and third sets of cooling holes are provided in a turbine airfoil. The first set of holes adjacent a leading edge have turbulators commencing at a predetermined distance from the root of the airfoil and terminating short of the airfoil tip. A second se... | 06/28/2005 |
