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| Number | Title | Issue Date |
| 7985328 | Using cell voltage as a monitor for deposition coverage A method and apparatus are described that use cell voltage and/or current as monitor to prevent electrochemical deposition (e.g., electroplating) tools from deplating wafers with no or poor metal (e.g., Cu) seed coverage. ... | 07/26/2011 |
| 7981266 | Electrochemical gas sensor containing electric connection lines or housing contact bridges comprising carbon nanotubes An electrochemical gas sensor (9) has improved electrochemical measurement properties and housing tightness for an electrolyte at the sites at which the connection lines (11, 21, 31) pass through. The sensor (9) includes a housing (4), co... | 07/19/2011 |
| 7435320 | Methods and apparatuses for monitoring organic additives in electrochemical deposition solutions The present invention relates in general to real-time analysis of electrochemical deposition (ECD) metal plating solutions, for the purpose of reducing plating defects and achieving high quality metal deposition. The present invention provides various new electroche... | 10/14/2008 |
| 7427346 | Electrochemical drive circuitry and method An electrochemical drive circuitry and method, such as may be employed in electroplating bath chemical monitoring. A microcontroller can be utilized to selectively apply galvanostatic or potentiostatic conditions on the electrochemical cell, for measurement of respo... | 09/23/2008 |
| 7384535 | Bath analysis Analytical methods are disclosed for determining the quantity of brightener and leveler in an electroplating bath in the presence of other organic additives, such as accelerators, brighteners and suppressors. The methods improve the reproducibility of measuring brig... | 06/10/2008 |
| 7371247 | Method and apparatus for penetrating tissue A tissue penetrating system includes a plurality of penetrating members each having a tip. A penetrating member driver is coupled to the plurality of penetrating members. Each tip of a penetrating member is uncovered during launch of the penetrating member by the pe... | 05/13/2008 |
| 7361257 | Electrochemical screening system Devices and methods for evaluating an electrochemical reaction are disclosed. A device includes an electrochemical cell having a cavity for containing a liquidus electrolyte, a first working electrode having at least one electrolytic surface at least partially withi... | 04/22/2008 |
| 7331931 | Method and apparatus for penetrating tissue These and other objects of the present invention are achieved in a body fluid sampling system for use on a tissue site that includes an electrically powered drive force generator. A penetrating member is operatively coupled to the force generator. The force generato... | 02/19/2008 |
| 7316700 | Self optimizing lancing device with adaptation means to temporal variations in cutaneous properties A lancing device, an embodiment of which controls the advancement and retraction of a lancet by monitoring the position of the lancet in conjunction with a lancet controller which incorporates a feedback loop for modulating the lancet driver to follow a predetermine... | 01/08/2008 |
| 7291117 | Method and apparatus for penetrating tissue These and other objects of the present invention are achieved in a body fluid sampling system for use on a tissue site that includes a voice coil based penetrating member driver. A plurality of penetrating members are included. A transport mechanism is configured to... | 11/06/2007 |
| 7258693 | Device and method for variable speed lancet A method of penetrating tissue is provided. The method comprises using a lancet driver to advance a lancet into the tissue; advancing the lancet at a first desired velocity in a first layer of tissue; advancing the lancet at a second desired velocity in a second lay... | 08/21/2007 |
| 7244265 | Method and apparatus for penetrating tissue These and other objects of the present invention are achieved in a body fluid sampling system for use on a tissue site that includes a drive force generator and a penetrating member operatively coupled to the force generator. The force generator moves the member alo... | 07/17/2007 |
| 7232451 | Method and apparatus for penetrating tissue A skin penetrating system has a housing member and a plurality of penetrating members positioned in the housing member. A tissue stabilizing device is coupled to the housing member. A user interface is configured to relay at least one of, skin penetrating performanc... | 06/19/2007 |
| 7229458 | Method and apparatus for penetrating tissue A tissue penetrating system includes a plurality of cartridges each with a distal port and a proximal port. A plurality of penetrating members are provided, each coupled to a cartridge and having a sharpened distal tip and a shaft portion slidably disposed within th... | 06/12/2007 |
| 7229543 | Apparatus for controlling and/or measuring additive concentration in an electroplating bath A method for measuring a target constituent of an electroplating solution using an electroanalytical technique is set forth in which the electroplating solution includes one or more constituents whose by-products skew an initial electrical response to an energy inpu... | 06/12/2007 |
| 7226461 | Method and apparatus for a multi-use body fluid sampling device with sterility barrier release A device for use with a gripper is provided. A cartridge is provided that defines a plurality of cavities. A plurality of penetrating members are at least partially contained in the cavities of the cartridge. The penetrating members are slidably movable to extend ou... | 06/05/2007 |
| 7198606 | Method and apparatus for a multi-use body fluid sampling device with analyte sensing A device for use with a penetrating member driver to penetrate tissue is provided. A plurality of penetrating members are coupled to a single cartridge and are operatively couplable to the penetrating member driver. The penetrating members are movable to extend radi... | 04/03/2007 |
| 7144488 | Electrode, electrochemical cell, and method for analysis of electroplating baths A counter electrode for use in an electrochemical cell suitable for analysis of an electroplating composition, the counter electrode comprising a conductor; a sheath disposed about the conductor; an electrolyte disposed within the sheath; and an optionally porous el... | 12/05/2006 |
| 7094323 | Process analyzer for monitoring electrochemical deposition solutions The present invention relates to a process analyzer for analyzing composition of sample electrochemical deposition solutions, comprising at least one microelectrode having a radius of not more than about 5 μm. The process analyzer preferably comprises: (1) two or m... | 08/22/2006 |
| 7090764 | Method and apparatus for processing electrochemical signals Systems and methods are provided herein for improving the selectivity and productivity of sensors via digital signal processing techniques. According to one illustrative embodiment, in an electrochemical method for monitoring of a select analyte in a mixed sample wi... | 08/15/2006 |
| 7077946 | High throughput multi-channel rotating disk or ring-disk electrode assembly and method An electrochemical cell assembly including a plurality of testing cells, a reference cell, and fluid connections between the testing cells and the reference cell. Each of the testing cells includes a working electrode, which is a rotating disk or ring-disk electrode... | 07/18/2006 |
| 7041068 | Sampling module device and method A tissue penetration device and method of using same that may include a lancet module or sampling module. The sampling module may optionally be in a cartridge configuration and include sampling and analyzing functions, which may be integrated. ... | 05/09/2006 |
| 7025774 | Tissue penetration device A tissue penetration device and method of using same. The tissue penetration device may optionally include sampling and analyzing functions, which may be integrated. An embodiment provides control of a lancet used for sampling blood. Electric field coils or solenoid... | 04/11/2006 |
| 7022212 | Micro structured electrode and method for monitoring wafer electroplating baths A microstructured electrode coupled with an analytical method designed to simulate the actual conditions on the wafer and to measure critical parameters such as mass transfer of the active plating components, deposition rates of the copper in the plating bath soluti... | 04/04/2006 |
| 7005046 | Apparatus for electro chemical deposition A system is provided in which a smaller flow of deposition solution is diverted from a larger flow of deposition solution flowing on an electrochemical deposition tool platform. The smaller flow is diverted to a dosing unit which may be on a separate platform. The d... | 02/28/2006 |
| 6986835 | Apparatus for plating solution analysis A method and apparatus for analyzing plating solutions. The apparatus generally includes a plating cell, a reference electrolyte input, one or more external additive pumps, and a process controller. In one embodiment, the plating cell includes a cavity therein havin... | 01/17/2006 |
| RE38931 | Methods for controlling and/or measuring additive concentration in an electroplating bath A method for measuring a target constituent of an electroplating solution using an electroanalytical technique is set forth in which the electroplating solution includes one or more constituents whose by-products skew an initial electrical response to an energy inpu... | 01/10/2006 |
| 6942782 | Method and apparatus for measuring deposit forming capacity of fluids using an electrochemically controlled pH change in the fluid proximate to a piezoelectric microbalance A method and apparatus for measuring the deposit forming propensity of a continuously flowing fluid having a bulk pH of about 1 to about 12 comprising measuring the rate at which deposit forms on a quartz crystal microbalance having a top side comprising a working e... | 09/13/2005 |
| 6936157 | Interference correction of additives concentration measurements in metal electroplating solutions The present invention relates to a method and apparatus for determining concentrations of various organic additives in metal electroplating solutions, by utilizing a mathematical correction model in combination with the conventional PCGA chrono-potentiometric analys... | 08/30/2005 |
| 6899801 | Electrode refilling mechanism A method and apparatus for automatically refilling reference electrodes used in chemical analysis. The apparatus generally includes a reference electrode including an outer chamber with an electrolyte contained therein, an adapter to secure the plumbing to the refer... | 05/31/2005 |
| 6899805 | Automated chemical management system executing improved electrolyte analysis method A method for determining the concentration of an additive X of an electrochemical bath that includes at least one further component Y is set forth. In accordance with the method, a predetermined amount of a starting solution is provided. The starting solution compri... | 05/31/2005 |
| 6884333 | Electrochemical system for analyzing performance and properties of electrolytic solutions The invention relates to the analysis of the performance and properties of electrochemical processes, and specifically, to electrolytic solutions and electrode processes. The invention discloses a device and a method for obtaining qualitative and quantitative inform... | 04/26/2005 |
| 6830667 | Cathode cartridge and anode cartridge of testing device for electroplating To provide a cathode cartridge, which comprises a tabular cathode conductor 5, which has an open hole having a same shape to that of plated pats 2a of a plated base 2 as a negative plate, which has a plurality of a protruding portion that... | 12/14/2004 |
| 6827839 | Plating bath analysis Disclosed are methods for determining the quantity of leveler in an electroplating bath in the presence of other organic additives, such as accelerators, brighteners and suppressors. Such methods are fast, work over a broad concentration range of components and can ... | 12/07/2004 |
| 6818110 | Combinatorial electrochemical deposition and testing system An electrochemical deposition and testing system consisting of individually addressable electrode arrays, a fully automated deposition head, and a parallel screening apparatus is described. The system is capable of synthesizing and screening millions of new composit... | 11/16/2004 |
| 6814855 | Automated chemical management system having improved analysis unit A method and apparatus for measuring a target constituent of an electroplating solution using an electroanalytical technique is set forth. In accordance with the method, at least two electrodes are employed to execute the electroanalytical technique. Gasses that are... | 11/09/2004 |
| 6811661 | Cathode cartridge of testing device for electroplating and testing device for electroplating A cathode cartridge of a testing device for electroplating is provided, and includes a dummy plate 7 as a negative pole provided outside a tabular front insulator 6. The dummy plate includes an orifice a having the same shape as a plated part 2 | 11/02/2004 |
| 6808611 | Methods in electroanalytical techniques to analyze organic components in plating baths Embodiments of the invention provide an electro-analytical method for determining the concentration of an organic additive in an acidic or basic metal plating bath using an organic chemical analyzer. The method includes preparing a supporting-electrolyte solution, p... | 10/26/2004 |
| 6805788 | Electrochemical impedance evaluation and inspection sensor An apparatus for electrochemical impedance spectroscopy having a solid electrolyte is disclosed. The apparatus has a chamber made of an electronically insulating material, a solid electrolyte coupled to the chamber and an electrode disposed in the chamber. A biasing... | 10/19/2004 |
| 6749739 | Detection of suppressor breakdown contaminants in a plating bath Relative concentrations of active suppressor additive species and suppressor breakdown contaminants in an acid copper electroplating bath are determined by cyclic voltammetric stripping (CVS) dilution titration analysis using two negative electrode potential limits.... | 06/15/2004 |
