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| Number | Title | Issue Date |
| 7410542 | Variable environment, scale-able, roll to roll system and method for manufacturing thin film electronics on flexible substrates A roll to roll, film forming system overcoming the shortcomings of current roll to roll processing is presented; The roll to roll enabled cartridge is loaded with a bolt of fresh flexible substrate. A skate couples with a cartridge, forms a seal with the cartridge's... | 08/12/2008 |
| 7322225 | Adhesion promotion vacuum monitoring system for photo resist coaters An apparatus and method for monitoring pressure within an adhesion promotion unit is provided. The apparatus in one embodiment includes a chamber configured to receive and heat a semiconductor wafer. A vacuum device is in fluid communication with a processing space ... | 01/29/2008 |
| 7294283 | Penning discharge plasma source The preferred embodiments described herein provide a Penning discharge plasma source. The magnetic and electric field arrangement, similar to a Penning discharge, effectively traps the electron Hall current in a region between two surfaces. When a substrate (10 | 11/13/2007 |
| 7288420 | Method for manufacturing an electro-optical device An object of the present invention is to provide an EL display device having high operation performance and reliability. A third passivation film 45 is disposed under the EL element 203 comprising a pixel electrode (anode) 46, an EL layer... | 10/30/2007 |
| 7169232 | Producing repetitive coatings on a flexible substrate Apparatus for use in making a device by forming repetitive sequences of coatings on a flexible substrate including defining a path for the flexible substrate; the flexible substrate being disposed about at least a portion of the path; a first deposition source for d... | 01/30/2007 |
| 7163608 | Apparatus for synthesis of layers, coatings or films Systems and methods are described for the synthesis of films, coatings or layers. An apparatus includes a first holder; a second holder coupled to the first holder; a linkage coupled to the first holder and the second holder to move the first holder relative to the ... | 01/16/2007 |
| 7156960 | Method and device for continuous cold plasma deposition of metal coatings A method for the deposition of a metal layer on a substrate (1) uses a cold plasma inside an enclosure (7) heated to avoid the formation of a metal deposit at its surface. The enclosure has an inlet (21) and an outlet (22) for the substra... | 01/02/2007 |
| 6977359 | Method and device for vacuum treatment A vacuum-processing method carries out, in a vacuum-processing vessel (4), a process wherein a condition of an interior of the vacuum processing vessel (4) changes as the number of processed objects (W) increases, such as a film-forming process for for... | 12/20/2005 |
| 6964731 | Soil-resistant coating for glass surfaces A glass article which has a water-sheeting coating and a method of applying coatings to opposed sides of a substrate are described. In one embodiment, a glass sheet is provided bearing a sputtered water-sheeting coating comprising silica on an exterior surface and b... | 11/15/2005 |
| 6949173 | Continuous coating system A continuous coating system has several treatment chambers (1, 2) that are arranged one after the other in such a way that in each case, a wall (3) of one treatment chamber (1) having a passage (5) contacts a wall (4) in the adjace... | 09/27/2005 |
| 6942768 | Vacuum coating apparatus A system for coating band-shaped material, where the band-shaped material travels through at least one process chamber in which there is a vacuum, and at least one cooling roller. On the peripheral surface of each cooling roller are at least two magnetron sputter so... | 09/13/2005 |
| 6906008 | Apparatus for consecutive deposition of high-temperature superconducting (HTS) buffer layers The present invention is a deposition system for the production of coated substrates that provides a first deposition process that subsequently feeds a second deposition process and where the two deposition processes are occurring concurrently. The consecutive depos... | 06/14/2005 |
| 6878207 | Gas gate for isolating regions of differing gaseous pressure Disclosed herein is an improved gas gate for interconnecting regions of differing gaseous composition and/or pressure, more particularly between atmosphere and a vacuum. The gas gate includes a cylinder within a housing situated between the regions of differing gase... | 04/12/2005 |
| 6875478 | Apparatus and process for film deposition A film deposition apparatus equipped with a vacuum chamber, comprising a pair of rollers for vertically traveling a continuous sheet as a substrate, and a pair of sputtering cathodes for continuously depositing the film on the surfaces of the sheet in the vacuum cha... | 04/05/2005 |
| 6869484 | Continuous feed coater A continuous feed coater for coating a length of substrate with vaporized or sprayed material, is disclosed. A specific example is a roll-to-roll coater which includes two lower supply rollers for supporting two webs of uncoated material, and two upper take-up rolle... | 03/22/2005 |
| 6852169 | Apparatus and methods for processing optical fibers with a plasma Plasma processing system and methods for stripping the buffer and, optionally, removing the cladding from an optical fiber. The plasma processing system includes a holder capable of holding one or more optical fibers such that a mid-span portion of each optical fibe... | 02/08/2005 |
| 6833031 | Method and device for coating a substrate Apparatus and methods for coating a substrate. In an exemplary embodiment, the apparatus are used to create a metallized substrate for use as an EMI/RFI shield. The apparatus typically includes a movable processing apparatus that is movable orthogonal to the substra... | 12/21/2004 |
| 6821348 | In-line deposition processes for circuit fabrication In one embodiment, the invention is directed to aperture mask deposition techniques using aperture mask patterns formed in one or more elongated webs of flexible film. The techniques involve sequentially depositing material through mask patterns formed in the film t... | 11/23/2004 |
| 6787012 | Apparatus for the synthesis of layers, coatings or films Systems and methods are described for synthesis of films, coatings or layers. An apparatus includes a first holder; a second holder coupled to the first holder; a linkage coupled to the first holder and the second holder to move the first holder relative to the seco... | 09/07/2004 |
| 6770175 | Apparatus for and method of forming electrode for lithium secondary cell An apparatus, for forming an electrode for a lithium secondary cell capable of readily forming an active material layer constituted by at least two elements and controlling the composition of the active material layer, comprises a first sputtering source for sputter... | 08/03/2004 |
| 6740210 | Sputtering method for forming film and apparatus therefor Since the transfer speed of a substrate is controlled to compensate for a film-forming rate, and an electric power applied to heating means for heating the substrate is controlled so that thermal equilibrium of the substrate is maintained, a film having a uniform th... | 05/25/2004 |
| 6630058 | Method and apparatus for manufacturing film with conductive sheet, for touch-panel, and film manufactured thereby A tensile force is applied to at least a surface of a film to which a conductive material is applied within an elastic limit by a tensile force applying means, the conductive material is applied to a first surface of the film by a coating means in a tensi... | 10/07/2003 |
| 6620288 | Substrate treatment apparatus In the substrate treatment apparatus including substrate treatment chambers (301 and 303) and a buffer chamber (302) having an exhaust system (306b) independent of the substrate treatment chambers, connection tubes (304a and 304b) are provided between the... | 09/16/2003 |
| 6579422 | Method and apparatus for manufacturing flexible organic EL display A whole organic EL display fabricating apparatus is provided inside a vacuum chamber. In this case, a first patterning unit B through a third patterning unit D for sequentially forming luminescent layer patterns of GREEN, BLUE, and RED on an anode pattern... | 06/17/2003 |
| 6562400 | Method and apparatus for forming deposition film, and method for treating substrate A gas adsorptive member is disposed in a space communicating with film deposition chambers, and deposition films are deposited while continuously feeding gas components released from this member, thereby enabling the high quality and uniform deposition fi... | 05/13/2003 |
| 6495008 | Method for making polycrystalline thin film and associated oxide superconductor and apparatus therefor A method is presented for making a polycrystalline thin film (B) by depositing particles emitted from a target (36) on a substrate base (A) to form the film (B) constituted by the target material while concurrently irradiating the depositing particles wit... | 12/17/2002 |
| 6475354 | Deposited film producing process, photovoltaic device producing process, and deposited film producing system This invention relates to a deposited film producing process that enables reduction of the time for adjusting the conditions for film formation, and brings about an improvement in the reproducibility of film thickness and film quality of the deposited fil... | 11/05/2002 |
| 6447652 | Thin-film forming method and thin-film forming apparatus A Raman spectrum of a thin film which must be formed is measured in a thin-film forming step for forming the thin film on a member to be processed in an atmosphere, the pressure of which has been reduced. Moreover, the conditions under which the thin film... | 09/10/2002 |
| 6440277 | Techniques of printing micro-structure patterns such as holograms directly onto final documents or other substrates in discrete areas thereof An improved method and apparatus for applying discrete area holograms or other optical devices directly onto documents or other substrates in a continuous process analogous to the operation of a printing press. The continuous process is carried out in a v... | 08/27/2002 |
| 6432281 | Process for formation of a coating on a substrate A process for forming a coating on a substrate by condensation of a coating material onto the substrate while the substrate is moving through an enclosure under vacuum in which evaporation of the coating material takes place. With the inventive process, d... | 08/13/2002 |
| 6402902 | Apparatus and method for a reliable return current path for sputtering processes A method for establishing and maintaining a reliable ground for reactive sputtering systems. A spatially extended high density plasma is generated in a large region surrounding the sputtering target. The plasma electrically connects the target to a part o... | 06/11/2002 |
| 6355146 | Sputtering process and apparatus for coating powders A process and apparatus for coating small particles and fibers. The process involves agitation by vibrating or tumbling the particles or fibers to promote coating uniformly, removing adsorbed gases and static charges from the particles or fibers by an ini... | 03/12/2002 |
| 6338775 | Apparatus and method for uniformly depositing thin films over substrates A thin film deposition apparatus and method are disclosed in this invention. The method includes a step of providing a vacuum chamber for containing a thin-film particle source for generating thin-film particles to deposit a thin-film on the substrates. T... | 01/15/2002 |
| 6337004 | High adhesion performance roll sputtered strike layer The adhesion of chromium-copper layer to polyimide has been greatly improved by a method which provides controlled reduction, rather than total elimination, of water content in the polyimide. The electronic packaging device which incorporates the flexible... | 01/08/2002 |
| 6319371 | Film forming apparatus A film forming apparatus comprises a sputtering chamber, a cooling drum disposed at an central portion thereof for cooling a roll film in contact with the surface thereof, a roll chamber, an SiOx film forming chamber and a monitor room disposed... | 11/20/2001 |
| 6261634 | Apparatus and method for forming film When a thin film is formed on a flexible and filmy substrate by a vapor phase method, the substrate is prevented from warping to be caused by the internal stress remaining in the thin film. When the thin film is formed by the vapor phase method, the subst... | 07/17/2001 |
| 6176982 | Method of applying a coating to a metallic article and an apparatus for applying a coating to a metallic article A method of applying a coating to a metallic article (10) comprises placing the metallic article within a hollow cathode (38) in a vacuum chamber (30), evacuating the vacuum chamber (30), applying a negative voltage to the hollow cathode (38) to produce a... | 01/23/2001 |
| 6171458 | Method for manufacturing an absorbent layer for solar collectors, a device for performing the method and an absorbent layer for solar collectors A spectral selective absorbing surface on solar collector elements has a very high solar absorbing ability, in the range of 96% to 97% and a low thermal emittance, in the order of 10%, and can be produced with high capacity in industrial scale. A reactive... | 01/09/2001 |
| 6168698 | Apparatus for coating a substrate Power supply lines (41, 42) connect poles of an alternating current power source (43) to respective cathodes (58, 59) in compartments (32, 39), included among a plurality of adjacent compartments (32-39'), which together form a vacuum chamber (31) and whi... | 01/02/2001 |
| 6149785 | Apparatus for coating powders A process and apparatus for coating small particles and fibers. The process involves agitation by vibrating or tumbling the particles or fibers to promote coating uniformly, removing adsorbed gases and static charges from the particles or fibers by an ini... | 11/21/2000 |
